JPH03242544A - humidity sensor - Google Patents
humidity sensorInfo
- Publication number
- JPH03242544A JPH03242544A JP3875590A JP3875590A JPH03242544A JP H03242544 A JPH03242544 A JP H03242544A JP 3875590 A JP3875590 A JP 3875590A JP 3875590 A JP3875590 A JP 3875590A JP H03242544 A JPH03242544 A JP H03242544A
- Authority
- JP
- Japan
- Prior art keywords
- copper particles
- dispersed
- silica
- humidity
- stirred
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 22
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052802 copper Inorganic materials 0.000 claims abstract description 13
- 239000010949 copper Substances 0.000 claims abstract description 13
- 239000002245 particle Substances 0.000 claims abstract description 13
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 11
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 abstract description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 abstract description 4
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 235000011187 glycerol Nutrition 0.000 abstract description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 2
- 238000003618 dip coating Methods 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910018879 Pt—Pd Inorganic materials 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000026041 response to humidity Effects 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、湿度に対応して素子の電気的特性が変化する
ことにより湿度を検出する湿度センサに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a humidity sensor that detects humidity by changing the electrical characteristics of an element in response to humidity.
［従来の技術］
近年、湿度計測、湿度制御を必要とする分野が増加し、
湿度センサの重要性が認められるようになった。[Conventional technology] In recent years, the number of fields requiring humidity measurement and humidity control has increased.
The importance of humidity sensors is now recognized.
兄度に対応して素子の電気的特性が変化することにより
湿度を検出する湿度センサには、電解質系、金属系、高
分子系、セラミックス系等があり、それぞれいろいろな
系が研究されているが、現在実用化されているものは、
高分子系およびセラミックス系の湿度センサである。い
ずれも、素子に対する水の吸脱着により、素子の抵抗値
または静電容量が変化する性質を利用したものである。Humidity sensors that detect humidity by changing the electrical characteristics of the element in response to temperature include electrolyte-based, metal-based, polymer-based, ceramic-based, etc., and various systems are being researched. However, what is currently in practical use is
These are polymer-based and ceramic-based humidity sensors. All of these utilize the property that the resistance value or capacitance of the element changes due to adsorption and desorption of water to the element.
［発明が解決しようとする課題］
しかし、従来の湿度センサは、抵抗値が高いため、精度
の良い湿度計を製造するためには、高度な回路技術およ
び実装技術を必要とした。[Problems to be Solved by the Invention] However, since conventional humidity sensors have a high resistance value, advanced circuit technology and packaging technology are required in order to manufacture a highly accurate hygrometer.
そこで本発明はこのような問題点を解決するもので、そ
の目的とするところは、抵抗値の低い湿度センサを提供
するところにある。The present invention is intended to solve these problems, and its purpose is to provide a humidity sensor with a low resistance value.
［課題を解決するための手段］
本発明の湿度センサは、銅粒子を分散させたシリカ膜を
感湿膜として用いることを特徴とする。[Means for Solving the Problems] The humidity sensor of the present invention is characterized in that a silica film in which copper particles are dispersed is used as a humidity sensitive film.
シリカ膜に銅粒子を分散させることにより、抵抗値の低
い湿度センサを得ることができる。By dispersing copper particles in a silica film, a humidity sensor with low resistance can be obtained.
いやすいことがわかる。It turns out that it is easy to use.
［実施例コ
テトラエトキシシラン（Ｓ ｉ （ＯＣ２Ｈ６）４）
５０ｍｌにエタノール２５ｍ１．０．０２Ｎ塩酸４ｍｌ
を加え、１時間攪拌することによりテトラエトキシシラ
ンを加水分解した後、グリセリン１０ｍ１、微粉末シリ
カ１３．５ｇを加え、３０分間攪拌し、さらに銅粒子２
３ｇを加え、３０分間攪拌することにより、銅粒子を分
散させたシリカゾルを作製した。Ｐｔ−Ｐｄ櫛形電極を
スクリーン印刷により形成したアルミナ基板上に、この
ゾルをデイツプコーティングし、１００℃で１０分間乾
燥し、４５０°Ｃで３０分間焼結し、銅粒子を分散させ
たシリカ膜を形成した。[Example Cotetraethoxysilane (S i (OC2H6)4)
50ml 25ml ethanol1.0.02N hydrochloric acid 4ml
was added and stirred for 1 hour to hydrolyze tetraethoxysilane, then 10 ml of glycerin and 13.5 g of finely powdered silica were added, stirred for 30 minutes, and then copper particles 2
A silica sol in which copper particles were dispersed was prepared by adding 3 g and stirring for 30 minutes. This sol was dip-coated on an alumina substrate on which Pt-Pd comb-shaped electrodes were formed by screen printing, dried at 100°C for 10 minutes, and sintered at 450°C for 30 minutes to form a silica film with copper particles dispersed therein. was formed.
このようにして製作した湿度センサの斜視図を第１図に
示す。第１図において、１は基板、２は電極、３は銅粒
子を分散させたシリカ膜である。A perspective view of the humidity sensor manufactured in this manner is shown in FIG. In FIG. 1, 1 is a substrate, 2 is an electrode, and 3 is a silica film in which copper particles are dispersed.
本湿度センサの感湿特性を第２図に示す。第２図より、
本発明の湿度センサは、抵抗値が低く、使［発明の効果
］
以上述べたように本発明の湿度センサは、銅粒子を分散
させたシリカ膜を感湿膜として用いるので、抵抗値が低
いため、高度な回路技術および実装技術は必要なく、使
いやすい。したがって、底コスト、高精度な湿度センサ
として、湿度計測、湿度制御を必要とする分野に広く応
用することができる。Figure 2 shows the humidity sensitivity characteristics of this humidity sensor. From Figure 2,
The humidity sensor of the present invention has a low resistance value and is easy to use. [Effects of the Invention] As described above, the humidity sensor of the present invention has a low resistance value because it uses a silica film in which copper particles are dispersed as a moisture-sensitive film. Therefore, advanced circuit technology and mounting technology are not required and it is easy to use. Therefore, it can be widely applied as a low-cost, high-precision humidity sensor to fields requiring humidity measurement and humidity control.
第１図は本発明の湿度センサの斜視図。 １・・・基板 ２・・・電極 ３・・・銅粒子を分散させたシリカ膜 第２図は、本発明の湿度センサの感湿特性図。 以上 FIG. 1 is a perspective view of the humidity sensor of the present invention. 1... Board 2...electrode 3... Silica film with copper particles dispersed in it FIG. 2 is a diagram showing the humidity sensitivity characteristics of the humidity sensor of the present invention. that's all
Claims (1)
を特徴とする湿度センサ。A humidity sensor characterized by using a silica film in which copper particles are dispersed as a moisture-sensitive film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3875590A JPH03242544A (en) | 1990-02-20 | 1990-02-20 | humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3875590A JPH03242544A (en) | 1990-02-20 | 1990-02-20 | humidity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03242544A true JPH03242544A (en) | 1991-10-29 |
Family
ID=12534109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3875590A Pending JPH03242544A (en) | 1990-02-20 | 1990-02-20 | humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03242544A (en) |
-
1990
- 1990-02-20 JP JP3875590A patent/JPH03242544A/en active Pending
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