JPH03278418A - Porcelain capacitor and manufacture thereof - Google Patents
Porcelain capacitor and manufacture thereofInfo
- Publication number
- JPH03278418A JPH03278418A JP2076768A JP7676890A JPH03278418A JP H03278418 A JPH03278418 A JP H03278418A JP 2076768 A JP2076768 A JP 2076768A JP 7676890 A JP7676890 A JP 7676890A JP H03278418 A JPH03278418 A JP H03278418A
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- Prior art keywords
- mol
- composition
- additive component
- sio
- component
- Prior art date
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Links
- 229910052573 porcelain Inorganic materials 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000003990 capacitor Substances 0.000 title claims description 5
- 239000000203 mixture Substances 0.000 claims abstract description 89
- 239000000654 additive Substances 0.000 claims abstract description 64
- 230000000996 additive effect Effects 0.000 claims abstract description 64
- 238000010304 firing Methods 0.000 claims abstract description 16
- 238000010586 diagram Methods 0.000 claims abstract description 10
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 9
- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract description 7
- 229910052691 Erbium Inorganic materials 0.000 claims abstract description 7
- 229910052688 Gadolinium Inorganic materials 0.000 claims abstract description 7
- 229910052689 Holmium Inorganic materials 0.000 claims abstract description 7
- 229910052706 scandium Inorganic materials 0.000 claims abstract description 7
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 239000000919 ceramic Substances 0.000 claims description 34
- 239000003985 ceramic capacitor Substances 0.000 claims description 21
- 230000001590 oxidative effect Effects 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 239000004615 ingredient Substances 0.000 claims 1
- 238000003475 lamination Methods 0.000 claims 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052769 Ytterbium Inorganic materials 0.000 abstract description 5
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 abstract description 5
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 5
- 150000004706 metal oxides Chemical class 0.000 abstract description 5
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052681 coesite Inorganic materials 0.000 abstract description 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 3
- 229910052682 stishovite Inorganic materials 0.000 abstract description 3
- 229910052905 tridymite Inorganic materials 0.000 abstract description 3
- 238000002156 mixing Methods 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 22
- 239000011701 zinc Substances 0.000 description 18
- 229910052725 zinc Inorganic materials 0.000 description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 238000009472 formulation Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910000510 noble metal Inorganic materials 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910020169 SiOa Inorganic materials 0.000 description 1
- KZNMRPQBBZBTSW-UHFFFAOYSA-N [Au]=O Chemical class [Au]=O KZNMRPQBBZBTSW-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229920006222 acrylic ester polymer Polymers 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 229910001922 gold oxide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001089 mineralizing effect Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Ceramic Capacitors (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、誘電体磁器層を少なくとも2以上の内部電極
で挟持してなる単層または積層構造の磁器コンデンサ及
びその製造方法に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a ceramic capacitor having a single-layer or laminated structure in which a dielectric ceramic layer is sandwiched between at least two internal electrodes, and a method for manufacturing the same. .
[従来の技術]
従来、積層磁器コンデンサを製造する際には、誘電体磁
器原料粉末から成る未焼結磁器シート(グリーンシート
)に白金又はパラジウム等の貴金属の導電性ペーストを
所望パターンで印刷し、これを複数枚積み重ねて圧着し
、酸化性雰囲気中において1300℃〜1600℃で焼
成させた。[Prior Art] Conventionally, when manufacturing multilayer ceramic capacitors, a conductive paste of noble metal such as platinum or palladium is printed in a desired pattern on an unsintered porcelain sheet (green sheet) made of dielectric porcelain raw material powder. A plurality of these sheets were stacked and pressed together, and fired at 1300°C to 1600°C in an oxidizing atmosphere.
この焼成により、誘電体磁器原料粉末から成る未焼結磁
器シートは誘電体磁器層となり、白金又はパラジウム等
の貴金属の導電性ペーストは内部電極となる。Through this firing, the unsintered porcelain sheet made of the dielectric porcelain raw material powder becomes a dielectric porcelain layer, and the conductive paste of noble metal such as platinum or palladium becomes an internal electrode.
上述のように、導電性ペーストとして白金又はパラジウ
ム等の貴金属を主成分とするものを使用すれば、酸化性
雰囲気中において1300℃〜1600℃という高温で
焼成させても、目的とする内部電極を得ることができる
。As mentioned above, if a conductive paste containing a noble metal such as platinum or palladium is used as the main component, the intended internal electrode can be formed even if it is fired at a high temperature of 1300°C to 1600°C in an oxidizing atmosphere. Obtainable.
しかし、白金、パラジウム等の貴金属は高価であるため
、必然的に積層磁器コンデンサがコスト高になっていた
。However, since precious metals such as platinum and palladium are expensive, the cost of multilayer ceramic capacitors has inevitably increased.
上述の問題を解決することができるものとして、本件出
願人に係わる特公昭61−14607号公報には、(B
a M−M If]Om T i O2(但し、Mは
Mg及び/又はZn)から成る基本成分と、L i z
O及びSingから成る添加成分とを含む誘電体磁器
組成物が開示されている。Japanese Patent Publication No. 14607/1983, filed by the applicant, discloses (B
a M−M If] Om T i O2 (where M is Mg and/or Zn), and L i z
A dielectric ceramic composition is disclosed that includes an additive component consisting of O and Sing.
また、特公昭61−14608号公報には、上記の特公
昭61−14607号公報記載の誘電体磁器組成物のL
i t O及びS i Oxの代りに、L i s
O、S i Oz及びMO(但し、MOはBaO、Ca
O及びSrOから選択された1種または2種以上の金に
酸化物)から成る添加成分を含む誘電体磁器組成物が開
示されている。In addition, Japanese Patent Publication No. 61-14608 discloses that the dielectric ceramic composition described in Japanese Patent Publication No. 61-14607 is
Instead of it O and S i Ox, L i s
O, S i Oz and MO (however, MO is BaO, Ca
A dielectric ceramic composition is disclosed that includes an additive component consisting of one or more gold oxides selected from O and SrO.
また、特公昭61−14609号公報には、(B ak
−x−y Mx Ly)Oi+ 710x (但し、
MはMg及び/又はZn、LはSr及び/又はCa)か
ら成る基本成分と、Li2O及び5i02から成る添加
成分とを含む誘電体磁器組成物が開示されている。In addition, in Japanese Patent Publication No. 14609/1983, (Bak
-x-y Mx Ly) Oi+ 710x (However,
A dielectric ceramic composition is disclosed that includes a basic component in which M is Mg and/or Zn, and L is Sr and/or Ca, and additional components include Li2O and 5i02.
また、特公昭61−14610号公報には、上記の特公
昭61−14609号公報記載の誘電体磁器組成物にお
けるL i * O及び5iOzの代りに、Liz O
,Sing及びMO(但し、MOはBaO、CaO及び
SrOから選択された1種または2種以上の金属酸化物
)から成る添加成分を含む誘電体磁器組成物が開示され
ている。Further, in Japanese Patent Publication No. 61-14610, in place of Li*O and 5iOz in the dielectric ceramic composition described in Japanese Patent Publication No. 61-14609,
, Sing, and MO (where MO is one or more metal oxides selected from BaO, CaO, and SrO).
また、特公昭61−14611号公報には、(B ai
+−++ MWlol 7 i Ox (但し、Mは
Mg。In addition, in Japanese Patent Publication No. 14611/1983, (B ai
+-++ MWlol 7 i Ox (However, M is Mg.
Z n + S r及びCaから選択された1種または
2種以上の金属元素)から成る基本成分と、B2O,及
びS i Oaから成る添加成分とを含む誘電体磁器組
成物が開示されている。A dielectric ceramic composition is disclosed that includes a basic component consisting of one or more metal elements selected from Zn + Sr and Ca) and an additive component consisting of B2O and SiOa. .
また、特公昭62−1595号公報には、(B a、−
x MXIOII T 10K (但し、MはMg。Furthermore, in Japanese Patent Publication No. 1595/1983, (B a, -
x MXIOII T 10K (However, M is Mg.
Zn、Sr及びCaから選択された1種または2種以上
の金属元素)から成る基本成分と、B20.及びMO(
但し、MOはB ao。one or more metal elements selected from Zn, Sr and Ca); and B20. and MO(
However, MO is Bao.
MgO,ZnO,SrO及びCaOから選択された1種
または2種以上の金属酸化物)から成る添加成分とを含
む誘電体磁器組成物が開示されている。A dielectric ceramic composition containing an additive component consisting of one or more metal oxides selected from MgO, ZnO, SrO, and CaO is disclosed.
また、特公昭62−1596号公報には、上記の特公昭
62−1595号公報記載の誘電体磁器組成物のB2O
3及びMOの代りに、Ba O,。In addition, Japanese Patent Publication No. 1596/1983 describes the B2O of the dielectric ceramic composition described in Japanese Patent Publication No. 1595/1982.
3 and BaO, instead of MO.
SiO2及びMO(但し、MOはBad。SiO2 and MO (However, MO is Bad.
MgO,ZnO,SrO及びCaOから選択された1種
または2種以上の金属酸化物)から成る添加成分とを含
む誘電体磁器組成物が開示されている。A dielectric ceramic composition containing an additive component consisting of one or more metal oxides selected from MgO, ZnO, SrO, and CaO is disclosed.
