JPH03228220A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH03228220A JPH03228220A JP2266190A JP2266190A JPH03228220A JP H03228220 A JPH03228220 A JP H03228220A JP 2266190 A JP2266190 A JP 2266190A JP 2266190 A JP2266190 A JP 2266190A JP H03228220 A JPH03228220 A JP H03228220A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- plane
- recording medium
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は磁気記録媒体に関する。更に詳細には、本発明
はR/W特性が改善された磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to magnetic recording media. More specifically, the present invention relates to a magnetic recording medium with improved R/W characteristics.
[従来の技術]
面内磁気記録の記録密度を向上させるため、基体tに設
ける面内磁気異方性膜の厚さは、最近、ますます薄膜化
している。さらに単位体積当たりの磁化量を増加させる
ため、酸化鉄等の針状磁性体を基体上に塗布した形式か
ら、基体上に強磁性体の薄膜を直接、物理蒸着した形式
に徐々に移行している。[Prior Art] In order to improve the recording density of in-plane magnetic recording, the thickness of the in-plane magnetic anisotropic film provided on the substrate t has recently become thinner and thinner. Furthermore, in order to increase the amount of magnetization per unit volume, we gradually transitioned from a method in which acicular magnetic material such as iron oxide was coated on a substrate to a method in which a thin film of ferromagnetic material was physically deposited directly on the substrate. There is.
現在、薄膜媒体としてスパッタ法で作膜したCoNi合
金面内磁気異方性膜が塗布形に代わり商品化されつつあ
る。このCoNi合金薄膜媒体は、リジッドディスクを
主なターゲットとしており、従って円板ディスクの円周
に沿い、一定のR/W特性が必要となる。Currently, CoNi alloy in-plane magnetic anisotropic films formed by sputtering are being commercialized as thin film media instead of coating media. This CoNi alloy thin film medium is mainly targeted at rigid disks, and therefore requires constant R/W characteristics along the circumference of the circular disk.
現在行われている方法では、円板基体りに同心円状のキ
ズ(テクスチャ)を設け、さらにCoNi層の下地層と
してCrを設けるこにより円周に沿い一定の磁気特性、
すなわち安定したR/W特性を得ている。In the current method, concentric scratches (texture) are formed on the disk substrate, and Cr is further provided as an underlying layer of the CoNi layer, thereby maintaining constant magnetic properties along the circumference.
In other words, stable R/W characteristics are obtained.
[発明が解決しようとする課題]
しかし、スバッタ工程における装置トの問題から完全に
円周方向で一定な磁気特性が得られず、また円周方向と
半径方向では大きな異方性を生む結果となっている。円
周方向での磁気特性の差異は再生出力の変動(モジュレ
ーション)となり、安定したR/W特性を得る上で問題
がある。[Problem to be solved by the invention] However, due to equipment problems in the spatter process, completely constant magnetic properties cannot be obtained in the circumferential direction, and large anisotropy occurs in the circumferential and radial directions. It has become. Differences in magnetic characteristics in the circumferential direction result in fluctuations (modulation) in the reproduction output, which poses a problem in obtaining stable R/W characteristics.
従って、本発明の目的は、安定したR/W特性を示す面
内磁気異方性膜を有する磁気記録媒体を提供することで
ある。Therefore, an object of the present invention is to provide a magnetic recording medium having an in-plane magnetic anisotropic film exhibiting stable R/W characteristics.
[課題を解決するための手段コ
前記目的を達成するために、本発明では、基体にに多孔
質アルマイトからなる面内磁気異方性膜を有する磁気記
録媒体であって、膜面内中でのみかけ上の異方性磁界が
1000e以下であることを特徴とする磁気記録媒体を
提供する。[Means for Solving the Problems] In order to achieve the above object, the present invention provides a magnetic recording medium having an in-plane magnetic anisotropic film made of porous alumite on a base, wherein Provided is a magnetic recording medium characterized in that an apparent anisotropic magnetic field is 1000e or less.
この磁気記録媒体はリジッドディスクであることか好ま
しい。Preferably, this magnetic recording medium is a rigid disk.
[作用]
前記のように、本発明の磁気記録媒体は多孔質アルマイ
トを用いた面内磁気異方性膜を有する。[Function] As described above, the magnetic recording medium of the present invention has an in-plane magnetic anisotropy film using porous alumite.
