JPH03272111A - Bobbin for surface package type transformer - Google Patents

Bobbin for surface package type transformer

Info

Publication number
JPH03272111A
JPH03272111A JP7310990A JP7310990A JPH03272111A JP H03272111 A JPH03272111 A JP H03272111A JP 7310990 A JP7310990 A JP 7310990A JP 7310990 A JP7310990 A JP 7310990A JP H03272111 A JPH03272111 A JP H03272111A
Authority
JP
Japan
Prior art keywords
terminal
bobbin
groove
printed wiring
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7310990A
Other languages
Japanese (ja)
Inventor
Megumi Kosuda
小須田 恵
Osamu Takahashi
修 高橋
Hidenori Tsuruse
鶴瀬 英紀
Satoyuki Takagi
高木 伶征
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7310990A priority Critical patent/JPH03272111A/en
Publication of JPH03272111A publication Critical patent/JPH03272111A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3421Leaded components

Landscapes

  • Coils Or Transformers For Communication (AREA)

Abstract

PURPOSE:To relax stress at a soldered joint part in the land of the terminal and the printed wiring plate caused by the difference in expansion coefficient, and to miniaturize a bobbin by reducing the area of soldering by a method wherein the terminal is fixed by giving the degree of freedon aginst the bobbin. CONSTITUTION:The terminal part 3, which is engaged to the lower flange of a bobbin 1 has a stepping face 5 and a stepping side face 6, a groove Q having a terminal-fitting groove 8 is provided on a plane surface part P, and a U-shaped terminal 4, having a terminal protruding part 7 on the rear side, is inserted into the groove Q. The terminal 4 is couplded to the terminal part 3 using the protruding part 7 and the groove 8, but as the cross-section of the protruding part is semi-circularly shaped and the cross-section of the groove 8 is crescent-shaped, the degree of coupling of each surface of the terminal 4 and the groove Q is low, and there is a gap excepting the protruding part 7 and the groove 8. Then, the terminal 4 is placed on the land 11 located on a printed wiring board 10, the board 10 and the terminal 4 are fixed using a solder junction part 12 which is formed by soldering, and the terminal 4 and the bobbin 1 are fixed by giving the degree of freedom between the protruding part 7 and the groove 8. As a result, the stress of the junction part 12 generated by the difference of expansion coefficient of material is absorbed, the area of soldering is reduced, and the bobbin can be made small in size.

Description

【発明の詳細な説明】 (産業上の利用分野〕 この発明は、表面実装形トランス用ボビン、特に基板に
実装する表面実装形トランス用ボビンに関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a bobbin for a surface-mounted transformer, and particularly to a bobbin for a surface-mounted transformer mounted on a substrate.

〔従来の技術〕[Conventional technology]

従来、この種の装置として、第5図ないし第8図に示す
ものが知られている。
Conventionally, as this type of apparatus, those shown in FIGS. 5 to 8 are known.

1)第5図は、端子とボビンとを一体成形したボビンを
示す斜視図、第6図は第5図の端子部の詳細斜視図であ
る。図において、1はボビン、2はこのボビン1の1つ
ば、3はこの1つば2に係合された端子部、10は前記
ボビン1が実装される基板であるプリント配線板、11
はこのプリント配線板10に印刷されているランド、1
2ははんだ接合部、13は一体成形端子である。
1) FIG. 5 is a perspective view showing a bobbin in which a terminal and a bobbin are integrally molded, and FIG. 6 is a detailed perspective view of the terminal portion of FIG. 5. In the figure, 1 is a bobbin, 2 is one rib of this bobbin 1, 3 is a terminal portion engaged with this one rib 2, 10 is a printed wiring board which is a board on which the bobbin 1 is mounted, 11
is the land printed on this printed wiring board 10, 1
2 is a solder joint, and 13 is an integrally molded terminal.

