JPH03260417A - Flow rate adjustment device for porous hydrostatic gas bearings - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a flow rate adjusting device for a porous hydrostatic gas bearing.

[Prior art] In order to obtain a specified bearing performance such as rotational accuracy, load capacity, and bearing rigidity with a porous gas bearing, when gas is supplied to the porous body at a specified pressure, gas is ejected per unit area on the bearing surface. In other words, the flow rate of gas passing through the bearing surface is required to be uniform over the entire bearing surface at a predetermined value. Conventionally, this flow rate adjustment force method involves impregnating the bearing surface with resin in advance to close the pores of the porous material so that the flow rate is below a predetermined level, and then filling the resin appropriately with a solvent while measuring the gas passing flow rate. was removed and adjusted to make the flow rate uniform.

This method involves rubbing the bearing surface with a cotton swab soaked in an appropriate amount of solvent to dissolve the resin and gradually restore the flow rate while making repeated adjustments.

[Problems to be Solved by the Invention] However, in the conventional example, since the adjustment work relies on the experience and intuition of the operator, the C adjustment method requires trial and error, which requires a large number of work steps and causes an increase in costs. In addition, because it relied on manual labor, it was difficult to standardize and the quality varied widely. Furthermore, manually switching the flow rate adjustment surface of a large porous gas bearing is inefficient and dangerous.

The present invention has been made in view of the drawbacks of the prior art described above, and an object of the present invention is to provide a flow rate adjustment device for a porous hydrostatic gas bearing that can efficiently automate flow rate adjustment work without manual work.

[Means and Effects for Solving the Problems] To achieve the above object, the present invention measures the flow rate at a resin-impregnated bearing surface using a flowmeter, a spray, a mask, and a uniformly perforated pattern. Measure and use a preset program to select the optimal pattern to achieve a predetermined gas flow rate among uniformly perforated patterns with several types of aperture ratios. By applying a spray (solvent), the flow rate of gas passing through the porous hydrostatic gas bearing can be uniformly set to a predetermined value.

[Example] Fig. 1 is an overall plan view of the device, and Fig. 2 is a side view thereof. In the figure, part A is an orthogonal three-axis NC robot, which sprays the solvent coating spray nozzle of the flow rate adjustment part (8 parts) toward the bearing surface of the porous hydrostatic gas bearing whose flow rate is to be adjusted according to a preset program. 44 (FIG. 5) and the detection pad 45 for flow rate measurement. Section C is a reversing unit, which is driven by an air actuator 1 during automatic switching of the bearing surface to adjust the flow rate. 2 is a flex coupling, 3 is a rotating bearing, and 4 is a mounting base for the rotating bearing 3. FIG. 6 shows a mounting portion for a workpiece, etc., and 8 is a mounting frame for fixing a jig 9 for setting a static pressure gas bearing. The mounting frame 8 is inverted about shafts 12 provided on both sides thereof.

The D part is a shift unit, and when the bearing surface is automatically changed, the E
In order to evacuate the unit, the rodless cylinder 5
It moves along the slide guide 6 by the drive of.

The E part can select the optimum pattern to obtain a predetermined flow rate by rotation indexing according to a preset program.
Furthermore, it is provided with a mechanism for rotationally indexing the mask, and can be moved up and down by driving an air cylinder 7 attached to the D section.

FIG. 4 is a sectional view of section E. In FIG. 4, reference numeral 11 is a pattern having different aperture ratios in several kinds of fan-shaped areas, as shown in FIG. Reference numeral 13 denotes a mask having fan-shaped openings tIrS72 for dividing the flow rate adjustment range into smaller parts in order to maintain a uniform flow rate on the bearing surface. As shown in FIG. 6, this mask 13 has several types of fan-shaped openings 72 on the same disc-shaped surface, so that it can adjust the flow rate of static pressure gas bearings of various sizes without changing the setup. can be done. Mask holter 15 is mask 1
3 is fixed with bolts, and is suspended by several guide bearings 17 arranged on the same circumference in a notch of a cylindrical part 16 and fixed with bolts. Also, mask holder 1
The rotation of the mask 13 is indexed according to a preset program by a stepping motor 19 via a ring gear 20 fixed to the other end surface of the mask 5 with bolts and a gear 21 incorporating a one-way cam clutch 24. Cylindrical part 16
The pattern 11 is fixed with bolts, and is suspended by several guide bearings 18 arranged on the same circumference on the part 30 and fixed with bolts. Ring gear 22, shaft 37, and key 25 fixed to the other end surface of 16 with bolts
The stepping motor 1 is connected to the stepping motor 1 through the gear 23 connected to the
9, the repattern 11 performs rotational indexing. At this time, the one-way clutch 24 causes the shaft 37 and the gear 21 to idle, and the mask 13 is connected to the stepping motor 19.
Not driven by. 28 is a flexible coupling for connecting the shaft 37 and the stepping motor 19, and 29 is a rotation bearing for the shaft 37. 30 is a fixing bracket provided with a guide bearing 18 and a stepping motor mounting portion.