多孔質アルマイトは膜面垂直方向に多数の微細孔かイf
在しており(孔密度:〜5X1010個/c12)、各
微細孔は非晶質AJ203により完全に分離されている
。このため微細孔中に充填された面内磁気異方性を示す
材料は各微細孔中において互いに完全に磁気的に分離さ
れた構造を有する。Porous alumite has many fine pores in the direction perpendicular to the film surface.
(pore density: ~5×1010 pores/c12), and each micropore is completely separated by amorphous AJ203. Therefore, the materials exhibiting in-plane magnetic anisotropy filled in the micropores have a structure that is completely magnetically separated from each other in each micropore.
このため、充填条件9作製装置によらず膜面内方向で完
全に等方的磁気特性を示す。Therefore, it exhibits completely isotropic magnetic properties in the in-plane direction of the film, regardless of the filling condition 9 manufacturing apparatus.
従って、再生出力は円周方向、半径方向を問わす、一定
の安定した再生出力が得られる。Therefore, a constant and stable reproduction output can be obtained regardless of whether the reproduction output is in the circumferential direction or the radial direction.
本発明の磁気記録媒体における膜面内中でのみかけ−L
の異方性磁界は1000e以下でなければならない。本
明細書における“みかけ上の”という用語は、膜面内方
向に−様な磁界(〜15kOe)を印加しながら試料を
その磁場内で回転し、そのトルク曲線から求まる膜面内
の異方性エネルギー(Ku)から、次式、
膜面内でのみかけの異方性磁界= 2 K u / M
s(式中、MSは試料の飽和磁化である)によって得
られる値を意味する1」的で使用されている。膜面内中
でのみかけ1−の異方性磁界(Hk)が1000eを越
えると、媒体の方向と位置により顕著な磁気特性の差を
生じ、その結果安定した再生出力が得られない。Hkの
下限はな(ゼロが最も理想的な値である。Hk=0の状
態では、完全に膜面内において等方的磁気特性を有する
こととなる。The apparent −L in the film plane of the magnetic recording medium of the present invention
The anisotropic magnetic field of must be less than 1000e. In this specification, the term "apparent" refers to the anisotropy in the film plane obtained by rotating the sample within the magnetic field while applying a -like magnetic field (~15 kOe) in the in-plane direction of the film. From the magnetic energy (Ku), the following formula: Apparent anisotropic magnetic field in the film plane = 2 Ku / M
s (where MS is the saturation magnetization of the sample). When the apparent 1- anisotropic magnetic field (Hk) in the film plane exceeds 1000e, significant differences in magnetic properties occur depending on the direction and position of the medium, and as a result, stable reproduction output cannot be obtained. What is the lower limit of Hk (zero is the most ideal value)? In a state where Hk = 0, the film has completely isotropic magnetic properties within the film plane.
膜面内中でのみかけ上の異方性磁界を1000e以下に
制御するには、磁性粒子を各々非磁性体で完全に分離し
、磁気的カップリングを起こさない状態にする(例えば
、アルマイト微細孔中の磁性粒子あるいはアルマイトを
他の非磁性体(例えば、有機樹脂、CulAgなど)で
置き換える)ことにより行われる。In order to control the apparent anisotropic magnetic field within the film plane to 1000e or less, each magnetic particle is completely separated with a non-magnetic material to prevent magnetic coupling (for example, an alumite fine This is done by replacing the magnetic particles or alumite in the pores with other non-magnetic material (eg, organic resin, CulAg, etc.).
アルマイト層はアルミニウム基板を陽極酸化することに
より基板上に直接形成させることもできるが、非磁性基
板上にアルミニウムまたはアルミニウム合金を物理蒸着
法により蒸着し、この蒸着層を陽極酸化することによっ
ても形成させることかできる。物理蒸着法としては、真
空蒸着法、イオンブレーティング法、スバ、タリング法
、イオンビームデポジ/ヨン法および化学的気相成長法
(CVD法)などがある。The alumite layer can be formed directly on the substrate by anodizing the aluminum substrate, but it can also be formed by depositing aluminum or an aluminum alloy on a non-magnetic substrate by physical vapor deposition and then anodizing the deposited layer. I can do it. Examples of the physical vapor deposition method include a vacuum vapor deposition method, an ion blating method, a deposition method, a taring method, an ion beam deposition method, and a chemical vapor deposition method (CVD method).