これらに開示されている誘電体磁器組成物を誘電体層と
して使用すれば、還元性雰囲気中において、1000℃
以下の温度の焼成で磁器コンデンサな得ることができ、
しかも、その誘電体磁器組成物の比誘電率を2000以
上、比誘電率の温度変化率を一25℃〜+85℃で一1
0%〜+lO%の範囲にすることができるものである。If the dielectric ceramic composition disclosed in these documents is used as a dielectric layer, it can be heated to 1000°C in a reducing atmosphere.
Porcelain capacitors can be obtained by firing at temperatures below,
Moreover, the relative permittivity of the dielectric ceramic composition is 2000 or more, and the temperature change rate of the relative permittivity is 11 from -25°C to +85°C.
It can be in the range of 0% to +1O%.
[発明が解決しようとする課題]
ところで、近年における電子回路の高密度化に伴ない、
磁器コンデンサの小型化の要求は非常に強く、上記各公
報に開示されている誘電体磁器組成物よりも更に比誘電
率の大きな誘電体磁器組成物を備えた磁器コンデンサの
開発が望まれていた。[Problems to be solved by the invention] By the way, with the increasing density of electronic circuits in recent years,
There is a very strong demand for miniaturization of ceramic capacitors, and it has been desired to develop a ceramic capacitor equipped with a dielectric ceramic composition having a higher dielectric constant than the dielectric ceramic compositions disclosed in the above-mentioned publications. .
また、磁器コンデンサは各種の環境下において使用され
るため、上記各公報に開示されている誘電体磁器組成物
よりも更に広い温度範囲にわたって比誘電率の変化率が
小さい誘電体磁器組成物を備えた磁器コンデンサの開発
が望まれていた。In addition, since ceramic capacitors are used in various environments, they are equipped with a dielectric ceramic composition that has a smaller rate of change in relative dielectric constant over a wider temperature range than the dielectric ceramic compositions disclosed in the above-mentioned publications. There was a desire to develop a ceramic capacitor that would
そこで、本発明の目的は、非酸化性雰囲気中における1
200℃以下の焼成で得られるものであるにもかかわら
ず、比誘電率が3000以上、誘電体損失tanδが2
.5%以下、抵抗率ρが1xlO’MΩ・cm以上であ
り、かつ比誘電率の温度変化率が一55℃〜125℃で
一15%〜+15%(25℃を基準)、−25℃〜85
℃で一10%〜+10%(20℃を基準)の範囲に収ま
る誘電体磁器組成物を備えた磁器コンデンサ及びその製
造方法を提供することにある。Therefore, the object of the present invention is to
Although it can be obtained by firing at temperatures below 200°C, it has a relative dielectric constant of 3000 or more and a dielectric loss tan δ of 2.
.. 5% or less, the resistivity ρ is 1xlO'MΩ・cm or more, and the temperature change rate of the dielectric constant is -15% to +15% (based on 25°C) at -55°C to 125°C, -25°C to 85
The object of the present invention is to provide a ceramic capacitor equipped with a dielectric ceramic composition whose temperature ranges from -10% to +10% (based on 20°C) and a method for manufacturing the same.
[課題を解決するための手段]
本発明に係る磁器コンデンサは、誘電体磁器組成物から
なる誘電体磁器層と、この誘電体磁器層を挟持している
少なくとも2以上の内部電極とを備え、
前記誘電体磁器組成物が、100重量部の基本成分と、
0.01〜3重量部のM e * O*で表わされる添
加成分1と、0.2〜5重量部の添加成分2との混合物
を焼成したものからなり、前記基本成分が
(Bak−(x*yl MIILyloll fT1+
−JilOa−xzi(但し、MはMg及び/又はZn
、LはCa及び/又はSr、RはSc、Y、Gd、Dy
。[Means for Solving the Problems] A ceramic capacitor according to the present invention includes a dielectric ceramic layer made of a dielectric ceramic composition, and at least two or more internal electrodes sandwiching the dielectric ceramic layer, The dielectric ceramic composition comprises 100 parts by weight of a basic component;
It consists of a mixture of 0.01 to 3 parts by weight of additive component 1 represented by Me*O* and 0.2 to 5 parts by weight of additive component 2, and the basic component is (Bak-( x*yl MIILyloll fT1+
-JilOa-xzi (where M is Mg and/or Zn
, L is Ca and/or Sr, R is Sc, Y, Gd, Dy
.
Ho、Er及びYbから選択された1種または2種以上
の金属元素、k、x、y、zは1゜00≦k≦1.05
0<x<0.10
o<y≦0.05
0.01≦x+y≦0.10
0.002≦z≦0.06
を満足する数値)で表わされる物質からなり、前記添加
成分1がCrg Os及び/又はAl2O,からなり、
前記添加成分2がL i z OとS f O2とMO
(但し、MOはBaO、SrO、CaO、MgO及びZ
nOから選択された1種または2種以上の金属酸化物)
とからなり、
前記Li5Oと前記5iO−と前記MOとの組成範囲が
、これらの組成をモル%で示す三角図における、
前記L i 20が1モル%、前記Singが80モル
%、前記MOが19モル%の組成を示す第1の点Aと、
前記L x 20が1モル%、前記S i O2が39
モル%、前記MOが60モル%の組成を示す第2の点B
と、
前記Li2Oが30モル%、前記S i Oaが30モ
ル%、前記MOが40モル%の組成を示す第3の点Cと
、
前記L i z Oが50モル%、前記S i Ozが
50モル%、前記MOが0モル%の組成を示す第4の点
りと、
前記Li* Oが20モル%、前記Si’Otが80モ
ル%、前記MOが0モル%の組成を示す第5の点Eと
をこの順に結ぶ5本の直線で囲まれた領域内のものであ
る。One or more metal elements selected from Ho, Er and Yb, k, x, y, z are 1°00≦k≦1.05 0<x<0.10 o<y≦0.05 0.01≦x+y≦0.10 0.002≦z≦0.06), the additive component 1 is composed of CrgOs and/or Al2O, and the additive component 2 is L i z O and S f O2 and MO
(However, MO is BaO, SrO, CaO, MgO and Z
one or more metal oxides selected from nO)
In the triangular diagram showing these compositions in mol%, the composition range of Li5O, 5iO-, and MO is 1 mol% for Li20, 80 mol% for Sing, and 80 mol% for MO. The first point A has a composition of 19 mol%, the L x 20 is 1 mol %, and the S i O2 is 39 mol %.
mol %, a second point B where the MO has a composition of 60 mol %
and a third point C showing a composition of 30 mol% of Li2O, 30 mol% of S i Oa, and 40 mol% of MO; a fourth dot having a composition of 50 mol%, the MO being 0 mol%, and a fourth dot having a composition of 20 mol% the Li*O, 80 mol% the Si'Ot, and 0 mol% the MO. This is within an area surrounded by five straight lines connecting point E of No. 5 in this order.
ここで、kの値は1.OO≦k≦1.05の範囲が好ま
しい、にの値が1.00未満では、抵抗率ρが1X10
’MΩ・CIより小さくなり、静電容量の温度変化率Δ
C−□、八CI2%が一15%〜+15%から外れ、Δ
C−as、ΔCssが一10%〜+10%から外れ、ま
たkの値が1.05を越えるとm密な焼結体が得られな
くなってしまうが、kの値が1.00≦k≦1.05の
範囲では所望の電気的特性を有する緻密な焼結体が得ら
れるからである。Here, the value of k is 1. The range of OO≦k≦1.05 is preferable; when the value of is less than 1.00, the resistivity ρ is 1×10
'becomes smaller than MΩ・CI, temperature change rate of capacitance Δ
C-□, 8 CI2% deviates from 115% to +15%, Δ
If C-as and ΔCss deviate from -10% to +10% and the value of k exceeds 1.05, it will not be possible to obtain an m-dense sintered body, but if the value of k is 1.00≦k≦ This is because within the range of 1.05, a dense sintered body having desired electrical characteristics can be obtained.
また、X+yの値は0.01≦x+y≦0、lOの範囲
が好ましい。x+yの値が0.01未満では静電容量の
温度変化率ΔC−55が一15%〜+15%から外れ、
X+yの値が0.10を越えると、静電容量の温度変化
率ΔCasが一1O%〜+10%から外れてしまうが、
x+yの(直が0.01≦x+y≦0.10の範囲では
所望の電気的特性を有するものが得られるからである。Further, the value of X+y is preferably in the range of 0.01≦x+y≦0, lO. When the value of x+y is less than 0.01, the temperature change rate ΔC-55 of capacitance deviates from -15% to +15%,
If the value of
This is because when the directivity of x+y is in the range of 0.01≦x+y≦0.10, a product having desired electrical characteristics can be obtained.
但し、x+y≦0.10であっても、y≦0.05が好
ましい。x+y≦0.10を満足していても、yの値が
0.05を越えると、静電容量の温度変化第八Cssが
一10%〜+lO%から外れてしまうからである。However, even if x+y≦0.10, y≦0.05 is preferable. This is because even if x+y≦0.10 is satisfied, if the value of y exceeds 0.05, the capacitance temperature change 8th Css will deviate from 110% to +10%.
なお、M成分のMgとZn及びL成分のCaとSrはは
f同様に働き2O<x<0.10を満足する範囲でMg
とZnのうちの一方または両方を使用すること、またO
<y≦0.05を満足する範囲でCaとSrのうちの一
方または両方を使用することができる。In addition, Mg and Zn of the M component and Ca and Sr of the L component work in the same way as f, and Mg and Zn in the range satisfying 2O<x<0.10.
and Zn or both;
One or both of Ca and Sr can be used within a range that satisfies <y≦0.05.
