JPH0360004U - - Google Patents
Info
- Publication number
- JPH0360004U JPH0360004U JP12087089U JP12087089U JPH0360004U JP H0360004 U JPH0360004 U JP H0360004U JP 12087089 U JP12087089 U JP 12087089U JP 12087089 U JP12087089 U JP 12087089U JP H0360004 U JPH0360004 U JP H0360004U
- Authority
- JP
- Japan
- Prior art keywords
- projection
- optical system
- mount
- projection lens
- inspection machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
第1図は本考案に係わる投影検査機の第1実施
例を示す縦断面図、第2図は本考案に係わる投影
検査機の第1実施例を示す図であつて、投影レン
ズマウント装着部に投影レンズマウントが装着さ
れている状態を示す斜視図、第3図は第2図の投
影レンズマウントの代わりに顕微鏡マウントが装
着されている状態を示す斜視図、第4図は接眼光
学系の視野を示す図、第5図は本考案に係わる投
影検査機の第2実施例を示す斜視図である。
5……X−Yテーブル、17……投影レンズマ
ウント装着部、18……投影レンズマウント、2
8……マツトスクリーン、29……顕微鏡マウン
ト、34……基準指標、35……移動量表示部。
FIG. 1 is a longitudinal cross-sectional view showing a first embodiment of a projection inspection machine according to the present invention, and FIG. 2 is a diagram showing a first embodiment of a projection inspection machine according to the present invention, showing a projection lens mount attachment part. Figure 3 is a perspective view showing a microscope mount installed in place of the projection lens mount shown in Figure 2, and Figure 4 is a perspective view of the eyepiece optical system. FIG. 5 is a perspective view showing a second embodiment of the projection inspection machine according to the present invention. 5... X-Y table, 17... Projection lens mount attachment part, 18... Projection lens mount, 2
8...Mat screen, 29...Microscope mount, 34...Reference index, 35...Movement amount display section.
Claims (1)
物台の上方に投影光学系の一部を構成する投影レ
ンズを装着するための投影レンズマウント装着部
を備え、照明光の照射に基づき前記投影光学系を
介してスクリーンに前記被測定物の像を投影して
観察検査する投影検査機において、投影レンズマ
ウントが接眼光学系を備えた顕微鏡マウントと交
換可能に着脱可能とされ、前記接眼光学系の視野
内には基準指標が設けられ、前記載物台には移動
量を表示する移動量表示部が設けられていること
を特徴とする投影検査機。 A projection lens mount mounting section is provided above the stage that is movable in two-dimensional directions and is used to mount a projection lens that forms part of the projection optical system on which the object to be measured is placed. In a projection inspection machine that projects an image of the object to be measured onto a screen via the projection optical system for observation and inspection, the projection lens mount is detachable and replaceable with a microscope mount equipped with an eyepiece optical system, and the eyepiece A projection inspection machine characterized in that a reference index is provided within the field of view of the optical system, and a movement amount display section for displaying the amount of movement is provided on the object table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12087089U JPH0738807Y2 (en) | 1989-10-16 | 1989-10-16 | Projection inspection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12087089U JPH0738807Y2 (en) | 1989-10-16 | 1989-10-16 | Projection inspection machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0360004U true JPH0360004U (en) | 1991-06-13 |
| JPH0738807Y2 JPH0738807Y2 (en) | 1995-09-06 |
Family
ID=31668923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12087089U Expired - Lifetime JPH0738807Y2 (en) | 1989-10-16 | 1989-10-16 | Projection inspection machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0738807Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010181254A (en) * | 2009-02-05 | 2010-08-19 | Ushio Inc | Device for inspecting screen print making |
| KR101698900B1 (en) * | 2016-11-07 | 2017-01-23 | 이관보 | Hair accessory |
-
1989
- 1989-10-16 JP JP12087089U patent/JPH0738807Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010181254A (en) * | 2009-02-05 | 2010-08-19 | Ushio Inc | Device for inspecting screen print making |
| KR101698900B1 (en) * | 2016-11-07 | 2017-01-23 | 이관보 | Hair accessory |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0738807Y2 (en) | 1995-09-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |