JPH03280603A - Automatic trimming device for electronic component - Google Patents

Abstract

PURPOSE:To prevent overcut and to decrease the fraction defective by obtaining a relation between a cutting amount and a change in the characteristic as to plural electronic components, storing the maximum change and refering to the stored result so as to decide the cutting amount. CONSTITUTION:The device is provided with a storage means storing information relating to a characteristic change of an electronic component with respect to a cutting amount, an arithmetic means 410 to obtain the cutting amount by referencing the information stored in the storage means from the result of measurement obtained by a measuring means 300 and a drive control means 403 driving a cutting direction moving mechanism in response to the cutting amount obtained by the arithmetic means 410. That is, an electronic component among plural electronic components having a maximum change in the characteristic with respect to the unit cutting amount is stored in the storage means and the cutting amount is obtained based on a difference between the result of the measurement and the object characteristic value by referencing the stored result. Thus, excess cutting amount is prevented and the excess of cutting amount in excess of the standards is prevented.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to an automatic trimming device for trimming (correcting) the transmission characteristics of electronic components such as dielectric resonators to desired ones. [Conventional technology]

For example, a dielectric resonator has a configuration in which an outer conductor is adhered to the outer surface of a rectangular parallelepiped dielectric block, and an inner conductor is adhered to the inner wall surface of a through hole provided in the dielectric block. have Japanese Unexamined Patent Publication No. Sho Ei4-1310 discloses an example of this type of dielectric resonator. That is, as shown in FIG. 21, the dielectric resonator W as an example of this dielectric electronic component is constructed by attaching a rectangular parallelepiped-shaped dielectric block 1 made of ceramic or the like to the opposing surfaces of the block 1, as shown in the figure. In the example, two through holes 2 are provided that penetrate between the top surface 1a and the bottom surface 1b. An inner conductor 3 made of metal such as silver is adhered to the inner wall surface of the through hole 2 by plating or printing. Further, an outer conductor 4 made of a metal film is similarly formed on the four side surfaces of the dielectric block 1 and, in this case, on the bottom surface 1b. In this case, the inner conductor 3 is connected to the outer conductor 4 at the bottom surface 1b. Therefore, in this example, the top surface 1a of the dielectric block 1 is an open end surface, and the bottom surface 1b is a terminal end surface. Further, an electromagnetic field coupling through hole 5 is formed between the through holes 2 for forming the inner conductor 3. The two resonators are coupled and integrated through the coupling hole 5. Further, on the upper surface 1a, which is the open end surface of the dielectric block 1, a conductor film 6 is formed to be exposed in a direction approaching the electromagnetic coupling hole 5 from the outer conductor on the mutually opposing side surfaces of the dielectric block. This conductive film 6 is for adjusting the coupling coefficient of the two resonators. That is, as shown in FIG. 22, the coupling coefficient between two resonators changes depending on the relationship between the width dimension A of the dielectric block 1 and the width direction dimension B of the coupling hole, and when B/A is large, There is a relationship in which the coupling coefficient becomes larger. When the conductive film 6 is provided, the width dimension A of the dielectric block near the coupling hole 5 is equivalently reduced, and B/A is increased. Therefore, by adjusting the amount of extension of the conductor film 6 from the outer conductor 4 and its shape, the coupling coefficient can be easily adjusted, and the resonance frequency can be adjusted. In this way, a dielectric resonator having a desired coupling coefficient and desired frequency characteristics is manufactured. However, although the conductive film 6 is formed by printing, etc., the printing accuracy may deviate from the desired printing position as shown by the dotted line in FIG. The distance d may not be a predetermined value. Furthermore, since the conductive film 6 is formed by silk printing or the like,
As shown in FIG. 24, the edge 6a of the pattern of the conductor film 6
It has the disadvantage of poor linearity. Therefore, the desired coupling coefficient cannot be obtained by the conductor film 6, and the frequency characteristics also deviate from the desired ones. That is, if the width of the conductor film 6 is l as shown in FIG.