また、Zの(直は、0.002≦z≦0.06の範囲が
好ましい。Zの値が0.002未満では静電容量の温度
変化率ΔC−□が一15%〜+15%から外れ、ΔC−
asが一10%〜+10%から外れてしまい、Zの値が
0.06を越えると緻密な焼結体が得られなくなってし
まうが、0.002≦z≦0.06の範囲では、所望の
電気的特性を有する緻密な焼結体が得られるからである
。In addition, the value of Z is preferably in the range of 0.002≦z≦0.06. If the value of Z is less than 0.002, the temperature change rate of capacitance ΔC-□ will deviate from -15% to +15%. , ΔC-
If as deviates from -10% to +10% and the value of Z exceeds 0.06, a dense sintered body cannot be obtained, but in the range of 0.002≦z≦0.06, the desired This is because a dense sintered body having the following electrical properties can be obtained.
なお、R成分のSc、Y、Gd、Dy、Ho。Note that the R components Sc, Y, Gd, Dy, and Ho.
Er及びYbははS同様に働き、これらから選択された
1つを使用しても、または複数を組み合わせて使用して
も同様な効果が得られるものである。従って、2の値は
、R成分が1種または複数種のいずれの場合においても
0.002≦z≦0.06の範囲にすることが望ましい
。Er and Yb work in the same way as S, and the same effect can be obtained even if one selected from them is used or a plurality of them are used in combination. Therefore, the value of 2 is desirably within the range of 0.002≦z≦0.06, regardless of whether there is one type of R component or multiple types of R components.
また、R成分は、静電容量の温度特性の改善に寄与する
ものである。すなわち、R成分の添加によって一55℃
〜125℃の範囲での静電容量の温度変化率△C−1s
〜八Cl28を一15%〜+15%の範囲に容易に収め
ることが可能になると共に一25℃〜85℃の範囲での
静電容量の温度変化率ΔC−25〜ΔC65を一10%
〜+10%の範囲に容易に収めることが可能になり、か
つ各温度範囲における静電容量の温度変化率の変動幅を
小さくすることができるものである。Furthermore, the R component contributes to improving the temperature characteristics of capacitance. That is, by adding the R component, the temperature
Temperature change rate of capacitance △C-1s in the range of ~125℃
~8Cl28 can be easily kept in the range of -15% to +15%, and the temperature change rate of capacitance ΔC-25 to ΔC65 in the range of -25°C to 85°C can be reduced to -10%.
This makes it possible to easily keep the capacitance within the range of ~+10%, and to reduce the fluctuation range of the temperature change rate of capacitance in each temperature range.
また、R成分は抵抗率ρを大きくする作用及び焼結性を
高める作用を有するものである。Moreover, the R component has the effect of increasing the resistivity ρ and the effect of increasing the sinterability.
なお、基本成分を示す前記組成式中において、X+ y
+ Zr kはもちろんそれぞれの元素の原子数を示し
ている。In addition, in the above composition formula showing the basic components, X+ y
+ Zr k of course indicates the number of atoms of each element.
また、基本成分の中に、本発明の目的を阻害しない範囲
で微量のM n Oz (好ましくは0.05〜0.
1重量%)等の鉱化剤を添加し、焼結性を向上させても
よい。また、その他の物質を必要に応じて添加してもよ
い。In addition, a trace amount of MnOz (preferably 0.05 to 0.000.
A mineralizing agent such as 1% by weight) may be added to improve sinterability. Further, other substances may be added as necessary.
また、基本成分を得るための出発原料を、実施例で示し
たもの以外の例えばB ao、 S r O。In addition, starting materials for obtaining the basic components may be other than those shown in Examples, such as Bao, SrO.
CaO等の酸化物または水酸化物またはその他の化合物
としてもよい。It may also be an oxide or hydroxide such as CaO or other compounds.
次に、添加成分1の添加量は、100重量部の基本成分
に対し、0.01〜3重量部の範囲が好ましい、添加成
分1の添加量が、100重量部の基本成分に対し、0.
01未満の場合は、静電容量の温度変化率△c 41i
が一15%〜+15%の範囲から外れ、3.0重量部を
越えた場合は1250℃で焼成しても緻密な焼結体が得
られないが、添加成分1が0.01〜3重量部の範囲に
ある場合は所望の特性の焼結体を得ることができるから
である。Next, the amount of additive component 1 added is preferably in the range of 0.01 to 3 parts by weight per 100 parts by weight of the basic component. ..
If it is less than 01, the temperature change rate of capacitance Δc 41i
If it is outside the range of -15% to +15% and exceeds 3.0 parts by weight, a dense sintered body cannot be obtained even if fired at 1250°C, but if the additive component 1 is 0.01 to 3 parts by weight This is because a sintered body having desired characteristics can be obtained when the amount is within the range of .
なお、添加成分lのCr * OsとA1.O,とはは
S同様に働き、これ等から選択された1つを使用しても
、又は複数を使用しても同様な結果が得られる。そして
、添加成分1が1種又は複数種の何れの場合に於ても、
添加量は0.O1〜3.0の範囲にすることが望ましい
。Note that Cr*Os of the additive component l and A1. O, works in the same way as S, and the same result can be obtained even if one selected from them or a plurality of them are used. And, regardless of whether the additive component 1 is one type or multiple types,
The amount added is 0. It is desirable to set it in the range of O1 to 3.0.
なお、この添加成分工は、静電容量の温度特性の改善に
寄与する。即ち、添加成分1の添加によって静電容量の
温度変化率△C−55〜ΔC1□。Note that this additive component technique contributes to improving the temperature characteristics of capacitance. That is, the temperature change rate of capacitance due to addition of additive component 1 is ΔC-55 to ΔC1□.
を−15%〜+15%の範囲に収めることが可能になる
と共に、静電容量の温度変化率ΔC−2,〜ΔCasを
一10%〜+10%の範囲に容易に収めることが可能に
なり、且つ各温度範囲における静電容量の温度変化率の
変動幅を小さくすることができる。また、添加成分1は
抵抗率pを太き(する作用を若干有する。It becomes possible to keep the capacitance temperature change rate ΔC-2, to ΔCas within the range of -15% to +15%, and it becomes possible to easily keep the capacitance temperature change rate ΔC-2, ~ΔCas within the range of -10% to +10%. In addition, the fluctuation width of the temperature change rate of capacitance in each temperature range can be reduced. Further, the additive component 1 has the effect of slightly increasing the resistivity p.
次に、添加成分2の添加量は、100重量部の基本成分
に対し、0.2〜5重量部の範囲が好ましい。添加成分
2の添加量がCl 2重量部未満の場合には、焼成温度
が1250℃であっても緻密な焼結体が得られず、また
、添加成分2の添加量が5重量部を越えると、比誘電率
ε、が3000未満となり、しかも静電容量の温度変化
第八C−5sが一15%〜+15%から外れるが、添加
成分2が0.2〜5重量部の範囲にある場合は、所望の
電気的特性のものが得られるからである。Next, the amount of additive component 2 added is preferably in the range of 0.2 to 5 parts by weight per 100 parts by weight of the basic component. If the amount of additive component 2 added is less than 2 parts by weight of Cl, a dense sintered body cannot be obtained even if the firing temperature is 1250°C, and the amount of additive component 2 exceeds 5 parts by weight. , the relative permittivity ε is less than 3000, and the capacitance temperature change No. 8 C-5s is outside of -15% to +15%, but the additive component 2 is in the range of 0.2 to 5 parts by weight. This is because, in this case, desired electrical characteristics can be obtained.
添加成分2の組成は、L i t OS i OzMO
の組成比をモル%で示す三角図の第1〜5の点A−Eを
この順に結ぶ5本の直線で囲まれた領域内が好ましい。The composition of additive component 2 is L it OS i OzMO
Preferably, the area is within the area surrounded by five straight lines connecting points 1 to 5 in this order of the triangular diagram showing the composition ratio in mol%.
添加成分2の組成をこの領域外とすれば、緻密な焼結体
を得ることができないが、この領域内の組成とすれば、
所望の電気的特性の焼結体を得ることができるからであ
る。If the composition of additive component 2 is outside this range, a dense sintered body cannot be obtained, but if the composition is within this range,
This is because a sintered body with desired electrical characteristics can be obtained.
なお、添加成分2の出発原料は酸化物、水酸化物等の他
の化合物としてもよい。Note that the starting material for additive component 2 may be other compounds such as oxides and hydroxides.
次に、本発明に係る磁器コンデンサの製造方法は、上記
の基本成分と添加成分lと添加成分2とからなる未焼結
の磁器粉末の混合物を調製する工程と、前記混合物から
なる未焼結磁器シートを形成する工程と、前記未焼結磁
器シートを少なくとも2以上の導電性ペースト膜で挟持
させた積層物を形成する工程と、前記積層物を非酸化性
雰囲気中において焼成する工程と、前記焼成を受けた積
層物を酸化性雰囲気中において熱処理する工程とを備え
たものである。Next, the method for manufacturing a porcelain capacitor according to the present invention includes the steps of preparing a mixture of unsintered porcelain powder consisting of the above-mentioned basic components, additive component 1, and additive component 2; a step of forming a porcelain sheet; a step of forming a laminate in which the unsintered porcelain sheet is sandwiched between at least two conductive paste films; and a step of firing the laminate in a non-oxidizing atmosphere; and a step of heat-treating the fired laminate in an oxidizing atmosphere.
ここで、非酸化性雰囲気中の焼成温度は、電極材料を考
慮して種々変えることができる。Here, the firing temperature in the non-oxidizing atmosphere can be varied depending on the electrode material.