アルミニウムの陽極酸化法は公知である。−船釣に、ア
ルミニウムの陽極酸化は直流(DC)で行っている。D
Cでは、電流密度を増大させると、耐電場強度が増大し
、腐食性が強くなり、その結果、開始点(ピット)が多
くなる。この電解初期に生じたピットが続けてエツチン
グされ微細なホール(孔)が形成され、多孔質アルマイ
トが得られる。Aluminum anodic oxidation methods are known. -For boat fishing, aluminum is anodized using direct current (DC). D
In C, increasing the current density increases the electric field strength and becomes more corrosive, resulting in more initiation points (pits). The pits generated at the initial stage of electrolysis are subsequently etched to form fine holes, resulting in porous alumite.
本発明の磁気記録媒体に使用される非磁性基板としては
、アルミニウム基板の他に、ガラス類。Examples of non-magnetic substrates used in the magnetic recording medium of the present invention include glass in addition to aluminum substrates.
セラミック、陽極酸化アルミ、黄銅などの金属板。Metal plates such as ceramic, anodized aluminum, and brass.
Si単結晶板9表面を熱酸化処理したSi単結晶板など
がある。There is a Si single crystal plate whose surface is thermally oxidized.
[実施例] 以下、実施例により本発明を史に詳細に説明する。[Example] Hereinafter, the present invention will be explained in detail with reference to examples.
実IJ1[
純度99.97%の3.5インチサイズのAJ1基板を
トリクロロエタン中で洗浄脱脂し、陽極酸化を18℃、
1モル/J!のH2SO4と5g/λのAλ2 (S
O4)3を含む洛中で、17.5Vの定電圧で行い、ア
ルマイト層を0.45μm化成した。次にアルマイトを
30℃、1wt%のH3PO4中に移し、40mA/d
m2の電流密度で両極間電圧(対極:カーボン)が8V
になるまて再化成した。Real IJ1 [A 3.5-inch size AJ1 substrate with a purity of 99.97% was cleaned and degreased in trichloroethane, and anodized at 18°C.
1 mol/J! of H2SO4 and 5g/λ of Aλ2 (S
The alumite layer was formed to a thickness of 0.45 μm by using a constant voltage of 17.5 V in an atmosphere containing O4)3. Next, the alumite was transferred to 1 wt% H3PO4 at 30°C, and 40 mA/d
The voltage between the electrodes (counter electrode: carbon) is 8V at a current density of m2.
It was re-formed.
この後、同浴中に試料を浸漬し、アルマイトの微細孔径
を拡大処理した。この処理の後、同浴において8■の定
電圧で化成し、バリヤ層の調整と均一化を行った。この
時、アルマイトのセル径。Thereafter, the sample was immersed in the same bath to enlarge the micropore diameter of the alumite. After this treatment, chemical conversion was carried out in the same bath at a constant voltage of 8 µm to adjust and make the barrier layer uniform. At this time, the cell diameter of the alumite.
ボア径はそれぞれ450人、380人であった。The bore diameters were 450 and 380, respectively.
次にアルマイトを、Co” :0.2モル/λ。Next, alumite was added, Co'': 0.2 mol/λ.
H3BO3: 0.2モル/λ、グリセリン=2mjl
/J2.NaPHz 02 :0.02モル/λを含む
メツキ浴に移し、pH4,0,20℃において、AC3
00Hz、16Vp−pの電源を用い微細孔中にCo−
P粒子を0.15μm充填した。H3BO3: 0.2 mol/λ, glycerin = 2 mjl
/J2. Transferred to a plating bath containing NaPHz 02: 0.02 mol/λ, pH 4.0, AC3 at 20°C.
Using a power supply of 00Hz and 16Vpp, Co
P particles were filled to a thickness of 0.15 μm.
この試料をl cm角に切り出し、面内方向に・f社に
16kOeの外部磁界を印加し、膜面内申における異方
性をトルク曲線より求めた結果、膜面内における異方性
は異方性磁界Hkとして150eであった。This sample was cut into 1 cm square pieces, an external magnetic field of 16 kOe was applied in the in-plane direction, and the anisotropy in the film plane was determined from the torque curve. The magnetic field Hk was 150e.