The capacitance C between them is proportional to i'/d2. Therefore, if there is uneven printing or poor linearity of the conductor film pattern, the capacitance will not be as expected, and therefore,
The frequency characteristics of the dielectric resonator W deviate from the desired frequency characteristics. Therefore, in general, a manufactured dielectric resonator is measured to see if it has the desired frequency characteristics, and if it does not have the desired characteristics, the through hole 2 on the open end surface of the dielectric resonator is
, 2, the edge of the open end face, and one edge of the printed metal conductor film 6 are trimmed (corrected) to have desired frequency characteristics. Note that in the case of a dielectric resonator, when cutting is performed, the resonant frequency changes only in the higher direction. By the way, conventionally, there is no device that automatically performs this trimming, and the measurement and trimming are performed as follows. That is, the operator first measures the resonant frequency of the dielectric resonator using a measuring device, and checks whether the resonant frequency fc is within the standard range, higher than the standard range, or lower than the standard range. When the resonance frequency is high, adjustment is no longer possible and the product is rejected as a defective product. When the resonance frequency is low, the operator uses a cutting device to cut the cut portion of the electronic component by a predetermined amount. Next, the dielectric resonator after cutting is measured again, and if it still does not fall within the standard range, cutting is performed. Repeat the above steps and adjust the resonance frequency so that it falls within the standard range. At this time, the cutting work is performed with care so that the resonance frequency does not become higher than the standard value.

[Problem to be solved by the invention]

As described above, in the past, the efficiency of the trimming process was very poor because the measurement and cutting operations were performed manually by the operator. In addition, if the resonant frequency becomes higher than the standard value, trimming becomes impossible and the dielectric resonator becomes a defective product. Therefore, if you try to modify the characteristics in a short time by reducing the number of cutting operations, , the defective rate becomes high. For this reason, the amount of cutting per cutting process is reduced,
It is necessary to repeat measurement and cutting multiple times to ensure that it is within the standard range, and it takes a long time to correct the characteristics. In addition, as described above, the operator must perform the cutting process while being careful not to cause the resonance frequency to exceed the standard value, so the operator must be highly skilled. In view of the above points, the present invention allows the trimming process consisting of characteristic measurement and cutting to be performed automatically, and furthermore,
An object of the present invention is to provide an automatic trimming device that can correct characteristics accurately and at high speed.

[Means to solve the problem]

An automatic trimming device according to the present invention includes a clamp mechanism for fixing an electronic component, a measuring means for measuring characteristics of the electronic component, a cutting tool including a cutting member, and a cutting tool for applying the cutting member to a cut portion of the electronic component. a contact direction moving mechanism for moving the cutting tool or the electronic component so that the cutting tool or the electronic component is in contact with the cutting member; a cutting direction moving mechanism for moving the electronic component in the cutting direction; a storage means for storing information regarding a change in characteristics of the electronic component with respect to the amount of cutting; and receiving a measurement result obtained by the measurement means and storing the measurement result in the storage means. The present invention is characterized in that it includes a calculation means for determining the amount of cutting by referring to the information obtained by the calculation, and a drive control means for driving the cutting direction movement mechanism in accordance with the amount of grinding determined by the calculation means. Further, the present invention provides means for obtaining information regarding changes in characteristics of the electronic component with respect to the amount of cutting, and when determining changes in characteristics of a plurality of electronic components with respect to the amount of cutting,
The present invention is characterized in that the information whose characteristics change the most with respect to the unit cutting amount is stored in the storage means. Further, in the present invention, the cut portion of the electronic component is cut by a predetermined amount, and the cutting for modifying the characteristics is performed using the position where the cut is made by the predetermined amount as the origin of the modification. It is characterized by what it did.

[Effect]

According to the invention configured as described above, the characteristics of the electronic component are measured by the measuring means, and the measurement results are sent to the calculating means. The calculation means refers to information regarding changes in characteristics of the electronic component with respect to the amount of cutting stored in the storage means, and determines the amount of cutting based on the difference between the measurement result and the target characteristic value. Information on this amount of cutting is sent to the control means, and the control means controls the cutting direction movement mechanism to relatively move the cutting member by a distance corresponding to the amount of cutting, thereby cutting the dielectric electronic component. It will be done. The storage means stores one of the characteristic changes with respect to the cutting amount of the plurality of electronic components, which has the largest change in characteristic with respect to the unit cutting amount. This prevents the characteristics from exceeding standard values when cutting is performed with the cutting amount determined from the measurement results by referring to the memory contents of this storage means, even if there is variation in the change in characteristics with respect to the amount of cutting. It becomes possible to prevent this. Furthermore, prior to performing cutting for correction, the cut portion of the electronic component is cut by a predetermined amount. Then, cutting for correction is performed using the cutting position as the origin. Therefore, even if there are variations in the position of the cutting part, or even if the cutting member wears out due to wear and the origin position changes, cutting can always be performed from a constant origin position, resulting in accurate cutting. Can be cut.