ニッケルを内部電極とする場合には、1050’C〜1
200℃の範囲でニッケル粒子の凝集がほとんど生じな
い。When using nickel as the internal electrode, 1050'C~1
Almost no aggregation of nickel particles occurs in the 200°C range.
また、非酸化性雰囲気は、N2やcoなどの還元性雰囲
気のみならず、N2やArなどの中性雰囲気であっても
よい。Further, the non-oxidizing atmosphere may be not only a reducing atmosphere such as N2 or co, but also a neutral atmosphere such as N2 or Ar.
また、酸化性雰囲気中における熱処理の温度は、ニッケ
ル等の電極材料と磁器の酸化とを考慮して種々変更する
ことが可能である。Furthermore, the temperature of the heat treatment in the oxidizing atmosphere can be varied in consideration of the electrode material such as nickel and the oxidation of the ceramic.
この熱処理の温度は、実施例では600’Cとしたが、
これに限定されるものではなく、焼結温度よりも低い温
度であればよ(、好ましくは500℃〜1000℃の範
囲がよい。The temperature of this heat treatment was 600'C in the example, but
The temperature is not limited to this, and the temperature may be lower than the sintering temperature (preferably in the range of 500°C to 1000°C).
なお1本発明は積層磁器コンデンサ以外の一般的な単層
の磁器コンデンサにも勿論適用可能である。Note that the present invention is of course applicable to general single-layer ceramic capacitors other than multilayer ceramic capacitors.
[実施例]
まず、第1表のNo、1の試料の調製方法とその電気的
特性について説明する。[Example] First, the preparation method of sample No. 1 in Table 1 and its electrical characteristics will be explained.
基邊ヨ叱分jす」刃 配合1の化合物を各々秤量し、 これらを15時 間部式混合して原料混合物を得た。Motobe yo scolding blade Weigh each compound of Formulation 1, these at 3pm A raw material mixture was obtained by intermittent mixing.
ここで、 配合1の化合物の重量 (g) とモル部 は、 基本成分の一般式 %式% (11 となるように計算して求めた値である。here, Weight of compound of formulation 1 (g) and mole part teeth, General formula of basic components %formula% (11 This is the value calculated so that.
次に。next.
この原料混合物を1
50℃で4時間乾燥
後、粉砕し、大気中において約1200℃の温度で2時
間仮焼し、基本成分の粉末を得た。This raw material mixture was dried at 150° C. for 4 hours, pulverized, and calcined in the air at a temperature of about 1200° C. for 2 hours to obtain a powder of the basic component.
添口成 2の調′
また、配合2の化合物を各々秤量して混合し、この混合
物にアルコールを300cc加え、ポリエチレンポット
にてアルミナボールを用いて10時間撹拌した後、大気
中において1000℃の温度で2時間仮焼成した。Preparation of Addition Formation 2' Also, the compounds of Formulation 2 were each weighed and mixed, 300 cc of alcohol was added to this mixture, and after stirring for 10 hours using an alumina ball in a polyethylene pot, the mixture was heated to 1000°C in the atmosphere. Temporary firing was carried out at the same temperature for 2 hours.
ここで、配合2の化合物の重量(g)とモル部は、L
i z Oが1モル%、SiO□が80モル%、MOが
19モル%(BaO(3,8モル%)+CaO(3,8
モル%)+SrO(3,8モル%)+MgO(3,8モ
ル%)+ZnO(3,8モル%))の組成になるように
計算して求めた値である。Here, the weight (g) and molar parts of the compound of formulation 2 are L
i z O is 1 mol%, SiO□ is 80 mol%, MO is 19 mol% (BaO (3,8 mol%) + CaO (3,8 mol%)
This value was calculated so that the composition would be (mol%) + SrO (3.8 mol%) + MgO (3.8 mol%) + ZnO (3.8 mol%)).
次に、この仮焼によって得られたものを300ccの水
とともにアルミナポットに入れ、アルミナボールで15
時間粉砕し、しかる後に150℃で4時間乾燥させて、
添加成分2の粉末を得た。Next, the material obtained by this calcining was placed in an alumina pot with 300 cc of water, and an alumina ball was used to
Grind for hours, then dry at 150°C for 4 hours,
A powder of additive component 2 was obtained.
尚、MOの内容であるBaO、Cab。Incidentally, the contents of MO are BaO and Cab.
SrO,MgO及びZnOの割合は、第1表に示すよう
に、いずれも20モル%となる。As shown in Table 1, the proportions of SrO, MgO and ZnO are all 20 mol%.
L1ユニ立11
次に、100重量部(1000g)の前記基本成分に対
し、2重量部(20g)の前記添加成分2を添加し、更
に、平均粒径が0.5μmでよく粒の揃った純度99.
0%以上のCr2O*を添加成分工として0.1重量f
fi(Ig)添加し、更に、アクリル酸エステルポリマ
ー、グリセリン、縮合リン酸塩の水溶液からなる有機バ
インダーを、基本成分と添加成分1,2の合計重量に対
して15重量%添加し、更に、50重量%の水を加え、
これらをボールミルに入れて、粉砕及び混合して磁器原
料のスラリーを調製した。L1 Unit Stand 11 Next, 2 parts by weight (20 g) of the additive component 2 was added to 100 parts by weight (1000 g) of the basic component, and further, the particles were well-aligned with an average particle size of 0.5 μm. Purity 99.
0.1 weight f as an additive component with 0% or more Cr2O*
fi (Ig) was added, and further, an organic binder consisting of an aqueous solution of acrylic ester polymer, glycerin, and condensed phosphate was added in an amount of 15% by weight based on the total weight of the basic component and additive components 1 and 2, and further, Add 50% water by weight,
These were placed in a ball mill, pulverized and mixed to prepare a slurry of porcelain raw materials.
未 磁°シートのそ成
次に、上記スラリーを真空脱泡機に入れて脱泡し、この
スラリーをリバースロールコータに入れ、ここから得ら
れる薄膜成形物を長尺なポリエステルフィルム上に連続
して受は取ると共に、同フィルム上でこれを100℃に
加熱して乾燥させ、厚さ約25μmの未焼結磁器シート
を得た。After forming the unmagnetized sheet, the slurry is placed in a vacuum defoaming machine to be defoamed, this slurry is placed in a reverse roll coater, and the thin film molding obtained from this is continuously coated on a long polyester film. The receiver was removed and dried on the same film by heating at 100° C. to obtain an unsintered porcelain sheet with a thickness of about 25 μm.
このシートは長尺なものであるが、これを10cm角の
正方形に裁断して使用する。This sheet is long and is used by cutting it into 10 cm squares.
導電 ペーストの び 刷
一方、内部電極用の導電性ペーストは、粒径平均1.5
μmのニッケル粉末10gと、エチルセルロース0.9
gをブチルカルピトール9.1gに溶解させたものとを
撹拌機に入れ、10時間撹拌することにより得た。そし
て、この導電性ペーストを長さ14mm、幅7mmのパ
ターンを50個有するスクリーンを介して上記未焼結磁
器シートの片側に印刷した後、これを乾燥させた。On the other hand, the conductive paste for internal electrodes has an average particle size of 1.5
10g of μm nickel powder and 0.9g of ethyl cellulose
g dissolved in 9.1 g of butylcarpitol were placed in a stirrer and stirred for 10 hours. Then, this conductive paste was printed on one side of the unsintered porcelain sheet through a screen having 50 patterns of 14 mm in length and 7 mm in width, and then dried.
磁°シートの 層
次に、上記印刷面を上にして未焼結磁器シートを2枚積
層した。この際、隣接する上下のシートにおいて、その
印刷面がパターンの長平方向に約半分程ずれるように配
置した。更に、この積層物の上下両面にそれぞれ4枚ず
つ厚さ60μmの未焼結磁器シートを積層した。Layers of Magnetic Sheets Next, two unsintered porcelain sheets were laminated with the printed side facing up. At this time, the adjacent upper and lower sheets were arranged so that their printed surfaces were shifted by about half in the longitudinal direction of the pattern. Further, four unsintered porcelain sheets each having a thickness of 60 μm were laminated on the upper and lower surfaces of this laminate.
物の と断
次いで、この積層物を約50℃の温度で厚さ方向に約4
0トンの荷重を加えて圧着させた。This laminate is then heated at a temperature of about 50°C in the thickness direction for about 40 minutes.
A load of 0 tons was applied to bond the parts.
しかる後、この積層物を格子状に裁断し、50個の積層
体チップを得た。Thereafter, this laminate was cut into a grid shape to obtain 50 laminate chips.
チップの
次に、この積層体チップを雰囲気焼成が可能な炉に入れ
1.大気雰囲気中において100℃/hの速度で600
℃まで昇温して、有機バインダを燃焼させた。Next to the chip, this stacked chip is placed in a furnace capable of atmosphere firing.1. 600 at a rate of 100°C/h in an air atmosphere
The organic binder was burned by increasing the temperature to ℃.
しかる後、炉の雰囲気を大気からH2(2体積%)+N
、(98体積%)の還元性雰囲気に変えた。そして、炉
をこの還元性雰囲気とした状態を保って、積層体チップ
の加熱温度を600℃から焼結温度の1150℃まで、
100℃/hの速度で昇温して1150℃(最高温度)
を3時間保持した後、100℃/hの速度で600℃ま
で降温し、雰囲気を大気雰囲気(酸化性雰囲気)におき
かえて、600℃を30分間保持して酸化処理を行い、
その後、室温まで冷却して積層焼結体チップを得た。After that, the atmosphere of the furnace was changed from the atmosphere to H2 (2% by volume) + N.
