JPH032350U - - Google Patents
Info
- Publication number
- JPH032350U JPH032350U JP6193989U JP6193989U JPH032350U JP H032350 U JPH032350 U JP H032350U JP 6193989 U JP6193989 U JP 6193989U JP 6193989 U JP6193989 U JP 6193989U JP H032350 U JPH032350 U JP H032350U
- Authority
- JP
- Japan
- Prior art keywords
- screen mask
- light
- inspection
- color
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 14
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 230000000295 complement effect Effects 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
Description
第１図は実施例１に係るスクリーンマスク検査
装置の概略を示す説明用断面図、第２図は光規制
部材の具体例を示す説明図、第３図は実施例４に
係るスクリーンマスク検査装置の概略を示す説明
用断面図、第４図は実施例６に係るスクリーンマ
スク検査装置の概略を示す説明用断面図、第５図
は従来のスクリーンマスク検査装置の概略を示す
説明用断面図である。
１０……スクリーンマスク、１１……画線部、
１２……非画線部、１５……画線部を構成する膜
の側壁、２０……スクリーンマスク検査台、２１
……透明ガラス板、２２，２３……遮光板、２４
……スクリーンマスクのガイド、２５……検査領
域、２６，２７……光拡散板、３０……光源、３
０Ａ，３０Ｂ，３０Ｃ……光源、４０……光拡散
板、５０……光規制部材、５１……筒状部、５２
……筒状部の内壁。
FIG. 1 is an explanatory sectional view showing an outline of a screen mask inspection device according to Example 1, FIG. 2 is an explanatory view showing a specific example of a light regulating member, and FIG. 3 is an explanatory cross-sectional view showing an outline of a screen mask inspection device according to Example 4. FIG. 4 is an explanatory cross-sectional view schematically showing a screen mask inspection apparatus according to the sixth embodiment, and FIG. 5 is an explanatory cross-sectional view schematically showing a conventional screen mask inspection apparatus. be. 10...screen mask, 11...print area,
12... Non-image area, 15... Side wall of the membrane constituting the image area, 20... Screen mask inspection table, 21
...Transparent glass plate, 22, 23... Light shielding plate, 24
... Screen mask guide, 25 ... Inspection area, 26, 27 ... Light diffusion plate, 30 ... Light source, 3
0A, 30B, 30C... Light source, 40... Light diffusing plate, 50... Light regulating member, 51... Cylindrical part, 52
...Inner wall of the cylindrical part.
Claims (1)
察してスクリーンマスクの画線部および非画線部
の状態を検査する装置であつて、 光透過部分からなる検査領域を有する、検査す
べきスクリーンマスクが位置されるスクリーンマ
スク検査台と、この検査台の少なくとも検査領域
を照明する光源と、前記検査台と前記光源との間
に配置された、当該検査台に向かう光を垂直方向
に揃うように規制する筒状部が多数並設された構
造の光規制部材とを備えてなることを特徴とする
スクリーンマスク検査装置。 (2) 光規制部材における筒状部の内壁の色が、
黒色またはスクリーンマスクの画線部を構成する
感光材料の色に対して補色関係にある色と同一ま
たは近似したものであることを特徴とする請求項
１に記載のスクリーンマスク検査装置。[Claims for Utility Model Registration] (1) A device for visually observing the transmitted light of the screen mask to inspect the condition of the image area and non-image area of the screen mask, which includes an inspection area consisting of the light-transmitting area. a screen mask inspection table on which a screen mask to be inspected is placed, a light source illuminating at least an inspection area of the inspection table, and a light source disposed between the inspection table and the light source, directed toward the inspection table. 1. A screen mask inspection device comprising: a light regulating member having a structure in which a large number of cylindrical portions are arranged in parallel to regulate light so that it is aligned in a vertical direction. (2) The color of the inner wall of the cylindrical part of the light regulating member is
2. The screen mask inspection apparatus according to claim 1, wherein the screen mask is black or a color that is the same as or similar to a color complementary to the color of the photosensitive material constituting the image area of the screen mask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6193989U JPH032350U (en) | 1989-05-30 | 1989-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6193989U JPH032350U (en) | 1989-05-30 | 1989-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH032350U true JPH032350U (en) | 1991-01-10 |
Family
ID=31590642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6193989U Pending JPH032350U (en) | 1989-05-30 | 1989-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH032350U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5477069A (en) * | 1977-12-02 | 1979-06-20 | Hitachi Ltd | Mask inspecting method |
| JPS57207853A (en) * | 1981-06-16 | 1982-12-20 | Matsushita Electric Ind Co Ltd | Lighting device for inspecting thin plate having semitransmission characteristics |
| JPS6329132B2 (en) * | 1978-04-13 | 1988-06-13 | Fruehauf Corp |
-
1989
- 1989-05-30 JP JP6193989U patent/JPH032350U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5477069A (en) * | 1977-12-02 | 1979-06-20 | Hitachi Ltd | Mask inspecting method |
| JPS6329132B2 (en) * | 1978-04-13 | 1988-06-13 | Fruehauf Corp | |
| JPS57207853A (en) * | 1981-06-16 | 1982-12-20 | Matsushita Electric Ind Co Ltd | Lighting device for inspecting thin plate having semitransmission characteristics |
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