【Example】

Hereinafter, one embodiment of the automatic trimming device for electronic components according to the present invention will be described with reference to the drawings, taking as an example the case where the resonant frequency of the dielectric resonator W shown in FIG. 21 is trimmed. FIG. 1 shows an overview of the entire mechanical components of the trimming device of this example. In this case, the size of the dielectric resonator W in this example is such that the length in the direction of the through hole 2 of the dielectric block 1 is 7 to 12 mm, the open end face and the end face are a square of 6 fins x 8 to 20 squares, The inner diameter of the through hole 2 is 2.2+l1m. As shown in FIG. 1, this dielectric resonator W is
It is placed on a mounting table 211 also made of metal, which is provided on a workbench 210 made of a metal conductor, with its - side surface being in contact with the mounting surface, and the through hole 2 being parallel to the mounting surface. has been done. Then, the dielectric resonator W is attached to the clamp mechanism 2 in a state where the end face facing the opening of the through hole 2 is exposed to the outside.
12 and is positioned and fixed on the mounting table 211. FIG. 2 is a plan view of the clamp mechanism 212 of this example, and FIG. 3 is a side view thereof. In the figure, 220 and 222 are rotating shafts, which are rotatably supported by housing members 221 and 223. The housing parts 221, 223 are screwed to the base 232, for example. The rotating shafts 220 and 222 extend parallel to the plane of the base 232, that is, in the horizontal direction, and are attached parallel to each other. Rotating bodies, in this example pinions 224 and 226, are press-fitted and fixed to the rotating shafts 220 and 222, respectively. In this case, as shown in FIG.
No. 4,226 has a notch-like portion, for example, a fan-shaped portion having a 120° angle range. A mounting table 211 whose height is lower than the position connecting the center lines of the rotating shafts 220 and 222 by an amount corresponding to the height of the dielectric resonator W to be clamped is mounted on the base 232 between the housing members 221 and 223, for example. Attached with screws. Then, the dielectric resonator W is carried in from above and placed on this mounting table 211. In this case, the distance from the center line position of the rotating shaft 220, 222 to the side end of the dielectric resonator W placed on the mounting table 211 is shorter than the radius of the pinion 224, 226. , pinions 224 and 226 are directed toward the dielectric resonator W, so that the pinions 22 and 22 can be easily loaded onto the mounting table 211 from above.
4.2213 can be kept out of the way. For this reason, the end faces of the notch-shaped portion intersect with the rotation direction of the pinions 224 and 22B, in this example, the two end faces 225a, 225b and the two end faces 227a are substantially orthogonal. The angular range of the cutout portion sandwiched by 227b is such that the pinion 22
4.226 is selected as an angle that does not get in the way, and the angular range of 120° is an example of this. In addition, considering that the size of the dielectric resonator W changes not only in the height direction but also in the length direction, in this example, the housing member 221 is attached to the base 232 by mounting position change guides 242 and 244. The mounting position can be changed along the axis, and the distance between the housing member 223, which is fixed in position (the distance between the rotating shafts 220 and 222), can be changed. Then, the rack teeth 2 are connected to the pinions 224 and 226.
29.231 are engaged. This rack tooth 229.23
1 is formed along the longitudinal direction of a rack plate 22L23 (l) whose longitudinal direction is perpendicular to the plane of the base 232. The rack plates 228, 230 are arranged to support the piston rods of the air cylinder mechanisms 238, 240. 234,
It is screwed to 236. Therefore, the air cylinder mechanisms 238 and 240 cause the rack plates 228 and 23 to
0 moves up and down in the direction of the arrow, and along with this, the rack teeth 229,
Pinions 224 and 226 with which 231 is engaged are rotated about rotational shafts 220 and 222 in the direction of the arrow. Note that a through hole 233 is formed in the base 232, and an air cylinder mechanism 238,
240 is configured to move the rack plates 228, 230 up and down. Next, the operation of this clamp device will be explained. First, before the dielectric resonator W is loaded onto the mounting table 211, the air cylinder mechanisms 238 and 240 are adjusted so that the rotation angle positions of the pinions 224 and 228 are as follows.
The end face 2 of the pinion 224° 226 whose notched portion faces the dielectric resonator W side and faces the upper surface of the dielectric resonator W.
