JPH03278422A - Porcelain capacitor and manufacture thereof - Google Patents
Porcelain capacitor and manufacture thereofInfo
- Publication number
- JPH03278422A JPH03278422A JP2076774A JP7677490A JPH03278422A JP H03278422 A JPH03278422 A JP H03278422A JP 2076774 A JP2076774 A JP 2076774A JP 7677490 A JP7677490 A JP 7677490A JP H03278422 A JPH03278422 A JP H03278422A
- Authority
- JP
- Japan
- Prior art keywords
- mol
- composition
- sio
- additive component
- range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052573 porcelain Inorganic materials 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000003990 capacitor Substances 0.000 title claims description 4
- 239000000203 mixture Substances 0.000 claims abstract description 113
- 239000000654 additive Substances 0.000 claims abstract description 65
- 230000000996 additive effect Effects 0.000 claims abstract description 65
- 238000010304 firing Methods 0.000 claims abstract description 15
- 238000010586 diagram Methods 0.000 claims abstract description 10
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 8
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 8
- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract description 6
- 229910052691 Erbium Inorganic materials 0.000 claims abstract description 6
- 229910052689 Holmium Inorganic materials 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 229910052706 scandium Inorganic materials 0.000 claims abstract description 6
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 6
- 229910052769 Ytterbium Inorganic materials 0.000 claims abstract description 5
- 229910052688 Gadolinium Inorganic materials 0.000 claims abstract description 4
- 229910052771 Terbium Inorganic materials 0.000 claims abstract description 4
- 229910052775 Thulium Inorganic materials 0.000 claims abstract description 4
- 229910052765 Lutetium Inorganic materials 0.000 claims abstract description 3
- 239000000919 ceramic Substances 0.000 claims description 52
- 239000003985 ceramic capacitor Substances 0.000 claims description 26
- 230000001590 oxidative effect Effects 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 239000004615 ingredient Substances 0.000 claims description 2
- 238000003475 lamination Methods 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052681 coesite Inorganic materials 0.000 abstract description 6
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 6
- 239000000377 silicon dioxide Substances 0.000 abstract description 6
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 6
- 229910052682 stishovite Inorganic materials 0.000 abstract description 6
- 229910052905 tridymite Inorganic materials 0.000 abstract description 6
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 abstract description 4
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 abstract description 4
- 238000002156 mixing Methods 0.000 abstract description 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 abstract 2
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 21
- 239000011701 zinc Substances 0.000 description 17
- 229910052725 zinc Inorganic materials 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 229910052791 calcium Inorganic materials 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 229910052712 strontium Inorganic materials 0.000 description 7
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 5
- 229910052749 magnesium Inorganic materials 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000009472 formulation Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910000510 noble metal Inorganic materials 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229910015017 LiaO Inorganic materials 0.000 description 1
- 206010027940 Mood altered Diseases 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 206010052428 Wound Diseases 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001089 mineralizing effect Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Ceramic Capacitors (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、誘電体磁器層を少なくとも2以上の内部電極
で挟持してなる単層または積層構造の磁器コンデンサ及
びその製造方法に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a ceramic capacitor having a single-layer or laminated structure in which a dielectric ceramic layer is sandwiched between at least two internal electrodes, and a method for manufacturing the same. .
[従来の技術]
従来、積層磁器コンデンサを製造する際には、誘電体磁
器原料粉末から成る未焼結磁器シート(グリーンシート
)に白金又はパラジウム等の貴金属の導電性ペーストを
所望パターンで印刷し、これを複数枚積み重ねて圧着し
、酸化性雰囲気中において1300℃〜1600℃で焼
成させていた。[Prior Art] Conventionally, when manufacturing multilayer ceramic capacitors, a conductive paste of noble metal such as platinum or palladium is printed in a desired pattern on an unsintered porcelain sheet (green sheet) made of dielectric porcelain raw material powder. A plurality of these sheets were stacked and pressed together, and fired at 1300° C. to 1600° C. in an oxidizing atmosphere.
この焼成により、誘電体磁器原料粉末から成る未焼結磁
器シートは誘電体磁器層となり、白金又はパラジウム等
の貴金属の導電性ペーストは内部電極となる。Through this firing, the unsintered porcelain sheet made of the dielectric porcelain raw material powder becomes a dielectric porcelain layer, and the conductive paste of noble metal such as platinum or palladium becomes an internal electrode.
上述の如く、導電性ペーストとして白金又はパラジウム
等の貴金属を主成分とするものを使用すれば、酸化性雰
囲気中において1300℃〜1600℃という高温で焼
成させても、所望の内部電極を得ることができる。As mentioned above, if a conductive paste containing a noble metal such as platinum or palladium is used as the main component, the desired internal electrode can be obtained even if it is fired at a high temperature of 1300°C to 1600°C in an oxidizing atmosphere. I can do it.
しかし、白金、パラジウム等の貴金属は高価であるため
、必然的に積層磁器コンデンサがコスト高になっていた
。However, since precious metals such as platinum and palladium are expensive, the cost of multilayer ceramic capacitors has inevitably increased.
上述の問題を解決することができるものとして、本件出
願人に係わる特公昭61−14607号公報には、(B
am−x MxlO+t T i Ox(但し、Mは
Mg及び/又はZn)から成る基本成分と、Li2O及
びSiO2から成る添加成分とを含む誘電体磁器組成物
が開示されている。Japanese Patent Publication No. 14607/1983, filed by the applicant, discloses (B
A dielectric ceramic composition is disclosed that includes a basic component consisting of am-x MxlO+t T i Ox (where M is Mg and/or Zn) and additive components consisting of Li2O and SiO2.
また、特公昭61−14608号公報には、上記の特公
昭61−14607号公報記載の誘電体磁器組成物のL
i2O及び5if2の代りk、L i 20 、 S
i O2及びMO(但し、MOはBaO、CaO及びS
rOから選択された1種または2種以上の金属酸化物)
から成る添加成分を含む誘電体磁器組成物が開示されて
いる。In addition, Japanese Patent Publication No. 61-14608 discloses that the dielectric ceramic composition described in Japanese Patent Publication No. 61-14607 is
k, L i 20 , S instead of i2O and 5if2
i O2 and MO (however, MO is BaO, CaO and S
one or more metal oxides selected from rO)
A dielectric ceramic composition is disclosed that includes an additive component consisting of.
また、特公昭61−1.4609号公報には、(B a
、−*−y Mz LylOkT i 02 (但
し、MはMg及び/又はZn、LはSr及び/又はCa
)から成る基本成分と、L i z O及びSiO□か
ら成る添加成分とを含む誘電体磁器組成物が開示されて
いる。In addition, in Japanese Patent Publication No. 61-1.4609, (B a
, -*-y Mz LylOkT i 02 (However, M is Mg and/or Zn, L is Sr and/or Ca
A dielectric ceramic composition is disclosed that includes a basic component consisting of ) and additive components consisting of L iz O and SiO□.
また、特公昭61−14610号公報には、上記の特公
昭61−14609号公報記載の誘電体磁器組成物にお
けるL i t O及びSiO□の代りk、L i 2
0. S i Ox及びMO(但し、MOはEar、C
aO及びSrOから選択された1種または2種以上の金
属酸化物)から成る添加成分を含む誘電体磁器組成物が
開示されている。Further, in Japanese Patent Publication No. 14610/1982, k, Li 2 instead of L i t O and SiO□ in the dielectric ceramic composition described in Japanese Patent Publication No. 61-14609 mentioned above
0. S i Ox and MO (however, MO is Ear, C
A dielectric ceramic composition is disclosed that includes an additive component consisting of one or more metal oxides selected from aO and SrO.
また、特公昭61−14611号公報には、(B ai
+−x M−)okT i 02 (但し、MはMg
。In addition, in Japanese Patent Publication No. 14611/1983, (B ai
+-x M-)okT i 02 (However, M is Mg
.
Zn、Sr及びCaから選択された1種または2種以上
の金属元素)から成る基本成分と、B2O3及びSiO
□から成る添加成分とを含む誘電体磁器組成物が開示さ
れている。one or more metal elements selected from Zn, Sr and Ca), and B2O3 and SiO
A dielectric ceramic composition containing an additive component consisting of □ is disclosed.
また、特公昭62−1.595号公報には。Also, in Japanese Patent Publication No. 62-1.595.
(B ay−x M、)O,T i 02(但し、Mは
Mg。(B ay-x M,) O, T i 02 (However, M is Mg.
Zn、Sr及びCaから選択された1種または2種以上
の金属元素)から成る基本成分と、B2O,及びMO(
但し、MOはB ao。A basic component consisting of one or more metal elements selected from Zn, Sr, and Ca), B2O, and MO (
However, MO is Bao.
MgO,ZnO,SrO及びCaOから選択された1種
または2種以上の金属酸化物)から成る添加成分とを含
む誘電体磁器組成物が開示されている。A dielectric ceramic composition containing an additive component consisting of one or more metal oxides selected from MgO, ZnO, SrO, and CaO is disclosed.
また、特公昭62−1596号公報には、上記の特公昭
62−1595号公報記載の誘電体磁器組成物のB、0
3及びMOの代りk、Bias sio!及びMO(
但し、MOはBaO、MgO,ZnO,SrO及びCa
Oから選択された1種または2種以上の金属酸化物)か
ら成る添加成分とを含む誘電体磁器組成物が開示されて
いる。In addition, Japanese Patent Publication No. 62-1596 discloses that the dielectric ceramic composition B, 0
k instead of 3 and MO, Bias sio! and MO(
However, MO is BaO, MgO, ZnO, SrO and Ca
A dielectric ceramic composition is disclosed that includes an additive component consisting of one or more metal oxides selected from O.
これらに開示されている誘電体磁器組成物を誘電体層と
して使用すれば、還元性雰囲気中において、1200℃
以下の温度の焼成で磁器コンデンサを得ることができ、
しかも、その誘電体磁器組成物の比誘電率を2000以
上、比誘電率の温度変化率を一25℃〜+85℃で土1
0%の範囲にすることができるものである。If the dielectric ceramic composition disclosed in these documents is used as a dielectric layer, it can be heated to 1200°C in a reducing atmosphere.
Porcelain capacitors can be obtained by firing at the following temperatures:
Moreover, the relative permittivity of the dielectric ceramic composition is 2000 or more, and the temperature change rate of the relative permittivity is 1 at -25°C to +85°C.
It can be set in the range of 0%.