, (98% by volume). Then, while maintaining the furnace in this reducing atmosphere, the heating temperature of the stacked chips was increased from 600°C to the sintering temperature of 1150°C.
Raise the temperature at a rate of 100°C/h to 1150°C (maximum temperature)
After holding for 3 hours, the temperature was lowered to 600°C at a rate of 100°C/h, the atmosphere was changed to an air atmosphere (oxidizing atmosphere), and 600°C was held for 30 minutes to perform oxidation treatment.
Thereafter, it was cooled to room temperature to obtain a laminated sintered body chip.
外」屡【極1す刻成
次に、電極が露出する積層焼結体チップの側面に亜鉛と
ガラスフリット(glass frit)とビヒクル(
vehicle )とからなる導電性ペーストを塗布し
て乾燥し、これを大気中で550℃の温度で15分間焼
付け、亜鉛電極層を形成し、更にこの上に無電解メツキ
法で銅層を形成し、更にこの上に電気メツキ法でPb−
3n半田層を設けて、一対の外部電極を形成した。Next, zinc, glass frit, and vehicle (
A conductive paste consisting of a vehicle) was applied and dried, and this was baked in the air at a temperature of 550°C for 15 minutes to form a zinc electrode layer, and then a copper layer was further formed on this using an electroless plating method. , and then on top of this, Pb-
A 3N solder layer was provided to form a pair of external electrodes.
これにより、第1図に示すように、3層の誘電体磁器層
12と2層の内部電極14とから成る積層焼結体チップ
15に一対の外部電極16を形成した積層磁器コンデン
サ10が得られた。As a result, as shown in FIG. 1, a multilayer ceramic capacitor 10 is obtained in which a pair of external electrodes 16 are formed on a multilayer sintered chip 15 consisting of three dielectric ceramic layers 12 and two internal electrodes 14. It was done.
ここで、外部電極16は、亜鉛電極層18と、この亜鉛
電極層18の上に形成された銅層20と、この銅層20
の上に形成されたPb−3n半田層22とからなる。Here, the external electrode 16 includes a zinc electrode layer 18, a copper layer 20 formed on the zinc electrode layer 18, and a copper layer 20 formed on the zinc electrode layer 18.
and a Pb-3n solder layer 22 formed on top of the Pb-3n solder layer 22.
なお、この積層磁器コンデンサ10の誘電体磁器層12
の厚さは0.02mm、一対の内部電極14の対向面積
は5mmx5mm=25mm”である、また、焼結後の
誘電体磁器層12の組成は、焼結前の基本成分及び添加
成分の混合組成と実質的に同じである。Note that the dielectric ceramic layer 12 of this multilayer ceramic capacitor 10
The thickness of the dielectric ceramic layer 12 is 0.02 mm, and the opposing area of the pair of internal electrodes 14 is 5 mm x 5 mm = 25 mm.The composition of the dielectric ceramic layer 12 after sintering is a mixture of the basic components and additive components before sintering. The composition is substantially the same.
・、 の1
次に、積層磁器コンデンサ10の電気的特性を測定し、
その平均値を求めたところ、第2表に示すように、比誘
電率ε1が3710、tanδが1.2%、抵抗率ρが
4.8xlO’MΩ’cm 。・, 1 Next, the electrical characteristics of the multilayer ceramic capacitor 10 are measured,
When the average values were calculated, as shown in Table 2, the dielectric constant ε1 was 3710, tan δ was 1.2%, and resistivity ρ was 4.8xlO'MΩ'cm.
25℃の静電容量を基準にした一55℃及び+125℃
の静電容量の変化第八し、SへC1,sが−10,9%
、+5.8%、20℃の静電容量を基準にした一25℃
、+85℃の静電容量の変化率ΔC−0.八Cssが−
6,1%。-55℃ and +125℃ based on capacitance at 25℃
8th change in capacitance of C1,s to S is -10,9%
, +5.8%, -25°C based on capacitance at 20°C
, rate of change in capacitance at +85°C ΔC-0. Eight Css-
6.1%.
−4,5%であった。-4.5%.
なお、電気的特性は次の要領で測定した。Note that the electrical characteristics were measured in the following manner.
IAI比誘電率ε1は、温度20℃、周波数1kHz、
電圧(実効値)1.OVの条件で静電容量を測定し、こ
の測定値と、一対の内部電極14の対向面積25 m
m ”と、一対の内部電極14間の誘電体磁器層12の
厚さ0.02mmから計算で求めた。The IAI dielectric constant ε1 is at a temperature of 20°C, a frequency of 1kHz,
Voltage (effective value) 1. The capacitance was measured under OV conditions, and the measured value and the opposing area of the pair of internal electrodes 14, 25 m
m'' and the thickness of the dielectric ceramic layer 12 between the pair of internal electrodes 14 of 0.02 mm.
(Bl誘電体損失tanδ(%)は上記比誘電率の測定
と同一条件で測定した。(Bl dielectric loss tan δ (%) was measured under the same conditions as the above measurement of relative dielectric constant.
(C1抵抗率p (MO・cm)は、温度20’Cにお
いてDClooVを1分間印加した後に一対の外部電極
16間の抵抗値を測定し、この測定値と寸法とに基づい
て計算で求めた。(C1 resistivity p (MO cm) was calculated by measuring the resistance value between a pair of external electrodes 16 after applying DClooV for 1 minute at a temperature of 20'C and based on this measurement value and dimensions. .
(D)静電容量の温度特性は、恒温槽の中に試料を入れ
、−55℃、−25℃、0℃、+20’C。(D) Temperature characteristics of capacitance: -55°C, -25°C, 0°C, +20'C by placing the sample in a constant temperature bath.
+25℃、+40℃、+60℃、+85℃。+25℃, +40℃, +60℃, +85℃.
+105℃、+125℃の各温度において、周波数1
kHz、電圧(実効値)1.OVの条件で静電容量を測
定し、20℃及び25℃の時の静電容量に対する各温度
における変化率を求めることによって得た。Frequency 1 at each temperature of +105℃ and +125℃
kHz, voltage (effective value) 1. The capacitance was measured under OV conditions, and the rate of change at each temperature with respect to the capacitance at 20°C and 25°C was obtained.
以上、No、1の試料の作成方法及びその特性について
述べたが、試料No、2〜105についても、基本成分
及び添加成分1.2の組成、これ等の割合、及び還元性
雰囲気中における焼成温度を第1表及び第2表に示すよ
うに変化させた他は、No、lの試料と全く同一の方法
で積層磁器コンデンサを作成し、同一の方法で電気的特
性を測定した。The preparation method of sample No. 1 and its characteristics have been described above, but for sample No. 2 to 105, the composition of the basic component and additive component 1.2, their ratio, and firing in a reducing atmosphere are also explained. Except for changing the temperature as shown in Tables 1 and 2, multilayer ceramic capacitors were prepared in exactly the same manner as for samples No. 1 and their electrical characteristics were measured in the same manner.
第1表は、各々の試料の基本成分と添加成分1.2の組
成を示し、第2表は各々の試料の焼成温度及び電気的特
性を示す。Table 1 shows the composition of the basic components and additive components 1.2 of each sample, and Table 2 shows the firing temperature and electrical characteristics of each sample.
なお、第1表の基本成分の欄のx、y、z、には、前述
した基本成分の組成式(1)の各元素の原子数、すなわ
ち(Ti+R)の原子数を1とした場合の各元素の原子
数の割合を示す。Note that x, y, and z in the basic component column of Table 1 are the number of atoms of each element in the basic component composition formula (1) described above, that is, when the number of atoms of (Ti + R) is 1. Shows the ratio of the number of atoms of each element.
また、Xの欄のMg、Znは、前述した基本成分の組成
式(1)のMの内容を示し、yの欄のCa + S r
は、基本成分の組成式(1)のしの内容を示し、Zの欄
のSc、Y、Gd、Dy。Furthermore, Mg and Zn in the X column indicate the contents of M in the basic component composition formula (1) described above, and Ca + S r in the y column.
indicates the contents of the basic component composition formula (1), and Sc, Y, Gd, Dy in the Z column.
Ho、Er及びYbは、前述した基本成分の組成式(1
)のRの内容を示している。Ho, Er, and Yb are represented by the above-mentioned basic component composition formula (1
) shows the contents of R.
これらの欄にはこれらの原子数が示され、また合計の欄
にはMg、Zn、Ca、Srの合計値(x+y)が示さ
れている。These columns show the number of these atoms, and the total column shows the total value (x+y) of Mg, Zn, Ca, and Sr.
添加成分1,2の添加量は基本成分100重量部に対す
る重量部で示されている。添加成分2のMOの内容の欄
にはBaO、MgO,ZnO。The amounts of additive components 1 and 2 are shown in parts by weight based on 100 parts by weight of the basic component. The MO content column for additive component 2 contains BaO, MgO, and ZnO.
SrO及びCaOの割合がモル%で示されている。The proportions of SrO and CaO are shown in mol%.
第2表において、静電容量の温度特性は、25℃の静電
容量を基準にした一55℃及び+125℃の静電容量変
化率がΔC−**C%)及びΔC1□ (%)で、20
℃の静電容量を基準にした一25℃及び+85℃の静電
容量変化率がΔC−1s及びΔC1l@で示されている
。In Table 2, the temperature characteristics of capacitance are as follows: The capacitance change rate at -55℃ and +125℃ based on the capacitance at 25℃ is ΔC-**C%) and ΔC1□ (%). , 20
The capacitance change rates at -25°C and +85°C based on the capacitance at °C are shown as ΔC-1s and ΔC1l@.