L佼旌上
非磁性基体として厚さ1.28−*の、N1−Pメツキ
処理したAJ!基板を使用し、CoB□N12oを50
0人の厚さでCr下地(厚さ5000人)上にスパッタ
法で成膜し、膜面内の異方性を同様にして求めた結果、
Hkとして8300eとなった。AJ with N1-P plating treatment with a thickness of 1.28-* as a non-magnetic substrate on the L cable! Using a substrate, 50% CoB□N12o
A film was formed by sputtering on a Cr base (5000 mm thick) with a thickness of 0 mm, and the in-plane anisotropy of the film was similarly determined.
The Hk was 8300e.
実施例1で得られた試料および比較例1のC。C of the sample obtained in Example 1 and Comparative Example 1.
Niスパッタ膜の面内磁気特性(保磁力および角形比)
が、外部磁界が常に膜面と平行になる様にして、その磁
界の中で試料を回転させた時どの様に変化するのか第1
図に示す。第1図において、面内方向保磁力および面内
方向角形比は各々の試料の最大値で規格化している。ア
ルマイ)CO−Pメ、キ膜では、との方向においても一
定の面内方向保磁力および面内方向角形比か得られるか
、CoNiスパッタ膜では角度により最大値から面内方
向保磁力で19.7%、面内方向角形比で9.8%減少
している。In-plane magnetic properties (coercive force and squareness ratio) of Ni sputtered film
However, the first question is how the sample changes when the external magnetic field is always parallel to the film surface and the sample is rotated in that magnetic field.
As shown in the figure. In FIG. 1, the in-plane coercive force and the in-plane squareness ratio are normalized by the maximum value of each sample. For CO-P films (Aluminum), a constant in-plane coercive force and in-plane squareness ratio can be obtained even in the directions, whereas for a CoNi sputtered film, the in-plane coercive force varies from the maximum value to 19 depending on the angle. .7%, and the in-plane direction squareness ratio decreased by 9.8%.
この事実からも、アルマイトを用いた面内磁化膜(面内
方向保磁カニ7000e;面内方向角形比:0.84)
は、試料の場所、方向に左右されず、全試料内で安定し
た一定の特性を示し、従って、安定した再生出力が得ら
れると考えられる。From this fact, an in-plane magnetized film using alumite (in-plane direction coercive crab 7000e; in-plane direction squareness ratio: 0.84)
exhibits stable and constant characteristics within all samples, regardless of the location and direction of the sample, and is therefore considered to provide stable reproduction output.
[発明の効果コ
以上説明した様に、アルマイトを利用した面内磁気異方
性膜を用いることにより、媒体面内中で一定の安定した
磁気特性と低い異方性磁界が得られ、安定した再生出力
が得られる。[Effects of the invention] As explained above, by using an in-plane magnetic anisotropic film using alumite, certain stable magnetic properties and a low anisotropic magnetic field can be obtained in the plane of the medium. You can get playback output.
第1図は、本実施例におけるCo−Pメツキアルマイト
膜および比較例におけるCoNiスパッタ膜の面内磁気
特性の方位依存性を示す特性図である。FIG. 1 is a characteristic diagram showing the orientation dependence of the in-plane magnetic properties of the Co--P metal alumite film in this example and the CoNi sputtered film in the comparative example.
Claims (3)
において、膜面内中でのみかけ上の異方性磁界が100
0e以下であることを特徴とする磁気記録媒体。(1) In a magnetic recording medium having an in-plane magnetic anisotropy film on a substrate, the apparent anisotropy magnetic field in the film plane is 100
A magnetic recording medium characterized in that the magnetic recording medium has a magnetic flux of 0e or less.
面内磁気異方性膜であることを特徴とする請求項1記載
の磁気記録媒体。(2) The magnetic recording medium according to claim 1, wherein the in-plane magnetic anisotropic film is an in-plane magnetic anisotropic film using porous alumite.
1または2記載の磁気記録媒体。(3) The magnetic recording medium according to claim 1 or 2, which is a rigid disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2266190A JPH03228220A (en) | 1990-02-01 | 1990-02-01 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2266190A JPH03228220A (en) | 1990-02-01 | 1990-02-01 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03228220A true JPH03228220A (en) | 1991-10-09 |
Family
ID=12089033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2266190A Pending JPH03228220A (en) | 1990-02-01 | 1990-02-01 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03228220A (en) |
-
1990
- 1990-02-01 JP JP2266190A patent/JPH03228220A/en active Pending
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