2)第7図はボビン1に端子4を圧入したボビンを示す
斜視図、第8図は第7図の端子部の詳細斜視図である。
2) FIG. 7 is a perspective view showing the bobbin 1 with the terminal 4 press-fitted therein, and FIG. 8 is a detailed perspective view of the terminal portion of FIG. 7.

図において、14はボビン1の下つば2に係合された端
子部3に圧入された圧入用端子である。
In the figure, reference numeral 14 denotes a press-fitting terminal that is press-fitted into the terminal portion 3 that is engaged with the lower collar 2 of the bobbin 1.

次に、構成について説明する。Next, the configuration will be explained.

1)第5図および第6図に示したボビン1の下つば2に
係合された端子部3に一体成形された、一体成形端子1
3をもつ、トランス用のボビン1に、図示されない、コ
イルを巻装し、フェライトコアを装着し前記プリント配
線板10に印刷さレテいるランド11に、前記ボビン1
の一体成形用端子13をのせ、はんだ付けをし、このは
んだ付けによって形成されるはんだ接合部12によって
ボビン1と、プリント配線板10を固定するようになっ
ていた。
1) An integrally molded terminal 1 that is integrally molded with the terminal portion 3 that is engaged with the lower collar 2 of the bobbin 1 shown in FIGS. 5 and 6.
3, a coil (not shown) is wound around the bobbin 1 for a transformer, a ferrite core is attached, and the bobbin 1 is attached to the land 11 printed on the printed wiring board 10.
An integrally molded terminal 13 is placed on the bobbin 1 and soldered, and the bobbin 1 and the printed wiring board 10 are fixed by the solder joint 12 formed by this soldering.

2)第7図および第8図に示したボビン1の下つば2に
係合された端子部3に圧入された、圧入用端子14をも
つ、トランス用ボビン1に、コイルを巻装し、フエライ
コアを装着し、プリント配線板10に印刷されているラ
ンド11に、前記ボビン1に圧入用端子14をのせ、は
んだ付けをし、前記半田付けによって成形されるはんだ
接合部12によってボビン1とプリント配線板を固定す
るようになっていた。
2) Winding a coil around a transformer bobbin 1 having a press-fitting terminal 14 press-fitted into a terminal portion 3 engaged with a lower collar 2 of the bobbin 1 shown in FIGS. 7 and 8, After attaching the ferrite core, place the press-fit terminal 14 on the bobbin 1 on the land 11 printed on the printed wiring board 10, solder it, and connect the bobbin 1 and the print with the solder joint 12 formed by the soldering. It was supposed to fix the wiring board.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、従来のボビンは、以上のように構成され
ているので、プリント配線板の材料とボビン材料の膨張
係数の差によって発生する応力が、プリント配線板のラ
ンドとボビンの端子とのはんだ接合部に作用するため、
表面実装用のボビンを作成しようとする場合、前記はん
だ接合部の面積を大きくするなど、前記応力に耐える構
造にしなければならないし、小型化、省スペース化をし
にくいという問題があった。
However, since the conventional bobbin is constructed as described above, stress generated due to the difference in expansion coefficients between the printed wiring board material and the bobbin material is applied to the solder joint between the printed wiring board land and the bobbin terminal. Because it acts on
When creating a bobbin for surface mounting, a structure must be created that can withstand the stress, such as by increasing the area of the solder joint, and there is a problem in that it is difficult to miniaturize and save space.

この発明は、上記のような問題を解消するためになされ
たもので、はんだ接合部の面積を大きくするなどにより
、スペースを多くすることなく、応力を吸収できる表面
実装トランス用ボビンを得ることを目的としている。
This invention was made to solve the above-mentioned problems, and it is possible to obtain a bobbin for a surface mount transformer that can absorb stress without increasing the space by increasing the area of the solder joint. The purpose is

〔課題を解決するための手段〕[Means to solve the problem]

このため、この発明に係る表面実装形トランス用ボビン
は、端子を、ボビンに対して自由度をもたせて固定した
ものである。
Therefore, in the bobbin for a surface mount type transformer according to the present invention, the terminal is fixed to the bobbin with a degree of freedom.

