JPH0360004U - - Google Patents

Info

Publication number
JPH0360004U
JPH0360004U JP12087089U JP12087089U JPH0360004U JP H0360004 U JPH0360004 U JP H0360004U JP 12087089 U JP12087089 U JP 12087089U JP 12087089 U JP12087089 U JP 12087089U JP H0360004 U JPH0360004 U JP H0360004U
Authority
JP
Japan
Prior art keywords
projection
optical system
mount
projection lens
inspection machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12087089U
Other languages
Japanese (ja)
Other versions
JPH0738807Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12087089U priority Critical patent/JPH0738807Y2/en
Publication of JPH0360004U publication Critical patent/JPH0360004U/ja
Application granted granted Critical
Publication of JPH0738807Y2 publication Critical patent/JPH0738807Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案に係わる投影検査機の第1実施
例を示す縦断面図、第2図は本考案に係わる投影
検査機の第1実施例を示す図であつて、投影レン
ズマウント装着部に投影レンズマウントが装着さ
れている状態を示す斜視図、第3図は第2図の投
影レンズマウントの代わりに顕微鏡マウントが装
着されている状態を示す斜視図、第4図は接眼光
学系の視野を示す図、第5図は本考案に係わる投
影検査機の第2実施例を示す斜視図である。 5……X−Yテーブル、17……投影レンズマ
ウント装着部、18……投影レンズマウント、2
8……マツトスクリーン、29……顕微鏡マウン
ト、34……基準指標、35……移動量表示部。
FIG. 1 is a longitudinal cross-sectional view showing a first embodiment of a projection inspection machine according to the present invention, and FIG. 2 is a diagram showing a first embodiment of a projection inspection machine according to the present invention, showing a projection lens mount attachment part. Figure 3 is a perspective view showing a microscope mount installed in place of the projection lens mount shown in Figure 2, and Figure 4 is a perspective view of the eyepiece optical system. FIG. 5 is a perspective view showing a second embodiment of the projection inspection machine according to the present invention. 5... X-Y table, 17... Projection lens mount attachment part, 18... Projection lens mount, 2
8...Mat screen, 29...Microscope mount, 34...Reference index, 35...Movement amount display section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 2次元方向に移動可能で被測定物を載置する載
物台の上方に投影光学系の一部を構成する投影レ
ンズを装着するための投影レンズマウント装着部
を備え、照明光の照射に基づき前記投影光学系を
介してスクリーンに前記被測定物の像を投影して
観察検査する投影検査機において、投影レンズマ
ウントが接眼光学系を備えた顕微鏡マウントと交
換可能に着脱可能とされ、前記接眼光学系の視野
内には基準指標が設けられ、前記載物台には移動
量を表示する移動量表示部が設けられていること
を特徴とする投影検査機。
A projection lens mount mounting section is provided above the stage that is movable in two-dimensional directions and is used to mount a projection lens that forms part of the projection optical system on which the object to be measured is placed. In a projection inspection machine that projects an image of the object to be measured onto a screen via the projection optical system for observation and inspection, the projection lens mount is detachable and replaceable with a microscope mount equipped with an eyepiece optical system, and the eyepiece A projection inspection machine characterized in that a reference index is provided within the field of view of the optical system, and a movement amount display section for displaying the amount of movement is provided on the object table.
JP12087089U 1989-10-16 1989-10-16 Projection inspection machine Expired - Lifetime JPH0738807Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12087089U JPH0738807Y2 (en) 1989-10-16 1989-10-16 Projection inspection machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12087089U JPH0738807Y2 (en) 1989-10-16 1989-10-16 Projection inspection machine

Publications (2)

Publication Number Publication Date
JPH0360004U true JPH0360004U (en) 1991-06-13
JPH0738807Y2 JPH0738807Y2 (en) 1995-09-06

Family

ID=31668923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12087089U Expired - Lifetime JPH0738807Y2 (en) 1989-10-16 1989-10-16 Projection inspection machine

Country Status (1)

Country Link
JP (1) JPH0738807Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010181254A (en) * 2009-02-05 2010-08-19 Ushio Inc Device for inspecting screen print making
KR101698900B1 (en) * 2016-11-07 2017-01-23 이관보 Hair accessory

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010181254A (en) * 2009-02-05 2010-08-19 Ushio Inc Device for inspecting screen print making
KR101698900B1 (en) * 2016-11-07 2017-01-23 이관보 Hair accessory

Also Published As

Publication number Publication date
JPH0738807Y2 (en) 1995-09-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term