In FIG. 3, 31 is an air cylinder for driving the pin 32 for fixing the mask 13 when the pattern 11 is indexed. The pin 32 fits into a pin hole arranged on the same circumference in the gear 20. The bush 33 is a guide for the bottle 32. 34 is a plate for mounting the bush 33, and 35 is a bracket for mounting the cylinder 31, which is fixed to the plate 34 with bolts. 36 is a bracket for attaching the plate 34, and is fixed to the bracket 30 with bolts. FIG. 5 is an enlarged view of section B (FIG. 2) attached to the NC robot vertical shaft 60.

A spray nozzle fixing rod 41 fixes the spray nozzle 44 with a set screw 42.

Reference numeral 45 denotes a detection pad having a ring-shaped elastic body 46 fixed to the bearing contact portion during flow rate measurement, and is fixed to the @ end of the rotation stopper cylinder 43.

Details of this detection bat (measuring pad) are shown in FIG.

45 is a measurement pad for detecting the flow rate flowing out from the bearing surface (porous body) 51.

Reference numeral 109 is a sensor for converting the flow rate taken in by the measurement pad into an electrical signal, and as shown in FIG. Air ejected from the sensor 109 is guided to the sensor 109 through the guide hole.

FIG. 6 is an exploded perspective view of the mask 13, pattern 11, static pressure gas bearing, jig 9, and mounting frame 8.

Figure 7(a) is a sectional view showing a porous gas bearing;
b) is its external view. 51 and 55 are graphite porous materials, 52 is a housing that holds the porous material 51 fixedly, 53 is an air chamber, and 54 is a compressed air supply port. When compressed air is supplied from the supply port 54, it passes through the air chamber 53, the porous material 51, and is ejected from the bearing surfaces 51a, 55a to the shaft 1.
01 is supported by static pressure in the thrust direction. Here, the bearing surface 51
The device of the present invention is used to adjust the flow rate ejected per unit area of a, 55a, that is, the flow rate of gas passing through, to a predetermined value and uniform over the entire bearing surface.

Next, the operation of this device will be explained.

Attach the bearing (7-770) to the mounting frame 8 via the bearing fixing jig 9.
When set, the unit E attached to the shift unit D moves horizontally until it hits the stopper 10 set so that the distance between the bearing adjustment surface and the pattern is constant by the air cylinder 7 at the end of the shift MJJ. descend. Next, the flow rate adjustment section B attached to the NC robot A moves to the flow rate adjustment position according to a preset program. Here, the detection bat 45 is lowered by the air cylinder 43 with a rotation stopper, passes through the mask 13 and the opening of the pattern 11, and comes into close contact with the bearing surface to measure the gas passing flow rate. Next, the detection pad 45 is raised by the air cylinder 43 with a rotation stopper. Here, pattern 1 has several types of aperture ratios to achieve a predetermined gas flow rate set based on data and a preset program! A more optimal pattern is selected by the control device.

Next, the spray nozzle 44 attached to the flow rate adjustment section B moves to the flow rate adjustment position according to a preset program and applies the solvent through the mask 13 and pattern 11. As a result, a predetermined gas flow rate can be obtained in a limited range of the bearing surface. When this series of operations is completed, the pulse motor rotates so that the pattern 11 is aligned with the passage opening of the detection pad 45 or the opening of the mask 13. Next, the mask 13 is preliminarily moved in the direction in which the one-way cam clutch 24 is locked to a range where the boundary of the range where a predetermined gas flow rate is obtained by the stepping motor 19 and the boundary of the opening of the mask 13 coincide with each other. Rotates according to the set program.