〔作用〕[Effect]

この発明による表面実装形トランス用ボビンは、端子を
ボビンに対して自由度をもたせて固定したことにより、
温度変化によるボビン材料とプリント配線板の材料との
膨張係数の差による前記端子とプリント配線板のランド
におけるはんだ接合部に応力が作用しないように働き、
このためはんだ面積を小さくでき、ボビンの小型化を達
成できる。
The bobbin for a surface-mounted transformer according to the present invention has terminals fixed to the bobbin with a degree of freedom.
Works to prevent stress from acting on the solder joint between the terminal and the land of the printed wiring board due to the difference in expansion coefficient between the bobbin material and the printed wiring board material due to temperature changes,
Therefore, the solder area can be reduced, and the bobbin can be made smaller.

(実施例) 以下に、この発明に係る一実施例の表面実装型トランス
用ボビンについて、図に基づいて説明する。第1図はこ
の発明の一実施例による表面実装型トランス用ボビンを
示す斜視図であり、第2図は第1図における端子部の拡
大詳細図である。従来例、第5図ないし第8図における
と同一部分または相当部分は同一符号を示し、説明の重
複をさける。
(Example) Below, a bobbin for a surface mount type transformer according to an example of the present invention will be described based on the drawings. FIG. 1 is a perspective view showing a bobbin for a surface mount type transformer according to an embodiment of the present invention, and FIG. 2 is an enlarged detailed view of the terminal portion in FIG. 1. The same or equivalent parts as in the conventional example and FIGS. 5 to 8 are denoted by the same reference numerals to avoid duplication of explanation.

第1図、第2図において、4はこの端子部3に嵌合され
ている端子、5はこの端子4が嵌合されている部分の段
差面、6は相対する面をもつ段差側面、7は端子凸部で
あり、8はこの端子凸部7と嵌合される、端子嵌合みぞ
である。10は前記ボビン1が実装される基板であるプ
リント配線板であり、11はこのプリント配線板10上
に印刷されているランド、12はこのランド!■上に端
子4をのせ、はんだ付けをした状態での端子とパターン
のはんだ接合部である。
In FIGS. 1 and 2, 4 is a terminal fitted to this terminal portion 3, 5 is a stepped surface of the portion where this terminal 4 is fitted, 6 is a stepped side surface with an opposing surface, and 7 is a terminal protrusion, and 8 is a terminal fitting groove into which this terminal protrusion 7 is fitted. 10 is a printed wiring board which is a board on which the bobbin 1 is mounted, 11 is a land printed on this printed wiring board 10, and 12 is this land! ■This is the solder joint between the terminal and the pattern when the terminal 4 is placed on top and soldered.

この発明の一実施例では、表面実装形トランス用ボビン
が、ボビン1の材料の熱によるIli!張係数と、プリ
ント配線板10の材料の熱により膨張係数が異なり、ボ
ビン1の端子4を表面実装したトランス用ボビンである
場合について説明する。
In one embodiment of the present invention, a bobbin for a surface-mounted transformer has Ili! due to the heat of the material of the bobbin 1. A case where the bobbin 1 is a transformer bobbin in which the expansion coefficient differs depending on the tensile coefficient and the heat of the material of the printed wiring board 10 and the terminals 4 of the bobbin 1 are surface mounted will be described.

ボビン1の下つば2に係合された端子部3には、第2図
に示すように、段差面5及び相対する面を持つ段差側面
6をもち、平面部Pには、端子嵌合みぞ8のあるみぞQ
を、上下少なくとも一方に設けである。第1図および第
2図では上下両方にみぞQを設けた場合を示しである。
The terminal portion 3 engaged with the lower collar 2 of the bobbin 1 has a stepped surface 5 and a stepped side surface 6 having opposing surfaces, as shown in FIG. 2, and the flat portion P has a terminal fitting groove. Groove Q with 8
are provided on at least one of the upper and lower sides. 1 and 2 show the case where grooves Q are provided on both the upper and lower sides.

