JPH032630U - - Google Patents
Info
- Publication number
- JPH032630U JPH032630U JP6355289U JP6355289U JPH032630U JP H032630 U JPH032630 U JP H032630U JP 6355289 U JP6355289 U JP 6355289U JP 6355289 U JP6355289 U JP 6355289U JP H032630 U JPH032630 U JP H032630U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- sloped
- storage hole
- placing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Description
第１図は、本考案の一実施例に係る半導体製造
装置の概略断面図、第２図は、同装置に用いられ
るサセプタの拡大半断面図、第３図は従来装置の
概略断面図、第４図は同従来装置に用いられるサ
セプタの斜視図である。
１……外側ベルジヤ、１′……内側ベルジヤ、
１０……サセプタ、１１……ウエーハ収納穴、Ｗ
……半導体ウエーハ。
1 is a schematic cross-sectional view of a semiconductor manufacturing apparatus according to an embodiment of the present invention, FIG. 2 is an enlarged half-sectional view of a susceptor used in the same apparatus, and FIG. 3 is a schematic cross-sectional view of a conventional apparatus. FIG. 4 is a perspective view of a susceptor used in the conventional device. 1...outer bell gear, 1'...inner bell gear,
10...Susceptor, 11...Wafer storage hole, W
...Semiconductor wafer.
Claims (1)
し、加熱しながら処理ガスを供給して該ウエーハ
にエピタキシヤル成長層を形成する装置において
、 上記サセプタを、サセプタ本体のウエーハ収納
穴の底面にサセプタの外周側が高くなるような傾
きをつけたことを特徴とする半導体製造装置。[Claims for Utility Model Registration] In an apparatus for placing a semiconductor wafer on a susceptor in a bell gear and supplying a processing gas while heating it to form an epitaxial growth layer on the wafer, A semiconductor manufacturing device characterized in that the bottom surface of the storage hole is sloped so that the outer peripheral side of the susceptor is higher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6355289U JPH032630U (en) | 1989-05-31 | 1989-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6355289U JPH032630U (en) | 1989-05-31 | 1989-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH032630U true JPH032630U (en) | 1991-01-11 |
Family
ID=31593706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6355289U Pending JPH032630U (en) | 1989-05-31 | 1989-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH032630U (en) |
-
1989
- 1989-05-31 JP JP6355289U patent/JPH032630U/ja active Pending