Here, the measurement using the detection pad 45 and the mask 13 described above are performed.
By repeating the application of the solvent using the spray nozzle 44 through the pattern 11, the entire bearing surface of the ring-shaped porous hydrostatic gas bearing as shown in FIG. 7 is made to have a predetermined uniform gas flow rate.

In this way, the flow rate adjustment on one side of the bearing surface is completed.

Next, according to a preset program, the flow rate adjusting section B attached to the NC robot A is moved to a position where it does not interfere with the reversal of the mounting frame 8. Further, the unit E is also raised by the drive of the air cylinder 7 and moved to a position where it does not interfere with the movement of the shift unit D. The shift unit D is moved by the drive of the rodless cylinder 5. In this state, the mounting frame 8 is reversed by the drive of the air actuator 1, and the switching of the flow rate adjustment surface of the bearing is completed. Thereafter, by repeating the above-described operations, a predetermined uniform gas flow rate can be achieved on both thrust surfaces of the porous gas bearing.

An embodiment of the present invention will be further described with reference to FIG. 9.

FIG. 9 is a block diagram showing the configuration of the device.

In the figure, reference numeral 60 denotes an orthogonal three-axis NC robot, which positions the flow rate detection pad 45 and the spray gun 44 with respect to respective adjustment points on the bearing surface 51. 104 is a motor driver of the NC robot 60, and 102 is an NC controller connected to the CPU 114. A memory 115 is connected to the CPU 114.

A flow rate adjustment control program is stored in the memory 115, and the CPU 14 controls the flow rate adjustment operation of this device, which will be described later, based on this program.

46 is an O-ring for measuring the flow rate, 43 is a cylinder for raising and lowering the detection part, 108 is a solenoid valve for switching the cylinder up and down, and 1.05 is a driver for the solenoid valve 108, which is connected to the CPU 114. ing. Also 1
06 is a solenoid valve for intermittently supplying compressed air to the spray gun.

107 is a driver for the solenoid valve 106, and similarly the CPU 11
Connected to 4. 109 is a flow rate sensor that converts the detected flow rate into an electrical signal, and 110 is an A/D converter that converts an analog signal into a digital signal, which is connected to the CPU 114. 2 is a rotary actuator that fixes an air bearing 52 with a fixing jig 9, is continuous with the central shaft 8, and turns a workpiece 180 degrees by switching a solenoid valve 117. 4 is a support base that supports the shaft 8; 116 is a solenoid valve 117;
It is connected to the CPU 114 using the following driver. 103
118 is a solenoid valve for turning on and off the air supplied to the air bearing 52, and 118 is a driver for the solenoid valve 103.
It is connected to PU114.

11 is a pattern unit in which five types of patterns are arranged on the circumference, 13 is a mask unit for limiting the adjustment range, and gears are provided on the outer periphery of each unit. Reference numeral 14 denotes a small gear for transmitting rotation, and a one-way clutch is built in, so that the pattern unit 1 and the mask unit 13 are rotated by forward and reverse rotation, respectively. Reference numeral 15 is a coupling for transmitting rotational force, reference numeral 19 is a stepping motor with a built-in reduction gear for rotational positioning, and reference numeral 113 is a driver for operating the stepping motor 19, which is connected to the CPU 114. Reference numeral 5 denotes a rodless cylinder which is used to prevent the pattern unit and mask unit from interfering with each other when the workpiece 52 is reversed. 111 is a solenoid valve that switches the rodless cylinder, 11
2 is a driver for operating the solenoid valve 111, and the CPU
114. A compressor 101 is a compression source, and is connected to each electromagnetic valve.

Next, the operation of the above-mentioned component device will be explained.