前記みぞQに、裏面に端子凸部7をもったコの字形の端
子4を挿入するようになっている。この挿入された端子
4は、端子凸部7と端子嵌合みぞ8によって端子部3に
結合されるが、端子凸部7の断面は半円状、端子嵌合み
ぞ8の断面は三日月形状をしているため結合度は低い。
A U-shaped terminal 4 having a terminal protrusion 7 on the back surface is inserted into the groove Q. The inserted terminal 4 is connected to the terminal part 3 by the terminal protrusion 7 and the terminal fitting groove 8. The terminal protrusion 7 has a semicircular cross section, and the terminal fitting groove 8 has a crescent shape in cross section. Therefore, the degree of coupling is low.

前記のボビン1の端子部3に挿入された端子4のそれぞ
れの面と、前記段差面5と段差側面6を持つみぞQの各
面とは、端子凸部7と端子嵌合みぞ8を除いては、間隙
をもっている。
Each surface of the terminal 4 inserted into the terminal portion 3 of the bobbin 1 and each surface of the groove Q having the stepped surface 5 and the stepped side surface 6 are, except for the terminal convex portion 7 and the terminal fitting groove 8. It has a gap.

このように構成されているので、ボビン1に、図示され
ないコイルを巻装し、フェライトコアを装着したトラン
スの端子4を、プリント配線板10に印刷されているラ
ンド11上にのせ、はんだ付けし、このはんだ付けによ
って形成されるはんだ接合部12により、プリント配線
板10と端子4は固定し、端子凸部7と端子嵌合みぞ8
間のみで、自由度を持せて結合したことにより、端子4
を、ボビン1と一体化せず、自由度を持たせて固定され
る。
With this structure, a coil (not shown) is wound around the bobbin 1, and the terminal 4 of the transformer equipped with the ferrite core is placed on the land 11 printed on the printed wiring board 10 and soldered. The printed wiring board 10 and the terminal 4 are fixed by the solder joint 12 formed by this soldering, and the terminal protrusion 7 and the terminal fitting groove 8 are fixed.
By connecting terminal 4 with a degree of freedom only between
is not integrated with the bobbin 1, but is fixed with a degree of freedom.

この発明の一実施例の表面実装形トランス用ボビンによ
れば、ボビン1の材料と膨張係数が異なる材料を用いた
プリント配線板10に、ボビン1を表面実装したトラン
ス用ボビンであって、ボビン1とプリント配線板10に
接続された端子4を、ボビン1と一体化せず自由度をも
たせて固定するように構成したので、ボビン1の材料と
プリント配線板10の材料の熱による膨張係数の差によ
り発生した応力を、前記構成部分にて吸収するため、端
子4とパターンのはんだ接合部12にかかる応力が減少
することにより、パターンとはんだ接合部12の面積を
小さくでき、小型化した費用面実装形トランス用ボビン
を提供できるという効果がある。
According to a surface-mounted transformer bobbin according to an embodiment of the present invention, the bobbin 1 is surface-mounted on a printed wiring board 10 made of a material having a different coefficient of expansion from the material of the bobbin 1, and the bobbin 1 and the terminal 4 connected to the printed wiring board 10 are not integrated with the bobbin 1 but are fixed with a degree of freedom, so that the coefficient of thermal expansion of the material of the bobbin 1 and the material of the printed wiring board 10 is Since the stress generated due to the difference between This has the effect of providing a bobbin for a surface-mounted transformer at a low cost.

(他の実施例) この発明の一実施例では、端子が平板である場合につい
て説明したが、丸棒、角棒の場合は、第3図および第4
図に示した他の実施例のように、ボビン1の下つば2に
係合される端子部3に端子部挿入穴9を設け、前記端子
部挿入穴9より径の小さい端子4を、端子部挿入穴9に
挿入し、上下を折り曲げる。
(Other Embodiments) In one embodiment of the present invention, the case where the terminal is a flat plate has been explained, but in the case of a round bar or a square bar, the terminal is shown in FIGS. 3 and 4.
As in the other embodiment shown in the figure, a terminal part insertion hole 9 is provided in the terminal part 3 that is engaged with the lower collar 2 of the bobbin 1, and the terminal part 4 having a smaller diameter than the terminal part insertion hole 9 is inserted into the terminal part 3. insert into the insertion hole 9 and fold the top and bottom.