第2表(1)
X磁力9寸された試料はfi例1
第2表(2)
X印が付された試料は比較例
第2表(3)
X印が付された試料は上]4列
第2表(4)
X印が付されt鰭
第2表(5)
X磁力9寸された試料はltJ!J+
INI表及び第2表から明らかなように、本発明に従う
試料では、非酸化性雰囲気中において、1200℃以下
の焼成で、比誘電率ε、が3000以上、tanδが2
,5%以下、抵抗率ρが1X10@MΩ・cm以上、静
電容量の温度変化率ΔC−55及びΔC125が一15
%〜+15%、ΔC−2,及びΔCasが一10%〜+
10%の範囲となり、所望特性の磁器コンデンサを得る
ことが出来るものである。Table 2 (1) Samples with X magnetic force 9 dimensions are fi example 1 Table 2 (2) Samples marked with an X are comparative examples Table 2 (3) Samples marked with an X are above] 4 Column Table 2 (4) Samples marked with an X and t fin Table 2 (5) X magnetic force 9 dimensions are ltJ! As is clear from the J+ INI Table and Table 2, the samples according to the present invention have a dielectric constant ε of 3000 or more and a tan δ of 2 when fired at 1200°C or lower in a non-oxidizing atmosphere.
, 5% or less, resistivity ρ is 1X10@MΩ・cm or more, temperature change rate of capacitance ΔC-55 and ΔC125 is 115
% ~ +15%, ΔC-2, and ΔCas -10% ~ +
10%, which makes it possible to obtain a ceramic capacitor with desired characteristics.
一方、試料No、11〜16.26.31゜32.40
〜44,50,54,55,60゜61.67.68.
74.85〜87.96〜98.104,105では本
発明の目的を達成することができない。従って、これ等
は本発明の範囲外のものである。On the other hand, sample No. 11-16.26.31°32.40
~44,50,54,55,60°61.67.68.
74.85-87.96-98.104,105 cannot achieve the object of the present invention. Therefore, these are outside the scope of the present invention.
第2表には静電容量の温度変化率ΔC−5s+ΔC+t
s+ ΔC−21+ △C0のみが示されているが、本
発明の範囲に属する試料の一25℃〜+85℃の範囲の
種々の静電容量の温度変化率ΔCは、−10%〜+10
%の範囲に収まり、また、−55℃〜+125℃の範囲
の種々の静電容量の変化率ΔCは、−15%〜+15%
の範囲に収まっている。Table 2 shows the temperature change rate of capacitance ΔC-5s+ΔC+t
Although only s+ ΔC-21+ ΔC0 is shown, the temperature change rate ΔC of various capacitances in the range of 25°C to +85°C is -10% to +10% for samples belonging to the scope of the present invention.
%, and the rate of change of various capacitances ΔC in the range of -55°C to +125°C is -15% to +15%.
is within the range.
次に、本発明の誘電体磁器組成物の組成範囲の限定理由
について述べる。Next, the reasons for limiting the composition range of the dielectric ceramic composition of the present invention will be described.
まず、x+yの値が、試料No、32に示すように、零
の場合には、静電容量の温度変化率ΔC−5sが一15
%〜+15%の範囲外となるが、試料No、33〜35
に示すように、X+yの値が0,01の場合には、所望
の電気的特性が得られる。従って、x+yの下限は0.
01である。First, when the value of x+y is zero as shown in sample No. 32, the temperature change rate of capacitance ΔC-5s is -15
Although it is outside the range of % to +15%, sample No. 33 to 35
As shown in the figure, when the value of X+y is 0.01, desired electrical characteristics can be obtained. Therefore, the lower limit of x+y is 0.
It is 01.
一方、試料No、41〜43に示すように、X+3’の
値が0.12の場合には、静電容量の温度変化率ΔCa
sが一10%〜+io%の範囲外となるが、試料No、
39.49に示すように、x+yの値が0.10の場合
には、所望の電気的特性を得ることができる。On the other hand, as shown in sample Nos. 41 to 43, when the value of X+3' is 0.12, the capacitance temperature change rate ΔCa
Although s is outside the range of -10% to +io%, sample No.
As shown in 39.49, when the value of x+y is 0.10, desired electrical characteristics can be obtained.
但し、試料No、40.44に示すように、x+yの値
が0.10であっても、yの値が0.05を越えてしま
う場合には、ΔCssが−Ic)〜+10%の範囲外と
なるので、X+3/の上限値は0.10であるが、同時
にyの上限値は0.05としなければならない。However, as shown in sample No. 40.44, even if the value of x+y is 0.10, if the value of y exceeds 0.05, ΔCss will be in the range of -Ic) to +10%. Therefore, the upper limit of X+3/ is 0.10, but at the same time the upper limit of y must be 0.05.
なお、M成分のMgとZn及びL成分のCaとSrはは
f同様に働き2O<x<0.10を満足する範囲でMg
とZnのうちの一方または両方を使用すること、またo
<y≦0.05を満足する範囲でCaとSrのうちの一
方または両方を使用することができる。そして、M成分
及びL成分の1種または複数種のいずれの場合において
もX+yの値を0.01〜0.10の範囲にすることが
望ましい。In addition, Mg and Zn of the M component and Ca and Sr of the L component work in the same way as f, and Mg and Zn in the range satisfying 2O<x<0.10.
and Zn or both, and o
One or both of Ca and Sr can be used within a range that satisfies <y≦0.05. It is desirable that the value of X+y be in the range of 0.01 to 0.10 in either case of one or more of the M component and the L component.
kの値が、試料No、50に示すように、0.98の場
合には、ρが1X10”MΩ’cm未満と大幅に低(な
り、静電容量の温度変化率ΔC−5s+ △c−2Bも
それぞれ一15%、−10%より大幅に悪化してしまう
が、試料No、51に示すように、kの値が1.00の
場合には、所望の電気的特性が得られる。従って、kの
値の下限は1.00である。When the value of k is 0.98 as shown in sample No. 50, ρ is significantly low (less than 1×10"MΩ'cm), and the temperature change rate of capacitance is ΔC-5s+ Δc- 2B is also significantly worse than -15% and -10%, respectively, but as shown in sample No. 51, when the value of k is 1.00, the desired electrical characteristics can be obtained. , k has a lower limit of 1.00.
一方、kの値が、試料No、54に示すように、1.0
7の場合には緻密な焼結体が得られないが、試料No、
53に示すように、kの値が1.05の場合には、所望
の電気的特性が得られる。従ってkの値の上限は1.0
5である。On the other hand, the value of k is 1.0 as shown in sample No. 54.
In the case of sample No. 7, a dense sintered body cannot be obtained, but in the case of sample No.
As shown in 53, when the value of k is 1.05, desired electrical characteristics can be obtained. Therefore, the upper limit of the value of k is 1.0
It is 5.
2の値が2試料No、55.61.68に示すように2
Oの場合には静電容量の温度変化率△C−1s、ΔC−
aSがそれぞれ一15%、−10%以内を満たしていな
いが、試料No、56゜62.69に示すように2の値
が0.002の場合には、所望の電気的特性が得られる
。従ってZの下限は0.002である。The value of 2 is 2 sample No. 2 as shown in 55.61.68.
In the case of O, the temperature change rate of capacitance △C-1s, ΔC-
Although aS is not within -15% and -10%, respectively, when the value of 2 is 0.002 as shown in sample No. 56°62.69, desired electrical characteristics can be obtained. Therefore, the lower limit of Z is 0.002.
一方、Zの値が試料No、60.67.74゜85.8
6に示すように、0.07の場合には1250℃で焼成
しても緻密な焼結体が得られないが、試料No、59.
66.73,83゜84に示すように0.06の場合に
は所望の電気的特性を得ることができる。従って、Zの
値の上限は0.06である。On the other hand, the value of Z is sample No. 60.67.74°85.8
As shown in Sample No. 6, when the temperature is 0.07, a dense sintered body cannot be obtained even if fired at 1250°C.
As shown in 66.73, 83.84, when the value is 0.06, desired electrical characteristics can be obtained. Therefore, the upper limit of the value of Z is 0.06.
向、R成分のSc、Y、Gd、Dy、Ho。Direction, R component Sc, Y, Gd, Dy, Ho.
Er及びYbははf同様に働き、これらから選択された
1つを使用しても、または複数を組み合わせて使用して
も同様な結果が得られる。Er and Yb work in the same way as f, and the same result can be obtained even if one selected from them is used or a plurality of them are used in combination.
そして、R成分が1種または複数種のいずれの場合にお
いてもZの値を0.002〜0.06の範囲にすること
が望ましい。In any case where there is one type of R component or multiple types of R components, it is desirable that the value of Z is in the range of 0.002 to 0.06.
