JPS633143U - - Google Patents
Info
- Publication number
- JPS633143U JPS633143U JP9701186U JP9701186U JPS633143U JP S633143 U JPS633143 U JP S633143U JP 9701186 U JP9701186 U JP 9701186U JP 9701186 U JP9701186 U JP 9701186U JP S633143 U JPS633143 U JP S633143U
- Authority
- JP
- Japan
- Prior art keywords
- transfer section
- section
- semiconductor manufacturing
- gas
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの発明の一実施例による半導体製造
装置を示す断面図、第２図は従来の半導体製造装
置を示す断面図である。
１はウエハー移送部、２は半導体製造用ガス供
給部、３はヒーター部、４は回転ブラシ、５はガ
スノズル。なお、図中、同一符号は同一、又は相
当部分を示す。
FIG. 1 is a sectional view showing a semiconductor manufacturing apparatus according to an embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional semiconductor manufacturing apparatus. 1 is a wafer transfer section, 2 is a semiconductor manufacturing gas supply section, 3 is a heater section, 4 is a rotating brush, and 5 is a gas nozzle. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
部と、この移送部の上部に半導体製造用ガスを供
給するガス供給部と、このガス供給部に対向する
前記移送部の内部に設けられ移送中の前記シリコ
ンウエハーを加熱するヒーター部と、前記移送部
の側部または下部に接して設けられた回転ブラシ
および前記移送部冷却用ガスノズルを備えた半導
体製造装置。 an endless track-like transfer section for transferring silicon wafers; a gas supply section for supplying semiconductor manufacturing gas to the upper part of this transfer section; A semiconductor manufacturing apparatus comprising: a heater section that heats a silicon wafer; a rotating brush provided in contact with a side or bottom of the transfer section; and a gas nozzle for cooling the transfer section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9701186U JPS633143U (en) | 1986-06-24 | 1986-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9701186U JPS633143U (en) | 1986-06-24 | 1986-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633143U true JPS633143U (en) | 1988-01-11 |
Family
ID=30963476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9701186U Pending JPS633143U (en) | 1986-06-24 | 1986-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633143U (en) |
-
1986
- 1986-06-24 JP JP9701186U patent/JPS633143U/ja active Pending