前記端子部挿入穴9は、上下少なくとも一方に段差面5
と、相対する面を持つ段差側面6をもつ、みぞQに設け
られており、段差側面6によって端子4の左右のぶれを
防止している。前記のように構成されているボビン1に
、図示されないコイルを巻装し、フェライトコアを装着
したトランスの端子4を、プリント配線板10に印刷さ
れたランド11の上にのせ、はんだ付をし、前記はんだ
付により形成されるはんだ接合部により、プリント配線
板10と端子4を固定し、また、端子4のばね圧力によ
りはさみ込みの作用により、端子4をボビンと一体化す
ることなく、自由度をもたせて固定でき、上記実施例と
同様の効果を奏する。
The terminal insertion hole 9 has a stepped surface 5 on at least one of the upper and lower sides.
The terminal 4 is provided in a groove Q having a stepped side surface 6 having opposing surfaces, and the stepped side surface 6 prevents the terminal 4 from shifting from side to side. A coil (not shown) is wound around the bobbin 1 configured as described above, and the terminal 4 of the transformer equipped with the ferrite core is placed on the land 11 printed on the printed wiring board 10 and soldered. The printed wiring board 10 and the terminal 4 are fixed by the solder joint formed by the soldering, and the spring pressure of the terminal 4 allows the terminal 4 to be freely attached without being integrated with the bobbin. It can be fixed with great precision and has the same effect as the above embodiment.

この発明の一実施例では、端子が平板である場合につい
て説明したが、端子が長円、平目であっでも同様な効果
を奏することはいうまでもない。
In one embodiment of the present invention, the case where the terminal is a flat plate has been described, but it goes without saying that the same effect can be achieved even if the terminal is oval or flat.

なお、この発明の一実施例では、表面実装形トランス用
ボビンが、ボビンの材料の膨張係数と、基板であるプリ
ント配線板の材料の膨張係数が異なるものであり、プリ
ント配線板に表面実装したトランス用ボビンである場合
について説明したが、ボビンの材料とプリント配線板の
材料の膨張係数が等しい場合であっても同様な効果を奏
することができることはもちろんであるほか、端子をボ
ビンと一体化せず、自由度をもたせて固定したことによ
り、ボビンの材料とプリント配線板の膨張係数の差によ
って応力は発生しないが、たとえば外力によって応力が
発生し、前記はんだ接合部などに作用したときであって
も、端子をボビンと自由度をもたせて固定したので、こ
の応力が吸収され、応力が作用しないように働くという
表面実装形トランス用ボビンが得られるという効果があ
る。
In one embodiment of the present invention, the bobbin for a surface-mounted transformer is one in which the expansion coefficient of the material of the bobbin is different from that of the material of the printed wiring board, which is the substrate, and the surface-mounted transformer is Although we have explained the case of a bobbin for a transformer, it goes without saying that the same effect can be achieved even when the expansion coefficients of the bobbin material and the material of the printed wiring board are the same, and the terminal can be integrated with the bobbin. By fixing the bobbin with a degree of freedom, stress will not be generated due to the difference in expansion coefficient between the bobbin material and the printed wiring board. Even if the terminal is fixed to the bobbin with a degree of freedom, this stress can be absorbed and a bobbin for a surface mount type transformer can be obtained in which the stress does not act.