尚、組成式でRで示される成分は、静電容量の温度特性
の改善に寄与するものである。すなわち、R成分の添加
によって一55℃〜125℃の範囲での静電容量の温度
変化率△C−5,〜ΔC128を一15%〜+15%の
範囲に容易に収めることが可能になると共に一25℃〜
85℃の範囲での静電容量の温度変化率ΔC−0〜ΔC
115を一10%〜+lO%の範囲に容易に収めること
が可能になり、かつ各温度範囲における静電容量の温度
変化率の変動幅を小さくすることができる。Note that the component represented by R in the compositional formula contributes to improving the temperature characteristics of capacitance. That is, by adding the R component, it becomes possible to easily keep the temperature change rate of capacitance ΔC-5, ~ΔC128 in the range of -55°C to 125°C within the range of -15% to +15%. -25℃~
Temperature change rate of capacitance ΔC-0 to ΔC in the range of 85℃
115 can be easily kept within the range of -10% to +lO%, and the fluctuation width of the temperature change rate of capacitance in each temperature range can be reduced.
また、R成分は抵抗率ρを大きくする作用及び焼結性を
高める作用を有するものである。Moreover, the R component has the effect of increasing the resistivity ρ and the effect of increasing the sinterability.
添加成分1であるCr2O3及び/又はA1..03(
7)添力n量が試料N o 、 87 、98 ニ示す
ように零の場合は、ΔC−5,が一15%以下となるが
、試料No、88.89,99,100に示すように添
加量が100重量部の基本成分に対して0.01重量部
の場合には所望の特性を得ることができる。従って、添
加成分1の下限は0.01である。Cr2O3 which is additive component 1 and/or A1. .. 03(
7) When the amount of force n is zero as shown in samples No. 87 and 98, ΔC-5 is less than 115%, but as shown in sample No. 88.89, 99.100. When the amount added is 0.01 part by weight per 100 parts by weight of the basic component, desired characteristics can be obtained. Therefore, the lower limit of additive component 1 is 0.01.
一方、試料No、96.97,104,105に示すよ
うに、添加成分1の添加量が3.0重量部よりも多い場
合には1250℃で焼成しても緻密な焼結体が得られな
いが、試料No、93〜95.103に示すように、3
.0重量部の場合には所望の特性を得ることができる。On the other hand, as shown in sample No. 96.97, 104, and 105, when the amount of additive component 1 added is more than 3.0 parts by weight, a dense sintered body cannot be obtained even if fired at 1250°C. However, as shown in sample No. 93-95.103, 3
.. In the case of 0 parts by weight, desired characteristics can be obtained.
従って、添加成分1の上限は3.OM量部である。Therefore, the upper limit of additive component 1 is 3. This is the OM quantity part.
なお、添加成分1のCr20xとA L t Osとは
はト同様に働き、これ等から選択された1つを使用して
も、又は複数を使用しても同様な結果が得られる。Note that Cr20x and A L t Os, which are additive components 1, work in the same manner as above, and the same result can be obtained even if one selected from them is used or a plurality of them are used.
そして、添加成分lが1種又は複数種の何れの場合に於
ても、添加量はo、oi〜3.0の範囲にすることが望
ましい。In any case where the additive component l is one type or multiple types, it is desirable that the amount added is in the range of o, oi to 3.0.
なお、この添加成分1は、静電容量の温度特性の改善に
寄与する。即ち、添加成分1の添加によって一55℃〜
125℃の範囲での静電容量の温度変化率ΔC−55〜
ΔCl2sを一15%〜+15%の範囲に収めることが
可能になると共に、−25℃〜85℃の範囲での静電容
量の温度変化率へC−u〜へCasを一10%〜+10
%の範囲に容易に収めることが可能になり、且つ各温度
範囲における静電容量の温度変化率の変動幅を小さくす
ることができる。また、添加成分1は抵抗率ρを大きく
する作用を若干有する。Note that this additive component 1 contributes to improving the temperature characteristics of capacitance. That is, by adding additive component 1, the temperature
Temperature change rate of capacitance ΔC-55 in the range of 125℃
It becomes possible to keep ΔCl2s in the range of -15% to +15%, and the temperature change rate of capacitance in the range of -25°C to 85°C and Cas to -10% to +10%.
%, and it is possible to reduce the fluctuation width of the temperature change rate of capacitance in each temperature range. Further, the additive component 1 has the effect of slightly increasing the resistivity ρ.
また、添加成分2の添加量が零の場合には、試料No、
26から明らかなように、焼成温度が1250℃であっ
ても緻密な焼結体が得られないが、試料No、27に示
すように、添加量が100重量部の基本成分に対して0
.2重量部の場合には、1190℃の焼成で所望の電気
的特性が得られる。従って、添加成分2の下限はCl
2重量部である。In addition, when the amount of additive component 2 added is zero, sample No.
As is clear from Sample No. 26, even if the firing temperature is 1250°C, a dense sintered body cannot be obtained. However, as shown in Sample No. 27, the addition amount is 0.
.. In the case of 2 parts by weight, desired electrical properties can be obtained by firing at 1190°C. Therefore, the lower limit of additive component 2 is Cl
2 parts by weight.
一方、試料No、31に示すように、添加成分2の添加
量が7.0重量部の場合には、he誘電率ε、が300
0未満となり、更に、静電容量の温度変化第へC−5s
が一15%〜+15%の範囲外となるが、試料No、3
0に示すように、添加量が5.0重量部の場合には、所
望の電気的特性を得ることができる。従って、添加量の
上限は5.0重皿部である。On the other hand, as shown in sample No. 31, when the amount of additive component 2 is 7.0 parts by weight, the he dielectric constant ε is 300
becomes less than 0, and furthermore, the temperature change of capacitance is
Sample No. 3 is outside the range of -15% to +15%.
As shown in 0, when the amount added is 5.0 parts by weight, desired electrical characteristics can be obtained. Therefore, the upper limit of the amount added is 5.0 parts.
添加成分2の好ましい組成は、第2図のLi−0−0−
5iO2−の組成比を示す三角図に基づいて決定するこ
とができる。A preferred composition of additive component 2 is Li-0-0- in FIG.
It can be determined based on a triangular diagram showing the composition ratio of 5iO2-.
三角図の第1の点Aは、試料N091のL 120が1
モル%、S i O2が80モル%、MOが19モル%
の組成を示し、第2の点Bは、試qNo、2のLi2O
が1モル%、5iOzが39モル%、MOが60モル%
の組成を示し、第3の点Cは、試料No、3のL x
x Oが30モル%、5i02が30モル%、MOが4
0モル%の組成を示し、第4の点りは試料N094のL
1□0が50モル%、SiO2が50モル%、MOが0
モル%の組成を示し、第5の点Eは、試FINo、5の
Li2Oが20モル%、5iO−が80モル%、MOが
0モル%の組成を示す。The first point A in the triangular diagram is that L 120 of sample N091 is 1.
mol%, S i O2 80 mol%, MO 19 mol%
The second point B is Li2O of sample qNo.2.
is 1 mol%, 5iOz is 39 mol%, MO is 60 mol%
The third point C is L x of sample No. 3.
x O is 30 mol%, 5i02 is 30 mol%, MO is 4
It shows a composition of 0 mol%, and the fourth spot is L of sample N094.
1□0 is 50 mol%, SiO2 is 50 mol%, MO is 0
The fifth point E shows the composition of sample FINo. 5 of 20 mol % of Li2O, 80 mol % of 5iO-, and 0 mol % of MO.
本発明の範囲に属する試料の添加成分2の組成は三角図
の第1〜5の点A−Eを順に結ぶ5本の直線で囲まれた
領域内の組成になっている。この領域内の組成とすれば
、所望の電気的特性を得ることができる。The composition of additive component 2 of the sample that falls within the scope of the present invention is within the region surrounded by five straight lines connecting points 1 to 5 of the triangular diagram in order. If the composition is within this range, desired electrical characteristics can be obtained.
一方、試料No、11〜16のように、添加成分2の組
成が本発明で特定した範囲外となれば、緻密な焼結体を
得ることができない。On the other hand, if the composition of additive component 2 falls outside the range specified in the present invention, as in Sample Nos. 11 to 16, a dense sintered body cannot be obtained.
なお、MO酸成分例えば試料No、21〜25に示すよ
うに、BaO,MgO,ZnO。Incidentally, the MO acid components include, for example, BaO, MgO, and ZnO as shown in Sample Nos. 21 to 25.
SrO,CaOのいずれか1つであってもよいし、また
は他の試料に示すように適当な比率としてもよい。It may be either one of SrO or CaO, or it may be in an appropriate ratio as shown in other samples.
[発明の効果]
本発明によれば、誘電体磁器組成物の組成を前述したよ
うにしたので、比誘電率が3000以上、誘電体損失t
anδが2.5%以下、抵抗率ρがlX10’MΩ・c
m以上であり、且つ比誘電率の温度変化率が、−55℃
〜125℃で一15%〜+15%(25℃を基準)、−
25℃〜85℃で一10%〜+10%(20℃を基準)
の範囲に収まる誘電体磁器組成物を備えた磁器コンデン
サを提供することができる。[Effects of the Invention] According to the present invention, since the composition of the dielectric ceramic composition is as described above, the dielectric constant is 3000 or more, and the dielectric loss t is
anδ is 2.5% or less, resistivity ρ is lX10'MΩ・c
m or more, and the temperature change rate of the relative permittivity is -55°C
-15% to +15% at ~125℃ (based on 25℃), -
-10% to +10% at 25℃ to 85℃ (based on 20℃)
It is possible to provide a ceramic capacitor with a dielectric ceramic composition falling within the range of .
また、本発明によれば、非酸化性雰囲気中において12
00℃以下の温度で焼成して得ることができるので、ニ
ッケル等の卑金属の導電性ペーストをグリーンシートに
塗布し、グリーンシートと導電性ペーストとを同時に焼
成する方法によって磁器コンデンサを製造することがで
きる。Further, according to the present invention, in a non-oxidizing atmosphere, 12
Since it can be obtained by firing at a temperature of 00°C or less, it is possible to manufacture a ceramic capacitor by applying a conductive paste of a base metal such as nickel to a green sheet and firing the green sheet and the conductive paste at the same time. can.