[発明が解決しようとする課題]
ところで、近年における電子回路の高密度化に伴ない、
磁器コンデンサの小型化の要求は非常に強く、上記各公
報に開示されている誘電体磁器組成物よりも更に比誘電
率の大きな誘電体磁器組成物を備えた磁器コンデンサの
開発が望まれていた。[Problems to be solved by the invention] By the way, with the increasing density of electronic circuits in recent years,
There is a very strong demand for miniaturization of ceramic capacitors, and it has been desired to develop a ceramic capacitor equipped with a dielectric ceramic composition having a higher dielectric constant than the dielectric ceramic compositions disclosed in the above-mentioned publications. .
また、磁器コンデンサは各種の環境下において便用され
るため、上記各公報に開示されている誘電体磁器組成物
よりも更に広い温度範囲にわたって比誘電率の変化率が
小さい誘電体磁器組成物を備えた磁器コンデンサの開発
が望まれていた。In addition, since ceramic capacitors are conveniently used in various environments, dielectric ceramic compositions with a smaller rate of change in dielectric constant over a wider temperature range than the dielectric ceramic compositions disclosed in the above-mentioned publications are used. There was a desire to develop a ceramic capacitor with this feature.
そこで、本発明の目的は、非酸化性雰囲気中における、
1200℃以下の温度の焼成で得られるものであるにも
かかわらず、比誘電率が3000以上、誘電体損失ta
nδが2.5%以下、抵抗率ρがlXl0’Ω・cm以
上であり、比誘電率の温度変化率が一55℃〜125℃
で一15%〜+15%(25℃を基準)、−25℃〜8
5℃で一10%〜+10%(20℃を基準)の範囲に収
まる誘電体磁器組成物を備えた磁器コンデンサ及びその
製造方法を提供することにある。Therefore, the object of the present invention is to
Although it is obtained by firing at a temperature of 1200°C or less, it has a relative dielectric constant of 3000 or more and a dielectric loss ta.
nδ is 2.5% or less, resistivity ρ is 1X10'Ω・cm or more, and the temperature change rate of relative dielectric constant is 155℃ to 125℃
-15% to +15% (based on 25℃), -25℃ to 8
It is an object of the present invention to provide a ceramic capacitor equipped with a dielectric ceramic composition whose temperature ranges from -10% to +10% (based on 20°C) at 5°C, and a method for manufacturing the same.
[課題を解決するための手段1
本発明に係る磁器コンデンサは、誘電体磁器組成物から
なる誘電体磁器層と、この誘電体磁器層を挟持している
少なくとも2以上の内部電極とを備えた磁器コンデンサ
において、
前記誘電体磁器組成物が、100重量部の基本成分と、
3.0重量部以下の第1添加成分と、0.2〜5重1部
の第2添加成分との溶合物を焼成したものからなり、
前記基本成分が
(1−αl (tBa+t−X−ffiMXt、ZI
L (Ti 1−yRyl O□−27□)+αBaZ
r0 s
(但し、MはMg及び/又はZn、LはCa及び/又は
Zn、LはSc、Y、Gd、 Dy。[Means for Solving the Problems 1] A ceramic capacitor according to the present invention includes a dielectric ceramic layer made of a dielectric ceramic composition, and at least two internal electrodes sandwiching the dielectric ceramic layer. In the ceramic capacitor, the dielectric ceramic composition comprises 100 parts by weight of a basic component;
It consists of a calcined mixture of a first additive component of 3.0 parts by weight or less and a second additive component of 0.2 to 5 parts by weight, and the basic component is (1-αl (tBa+t-X -ffiMXt, ZI
L (Ti 1-yRyl O□-27□) + αBaZ
r0s (However, M is Mg and/or Zn, L is Ca and/or Zn, L is Sc, Y, Gd, Dy.
Ho、Er、Yb、Tb、Tm、Luから選択された1
種または2種以上の金属、a、k、x。1 selected from Ho, Er, Yb, Tb, Tm, Lu
species or two or more metals, a, k, x.
z、yは
0、 005 ≦a≦0.04
1 、00≦に≦ 1 、05
0<x<0.10
0<z ≦0.05
0、01 ≦x+z ≦0.10
o<y≦0.04
を満足する数値)で表わされる物質からなり、前記第1
添加成分がCrz Ox及び/又はA1゜0.からなり
、
前記第2添加成分がL i x OとS i O2とM
O(但し、MOはB a O、S r O、Ca O、
M g O及びZnOから選択された1種または2種以
上の金属酸化物)とからなり、
前記Li2Oと前記S i O2と前記MOとの組成範
囲が、これらの組成をモル%で示す三角図における、
前記L i z Oが1モル%、前記SiO2が80モ
ル%、前記MOが19モル%の組成を示す第1の点Aと
、
前記L i 20が1モル%、前記S i O2が39
モル%、前記MOが60モル%の組成を示す第2の点B
と、
前記L i t Oが30モル%、前記SiO2が30
モル%、前記MOが40モル%の組成を示す第3の点C
と、
前記L i t Oが50モル%、前記Si O2が5
0モル%°、前記MOが0モル%の組成を示す第4の点
りと、
前記Li−0が20モル%、前記SiO□が80モル%
、前記MOが0モル%の組成を示す第5の点Eと
をこの順に結ぶ5本の直線で囲まれた領域内にあるもの
である。z, y are 0, 005 ≦a≦0.04 1 , 00≦≦1 , 05 0<x<0.10 0<z ≦0.05 0, 01 ≦x+z ≦0.10 o<y≦0 .04), and the first
The additive component is Crz Ox and/or A1°0. The second additive component is L i x O, S i O2, and M
O (However, MO is B a O, S r O, Ca O,
(one or more metal oxides selected from MgO and ZnO), and the composition range of the Li2O, the SiO2, and the MO is a triangular diagram showing these compositions in mol%. A first point A having a composition of 1 mol % of the Li z O, 80 mol % of the SiO2, and 19 mol % of the MO; 39
mol %, a second point B where the MO has a composition of 60 mol %
and the L i t O is 30 mol % and the SiO2 is 30 mol %.
mol%, a third point C where the MO has a composition of 40 mol%
and the Li t O is 50 mol % and the Si O 2 is 50 mol %.
a fourth dot showing a composition of 0 mol%° and 0 mol% of the MO; 20 mol% of the Li-0 and 80 mol% of the SiO□;
, and the fifth point E where the MO has a composition of 0 mol %.
ここで、0.005≦α≦0.04としたのは、aが0
.005≦α≦0.04の範囲では所望の電気的特性を
有する誘電体磁器組成物を得ることができるが、aが0
.005未満になると、静電容量の温度変化率△C−2
5が一10%〜+10%の範囲外、ΔC−55が一15
%〜+15%の範囲外となり、αが0.04を越えると
、静電容量の温度変化率ΔCasが一10%〜+10%
の範囲外となるからである。Here, the reason why 0.005≦α≦0.04 is set is that a is 0.
.. In the range of 005≦α≦0.04, a dielectric ceramic composition having desired electrical properties can be obtained, but when a is 0.
.. When it becomes less than 005, the temperature change rate of capacitance △C-2
5 is outside the range of -10% to +10%, ΔC-55 is -15
% to +15%, and if α exceeds 0.04, the temperature change rate ΔCas of capacitance will be -10% to +10%.
This is because it is outside the range of .
また、1.00≦に≦1.05としたのは。Also, 1.00≦≦1.05.
kが1.00≦に≦1.05の範囲では所望の電気的特
性を有する誘電体磁器組成物を得ることができるが、k
が1.00未満になると、抵抗率ρがlX10’MΩ・
cm未満と、大幅に低くなり、kが1.05を越えると
、緻密な焼結体が得られないからである。When k is in the range of 1.00≦1.05, a dielectric ceramic composition having desired electrical properties can be obtained.
becomes less than 1.00, the resistivity ρ becomes lX10'MΩ・
This is because when k is less than cm, it is significantly lower, and when k exceeds 1.05, a dense sintered body cannot be obtained.
また、0.01≦x+z≦0.10としだのは、x+z
が0.01≦x+z≦o、ioの範囲では所望の電気的
特性の誘電体磁器組成物を得ることができるが、X+Z
が0.01未満になると、静電容Iの温度変化率ΔC−
2,が一10%〜+10%の範囲外、ΔC−55が一1
5%〜+15%の範囲外となり、X+Zが0.10を越
えると、静電容量の温度変化第へCasが一10%〜+
10%の範囲外となるからである。Also, if 0.01≦x+z≦0.10, then x+z
In the range of 0.01≦x+z≦o, io, a dielectric ceramic composition with desired electrical properties can be obtained;
becomes less than 0.01, the rate of temperature change in capacitance I ΔC-
2, Outside the range of -10% to +10%, ΔC-55 is -1
If it is outside the range of 5% to +15% and X+Z exceeds 0.10, the temperature change of capacitance Cas will be -10% to +
This is because it is outside the 10% range.
但し、x+zが0.01≦x+z≦0.10の範囲にあ
っても、Zが0.05を越えてしまう場合には、所望の
電気的特性を有する誘電体磁器組成物が得られない。従
って、X+Zの上限値は0.10であるが、同時にZの
上限値は0,05にしなければならない。However, even if x+z is within the range of 0.01≦x+z≦0.10, if Z exceeds 0.05, a dielectric ceramic composition having desired electrical properties cannot be obtained. Therefore, the upper limit value of X+Z is 0.10, but at the same time the upper limit value of Z must be set to 0.05.
なお、M成分のMgとZn、L成分のCaとSrははf
同様に働き2O<x<0.10を満足する範囲でMgと
Znの内の一方または両方を使用すること、またO<z
≦0.05を満足する範囲でCaとSrの内の一方また
は両方を使用することができる。In addition, Mg and Zn of the M component and Ca and Sr of the L component are f
Similarly, one or both of Mg and Zn can be used within the range that satisfies 2O<x<0.10, and O<z
One or both of Ca and Sr can be used within a range satisfying ≦0.05.
そして、M成分及びL成分の1種または複数種の何れの
場合においてもX+Zの値を0.01〜0.10の範囲
にすることが望ましい。It is desirable that the value of X+Z be in the range of 0.01 to 0.10 in either case of one or more of the M component and the L component.
また、o<y≦0.04としたのは、yが0<y≦0.
04の範囲では所望の電気的特性の誘電体磁器組成物を
得ることができるが、yが0.04を越える場合には緻
密な焼結体を得ることができないからである。Also, the reason why o<y≦0.04 is set is that y is 0<y≦0.
If y is in the range of 0.04, a dielectric ceramic composition with desired electrical properties can be obtained, but if y exceeds 0.04, a dense sintered body cannot be obtained.
そして、R成分のSc、Y、Dy、Ho。Then, the R components Sc, Y, Dy, and Ho.