25a and 227a are placed far away from the top surface of dielectric resonator W(7). Therefore, pinion 22
The space above the mounting table 211 is made free by the notch-shaped portions 4,228, so that the space above the mounting table 211 is not obstructed when the dielectric resonator W is carried in from above. This position is located at the end surfaces 225a, 2 of the notch-shaped portions of the pinions 224, 226.
The rotational angular position is, for example, 60° before the rotational angular position where 27a abuts both ends of the dielectric resonator W. When the dielectric resonator W is carried in and placed on the mounting table 211, this is detected by, for example, a sensor (not shown) provided on the mounting table 211, and the air cylinder mechanism 238 is activated according to the detection output. , 240 are driven, and the rack plates 228, 230 are pushed upward. This results in
The pinion 224 that meshes with the rack teeth 229 rotates clockwise, and the pinion 226 that meshes with the rack teeth 231 rotates counterclockwise. It comes into contact with both ends of the upper surface of W. Air cylinder mechanism 238, 2
40 acts to rotate the pinions 224 and 226 to an additional rotational angular position than this rotational angular position, and the dielectric resonator W
is clamped so as to be pressed against the mounting table 211. In this case, through engagement with rack plates 228, 230 that move linearly by air cylinder mechanisms 238, 240,
The pinions 224 and 226 rotate, and the dielectric resonator W is clamped by the rotational force thereof, so that the dielectric resonator W can be securely fixed to the mounting table 2]1. Moreover, by controlling the way air pressure is applied to the air cylinder mechanisms 238, 240 and making the movement speed of the rack plates 228, 230 appropriate, the end surfaces 225a and 227a of the notched portions of the pinions 224, 226 are caused to resonate with the dielectric material. It can be brought into soft contact with the edge of the upper surface of the container W without impact. Therefore, there is no fear that the dielectric resonator will be damaged during clamping. Next, when carrying out the dielectric resonator W from the mounting table 211, the rack plates 22111 and 230 are pushed down by the air cylinder mechanisms 238 and 240, so that the pinions 224 and 226 are moved in the opposite direction to the above, respectively. It is rotated and returned to the same position as when the dielectric resonator W was brought in. Thereafter, the dielectric resonator W is taken out and the next dielectric resonator W is brought in, and this process is repeated thereafter. In this case, when the height of the dielectric resonator W changes, the rotation angles of the pinions 224 and 228 change. That is, this problem can be easily dealt with by simply changing the air pressure of the air cylinder mechanisms 238, 240. Further, as shown in FIG. 1, a cutting device 100 is arranged on the side facing the open end surface 1a of the dielectric resonator W. In this example, this cutting device 100 can be moved in the direction of bringing the cutting tool into contact with the open end surface of the dielectric resonator W and in the opposite direction, that is, in the directions of arrows A and B, by a cutting tool moving mechanism as described later. A cutting whetstone 22 that rotates at high speed is attached to the tip of the cutting tool as a cutting member. Then, the cutting device 100 moves the workbench 210 in the direction of the arrow C with the cutting wheel 22 in contact with the edge of the upper conductive film 6 of the dielectric resonator W, so that the conductive film The edges of 6 are cut. The cutting device 100 of this example is configured as shown in FIGS. 4 and 5, for example. That is, FIG. 4 is a plan view of the cutting device of this example, and FIG. 5 is a side view thereof, in which 10 is a base, 20 is a cutting tool, 30 is an air cylinder mechanism as a coarse adjustment feed mechanism, and 40 is a fine adjustment mechanism. A ball screw is an example of a feeding mechanism. A fixing plate 13 is attached to the legs 11, 12 fixed to the base 10 by being fixed with screws or the like. On this fixed plate 13, there are two pairs of rails 14 extending in the linear movement direction of the cutting tool 20 (the direction of arrow A, which is the forward direction of the cutting member, or the direction of arrow B, which is the backward direction of the cutting member). and 14 are formed. A mounting plate 50 is attached to the rails 14 and 14 via a linear guide 51, and the mounting plate 50 is guided by the rails 14 and 14 and can slide in the direction of arrow A or B. . A long hole 15 is bored in the fixed plate I8 in a direction parallel to the linear movement direction of the cutting tool 20. In addition, the fixed plate 13
An air cylinder mechanism 30 is attached to the back side of the air cylinder mechanism 30, with a piston rod 31 moving linearly in the directions of arrows A and B. The tip of the piston rod 31 of this air cylinder mechanism 30 is fixed to a connecting member 32 by screwing or the like. The connecting member 32 is a plate-shaped member in this example, and the other end of the connecting portion with the piston rod 31 is screwed into a mounting plate 50 on the surface side of the fixing plate 13 through a long hole 15 in the fixing plate 13 with a screw 33. It is connected and fixed by 33. Therefore, when the air cylinder mechanism 30 is driven to cause the piston rod 31 to reciprocate, the connecting member 32 moves in the elongated hole I5 in the direction of the arrow or in the direction of B in accordance with the reciprocating movement. Along with this, the connecting member 32
The mounting plate 50 fixed to the rail 14.14 slides in the direction of the arrow A or B while being guided by the rail 14.14. Also provided on the mounting plate 50 are a pair of rails 52,52. Then, the fine adjustment sliding plate 21 to which the cutting tool 20 is attached is able to slide in the directions of arrows A and B with respect to the rails 52 and 52 via a linear guide (not shown). installed. The fine adjustment sliding plate 21 extends below the ball screw 40, and the sliding member 41 screwed into the middle of the ball screw 40 is attached to the fine adjustment sliding plate 21.
