JPH0324439B2 - - Google Patents

Info

Publication number
JPH0324439B2
JPH0324439B2 JP60215911A JP21591185A JPH0324439B2 JP H0324439 B2 JPH0324439 B2 JP H0324439B2 JP 60215911 A JP60215911 A JP 60215911A JP 21591185 A JP21591185 A JP 21591185A JP H0324439 B2 JPH0324439 B2 JP H0324439B2
Authority
JP
Japan
Prior art keywords
single crystal
silicon carbide
thin film
sic
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60215911A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6272598A (ja
Inventor
Masaki Furukawa
Akira Suzuki
Mitsuhiro Shigeta
Atsuko Uemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP60215911A priority Critical patent/JPS6272598A/ja
Publication of JPS6272598A publication Critical patent/JPS6272598A/ja
Publication of JPH0324439B2 publication Critical patent/JPH0324439B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP60215911A 1985-09-26 1985-09-26 炭化珪素単結晶基板の製造方法 Granted JPS6272598A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60215911A JPS6272598A (ja) 1985-09-26 1985-09-26 炭化珪素単結晶基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60215911A JPS6272598A (ja) 1985-09-26 1985-09-26 炭化珪素単結晶基板の製造方法

Publications (2)

Publication Number Publication Date
JPS6272598A JPS6272598A (ja) 1987-04-03
JPH0324439B2 true JPH0324439B2 (pt) 1991-04-03

Family

ID=16680289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60215911A Granted JPS6272598A (ja) 1985-09-26 1985-09-26 炭化珪素単結晶基板の製造方法

Country Status (1)

Country Link
JP (1) JPS6272598A (pt)

Also Published As

Publication number Publication date
JPS6272598A (ja) 1987-04-03

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