Er、Ybははf同様に働き、これ等から選択された1
つを使用しても、又は複数を使用しても同様な結果が得
られる。R成分が1種又は複数種のいずれの場合に於て
も、yの値を0.04以下の範囲にすることが望ましい
。また、yは0.04以下であれば2Oに近い微量であ
ってもそれなりの効果がある。Er, Yb work in the same way as f, and 1 selected from these
Similar results can be obtained using one or more. Regardless of whether there is one type of R component or multiple types of R components, it is desirable that the value of y be in the range of 0.04 or less. Further, if y is 0.04 or less, even a trace amount close to 2O has a certain effect.
組成式中、Rで示す成分は、静電容量の温度特性の改善
に寄与する。即ち、R成分の添加によって一55℃〜1
25℃の範囲での静電容量の温度変化率ΔC−5,〜Δ
C1□、を一15%〜+15%の範囲に容易に収めるこ
とが可能になると共k、−25℃〜85℃の範囲での静
電容量の温度変化率△C−25〜△CAsを一10%〜
+10%の範囲に容易に収めることが可能になり、且つ
各温度範囲における静電容量の温度変化率の変動幅を小
さくすることができる。In the composition formula, the component represented by R contributes to improving the temperature characteristics of capacitance. That is, by adding the R component, the temperature
Temperature change rate of capacitance ΔC-5, ~Δ in the range of 25℃
C1□ can be easily kept within the range of -15% to +15%, and the temperature change rate of capacitance △C-25 to △CAs in the range of -25°C to 85°C can be kept within the range of -25% to +15%. 10%~
It becomes possible to easily keep the capacitance within the range of +10%, and it is possible to reduce the fluctuation range of the temperature change rate of capacitance in each temperature range.
また、R成分は抵抗率pを大きくする作用及び焼結性を
高める作用を有する。Moreover, the R component has the effect of increasing the resistivity p and the effect of increasing sinterability.
なお、基本成分を示す組成式において、X。In addition, in the composition formula showing the basic components, X.
y、z、にはそれぞれの元素の原子数を示し、1−aと
αは、この組成式の第1項の
IB&m−x−z’tA*Lx)Ok(Tt+−yRy
lOx−yyzと、第2項のBa1rn3との割合をモ
ルで示すものである。y and z indicate the number of atoms of each element, and 1-a and α are IB&m-x-z'tA*Lx)Ok(Tt+-yRy
The ratio of lOx-yyz to Ba1rn3 in the second term is shown in moles.
また、基本成分の中k、本発明の目的を阻害しない範囲
で微量のM n Oz (好ましくは0,05〜O,
1重量%)等の鉱化剤を添加し、焼結性を向上させても
よい。また、その他の物質を必要に応じて添加してもよ
い。In addition, among the basic components, a trace amount of M n Oz (preferably 0.05 to O,
A mineralizing agent such as 1% by weight) may be added to improve sinterability. Further, other substances may be added as necessary.
また、基本成分を得るための出発原料を、実施例で示し
たもの以外の例えばBaO、SrO。In addition, starting materials for obtaining the basic components may be other than those shown in Examples, such as BaO and SrO.
CaO等の酸化物または水酸化物またはその他の化合物
としてもよい。It may also be an oxide or hydroxide such as CaO or other compounds.
次k、第1添加成分の上限を3.0重量部としたのは、
第1添加成分の添加量が3.0重量部の場合には、所望
の電気的特性を有する誘電体磁器組成物を得ることがで
きるが、3.01凰部を越えた場合には、1250℃で
焼成しても緻密な焼結体が得られないからである。Next, the upper limit of the first additive component was set at 3.0 parts by weight.
When the amount of the first additive component added is 3.0 parts by weight, a dielectric ceramic composition having desired electrical properties can be obtained; however, when the amount exceeds 3.01 parts by weight, This is because a dense sintered body cannot be obtained even if fired at ℃.
第1添加成分は3.0重量部以下の範囲において極く微
量(0〈第1添加成分)であってもそれなりの効果を有
する。しかし、量産する時の電気的特性のバラツキを考
慮して0.001重量部以上添加することが望ましい。Even if the first additive component is in an extremely small amount (0<first additive component) within the range of 3.0 parts by weight or less, it has a certain effect. However, in consideration of variations in electrical properties during mass production, it is desirable to add 0.001 part by weight or more.
なお、第1添加成分のCrz OsとA1□O。Note that the first additional components are CrzOs and A1□O.
とばはイ同様に働き、これ等から選択された1つを使用
しても、又は複数を使用しても同様な結果が得られる。The toba works in the same way as the i, and the same result can be obtained by using one selected from these, or by using a plurality of them.
そして、第1添加成分が1種又は複数種の何れの場合に
於いても添加量は3.0重量部以下の範囲にすることが
望ましい。Whether the first additive component is one type or multiple types, the amount added is desirably within a range of 3.0 parts by weight or less.
この第1添加成分は、静電容量の温度特性の改善に寄与
する。即ち、第1添加成分の添加によって一55℃〜1
25℃の範囲での静電容量の温度変化率ΔC−55〜△
CI□5を一15%〜+15%の範囲に容易に収めるこ
とが可能になると共k、−25℃〜85℃の範囲での静
電容量の温度変化率△C−25〜ΔCs5を一10%〜
+10%の範囲に容易に収めることが可能になり、且つ
各温度範囲における静電容量の温度変化率の変動幅を小
さくすることができる。This first additive component contributes to improving the temperature characteristics of capacitance. That is, by adding the first additive component, the temperature of -55°C to 1
Temperature change rate of capacitance ΔC-55 to Δ in the range of 25℃
CI□5 can be easily kept within the range of -15% to +15%, and the temperature change rate of capacitance △C-25 to ΔCs5 in the range of -25°C to 85°C can be set to -10%. %~
It becomes possible to easily keep the capacitance within the range of +10%, and it is possible to reduce the fluctuation range of the temperature change rate of capacitance in each temperature range.
また、第1添加成分は抵抗率ρを大きくする作用を若干
有する。Further, the first additive component has the effect of slightly increasing the resistivity ρ.
次k、第2添加成分を、100重量部の基本成分に対し
、0.2〜5重量部の範囲としたのは、第2添加成分が
0.2〜5重量部の範囲では、所望の電気的特性を有す
る誘電体磁器組成物を得ることができるが、第2添加成
分が0.2重量部未満になると、焼成温度が1250℃
であっても緻密な焼結体が得られず、第2添加成分が5
重量部を越えると、比誘電率ε、が3000未満となり
、しかも静電容量の温度変化率ΔCa5が一10%〜+
10%の範囲外となるからである。Next, the second additive component was set in the range of 0.2 to 5 parts by weight relative to 100 parts by weight of the basic component. A dielectric ceramic composition having electrical properties can be obtained, but if the second additive component is less than 0.2 parts by weight, the firing temperature will be 1250°C.
However, a dense sintered body cannot be obtained even if the second additive component is 5
If it exceeds parts by weight, the relative dielectric constant ε becomes less than 3000, and the temperature change rate ΔCa5 of capacitance is -10% to +
This is because it is outside the 10% range.
第2添加成分の組成を、Li2OとS i 02とMO
の組成をモル%で示す三角図において、上述した第1〜
5の、屯A−Eをこの順に結ぶ5本の直線で囲まれた領
域内としたのは、第2添加成分の組成がこの領域内にあ
る場合は、所望の電気的特性を有する誘電体磁器組成物
を得ることができるが、第2添加成分の組成がこの範囲
外になれば、緻密な焼結体を得ることができないからで
ある。The composition of the second additive component is Li2O, S i 02 and MO
In the triangular diagram showing the composition in mol%, the first to
5, the area surrounded by the five straight lines connecting A-E in this order is the reason why if the composition of the second additive component is within this area, the dielectric material has the desired electrical characteristics. Although a ceramic composition can be obtained, if the composition of the second additive component is outside this range, a dense sintered body cannot be obtained.
なお、MO酸成分、BaO、MgO,ZnO。Note that the MO acid components are BaO, MgO, and ZnO.
SrO,CaOのいずれか1つであってもよいし、また
は適当な比率としてもよい。また、添加成分の出発原料
は実施例で示したもの以外の酸化物、水酸化物等の他の
化合物としてもよい。It may be either one of SrO or CaO, or it may be in an appropriate ratio. Further, the starting materials for the additive components may be other compounds such as oxides and hydroxides other than those shown in the examples.
次k、本発明に係る磁器コンデンサの製造方法は、上記
の基本成分と第1.第2添加成分とからなる未焼結の磁
器粉末の混合物を調製する工程と、前記混合物からなる
未焼結磁器シートを形成する工程と、前記未焼結磁器シ
ートを少なくとも2以上の導電性ペースト膜で挟持させ
た積層物を形成する工程と、前記積層物を非酸化性雰囲
気中において焼成する工程と、前記焼成を受けた積層物
を酸化性雰囲気中において熱処理する工程とを備えたも
のである。Next, the method for manufacturing a ceramic capacitor according to the present invention includes the above basic components and the first method. a step of preparing a mixture of unsintered porcelain powder comprising a second additive component; a step of forming an unsintered porcelain sheet comprising the mixture; The method comprises a step of forming a laminate sandwiched between films, a step of firing the laminate in a non-oxidizing atmosphere, and a step of heat-treating the fired laminate in an oxidizing atmosphere. be.
ここで、非酸化性雰囲気中の焼成温度は、電極材料を考
慮して種々変えることができる。Here, the firing temperature in the non-oxidizing atmosphere can be varied depending on the electrode material.
ニッケルを内部電極とする場合には、1050℃〜12
00℃の範囲でニッケル粒子の凝集がほとんど生じない
。また、非酸化性雰囲気はH2やGOなどの還元性雰囲
気のみならず、N2やArなどの中性雰囲気であっても
よい。When using nickel as the internal electrode, the temperature is 1050℃~12
Almost no aggregation of nickel particles occurs in the temperature range of 00°C. Further, the non-oxidizing atmosphere may be not only a reducing atmosphere such as H2 or GO, but also a neutral atmosphere such as N2 or Ar.
また、酸化性雰囲気中における熱処理の温度は、ニッケ
ル等の電極材料と磁器の酸化とを考慮して種々変更する
ことが可能である。Furthermore, the temperature of the heat treatment in the oxidizing atmosphere can be varied in consideration of the electrode material such as nickel and the oxidation of the ceramic.