1 with screws, etc. The ball screw 40 is rotationally driven by a ball screw drive mechanism 42 fixed to the mounting plate 50. The other end of the ball screw 4° is rotatably attached to a bearing member 43. Therefore, the drive mechanism 42 causes the ball screw 40 to
When rotated, the sliding member 41 slides in the direction of arrow A or B by a distance corresponding to the amount of rotation (rotation angle), and as a result, the fine adjustment sliding plate 21 to which the sliding member 41 is fixed slides in the direction of arrow A or B by the same distance, and the cutting tool 20
moves minutely with respect to the mounting plate 50. Further, in this example, a disk-shaped member 54 is attached to the end of the back side of the mounting plate 50 in the direction of arrow B, for example, by screwing at its center line position. Further, on the fixed plate 13, an air cylinder mechanism 62 is installed.
The piston rod 63 is attached to the fixing plate 13 so as to make linear reciprocating motion in the direction of the arrow C or D, which is perpendicular to the directions of the arrows A and B. An insertion member 61 made of, for example, a rectangular plate is attached to the tip of the piston rod 63 of the air cylinder mechanism 62. This insertion member 61 and the disk-shaped member 54 constitute means for preventing the mounting plate 50 from moving backward. In the case of the illustrated example, this insertion member 61 is
Along the side wall of the leg 11 fixed at 0 in the direction of arrows C and D, the air cylinder mechanism 62 is
, it slides in the directions of arrows C and D. In this case, the insertion member 61 is configured to be able to take a position shown by a chain double-dashed line 64 and a position shown by a solid line 65 by the air cylinder mechanism 62. The two-dot chain line 64 of this insertion member 6I
In the position shown by , the mounting plate 50 can be slid in the direction of arrow A or B without being obstructed by the insertion member 61, while in the position shown by the solid line 65, the mounting plate 50 can be moved in the direction of arrow B. Then, the disc-shaped member 54 is attached to the side of the insertion member 61.
The sides of the two abut in line contact. The cutting device 10 [1 configured as described above operates as follows. In the initial position, the mounting plate 50 has a disc-shaped member 5 at its end.
4 has retreated to the vicinity of leg 11. Further, the insertion member 61 is located at a position indicated by a two-dot chain line 64. First, the mounting plate 50 is moved from the initial position in the direction of arrow A by the air cylinder mechanism 30, and the cutting tool 20 is roughly adjusted and fed from the initial position. The distance from the initial position to the electronic component fixed on the mounting table to be cut is fixed, but the distance for this coarse adjustment feed is the distance from the initial position to the cutting wheel 22.
