JPH0323933U - - Google Patents
Info
- Publication number
- JPH0323933U JPH0323933U JP8463189U JP8463189U JPH0323933U JP H0323933 U JPH0323933 U JP H0323933U JP 8463189 U JP8463189 U JP 8463189U JP 8463189 U JP8463189 U JP 8463189U JP H0323933 U JPH0323933 U JP H0323933U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- cover
- chuck
- top plate
- top surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図はこの考案に係るウエーハ吸着チヤツク
の一実施例を示す概略縦断面図、第２図は従来の
ウエーハ吸着チヤツクを示す概略縦断面図である
。
２……チヤツク本体、３……パツド、４……吸
気孔、５……半導体ウエーハ、７……カバー、８
……カバー本体、９……クツシヨン、１０……ア
ーム、１２……ストツパー。
FIG. 1 is a schematic vertical sectional view showing an embodiment of a wafer suction chuck according to this invention, and FIG. 2 is a schematic vertical sectional view showing a conventional wafer suction chuck. 2...chuck body, 3...pad, 4...intake hole, 5...semiconductor wafer, 7...cover, 8
...Cover body, 9...Cushion, 10...Arm, 12...Stopper.
Claims (1)
面側で多数の吸気孔を穿設したチヤツク本体と、 天板を有する円筒状カバー本体の前記天板内面
に軟質素材からなる環状クツシヨンを装着したカ
バーとを具備し、 上記チヤツク本体の上方に上記カバーを移行可
能の配設したことを特徴とするウエーハ吸着チヤ
ツク。[Scope of Claim for Utility Model Registration] A chuck main body extending from the top surface toward the negative pressure suction means and having a large number of intake holes at least on the top surface side, and a cylindrical cover main body having a top plate, the inner surface of the top plate being soft. A wafer suction chuck, comprising: a cover fitted with an annular cushion made of material; and the cover is movably disposed above the chuck main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8463189U JPH0323933U (en) | 1989-07-18 | 1989-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8463189U JPH0323933U (en) | 1989-07-18 | 1989-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0323933U true JPH0323933U (en) | 1991-03-12 |
Family
ID=31633236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8463189U Pending JPH0323933U (en) | 1989-07-18 | 1989-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323933U (en) |
-
1989
- 1989-07-18 JP JP8463189U patent/JPH0323933U/ja active Pending