この熱処理の温度は実施例では600℃としたが、これ
に限定されるものではなく、焼結温度よりも低い温度で
あればよく、好ましくは500℃〜1000℃の範囲が
よい。Although the temperature of this heat treatment was set to 600°C in the example, it is not limited thereto, and may be any temperature lower than the sintering temperature, preferably in the range of 500°C to 1000°C.
なお、本発明は積層磁器コンデンサ以外の−M的な単層
の磁器コンデンサにも勿論適用可能である。Note that the present invention is of course applicable to -M single-layer ceramic capacitors other than multilayer ceramic capacitors.
[実施例1
まず、第1表のN011の試料の調製方法とその電気的
特性について説明する。[Example 1] First, the preparation method of sample N011 shown in Table 1 and its electrical characteristics will be explained.
五星履豆旦1玉
配合1の化合物を各々秤量し、こわらの化合物をボット
ミルfpot m1L11k、アルミナボール及び水2
.5℃とともに入れ、15時間撹拌混合して、原料混合
物を得た。Weigh each of the compounds of 1 ball of Gosei Doudan, and mix the stiff compound with Botmill fpot m1L11k, alumina ball, and 2 parts of water.
.. The mixture was added at 5° C. and stirred and mixed for 15 hours to obtain a raw material mixture.
ここで、配合1の化合物の重量(g)とモル部は、基本
成分の組成式
における第1項の
(BaM−++−zM++LzlOi+(Tit−yR
y)02−yza (以下、第1基本成分という。)が
(B a a、 96M g o、 asS ro、o
+) O1,o2(T 1 o、e*Y b n、al
)Or、ee5となるように計算して求めた値である。Here, the weight (g) and molar parts of the compound of Formulation 1 are the first term (BaM-++-zM++LzlOi+(Tit-yR
y)02-yza (hereinafter referred to as the first basic component) is (B a a, 96M go, asS ro, o
+) O1, o2 (T 1 o, e*Y b n, al
) Or, ee5.
次k、この原料混合物をステンレスポットに入れ、熱風
式乾燥器を用い、150℃で4時間乾燥し、この乾燥し
た原料混合物を粗粉砕し、この粗粉砕した原料混合物を
トンネル炉を用い、大気中において約1200℃で2時
間仮焼し、上記基本成分の組成式(1)における第1基
本成分の粉末を得た。Next, put this raw material mixture into a stainless steel pot, dry it at 150°C for 4 hours using a hot air dryer, coarsely crush this dried raw material mixture, and use a tunnel furnace to crush this coarsely crushed raw material mixture. The powder was calcined for 2 hours at about 1200° C. to obtain a powder of the first basic component in the composition formula (1) of the above basic component.
また、基本成分の組成式(1)の第2項のBaZrOx
(以下、第2基本成分という。)を得るためk、Ba
C0−とZ r 02とが等モルとなるようk、前者を
615.61g、後者を384.39gそれぞれ秤量し
、これ等を混合し、乾燥し、粉砕した後、大気中におい
て約1250℃で2時間仮焼した。In addition, BaZrOx in the second term of the basic component composition formula (1)
(hereinafter referred to as the second basic component), k, Ba
Weighed 615.61g of the former and 384.39g of the latter so that the moles of C0- and Zr02 were equal, mixed them, dried them, pulverized them, and then heated them at about 1250°C in the atmosphere. It was calcined for 2 hours.
そして、第1表の試料NO61に示すようk、1−〇が
0.98モル、aが0.02モルとなるようk、98モ
ル部(976,28g)の第1基本成分の粉末と、2モ
ル部f23.85g)の第2基本成分の粉末とを混合し
て1000gの基本成分を得た。Then, as shown in sample No. 61 in Table 1, k, 98 mol parts (976.28 g) of powder of the first basic component so that k, 1-0 is 0.98 mol, and a is 0.02 mol, 2 molar parts f23.85 g) of powder of the second basic component were mixed to obtain 1000 g of the basic component.
第2添加成 の調製
また、配合2の化合物を各々秤量して混合し、この混合
物にアルコールを300cc加え、ポリエチレンポット
中において、アルミナボールを用いて10時間撹拌し、
その後、大気中において1000℃の温度で2時間仮成
した。Preparation of the second additive composition Also, each of the compounds of Formulation 2 was weighed and mixed, 300 cc of alcohol was added to this mixture, and the mixture was stirred for 10 hours using an alumina ball in a polyethylene pot.
Thereafter, it was temporarily formed in the atmosphere at a temperature of 1000° C. for 2 hours.
二こで、配合2の化合物の重量(g)は、L 120が
1モル%、S i Ozが80モル%、MOが19モル
%(BaOf3.8モル%l+ca、0(9,5モル%
)+Mg0f5.7モル%))の組成になるように計算
して求めた値である。Here, the weight (g) of the compound of formulation 2 is as follows: L 120 is 1 mol%, SiOz is 80 mol%, MO is 19 mol% (BaOf3.8 mol%l+ca, 0(9.5 mol%
)+Mg0f5.7 mol%)) This is a value calculated to have a composition of
次k、上記仮焼によって得られたものを300ccの水
とともにアルミナポットに入れ、アルミナボールで15
時間粉砕し、その後、150℃で4時間乾燥させて、第
2添加成分の粉末を得た。Next, put the material obtained by the above calcination into an alumina pot with 300cc of water, and use an alumina ball to
The powder was pulverized for hours and then dried at 150° C. for 4 hours to obtain a powder of the second additive component.
尚、MOの内容であるBaO、CaO及びMgOの割合
は、第1表に示すようk、20モル%、50モル%及び
30モル%となる。Note that the proportions of BaO, CaO, and MgO, which are the contents of MO, are k, 20 mol%, 50 mol%, and 30 mol%, as shown in Table 1.
二1ユニエ見1
次k、100重量部(}Ooog)の前記基本成分k、
第1添加成分として平均粒径が0.5μmで良く粒の揃
った純度99.0%以上のCrz OxとA l z
Ozとを夫々0.1重量部(1g)添加し、そして2重
量部(20g)の前記第2添加成分を添加し、更k、ア
クリル酸エステルポリマー、グリセリン、縮合リン酸塩
の水滴液からなる有機バインダーを、基本成分と第1及
び第2添加成分との合計玉量に対して15重量%添加し
、更k、50重量%の水を加え、これらをボールミルに
入れて、粉砕及び混合して磁器原料のスラリーを調製し
た。21 Unier primary k, 100 parts by weight (}Ooog) of the basic component k,
As the first additive component, CrzOx and Alz with a purity of 99.0% or more with an average particle size of 0.5μm and well-aligned particles
0.1 parts by weight (1 g) of each of Oz, and 2 parts by weight (20 g) of the second additive component, and then from the water droplet liquid of the acrylic acid ester polymer, glycerin, and condensed phosphate. Add 15% by weight of an organic binder based on the total amount of the basic component and the first and second additive components, add 50% by weight of water, and place these in a ball mill to grind and mix. A slurry of porcelain raw material was prepared.
未焼 磁器シートの形成
次k、上記スラリーを真空脱?′21機に入れて脱泡し
、このスラリーをリバースロールコータに入れ、ここか
ら得られる薄膜成形物を長尺なポリエステルフィルム上
に連続して受は取らせると共k、同フィルム上でこれを
100℃に加熱して乾燥させ、厚さ約25amの未焼結
磁器シートを得た。このシートは長尺なものであるが、
これを10cm角の正方形に裁断して使用する。Next to forming the unfired porcelain sheet, remove the slurry by vacuum. The slurry is put into a reverse roll coater, and the resulting thin film molded product is continuously coated on a long polyester film. was heated to 100° C. and dried to obtain an unsintered porcelain sheet with a thickness of about 25 am. This sheet is long, but
Cut this into 10cm squares and use.
導電 ペーストの調製 び 刷
一方、内部電極用の導電性ペーストは、粒径平均1.5
μmのニッケル粉末10gと、エチルセルロース0.9
gをブチルカルピトール9.1gに濃醇させたものとを
撹拌機に入れ、10時間撹拌することにより得た。そし
て、この導電性ペーストを長さ14mm、幅7mmのパ
ターンを50個有するスクリーンを介して上記未焼結磁
器シートの片側に印刷した後、これを乾燥させた。Preparation and printing of conductive paste On the other hand, conductive paste for internal electrodes has an average particle size of 1.5
10g of μm nickel powder and 0.9g of ethyl cellulose
g was concentrated with 9.1 g of butylcarpitol and placed in a stirrer and stirred for 10 hours. Then, this conductive paste was printed on one side of the unsintered porcelain sheet through a screen having 50 patterns of 14 mm in length and 7 mm in width, and then dried.
未 話磁°シートの 層
次k、上記印刷面を上にして未焼結磁器シートを2枚積
層した。この際、隣接する上下のシートにおいて、その
印刷面がパターンの長手方向に約半分程ずれるように配
置した。更k、この積層物の上下両面にそれぞれ4枚ず
つ厚さ60μmの未焼結磁器シートを積層した。Layering of Unsintered Magnetic Sheets Two unsintered porcelain sheets were laminated with the above-mentioned printed side facing up. At this time, the adjacent upper and lower sheets were arranged so that their printed surfaces were shifted by about half in the longitudinal direction of the pattern. Furthermore, four unsintered porcelain sheets each having a thickness of 60 μm were laminated on the upper and lower surfaces of this laminate.
屑物の圧 と裁断
次k、この積層物を約50℃の温度で厚さ方向に約40
トンの荷重を加えて圧着させ、しかる後、この積層物を
格子状に裁断して、50個の積層体チップを得た。After pressing and cutting the waste, this laminate was heated at a temperature of about 50°C for about 40 minutes in the thickness direction.
The laminate was crimped under a load of 1,000 tons, and then the laminate was cut into a lattice shape to obtain 50 laminate chips.
履体チップの
次k、この積層体チップを雰囲気焼成が可能な炉に入れ
、大気雰囲気中において100℃/hの速度で600℃
まで昇温しで、有機バインダを燃焼させた。Next to the footwear chip, this laminate chip was placed in a furnace capable of firing in an atmosphere, and heated to 600°C at a rate of 100°C/h in an air atmosphere.
The organic binder was burned by increasing the temperature to .