第1図は本発明の実施例に係わる積層型磁器コンデンサ
を示す断面図、第2図は添加成分2の組成範囲を示す三
角図である。
2・・−磁器層、
4・・・内部電極、
6・・・外部
電極。FIG. 1 is a sectional view showing a multilayer ceramic capacitor according to an embodiment of the present invention, and FIG. 2 is a triangular diagram showing the composition range of additive component 2. 2...-Porcelain layer, 4... Internal electrode, 6... External electrode.
Claims (1)
電体磁器層を挟持している少なくとも2以上の内部電極
とを備えた磁器コンデンサにおいて、 前記誘電体磁器組成物が、100重量部の基本成分と、
0.01〜3重量部のMe_2O_3で表わされる添加
成分1と、0.2〜5重量部の添加成分2との混合物を
焼成したものからなり、前記基本成分が (Ba_k_−_(_x_+_y_)M_xL_y)O
_k(Ti_1_−_zR_z)O_2_−_z_/_
2(但し、MはMg及び/又はZn、LはCa及び/又
はSr、RはSc、Y、Gd、Dy、Ho、Er及びY
bから選択された1種または2種以上の金属元素、k、
x,y,zは 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10 0.002≦z≦0.06 を満足する数値)で表わされる物質からなり、前記添加
成分1がCr_2O_3及び/又はAl_2O_3から
なり、 前記添加成分2がLi_2OとSiO_2とMO(但し
、MOはBaO、SrO、CaO、MgO及びZnOか
ら選択された1種または2種以上の金属酸化物)とから
なり、 前記Li_2Oと前記SiO_2と前記MOとの組成範
囲が、これらの組成をモル%で示す三角図における、 前記Li_2Oが1モル%、前記SiO_2が80モル
%、前記MOが19モル%の組成を示す第1の点Aと、 前記Li_2Oが1モル%、前記SiO_2が39モル
%、前記MOが60モル%の組成を示す第2の点Bと、 前記Li_2Oが30モル%、前記SiO_2が30モ
ル%、前記MOが40モル%の組成を示す第3の点Cと
、 前記Li_2Oが50モル%、前記SiO_2が50モ
ル%、前記MOが0モル%の組成を示す第4の点Dと、 前記Li_2Oが20モル%、前記SiO_2が80モ
ル%、前記MOが0モル%の組成を示す第5の点Eと をこの順に結ぶ5本の直線で囲まれた領域内にあること
を特徴とする磁器コンデンサ。 2.未焼結の磁器粉末からなる混合物を調製する工程と
、前記混合物からなる未焼結磁器シートを形成する工程
と、前記未焼結磁器シートを少なくとも2以上の導電性
ペースト膜で挟持させた積層物を形成する工程と、前記
積層物を非酸化性雰囲気中において焼成する工程と、前
記焼成を受けた積層物を酸化性雰囲気中において熱処理
する工程とを備え、 前記未焼結の磁器粉末からなる混合物が、 100重量部の基本成分と、0.01〜3重量部のMe
_2O_3で表わされる添加成分1と、0.2〜5重量
部の添加成分2とからなり、 前記基本成分が (Ba_k_−_(_x_+_y_)M_xL_y)O
_k(Ti_1_−_zR_z)O_2_−_z_/_
2(但し、MはMg及び/又はZn、LはCa及び/又
はSr、RはSc、Y、Gd、Dy、Ho、Er及びY
bから選択された1種または2種以上の金属元素、k、
x、y、zは 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10 0.002≦z≦0.06 を満足する数値)で表わされる物質からなり、前記添加
成分1がCr_2O_3及び/又はAl_2O_3から
なり、 前記添加成分2がLi_2OとSiO_2とMO(但し
、MOはBaO、SrO、CaO、MgO及びZnOか
ら選択された1種または2種以上の金属酸化物)とから
なり、 前記Li_2Oと前記SiO_2と前記MOとの組成範
囲が、これらの組成をモル%で示す三角図における、 前記Li_2Oが1モル%、前記SiO_2が80モル
%、前記MOが19モル%の組成を示す第1の点Aと、 前記Li_2Oが1モル%、前記SiO_2が39モル
%、前記MOが60モル%の組成を示す第2の点Bと、 前記Li_2Oが30モル%、前記SiO_2が30モ
ル%、前記MOが40モル%の組成を示す第3の点Cと
、 前記Li_2Oが50モル%、前記SiO_2が50モ
ル%、前記MOが0モル%の組成を示す第4の点Dと、 前記Li_2Oが20モル%、前記SiO_2が80モ
ル%、前記MOが0モル%の組成を示す第5の点Eと をこの順に結ぶ5本の直線で囲まれた領域内にあること
を特徴とする磁器コンデンサの製造方法。[Claims] 1. A ceramic capacitor comprising a dielectric ceramic layer made of a dielectric ceramic composition and at least two or more internal electrodes sandwiching the dielectric ceramic layer, wherein the dielectric ceramic composition contains 100 parts by weight of the basic ingredients and
It consists of a mixture of 0.01 to 3 parts by weight of additive component 1 represented by Me_2O_3 and 0.2 to 5 parts by weight of additive component 2, and the basic component is (Ba_k_-_(_x_+_y_)M_xL_y )O
_k(Ti_1_-_zR_z)O_2_-_z_/_
2 (However, M is Mg and/or Zn, L is Ca and/or Sr, R is Sc, Y, Gd, Dy, Ho, Er, and Y
one or more metal elements selected from b, k,
x, y, z satisfy 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10 0.002≦z≦0.06 The additive component 1 is composed of Cr_2O_3 and/or Al_2O_3, and the additive component 2 is Li_2O, SiO_2, and MO (provided that MO is selected from BaO, SrO, CaO, MgO, and ZnO). The composition range of the Li_2O, the SiO_2, and the MO is in a triangular diagram showing these compositions in mol%, the Li_2O is 1 mol%, the SiO_2 is A first point A having a composition of 80 mol% of Li_2O, 19 mol% of the MO, and a second point A having a composition of 1 mol% of the Li_2O, 39 mol% of the SiO_2, and 60 mol% of the MO. B; a third point C having a composition of 30 mol% of Li_2O, 30 mol% of SiO_2, and 40 mol% of MO; 50 mol% of Li_2O, 50 mol% of SiO_2, and 40 mol% of MO; A fourth point D showing a composition of 0 mol% of Li_2O, a fifth point E showing a composition of 20 mol% of Li_2O, 80 mol% of SiO_2, and 0 mol% of MO are connected in this order 5 A porcelain capacitor characterized by being located within the area bounded by the straight line of the book. 2. A step of preparing a mixture made of unsintered porcelain powder, a step of forming an unsintered porcelain sheet made of the mixture, and a lamination in which the unsintered porcelain sheet is sandwiched between at least two or more conductive paste films. forming a product, firing the laminate in a non-oxidizing atmosphere, and heat-treating the fired laminate in an oxidizing atmosphere, from the unsintered porcelain powder. A mixture consisting of 100 parts by weight of the basic component and 0.01 to 3 parts by weight of Me
It consists of additive component 1 represented by _2O_3 and 0.2 to 5 parts by weight of additive component 2, and the basic component is (Ba_k_-_(_x_+_y_)M_xL_y)O
_k(Ti_1_-_zR_z)O_2_-_z_/_
2 (However, M is Mg and/or Zn, L is Ca and/or Sr, R is Sc, Y, Gd, Dy, Ho, Er, and Y
one or more metal elements selected from b, k,
x, y, and z satisfy 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10 0.002≦z≦0.06 The additive component 1 is composed of Cr_2O_3 and/or Al_2O_3, and the additive component 2 is Li_2O, SiO_2, and MO (provided that MO is selected from BaO, SrO, CaO, MgO, and ZnO). The composition range of the Li_2O, the SiO_2, and the MO is in a triangular diagram showing these compositions in mol%, the Li_2O is 1 mol%, the SiO_2 is A first point A having a composition of 80 mol% of Li_2O, 19 mol% of the MO, and a second point A having a composition of 1 mol% of the Li_2O, 39 mol% of the SiO_2, and 60 mol% of the MO. B; a third point C having a composition of 30 mol% of Li_2O, 30 mol% of SiO_2, and 40 mol% of MO; 50 mol% of Li_2O, 50 mol% of SiO_2, and 40 mol% of MO; A fourth point D showing a composition of 0 mol% of Li_2O, a fifth point E showing a composition of 20 mol% of Li_2O, 80 mol% of SiO_2, and 0 mol% of MO are connected in this order 5 A method for manufacturing a ceramic capacitor, characterized in that the capacitor is located within an area surrounded by straight lines of a book.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076768A JPH03278418A (en) | 1990-03-28 | 1990-03-28 | Porcelain capacitor and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076768A JPH03278418A (en) | 1990-03-28 | 1990-03-28 | Porcelain capacitor and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03278418A true JPH03278418A (en) | 1991-12-10 |
Family
ID=13614774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2076768A Expired - Lifetime JPH03278418A (en) | 1990-03-28 | 1990-03-28 | Porcelain capacitor and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03278418A (en) |
-
1990
- 1990-03-28 JP JP2076768A patent/JPH03278418A/en not_active Expired - Lifetime
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