This distance is shorter than the distance it takes until it hits the electronic component, leaving a distance for fine adjustment. In this case, the insertion member 61
The width in the direction orthogonal to the C and D directions is slightly shorter than this rough adjustment feed distance. Therefore, the insertion member 61 is in a state where it can move in the direction of arrow C without colliding with the disc-shaped member 54 of the mounting plate 50 and take the position indicated by the solid line 65. After this coarse adjustment feed, the air cylinder mechanism 62 advances the insertion member 61 in the direction of arrow C to the position indicated by the solid line 65. Next, the mounting plate 50 is moved in the direction of arrow B by the air cylinder mechanism 30, and the insertion member 61 and the disc-shaped member 54 attached to the mounting plate 50 are brought into line contact. Ru. At this time, the insertion member 61
Since the leg 11 is fixed to the base 10, the insertion member 6
1 does not move at all in the direction of arrow B, and therefore the mounting plate 50 does not move back in the direction of arrow B at all. Next, in this state, the ball screw drive mechanism 42 is driven to finely adjust and feed the tip position of the cutting whetstone 22 of the cutting tool 20 to a position where the end face of the electronic component to be cut is cut to an accurate depth. During this fine adjustment feeding, the position of the mounting plate 50 in the direction of arrow B is physically fixed by the insertion member 61. Therefore, when the cutting whetstone 22 comes into contact with the surface of the electronic component to be cut due to the fine adjustment feed, the mounting plate 50 does not move back at all even if it receives a reaction force from the fixed electronic component. Therefore, the cutting depth accurately corresponds to the fine adjustment feed amount. The cutting process is performed by maintaining this cutting depth and moving the electronic component in the direction of arrow C or D by a distance calculated based on the results of measuring the frequency characteristics of the electronic component as described below. Ru. Next, when the cutting process is completed, the ball screw drive mechanism 42 is driven again, and the cutting tool 20 is retreated in the direction of arrow B to the initial position. Next, the mounting plate 50 is moved slightly in the direction of arrow A by the air cylinder mechanism 30, and the abutment between the insertion member 61 and the disc-shaped member 54 is released. Next, the air cylinder mechanism 62 is driven to pull the insertion member 61 in the direction of the arrow, and the insertion member 61 is returned to the position indicated by the two-dot chain line 64. Thereafter, the air cylinder mechanism 30 is driven again, the mounting plate 50 is moved in the direction of arrow B, and the mounting plate 50 and cutting tool 20 return to their initial positions. Although not shown in FIG. 1, there is a work backup mechanism that prevents the dielectric resonator W from being pushed and moved in the direction of arrow A when the cutting wheel 22 is pressed against the dielectric resonator W. It is provided. That is, FIGS. 6 to 8 are diagrams for explaining an example thereof. In the figures, 501 indicates a backup member, and as shown in FIG.
It has protrusions 502 and 503 that abut on both ends in the width direction. In this case, there is a space between the protrusions 502 and 503, and the opening of the through hole 2.2 of the terminal end surface]b of the dielectric resonator W can be seen from this space. The backup member 501 is provided between the mounting table 2+1 and the wedge-shaped member 505. A spring 504 is provided between the backup member 501 and the mounting table 211, and is always biased away from the backup member 501 and the mounting table 211. The side surface on the opposite side is in contact with a wedge-shaped member 505. Both sides of this wedge-shaped member 505 in the directions of arrows C and D, which are the moving directions of the workbench 210, are provided with regulating members 506 and 507.
The location is regulated by. And the wedge-shaped member 5
The oblique side portion of 05 is in contact with a roller 510 that moves linearly back and forth within a long hole 508 provided along the moving direction of the workbench 210 by an air cylinder mechanism 509. The wedge-shaped member 505 is constantly pulled by springs 511 and 512 in the direction in which it comes into contact with the roller 510. Therefore, the air cylinder mechanism 509
10 in the direction of arrow C in FIG.
5 moves forward in the direction of the mounting table 211, and along with this, the backup member 501 also moves forward in the direction of the mounting table 211. Then, the protrusions 502 and 503 of the backup member 501 come into contact with both ends of the termination surface 1b of the dielectric resonator W. Therefore, even if the dielectric resonator W is pressed in the direction of the arrow A by the cutting whetstone 22, it does not move at all in the direction of the arrow since it is backed up by the backup member 501. Therefore, the accuracy of the cutting depth by the cutting wheel 22 at the open end surface 1a of the dielectric resonator W is maintained accurately. Next, as shown in FIG. 1, the measurement tool 300 is placed on the side facing the termination surface 1b of the dielectric resonator W. The measuring tool 300 includes a measuring element 301 made of a long and thin conductive rod, such as a tungsten round rod, with a diameter smaller than the inner diameter of the through hole 2 of the dielectric resonator W, for example, a diameter of 0.8 ml, and a measuring element 301 and a signal. It is configured as an electromagnetic field coupling section 302 that transmits and receives signals between the generator 401 and the receiving device 402 through electromagnetic field coupling mainly consisting of capacitive coupling that functions as a kind of capacitor. That is, FIG. 9 is a diagram for explaining this measuring tool 300. FIG. 3A particularly shows a portion of the printed circuit board 310 of the electromagnetic field coupling section 302, and the probe 301 is attached and fixed to the printed circuit board 310 while being connected to a conductor 313 on the surface of the printed circuit board 310. A conductor 314 connected to the input terminal 311 is extended in an L-shape to the vicinity of the conductor 313, and is electromagnetically coupled to the conductor 313 at its tip with a small distance therebetween. Similarly, output terminal 3
A conductor 315 connected to the conductor 12 is extended in an L-shape to the vicinity of the conductor 313, and is electromagnetically coupled to the conductor 313 with a minute interval. A ground conductor 31B is formed between the conductors 314 and 315 in order to isolate these conductors in terms of high frequency. Also, as shown in FIG. 9B, the ground conductor plate 317.