しかる後、炉の雰囲気を大気からH2(2体積%) 十
N2 (98体積%)の還元性雰囲気に変えた。そして
、炉をこの還元性雰囲気とした状態を保って、積層体チ
ップの加熱温度を600℃から焼結温度の1130℃ま
で、100℃/hの速度で昇温しで1130℃(最高温
度)を3時間保持した後、100℃/hの速度で600
℃まで降温し、雰囲気を大気雰囲気(酸化性雰囲気)に
おきかえて、600℃を30分間保持して酸化処理を行
い、その後、室温まで冷却して積層焼結体チップを得た
。Thereafter, the atmosphere in the furnace was changed from air to a reducing atmosphere of H2 (2% by volume) and 10N2 (98% by volume). Then, while maintaining the furnace in this reducing atmosphere, the heating temperature of the stacked chips was increased from 600°C to the sintering temperature of 1130°C at a rate of 100°C/h to 1130°C (maximum temperature). After holding for 3 hours, 600℃ at a rate of 100℃/h.
The temperature was lowered to .degree. C., the atmosphere was changed to an air atmosphere (oxidizing atmosphere), 600.degree. C. was maintained for 30 minutes to carry out oxidation treatment, and then cooled to room temperature to obtain a laminated sintered body chip.
外B極王す層成
次k、電極が露出する積層焼結体チップの側面に亜鉛と
ガラスフリット(glass frit)とビヒクル(
vehicle )とからなる導電性ペーストを塗布し
て乾燥し、これを大気中で550℃の温度で15分間焼
付け、亜鉛電極層を形成し、更にこの上に無電解メツキ
法で銅層を形成し、更にこの上に電気メツキ法でPb−
5n半田層を設けて、一対の外部電極を形成した。Next, zinc, glass frit, and vehicle (
A conductive paste consisting of a vehicle) was applied and dried, and this was baked in the air at a temperature of 550°C for 15 minutes to form a zinc electrode layer, and then a copper layer was further formed on this using an electroless plating method. , and then on top of this, Pb-
A 5N solder layer was provided to form a pair of external electrodes.
これにより、第1図に示す如く、3層の誘電体磁器層1
2と2層の内部電極14とから成る積層焼結体チップ1
5に一対の外部電極16を形成した積層磁器コンデンサ
10が得られた。As a result, as shown in FIG. 1, the three dielectric ceramic layers 1
2 and two layers of internal electrodes 14.
A multilayer ceramic capacitor 10 was obtained in which a pair of external electrodes 16 were formed on the capacitor 5.
ここで、外部電極16は、亜鉛電極N18と、この亜鉛
電極層18の上に形成された銅層20と、この銅層20
の上に形成されたPb−5n半田層22とからなる。Here, the external electrode 16 includes a zinc electrode N18, a copper layer 20 formed on the zinc electrode layer 18, and a copper layer 20 formed on the zinc electrode layer 18.
and a Pb-5n solder layer 22 formed on top of the Pb-5n solder layer 22.
なお、この積層磁器コンデンサ10の誘電体磁器層12
の厚さは0.02mm、一対の内部電極14の対向面積
は5mmX5mm=25mm”である。また、焼結後の
誘電体磁器層12の組成は、焼結前の基本成分及び添加
成分の混合組成と実質的に同じである。Note that the dielectric ceramic layer 12 of this multilayer ceramic capacitor 10
The thickness of the dielectric ceramic layer 12 is 0.02 mm, and the opposing area of the pair of internal electrodes 14 is 5 mm x 5 mm = 25 mm.The composition of the dielectric ceramic layer 12 after sintering is determined by mixing the basic components and additive components before sintering. The composition is substantially the same.
轡気 −の。I'm in a bad mood.
次k、積層磁器コンデンサ10の電気的特性を測定し、
その平均値を求めたところ、第2表に示すようk、比誘
電率ε、が3850、tanδが1.0%、抵抗率ρが
6.7X 106MΩ・cm、25℃の静電容量を基準
にしたー55℃及び+125℃の静電容量の変化率△C
−55,ΔC125が−9,5%、+3.8%、20℃
の静電容量を基準にした一25℃。Next, measure the electrical characteristics of the multilayer ceramic capacitor 10,
The average values were calculated, and as shown in Table 2, k, dielectric constant ε, 3850, tan δ 1.0%, resistivity ρ 6.7X 106 MΩ・cm, based on capacitance at 25°C Rate of change in capacitance △C at -55℃ and +125℃
-55, ΔC125 -9.5%, +3.8%, 20℃
-25℃ based on the capacitance of .
+85℃の静電容量の変化率ΔC−z5.ΔC8,が4
.7%、−5,2%であった。Rate of change in capacitance ΔC-z5 at +85°C. ΔC8, is 4
.. 7%, -5.2%.
なお、電気的特性は次の要領で測定した。Note that the electrical characteristics were measured in the following manner.
fAl比誘電率ε6は、温度20℃、周波数1 kHz
、電圧(実効値)1.0Vの条件で静電容量を測定し、
この測定値と、一対の内部電極14の対向面積25mm
2と、一対の内部電極14間の誘電体磁器層12の厚さ
0.02mmから計算で求めた。The relative dielectric constant ε6 of fAl is at a temperature of 20°C and a frequency of 1 kHz.
, the capacitance was measured under the condition of voltage (effective value) 1.0V,
This measurement value and the opposing area of the pair of internal electrodes 14 are 25 mm.
2 and the thickness of the dielectric ceramic layer 12 between the pair of internal electrodes 14 of 0.02 mm.
fB)誘電体損失tanδ(%)は上記比誘電率の測定
と同一条件で測定した。fB) Dielectric loss tan δ (%) was measured under the same conditions as the above measurement of relative dielectric constant.
fcl抵抗率ρ(MΩ・cm)は、温度20℃において
DC100Vを1分間印加した後に一対の外部電極16
間の抵抗値を測定し、この測定値と寸法とに基づいて計
算で求めた。The fcl resistivity ρ (MΩ・cm) is determined by applying DC 100V for 1 minute at a temperature of 20°C,
The resistance value between them was measured and calculated based on this measured value and the dimensions.
(D)静電容量の温度特性は、恒温槽の中に試料を入れ
、−55℃、−25℃、0℃、+20℃。(D) Temperature characteristics of capacitance: -55°C, -25°C, 0°C, +20°C with the sample placed in a constant temperature bath.
+25℃、+40℃、+60℃、+85℃。+25℃, +40℃, +60℃, +85℃.
+105℃、+125℃の各温度において、周波数1k
Hz、電圧(実効値)l OVの条件で静電容量を測定
し、20℃及び25℃の時の静電容量に対する各温度に
おける変化率を求めることによって得た。Frequency 1k at each temperature of +105℃ and +125℃
The capacitance was measured under the conditions of Hz and voltage (effective value) lOV, and the rate of change at each temperature with respect to the capacitance at 20°C and 25°C was obtained.
以上、N001の試料の作成方法及びその特性について
述べたが、試料No、2〜101についても、基本成分
、第1及び第2添加成分の組成、これ等の割合、及び還
元性雰囲気中における焼成温度を第1表及び第2表に示
すように変化させた他は、No、1の試料と全(同一の
方法で積層磁器コンデンサを作成し、同一の方法で電気
特性を測定した。The method for preparing sample No. 001 and its characteristics have been described above, but samples Nos. 2 to 101 also include the composition of the basic component, the first and second additive components, their ratios, and firing in a reducing atmosphere. Except for changing the temperature as shown in Tables 1 and 2, a multilayer ceramic capacitor was prepared in the same manner as the sample No. 1, and its electrical characteristics were measured in the same manner.
第1表は各々の試料の基本成分と添加成分の組成を示し
、第2表はそれぞれの試料の焼成温度及び電気的特性を
示す。Table 1 shows the composition of the basic components and additive components of each sample, and Table 2 shows the firing temperature and electrical characteristics of each sample.
なお、第1表の基本成分の欄の1−〇、aは第1基本成
分子Bai+−x−zM、Lz) Oi+ (TL 1
−ITRy)02−2/2と第2基本成分(Barro
w)の割合をモルで示し、k−x−z、x、z、には、
前述した基本成分の組成式(1)の各元素の原子数の割
合を示す。Note that 1-〇 and a in the basic component column of Table 1 are the first basic component elements Bai+-x-zM, Lz) Oi+ (TL 1
-ITRy) 02-2/2 and the second basic component (Barro
The proportion of w) is shown in moles, and k-x-z, x, z,
The ratio of the number of atoms of each element in the compositional formula (1) of the basic components described above is shown.
求だ、Xの欄のMg、Znは、前述した基本成分の組成
式(1)のMの内容を示し、これらの欄にはこれ等の原
子数が示され、合計の欄にはこれ等の合計値(X値)が
示されている。Mg and Zn in the X column indicate the contents of M in the compositional formula (1) of the basic component mentioned above, the number of atoms of these is shown in these columns, and the number of these atoms is shown in the total column. The total value (X value) is shown.
Zの欄のCa及びSrは、基本成分の組成式(1)のし
の内容を示し、これ等の欄にはこれ等の原子数が示され
、合計の欄にはこれ等の合計値(Z値)が示されている
。Ca and Sr in the Z column indicate the contents of the composition formula (1) of the basic components, the numbers of these atoms are shown in these columns, and the total value ( Z value) is shown.
添加成分の添加量は基本成分100重量部に対する重量
部で示されている。添加成分のMOの内容の欄にはB
a O、M g O、Z n O、S r O及びCa
Oの割合がモル%で示されている。The amount of the additive component added is shown in parts by weight based on 100 parts by weight of the basic component. In the column of MO content of additive ingredients, B
a O, M g O, Z n O, S r O and Ca
The proportion of O is shown in mole %.
第2表において、静電容量の温度特性は、25℃の静電
容量を基準にした一55℃及び+125℃の静電容量変
化率が△(、、、f%)及び△Cog−(%)で、20
℃の静電容量を基準にし
た
5℃及び+
5℃の静電容量
変化率がΔ
(%)
及びΔC8,(%)
で
示されている。In Table 2, the temperature characteristics of capacitance are as follows: △(,,,f%) and △Cog-(%) ), 20
The capacitance change rates at 5°C and +5°C based on the capacitance at °C are shown as Δ(%) and ΔC8,(%).
第2表(1)
※印が付されたμ罪毛創七咬例
第2表(2)
※印が付された;り斗はH」舊愕
第2表(3)
※印が付されたシ艶翳劇七咬例
第2表(4)
※印が付されたシワ嘔お七咬例
第2表(5)
※印が付された試料は比較例
第1表及び第2表から明らかなようk、本発明に従う試
料によれば、非酸化性雰囲気中において、1200℃以
下の焼成で、比誘電率ε。Table 2 (1) ※marked μ sin hair wounds 7 bite cases Table 2 (2) ※marked; Rito is H" 舊芉Table 2 (3) ※marked Table 2 (4) of 7-bite cases marked with * Marked Table 2 (5) Samples marked with * are from Tables 1 and 2 of comparative examples As is clear, according to the sample according to the present invention, when fired at 1200°C or less in a non-oxidizing atmosphere, the relative dielectric constant ε.