(発明の効果) 以上に、説明してきたように、この発明によれば、ボビ
ンと端子を成形または圧入して一体ものとせず、自由度
をもたせて固定するように構成したので、ボビンの材料
と基板の材料の熱膨張係数の差により発生する応力を前
記構成部分にて吸収するため、端子と基板上のランドの
はんだ接合部にかかる応力が減少することにより、基板
上のランドとはんだ接合部の面積を小さくでき、小型化
した表面実装トランス用ボビンが得られるという効果を
奏する。
(Effects of the Invention) As described above, according to the present invention, the bobbin and the terminal are not integrally formed by molding or press-fitting, but are configured to be fixed with a degree of freedom. Since the stress generated due to the difference in thermal expansion coefficient between the material of the terminal and the board is absorbed by the component, the stress applied to the solder joint between the terminal and the land on the board is reduced, and the solder joint with the land on the board is reduced. This has the effect that the area of the part can be reduced and a miniaturized bobbin for a surface mount transformer can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この発明の一実施例によるボビンを示す斜視
図、第2図は、同端子部の拡大詳細斜視図、第3図は、
この発明の他の実施例のボビンを 0 示す斜視図、第4図は、同端子部の拡大詳細斜視図、第
5図は、従来例の端子一体成形型ボビンを示す斜視図、
第6図は、同端子部の詳細斜視図、第7図は、他の従来
例の端子圧入形ボビンを示す斜視図、第8図は同端子部
の詳細斜視図である。 1はボビン、3は端子部、4は端子、7は端子凸部、8
は端子嵌合みぞ、10はプリント配線板である。 各図中、同一符号は同一部分または相当部分を示す。
FIG. 1 is a perspective view showing a bobbin according to an embodiment of the present invention, FIG. 2 is an enlarged detailed perspective view of the terminal portion, and FIG.
0 A perspective view showing a bobbin according to another embodiment of the present invention, FIG. 4 is an enlarged detailed perspective view of the terminal portion, and FIG. 5 is a perspective view showing a conventional terminal integrally molded bobbin.
FIG. 6 is a detailed perspective view of the terminal portion, FIG. 7 is a perspective view showing another conventional terminal press-fit type bobbin, and FIG. 8 is a detailed perspective view of the terminal portion. 1 is a bobbin, 3 is a terminal part, 4 is a terminal, 7 is a terminal convex part, 8
10 is a terminal fitting groove, and 10 is a printed wiring board. In each figure, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] ボビンの材料と、膨張係数が異なる材料を用いた基板に
、表面実装したトランス用ボビンであって、該ボビンと
基板に接続された端子を、ボビンと一体化せず自由度を
もたせて固定したことを特徴とする表面実装形トランス
用ボビン。
A transformer bobbin surface-mounted on a board made of a material with a different expansion coefficient from that of the bobbin, in which the terminals connected to the bobbin and the board are fixed with a degree of freedom without being integrated with the bobbin. A bobbin for surface-mounted transformers characterized by:
JP7310990A 1990-03-22 1990-03-22 Bobbin for surface package type transformer Pending JPH03272111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7310990A JPH03272111A (en) 1990-03-22 1990-03-22 Bobbin for surface package type transformer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7310990A JPH03272111A (en) 1990-03-22 1990-03-22 Bobbin for surface package type transformer

Publications (1)

Publication Number Publication Date
JPH03272111A true JPH03272111A (en) 1991-12-03

Family

ID=13508791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7310990A Pending JPH03272111A (en) 1990-03-22 1990-03-22 Bobbin for surface package type transformer

Country Status (1)

Country Link
JP (1) JPH03272111A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0997727A (en) * 1995-10-02 1997-04-08 Coil Suneeku Kk Coil and inductance element using this coil
JP2007273739A (en) * 2006-03-31 2007-10-18 Tdk Corp Coil parts

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179410A (en) * 1988-01-07 1989-07-17 Nikon Corp Method and apparatus for forming thin film by cvd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179410A (en) * 1988-01-07 1989-07-17 Nikon Corp Method and apparatus for forming thin film by cvd

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0997727A (en) * 1995-10-02 1997-04-08 Coil Suneeku Kk Coil and inductance element using this coil
JP2007273739A (en) * 2006-03-31 2007-10-18 Tdk Corp Coil parts

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