318 is attached in the extending direction of the probe 301 in a downwardly bent state. This ground conductor plate 31
7,318 is for contacting the workbench 210 and grounding the measurement system when measuring the dielectric resonator W placed on the mounting table 211 on the workbench 210, as will be described later. It is something. earth conductor 316 and earth conductor plate 317,
From the conductor to which 318 is connected, there is a ground terminal 319, 3
19, 819, and 319 are planted, and these earth terminals 819 are configured to be grounded. Further, as shown in FIG. 1, the electromagnetic field coupling section 302 is attached to the air cylinder mechanism 303 and
0 is capable of linear movement in a direction perpendicular to the end surface 1b of the dielectric resonator W (in the direction of arrows A and B). In this example, the workbench 210 is guided by the rails 215 and 215 in a direction perpendicular to the direction of movement of the measuring tool 300 (in the direction of arrow B), for example, by driving the ball screw 213 by the drive motor 214. The cutting direction moving mechanism is configured to be movable. That is,
Trimming is performed by moving the workbench 210 in the cutting direction while the cutting whetstone 22 is in contact with the conductive film 6 on the open end surface 1a of the dielectric resonator W. Then, the initial position is adjusted and the measuring tool 300 is moved to the arrow A.
When the probe 301 is moved in the direction of the dielectric resonator W
It is designed to be inserted approximately at the center of one of the through holes 2. The input terminal 311 of the electromagnetic field coupling section 302 is connected to the high frequency sweep signal generator 401, and the output terminal 312 is connected to the receiving device 402, for example, a spectrum analyzer. Then, as described below, the resonant frequency of the dielectric resonator W is measured. That is, the measuring tool 30 is
0 in the direction of arrow A and in the direction of dielectric resonator W,
The probe 301 is inserted into one of the through holes 2 of the dielectric resonator W from the end surface 1b side. At this time, the measuring head 301 is
As shown in FIG. 10, the open end surface 1a of the dielectric resonator W
A predetermined length k is made to protrude from the base. This protrusion length k corresponds to the frequency to be measured, in this example, the resonant frequency fc of the dielectric resonator W. This protrusion length k is, for example, when the resonance frequency is 700 M.
40 when the frequency is Hz, and 35 when the frequency is 900 MHz.
At 1400 MHz, it is recommended to select 15m+*. In this state, as shown in FIG. 10, the ground plates 31.7 and 31.8 come into contact with the workbench 210. Since the work table 210 and the mounting table 211 are made of conductors, the measurement system is grounded thereby. In this state, the signal generator 401 outputs the resonance frequency f. A frequency signal swept with a frequency width approximately centered on
supply to. The input signal is applied to the dielectric resonator W through the probe 301. Then, an output signal of the dielectric resonator W is induced in the length extending from the open end surface 1a of the probe 301, and this output signal is received by the spectrum analyzer of the receiving device 402. The equivalent circuit of the measurement system at this time is as shown in FIG. The received signal will be supplied. That is, as shown in FIG. 12, the resonance frequency f. A signal indicating the peak level is obtained as an output signal. Therefore, by detecting the signal indicating this peak level with the receiving device 402, the current resonant frequency of the dielectric resonator W can be known, and it can be confirmed whether it is at a desired value. I can do it. As is well known, the peak level frequency is detected by detecting the frequency position where the frequency gradient becomes zero. This detection is
It can be done with software using a computer. If the difference between the measured resonance frequency and the target frequency is not within a predetermined range, the amount to be cut is determined based on the frequency difference, and the cutting process is performed to correct it. As will be described later, the amount of cutting is determined by, for example, determining the relationship between cutting amount and frequency change when cutting the edge of the conductor film 6 in advance and storing it in a storage means, and referring to the stored contents. can do. For cutting, first, the air cylinder mechanism 30
3, the measuring tool 300 is moved backward, and then the cutting device 1
00 cutting wheel 22 is brought into contact with the edge of the conductive film 6 on the end surface 1a of the dielectric resonator W with a predetermined cutting depth. Then, the workbench 210 is moved in the direction of arrow B by the amount of cutting determined above, and the edge of the conductive film 6 is scraped off as indicated by diagonal lines in FIG. FIG. 14 shows an example of the entire system of a trimming device according to the present invention, and 400 is a mechanical component of the trimming device shown in FIG. 1 (hereinafter referred to as a trimming machine).