が3000以上、誘電体損失tanδが2.5%以下、
抵抗率ρが1x106MΩ・cm以上、静電容量の温度
変化率△C−55及びΔC1□5が一15%〜+15%
の範囲内、静電容量の温度変化率△C−2,及びΔCs
sが一10%〜+10%の範囲内の電気的特性を有する
磁器コンデンサを得ることができるものである。is 3000 or more, dielectric loss tan δ is 2.5% or less,
Resistivity ρ is 1x106MΩ・cm or more, temperature change rate of capacitance ΔC-55 and ΔC1□5 is -15% to +15%
Within the range of temperature change rate of capacitance ΔC-2, and ΔCs
It is possible to obtain a ceramic capacitor having electrical characteristics in which s is in the range of -10% to +10%.
一方、No、 11−16.30,35,40゜41
、.45,46.49,50.55.58〜61.66
.67.71,75,87,96゜97.103及び1
04の試料によれば、所望の電気的特性を有する磁器コ
ンデンサを得ることができない。従って、これらの試料
は本発明の範囲外のものである。On the other hand, No, 11-16.30,35,40°41
,.. 45, 46.49, 50.55.58-61.66
.. 67.71, 75, 87, 96°97.103 and 1
According to sample No. 04, a ceramic capacitor having desired electrical characteristics could not be obtained. Therefore, these samples are outside the scope of this invention.
なお、第2表には静電容量の温度変化率ΔC−5a、八
C128+ ΔC−2s、ΔCasのみが示されている
が、本発明の範囲に属する試料の−25℃〜+85℃の
範囲の種々の静電容量の温度変化率ΔCは、−10%〜
+10%の範囲に収まり、また、−55℃〜+125℃
の範囲の種々の静電容量の温度変化率ΔCは、−15%
〜+15%の範囲に収まっている。−
次k、本発明に係る磁器コンデンサに用いられている誘
電体磁器組成物の組成範囲の限定理由について述べる。Table 2 shows only the temperature change rate of capacitance ΔC-5a, 8C128+ ΔC-2s, and ΔCas, but the temperature change rate of capacitance in the range of -25°C to +85°C of the samples belonging to the scope of the present invention is The temperature change rate ΔC of various capacitances is -10% to
Within the range of +10%, and -55℃ to +125℃
The rate of temperature change ΔC for various capacitances in the range -15%
It falls within the range of ~+15%. - Next, the reason for limiting the composition range of the dielectric ceramic composition used in the ceramic capacitor according to the present invention will be described.
X+Zの値が、試料No、50に示すようk、零の場合
には、ΔC−2,が一10%〜+10%の範囲外、ΔC
−5sが一15%〜+15%の範囲外となるが、X+2
の値が、試料No、51.52に示すようk、o、oi
の場合には、所望の電気的特性を有する誘電体磁器組成
物を得ることができる。従って、X+Zの値の下限は0
.01である。If the value of
-5s is outside the range of 115% to +15%, but X+2
The values of k, o, oi as shown in sample No. 51.52
In this case, a dielectric ceramic composition having desired electrical properties can be obtained. Therefore, the lower limit of the value of X+Z is 0
.. It is 01.
一方、x+zの値が、試料No、55.59゜60及び
66に示すようk、0.12の場合には、ΔC11sが
一1O%〜+10%の範囲外となるが、X+Zの値が5
試料No、57.62.63及び65に示すようk、0
.10の場合には、所望の電気的特性を有する誘電体磁
器組成物を得ることができる。On the other hand, when the value of x+z is k, 0.12 as shown in Sample No. 55.59°60 and 66, ΔC11s is outside the range of -10% to +10%, but the value of X+Z is 5
k, 0 as shown in sample No. 57, 62, 63 and 65
.. In the case of 10, a dielectric ceramic composition having desired electrical properties can be obtained.
但し、X+Zの値が試料No、61に示すようk、0.
06であっても、Zの値が0.05を越えてしまう場合
には所望の電気的特性を有する誘電体磁器組成物を得る
ことができない。However, as shown in sample No. 61, the value of X+Z is k, 0.
Even if Z is 0.06, if the value of Z exceeds 0.05, a dielectric ceramic composition having desired electrical characteristics cannot be obtained.
従って、X+Zの上限値は0.10であるが、同時にZ
の上限値は0.05にしなければならない。Therefore, the upper limit of X+Z is 0.10, but at the same time Z
The upper limit of must be 0.05.
なお、M成分のMgとZn及びL成分のCaとSrはは
f同様に働き2O<x<0.10を満足する範囲でMg
とZnの内の一方または両方を使用すること、またO<
z≦0.05を満足する範囲でCaとSrの内の一方又
は両方を使用することができる。そして、M成分及びL
成分の1種又は数種の何れの場合においても、X+Zの
値を0.01〜0.10の範囲にすることが望ましい。In addition, Mg and Zn of the M component and Ca and Sr of the L component work in the same way as f, and Mg and Zn in the range satisfying 2O<x<0.10.
and Zn or both, and O<
One or both of Ca and Sr can be used within a range that satisfies z≦0.05. Then, M component and L
It is desirable that the value of X+Z be in the range of 0.01 to 0.10, regardless of whether one component or several components are used.
yの値が、試料No、40に示すようk、0.06の場
合には緻密な焼結体を得ることができないが、yの値が
、試料No、39に示すようk、0.04の場合には所
望の電気的特性を有する誘電体磁器組成物を得ることが
できる。If the value of y is k, 0.06 as shown in sample No. 40, a dense sintered body cannot be obtained, but if the value of y is k, 0.04 as shown in sample No. 39, a dense sintered body cannot be obtained. In this case, a dielectric ceramic composition having desired electrical properties can be obtained.
従って、yの上限値は0.04である。Therefore, the upper limit of y is 0.04.
なお、R成分のSc、Y、Dy、Ho、Er。Note that the R components Sc, Y, Dy, Ho, and Er.
Ybははf同様に働き、これ等から選択された1つを使
用しても、又は複数を使用しても同様な結果が得られる
。そして、R成分が1種又は複数種のいずれの場合に於
ても、yの値を0.04以下の範囲にすることが望まし
い。また、yは0.04以下であれば、0に近い微量で
あってもそれなりの効果がある。Yb works in the same way as f, and the same result can be obtained even if one selected from them or a plurality of them are used. In any case where there is one type of R component or multiple types of R components, it is desirable that the value of y is in the range of 0.04 or less. Further, if y is 0.04 or less, even a small amount close to 0 will have a certain effect.
組成式中、Rで示す成分は、静電容量の温度特性の改善
に寄与する。即ち、R成分の添加によって一55℃〜1
25℃の範囲での静電容量の温度変化率ΔC4,,〜△
C118を−15%〜+15%の範囲に容易に収めるこ
とが可能になると共k、−25℃〜85℃の範囲での静
電容量の温度変化率ΔC−3,〜ΔCssを一10%〜
+10%の範囲に容易に収めることが可能になり、且つ
各温度範囲における静電容量の温度変化率の変動幅を小
さくすることができる。In the composition formula, the component represented by R contributes to improving the temperature characteristics of capacitance. That is, by adding the R component, the temperature
Temperature change rate of capacitance ΔC4,, ~△ in the range of 25℃
It becomes possible to easily keep C118 within the range of -15% to +15%, and the temperature change rate of capacitance ΔC-3, ~ΔCss in the range of -25°C to 85°C is -10% ~
It becomes possible to easily keep the capacitance within the range of +10%, and it is possible to reduce the fluctuation range of the temperature change rate of capacitance in each temperature range.
また、R成分は抵抗率ρを太き(する作用及び焼結性を
高める作用を有する。Further, the R component has the effect of increasing the resistivity ρ and the effect of increasing sinterability.
aの値が、試料No、41.46に示すようk、零の場
合には、静電容量の温度変化率ΔC−25が一10%〜
+10%の範囲外、△C−58が一15%〜+15%の
範囲外となるが、αの値が、試NNo、42.47に示
すようk、0.005の場合には、所望の電気的特性を
有する誘電体磁器組成物を得ることができる。従って、
αの下限値は0.005である。When the value of a is k, zero as shown in sample No. 41.46, the temperature change rate ΔC-25 of capacitance is -10% to
ΔC-58 is outside the range of +10% and ΔC-58 is outside the range of -15% to +15%, but if the value of α is k, 0.005 as shown in test NNo. 42.47, the desired A dielectric ceramic composition having electrical properties can be obtained. Therefore,
The lower limit value of α is 0.005.
一方、αの値が、試料No、45.49に示すようk、
0.05の場合には、静電容量の温度変化率ΔC86が
一1O%〜+10%の範囲外となるが、αの値が、試料
No、44.48に示すようk、0.04の場合には、
所望の電気的特性を有する誘電体磁器組成物を得ること
ができる。従って、αの上限値は0.04である。On the other hand, the value of α is k as shown in sample No. 45.49,
In the case of 0.05, the capacitance temperature change rate ΔC86 is outside the range of -10% to +10%, but the value of α is 0.04 as shown in sample No. 44.48. in case of,
A dielectric ceramic composition having desired electrical properties can be obtained. Therefore, the upper limit value of α is 0.04.
にの値が、試料No−67に示すようk、1.0よりも
小さい場合には、抵抗率ρが1×10’MΩ・cm未満
と、大幅に低くなるが、kが、試料No、68に示すよ
うk、1.00の場合には、所望の電気的特性を有する
誘電体磁器組成物を得ることができる。従って、kの下
限値は1.00である。When the value of k is smaller than 1.0 as shown in sample No. 67, the resistivity ρ becomes significantly lower than 1×10'MΩ・cm; As shown in No. 68, when k is 1.00, a dielectric ceramic composition having desired electrical characteristics can be obtained. Therefore, the lower limit value of k is 1.00.
一方、kの値が、試料No、71に示すようk、1.0
5より大きい場合には、緻密な焼結体が得られないが、
kの値が、試料No、70に示すようk、1.05の場
合には、所望の電気的特性を有する誘電体磁器組成物を
得ることができる。従って、kの上限値はl 05であ
る。On the other hand, the value of k is 1.0 as shown in sample No. 71.
If it is larger than 5, a dense sintered body cannot be obtained, but
When the value of k is 1.05 as shown in Sample No. 70, a dielectric ceramic composition having desired electrical characteristics can be obtained. Therefore, the upper limit of k is l 05.