The fixing jig 9 fixes the workpiece 52 to the used reversing unit, and turns on the solenoid valve 103 to supply compressed air to the workpiece 52. Next, the solenoid valve 111 is operated, and the pattern unit 11 and mask unit 13 are placed coaxially with the workpiece. Next, the robot 6o moves to the start point taught in advance by a command from the CPU 114, the detection bat 45 is stopped at that point, the solenoid valve 18 is switched, the cylinder is operated, and the detection bat 45 is stopped at that point.
is lowered onto the bearing surface 51, and the flow rate is detected. The detected flow rate is converted into an electrical signal by the flow rate sensor 109, and further converted into a digital signal by the A/D converter 110 and taken into the CPU 114. An appropriate pattern is selected from the captured flow rate data using a pre-programmed calculation method, the motor 19 is driven through the stepping motor driver 113, and the pattern 13 arranged on the circumference is selected. Next, the robot 60 moves and moves the spray gun 44 to the adjustment point. tMi valve 106
is operated intermittently, and a fixed amount of solvent is sprayed from the spray gun 44 and sprayed onto the bearing surface 51 through the pattern 13.

Next, a command is issued to the robot again to switch the positions of the spray gun 44 and detection pad 45, and detect the flow rate after spraying. By repeating the above operations, when the flow rate is adjusted to the preset flow range, the CPU1
A command is issued from 14, the mask 13 and robot 60 are moved to the next point, and the flow rate is similarly adjusted. After repeating the above and completing all adjustments, the solenoid valve 111 is switched, the rodless cylinder 5 is operated, and the pattern unit 11 and mask unit 13 are moved to the relief position. Further, the solenoid valve 117 is switched, the rotary actuator 2 is operated, and the workpiece is reversed. Furthermore, the pattern unit and mask unit are arranged coaxially with the workpiece and flow rate adjustment is started, and when the adjustment of all points is completed, each unit returns to its initial state and all operations are completed.

[Effects of the Invention] As explained above, according to the present invention, the flow adjustment of a porous hydrostatic gas bearing can be carried out automatically and continuously, which not only reduces costs by reducing the number of man-hours but also provides uniform quality. It will be done. Furthermore, in large bearings, the flow rate adjustment surface can be automatically switched, improving work efficiency and safety.

[Brief explanation of drawings]

FIG. 1 is a plan view showing the configuration of an embodiment of the present invention, FIG. 2 is a side view of the embodiment shown in FIG. 1, FIG. 3 is a partial sectional view showing the main parts of the device, and FIG. 5 is a partially enlarged view showing the configuration of the flow rate adjustment section of the embodiment shown in FIG. 1; FIG. 6 is an exploded view showing the configuration of the main parts of the device. Perspective view, Figure 7 (a
) and (b) are respectively a sectional view and a perspective view of a porous gas bearing, FIG. 8 is a configuration diagram of a measurement pad used in the present invention, and FIG. 9 is a block diagram showing the configuration of the device of the present invention. : Orthogonal 3-axis NC robot, 2 flow rate adjustment parts, : Reversing unit, 4: Spray nozzle for solvent application, 5. Detection pad for flow rate measurement, 1: Pattern.

Claims (4)

[Claims] (1) A holding means for a gas bearing whose flow rate is to be adjusted, a means for measuring the flow rate ejected from the bearing, a pattern plate consisting of a plurality of coating pattern parts with a plurality of dispersed small holes and different opening ratios, and a solvent coating. a mask having a plurality of openings with different areas for coating the gas bearing, and a solvent application means for spraying and applying a solvent onto the gas bearing held by the holding means while covering the bearing with the pattern plate and the mask; A porous porous device characterized by comprising: a control means for selecting a coating pattern portion having an optimum aperture ratio based on the measurement result of the measuring means and moving the pattern portion and the opening of a predetermined mask onto the solvent coated surface of the bearing. Flow rate adjustment device for static pressure gas bearings. (2) The pattern plate is comprised of a rotatable disk divided into a plurality of fan-shaped application pattern parts, and small holes are uniformly distributed and formed in each pattern part with different aperture ratios. 2. The flow rate adjustment device for a porous hydrostatic gas bearing according to item 1. (3) The flow rate adjustment device for a porous hydrostatic gas bearing according to claim 1, wherein the holding means rotatably holds the bearing relative to the solvent application means. (4) The flow rate adjustment device for a porous hydrostatic gas bearing according to claim 2, wherein the mask comprises a disc disposed coaxially with the pattern plate.