Croom及び/又はAll0.から成る第1添加成分
の添加量が、試料No、96゜97.103及び104
に示すようk、3.0重量部よりも多い場合には、12
50℃で焼成しても緻密な焼結体が得られないが、試料
No。Croom and/or All0. The added amount of the first additive component consisting of sample No. 96°97.103 and 104
As shown in , if k is more than 3.0 parts by weight, 12
Although a dense sintered body cannot be obtained even if fired at 50°C, sample No.
95.102に示すようk、添加量が3.0重量部の場
合には、所望の電気的特性を有する誘電体磁器組成物を
得ることができる。従って、第1添加成分の上限は3.
0重量部である。As shown in 95.102, when k is added in an amount of 3.0 parts by weight, a dielectric ceramic composition having desired electrical properties can be obtained. Therefore, the upper limit of the first additive component is 3.
It is 0 parts by weight.
第1添加成分は3.0重量部以下の範囲において極(微
量であってもそれなりの効果を有する。The first additive component has a certain effect even in a very small amount within a range of 3.0 parts by weight or less.
しかし、量産する時の電気的特性のバラツキを考膚して
0.001重量部以上添加することが望ましい。However, in consideration of variations in electrical properties during mass production, it is desirable to add 0.001 part by weight or more.
なお、第1添加成分のCr z OsとA l t O
sとははヅ同様に働き、これ等から選択された1つを使
用しても、又は複数を使用しても同様な結果が得られる
。そして、第1添加成分が1種又は複数種の何れの場合
に於いても添加量は3.0重量部以下の範囲にすること
が望ましい。Note that the first additive components Cr z Os and Al t O
s works in the same way as , and the same result can be obtained even if one selected from these is used or a plurality of them are used. Whether the first additive component is one type or multiple types, the amount added is desirably within a range of 3.0 parts by weight or less.
この第1添加成分は、静電容量の温度特性の改善に寄与
する。即ち、第1添加成分の添加によって一55℃〜1
25℃の範囲での静電容量の温度変化率ΔC−@!1〜
ΔC1□を一15%〜+15%の範囲に容易に収めるこ
とが可能になると共k、−25℃〜85℃の範囲での静
電容量の温度変化率Δc−Is〜ΔCasを一1O%〜
+ 1.0%の範囲に容易に収めることが可能になり、
且つ各温度範囲における静電容量の温度変化率の変動幅
を小さくすることができる。This first additive component contributes to improving the temperature characteristics of capacitance. That is, by adding the first additive component, the temperature of -55°C to 1
Temperature change rate of capacitance ΔC-@! in the range of 25℃! 1~
It becomes possible to easily keep ΔC1□ in the range of -15% to +15%, and the temperature change rate of capacitance Δc-Is to ΔCas in the range of -25°C to 85°C can be set to -10% to
It becomes possible to easily keep it within the range of +1.0%,
In addition, the fluctuation width of the temperature change rate of capacitance in each temperature range can be reduced.
また、第1添加成分は抵抗率ρを大きくする作用を若干
有する。Further, the first additive component has the effect of slightly increasing the resistivity ρ.
第2添加成分の添加量が零の場合には、試料No、30
に示すようk、焼成温度が1250℃であっても緻密な
焼結体が得られないが、添加量が100重量部の基本成
分に対して0.2重量部の場合には、試料No、31に
示すように。When the amount of the second additive component is zero, sample No. 30
As shown in k, even if the firing temperature is 1250°C, a dense sintered body cannot be obtained, but when the amount added is 0.2 parts by weight per 100 parts by weight of the basic components, sample No. As shown in 31.
1200℃の焼成で所望の電気的特性を有する焼結体が
得られる。従って、第2添加成分の下限は0.2重量部
である。A sintered body having desired electrical properties can be obtained by firing at 1200°C. Therefore, the lower limit of the second additive component is 0.2 parts by weight.
一方、試料No、35に示すようk、第2添加成分の添
加量が7.0重量部の場合には、比誘電率ε1が300
0未満となり、更に八Cpsが一10%〜+10%の範
囲外となるが、試料No−34に示すようk、添加量が
5.0重量部の場合には、所望の電気的特性を有する焼
結体が得られる。従って、第2添加成分の添加量の上限
は5.0重量部である。On the other hand, as shown in sample No. 35, when the amount of the second additive component is 7.0 parts by weight, the dielectric constant ε1 is 300 parts by weight.
However, as shown in sample No. 34, when the amount added is 5.0 parts by weight, it has the desired electrical characteristics. A sintered body is obtained. Therefore, the upper limit of the amount of the second additive component added is 5.0 parts by weight.
第2添加成分の好ましい組成は、第2図のL 120
S i、 Oz MOの組成比を示す三角図に基づ
いて決定することができる。A preferred composition of the second additive component is L 120 in FIG.
S i,Oz It can be determined based on a triangular diagram showing the composition ratio of MO.
三角図の第1の点Aは、試料No、1のL i z O
が1モル%、S iOzが80モル%、MOが19モル
%の組成を示し、第2の点Bは、試料No、2のLi、
0が1モル%、SiO2が39モル%、MOが60モル
%の組成を示し、第3の点Cは、試料No、、3のL
l 20が30モル%、S i Oxが30モル%、M
Oが40モル%の組成を示し、第4の点りは試料No、
4のLi、0が50モル%、S i O2が50モル%
、MOが0モル%の組成を示し、第5の点Eば、試料N
o−5(7)LiaOが20モJI、%、Sin。The first point A in the triangular diagram is L i z O of sample No. 1.
is 1 mol%, SiOz is 80 mol%, MO is 19 mol%, and the second point B is Li of sample No. 2,
0 is 1 mol%, SiO2 is 39 mol%, MO is 60 mol%, and the third point C is the L of sample No. 3.
l20 is 30 mol%, S i Ox is 30 mol%, M
O shows a composition of 40 mol%, and the fourth spot is sample No.
4 Li, 0 is 50 mol%, S i O2 is 50 mol%
, exhibits a composition of 0 mol% MO, and if the fifth point E, sample N
o-5 (7) LiaO is 20 mo JI, %, Sin.
が80モル%、MOが0モル%の組成を示す。has a composition of 80 mol % and 0 mol % of MO.
本発明の範囲に属する試料の添加成分の組成は第2図に
示す三角図の第1〜5の点A−’Eをこの順に結ぶ5本
の直線で囲まれた領域内の組成になっている。この領域
内の組成とすれば、所望の電気的特性を得ることができ
る。The composition of the additive components of the sample that falls within the scope of the present invention is within the area surrounded by five straight lines connecting points 1 to 5 in this order in the triangular diagram shown in Figure 2. There is. If the composition is within this range, desired electrical characteristics can be obtained.
一方、第2添加成分の組成が本発明で特定した範囲外と
なれば、試料No、11〜16に示すようk、緻密な焼
結体を得ることができない。On the other hand, if the composition of the second additive component is outside the range specified in the present invention, dense sintered bodies cannot be obtained as shown in Sample Nos. 11 to 16.
なお、MO酸成分、例えば試料No、17〜21に示す
ようk、B a O、M g O、Z n O。In addition, MO acid components such as k, B a O, M g O, and Z n O as shown in sample Nos. 17 to 21.
SrO,CaOのいずれか1つであってもよいし、また
は他の試料に示すように適当な比率としてもよい。It may be either one of SrO or CaO, or it may be in an appropriate ratio as shown in other samples.
[発明の効果コ
本発明によれば、誘電体磁器組成物の組成を前述したよ
うにしたので、比誘電率が3000以上、誘電体損失t
anδが2.5%以下、抵抗率ρがlX10’MΩ・c
m以上であり、且つ比誘電率の温度変化率が、−55℃
〜125℃で一15%〜+15%(25℃を基準)、−
25℃〜85℃で一10%〜+10%(20℃を基準)
の範囲に収まる誘電体磁器組成物を備えた磁器コンデン
サを提供することができる。[Effects of the Invention] According to the present invention, since the composition of the dielectric ceramic composition is as described above, the dielectric constant is 3000 or more and the dielectric loss t is
anδ is 2.5% or less, resistivity ρ is lX10'MΩ・c
m or more, and the temperature change rate of the relative permittivity is -55°C
-15% to +15% at ~125℃ (based on 25℃), -
-10% to +10% at 25℃ to 85℃ (based on 20℃)
It is possible to provide a ceramic capacitor with a dielectric ceramic composition falling within the range of .
また、本発明によれば、非酸化性雰囲気中において12
00℃以下の温度で焼成して得ることができるので、ニ
ッケル等の卑金属の導電性ペーストをグリーンシートに
塗布し、グリーンシートと導電性ペーストとを同時に焼
成する方法によって磁器コンデンサを製造することがで
きる。Further, according to the present invention, in a non-oxidizing atmosphere, 12
Since it can be obtained by firing at a temperature of 00°C or less, it is possible to manufacture a ceramic capacitor by applying a conductive paste of a base metal such as nickel to a green sheet and firing the green sheet and the conductive paste at the same time. can.
第1図は本発明の実施例に係わる積層型磁器コンデンサ
を示す断面図、第2図は第2添加成分の組成範囲を示す
三角図である。
12・・・磁器層、14・・・内部電極、16・・−外
部電極。FIG. 1 is a sectional view showing a multilayer ceramic capacitor according to an embodiment of the present invention, and FIG. 2 is a triangular diagram showing the composition range of the second additive component. 12...Porcelain layer, 14...Internal electrode, 16...-External electrode.
Claims (1)
電体磁器層を挟持している少なくとも2以上の内部電極
とを備えた磁器コンデンサにおいて、 前記誘電体磁器組成物が、100重量部の基本成分と、
3.0重量部以下の第1添加成分と、0.2〜5重量部
の第2添加成分との混合物を焼成したものからなり、 前記基本成分が (1−α){(Ba_k_−_x_−_zM_xL_z
)O_k(Ti_1_−_yR_y}O_2_−_y_
/_2}+αBaZrO_3(但し、MはMg及び/又
はZn、LはCa及び/又はSr、RはSc、Y、Gd
、Dy、Ho、Er、Yb、Tb、Tm、Luから選択
された1種または2種以上の金属、α、k、x、z、y
は 0.005≦α≦0.04 1.00≦k≦1.05 0<x<0.10 0<z≦0.05 0.01≦x+z≦0.10 0<y≦0.04 を満足する数値)で表わされる物質からなり、前記第1
添加成分がCr_2O_3及び/又はAl_2O_3か
らなり、 前記第2添加成分がLi_2OとSiO_2とMO(但
し、MOはBaO、SrO、CaO、MgO及びZnO
から選択された1種または2種以上の金属酸化物)とか
らなり、 前記Li_2Oと前記SiO_2と前記MOとの組成範
囲が、これらの組成をモル%で示す三角図における、 前記Li_2Oが1モル%、前記SiO_2が80モル
%、前記MOが19モル%の組成を示す第1の点Aと、 前記Li_2Oが1モル%、前記SiO_2が39モル
%、前記MOが60モル%の組成を示す第2の点Bと、 前記Li_2Oが30モル%、前記SiO_2が30モ
ル%、前記MOが40モル%の組成を示す第3の点Cと
、 前記Li_2Oが50モル%、前記SiO_2が50モ
ル%、前記MOが0モル%の組成を示す第4の点Dと、 前記Li_2Oが20モル%、前記SiO_2が80モ
ル%、前記MOが0モル%の組成を示す第5の点Eと をこの順に結ぶ5本の直線で囲まれた領域内にあること
を特徴とする磁器コンデンサ。 2.未焼結の磁器粉末からなる混合物を調製する工程と
、前記混合物からなる未焼結磁器シートを形成する工程
と、前記未焼結磁器シートを少なくとも2以上の導電性
ペースト膜で挟持させた積層物を形成する工程と、前記
積層物を非酸化性雰囲気中において焼成する工程と、前
記焼成を受けた積層物を酸化性雰囲気中において熱処理
する工程とを備え、 前記未焼結の磁器粉末からなる混合物が、 100重量部の基本成分と、3.0重量部以下の第1添
加成分と、0.2〜5重量部の第2添加成分とからなり
、 前記基本成分が (1−α)((Ba_k_−_x_−_zM_xL_z
)O_k(Ti_1_−_yR_y)O_2_−_y_
/_2}+αBaZrO_3 (但し、MはMg及び/又はZn、LはCa及び/又は
Sr、RはSc、Y、Gd、Dy、Ho、Er、Yb、
Tb、Tm、Luから選択された1種または2種以上の
金属、α、k、x、z、yは 0.005≦α≦0.04 1.00≦k≦1.05 0<x<0.10 0<z≦0.05 0.01≦x+z≦0.10 0<y≦0.04 を満足する数値)で表わされる物質からなり、前記第1
添加成分がCr_2O_3及び/又はAl_2O_3か
らなり、 前記第2添加成分がLi_2OとSiO_2とMO(但
し、MOはBaO、SrO、CaO、MgO及びZnO
から選択された1種または2種以上の金属酸化物)とか
らなり、 前記Li_2Oと前記SiO_2と前記MOとの組成範
囲が、これらの組成をモル%で示す三角図における、 前記Li_2Oが1モル%、前記SiO_2が80モル
%、前記MOが19モル%の組成を示す第1の点Aと、 前記Li_2Oが1モル%、前記SiO_2が39モル
%、前記MOが60モル%の組成を示す第2の点Bと、 前記Li_2Oが30モル%、前記SiO_2が30モ
ル%、前記MOが40モル%の組成を示す第3の点Cと
、 前記Li_2Oが50モル%、前記SiO_2が50モ
ル%、前記MOが0モル%の組成を示す第4の点Dと、 前記Li_2Oが20モル%、前記SiO_2が80モ
ル%、前記MOが0モル%の組成を示す第5の点Eと をこの順に結ぶ5本の直線で囲まれた領域内にあること
を特徴とする磁器コンデンサの製造方法。[Claims] 1. A ceramic capacitor comprising a dielectric ceramic layer made of a dielectric ceramic composition and at least two or more internal electrodes sandwiching the dielectric ceramic layer, wherein the dielectric ceramic composition contains 100 parts by weight of the basic ingredients and
It is made by baking a mixture of 3.0 parts by weight or less of the first additive component and 0.2 to 5 parts by weight of the second additive component, and the basic component is (1-α) {(Ba_k_-_x_- _zM_xL_z
)O_k(Ti_1_-_yR_y}O_2_-_y_
/_2}+αBaZrO_3 (where M is Mg and/or Zn, L is Ca and/or Sr, R is Sc, Y, Gd
, Dy, Ho, Er, Yb, Tb, Tm, one or more metals selected from Lu, α, k, x, z, y
is 0.005≦α≦0.04 1.00≦k≦1.05 0<x<0.10 0<z≦0.05 0.01≦x+z≦0.10 0<y≦0.04 satisfying the above-mentioned first
The additive component consists of Cr_2O_3 and/or Al_2O_3, and the second additive component consists of Li_2O, SiO_2, and MO (However, MO is BaO, SrO, CaO, MgO, and ZnO.
(one or more metal oxides selected from), and the composition range of the Li_2O, the SiO_2, and the MO is such that the Li_2O is 1 mol in the triangular diagram showing these compositions in mol%. %, a first point A having a composition of 80 mol% of the SiO_2 and 19 mol% of the MO, and a composition of 1 mol% of the Li_2O, 39 mol% of the SiO_2, and 60 mol% of the MO. a second point B; a third point C having a composition of 30 mol% of the Li_2O, 30 mol% of the SiO_2, and 40 mol% of the MO; 50 mol% of the Li_2O and 50 mol% of the SiO_2; %, a fourth point D having a composition of 0 mol% of the MO, and a fifth point E having a composition of 20 mol% of the Li_2O, 80 mol% of the SiO_2, and 0 mol% of the MO. A ceramic capacitor characterized by being located within an area surrounded by five straight lines connected in this order. 2. A step of preparing a mixture made of unsintered porcelain powder, a step of forming an unsintered porcelain sheet made of the mixture, and a lamination in which the unsintered porcelain sheet is sandwiched between at least two or more conductive paste films. forming a product, firing the laminate in a non-oxidizing atmosphere, and heat-treating the fired laminate in an oxidizing atmosphere, from the unsintered porcelain powder. The mixture consists of 100 parts by weight of the basic component, 3.0 parts by weight or less of the first added component, and 0.2 to 5 parts by weight of the second added component, and the basic component is (1-α). ((Ba_k_−_x_−_zM_xL_z
)O_k(Ti_1_-_yR_y)O_2_-_y_
/_2}+αBaZrO_3 (However, M is Mg and/or Zn, L is Ca and/or Sr, R is Sc, Y, Gd, Dy, Ho, Er, Yb,
One or more metals selected from Tb, Tm, and Lu, α, k, x, z, and y are 0.005≦α≦0.04 1.00≦k≦1.05 0<x< 0.10 0<z≦0.05 0.01≦x+z≦0.10 0<y≦0.04), and the first
The additive component consists of Cr_2O_3 and/or Al_2O_3, and the second additive component consists of Li_2O, SiO_2, and MO (However, MO is BaO, SrO, CaO, MgO, and ZnO.
(one or more metal oxides selected from), and the composition range of the Li_2O, the SiO_2, and the MO is such that the Li_2O is 1 mol in the triangular diagram showing these compositions in mol%. %, a first point A having a composition of 80 mol% of the SiO_2 and 19 mol% of the MO, and a composition of 1 mol% of the Li_2O, 39 mol% of the SiO_2, and 60 mol% of the MO. a second point B; a third point C having a composition of 30 mol% of the Li_2O, 30 mol% of the SiO_2, and 40 mol% of the MO; 50 mol% of the Li_2O and 50 mol% of the SiO_2; %, a fourth point D having a composition of 0 mol% of the MO, and a fifth point E having a composition of 20 mol% of the Li_2O, 80 mol% of the SiO_2, and 0 mol% of the MO. A method for manufacturing a ceramic capacitor, characterized in that the capacitor is located within an area surrounded by five straight lines connected in this order.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076774A JPH03278422A (en) | 1990-03-28 | 1990-03-28 | Porcelain capacitor and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076774A JPH03278422A (en) | 1990-03-28 | 1990-03-28 | Porcelain capacitor and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03278422A true JPH03278422A (en) | 1991-12-10 |
Family
ID=13614937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2076774A Expired - Lifetime JPH03278422A (en) | 1990-03-28 | 1990-03-28 | Porcelain capacitor and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03278422A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0780856A3 (en) * | 1995-12-20 | 1998-01-14 | Murata Manufacturing Co., Ltd. | Dielectric ceramic composition and use thereof for monolithic ceramic capacitor |
| CN1091539C (en) * | 1996-07-19 | 2002-09-25 | 株式会社村田制作所 | Monolithic ceramic capacitor |
-
1990
- 1990-03-28 JP JP2076774A patent/JPH03278422A/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0780856A3 (en) * | 1995-12-20 | 1998-01-14 | Murata Manufacturing Co., Ltd. | Dielectric ceramic composition and use thereof for monolithic ceramic capacitor |
| CN1076510C (en) * | 1995-12-20 | 2001-12-19 | 株式会社村田制作所 | Monolithic ceramic capacitor |
| CN1091539C (en) * | 1996-07-19 | 2002-09-25 | 株式会社村田制作所 | Monolithic ceramic capacitor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0355002B2 (en) | ||
| JPH0552604B2 (en) | ||
| JPH02228019A (en) | Porcelain capacitor and manufacture thereof | |
| JPH02228015A (en) | Porcelain capacitor and manufacture thereof | |
| JPH03278422A (en) | Porcelain capacitor and manufacture thereof | |
| JPH02228014A (en) | Porcelain capacitor and manufacture thereof | |
| JPH03278423A (en) | Porcelain capacitor and manufacture thereof | |
| JPH03278424A (en) | Porcelain capacitor and manufacture thereof | |
| JPH07272971A (en) | Ceramic capacitor and its manufacture | |
| JPH03177010A (en) | Ceramic capacitor and manufacture thereof | |
| JPH0532892B2 (en) | ||
| JPH03278415A (en) | Porcelain capacitor and manufacture thereof | |
| JPH0234550A (en) | Dielectric porcelain composition | |
| JPH03278421A (en) | Porcelain capacitor and manufacture thereof | |
| JPH0234553A (en) | Dielectric porcelain composition | |
| JPH0525378B2 (en) | ||
| JPH0532895B2 (en) | ||
| JPH03278416A (en) | Porcelain capacitor and manufacture thereof | |
| JPH03278418A (en) | Porcelain capacitor and manufacture thereof | |
| JPH0525376B2 (en) | ||
| JPH03177008A (en) | Ceramic capacitor and manufacture thereof | |
| JPH03159110A (en) | Porcelain capacitor and its manufacture | |
| JPH0530044B2 (en) | ||
| JPH0525379B2 (en) | ||
| JPH03278417A (en) | Porcelain capacitor and manufacture thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090618 Year of fee payment: 16 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100618 Year of fee payment: 17 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100618 Year of fee payment: 17 |