It is. The input terminal 311 of the measuring tool 300 of this trimming machine 400 is connected to the high frequency sweep signal generator 401, and the output terminal 312 is connected to the spectrum analyzer 402, as described above. The spectrum analyzer 402 used in this example has the same functionality as a personal computer, and is connected to the trimming machine 400 via the I10 port, and receives signals from the probe 301 of the measurement tool 300 of the trimming machine 400, sensors, etc. (not shown) and supplies a control signal to the signal generator 401. In the spectrum analyzer 402, the previously determined relationship between cutting amount and frequency change is stored in a storage means. Furthermore, the spectrum analyzer 402 is connected to a control device (including a computer) 403 via a GPIB interface. This control device 403 is provided with a mechanism for expanding the I10 port, since the I10 port of the spectrum analyzer 402 cannot control all the motors, air cylinders, etc. of each part of the trimming machine 400. Furthermore, by providing the control device 403 with a key operation section, the trimming machine 400 can be manually operated. Control device 403 and motor 21 of trimming machine 400
4.42, Air cylinder mechanism 30.62, 303.2
36 etc. are connected through the I10 port, and these are controlled. The operation of this automatic trimming device will be explained below with reference to the flowchart shown in FIG. First, the measurement system and trimming machine 400 are initialized (step 601). Next, a dielectric resonator (hereinafter referred to as a work) W, which is an object to be worked on, is carried from above onto the mounting table 211 of the work table 210 (step 602). When this carry-in is detected, the air cylinder mechanisms 234 and 236 of the clamp mechanism 212 are driven, and the pinion 22
4 and 22B, the workpiece W is fixed to the mounting table 211 (step 603). Next, the air cylinder mechanism 509 is controlled to bring the backup member 501 into contact with the end surface 1b of the workpiece W, thereby backing up the workpiece W (step 604). Next, rough adjustment feed of the cutting device 100 is performed. That is, the air cylinder mechanisms 30 and 62 are controlled, and the insertion member 65 is inserted into the mounting plate 50 (step 605). Thereafter, for example, a pulse motor of the ball screw drive mechanism 42 is driven, and the cutting tool 2
Fine adjustment feed is performed until the No. 0 cutting whetstone 22 comes into contact with the open end surface 1a of the workpiece W at a predetermined cutting depth (step 606). Then, by driving the motor 214, the work table 210 is moved in the direction of the arrow C by a predetermined distance Xo, for example, 0.4 mm, and the edge of the conductive film 6 of the workpiece W is cut, and the origin Output trimming is performed (step 607). This origin finding trimming is performed for the following reasons. That is, the cutting device 100 is sent and the cutting wheel 22 is
When the cutting wheel 22 contacts the workpiece W at a predetermined cutting depth, when cutting is performed using the contact position as the cutting origin for correction, when the cutting wheel 22 contacts the workpiece W, the position shown in FIG. It is necessary to position it so that it is always in contact with the conductor film 6 as shown in FIG. However, if the printing accuracy of the conductor film 6 is poor, as shown in FIG. 15B, the cutting wheel 22
may come into contact with the conductor film 6 only slightly or not at all, and even if it does come into contact, the amount of contact is not fixed. In addition, cutting whetstone 2
2 wears out, the contact area with the workpiece W becomes smaller than it was initially, and the contact area at the contact position changes. In this case, the cutting wheel 2 is moved in the cutting direction relative to the open end surface 1a by the amount of trimming determined from the measured value.
17A, the frequency should change from the contact position as shown by the solid line a in FIG. 17A, but when cutting is performed by moving the Until then, the frequency does not change, or hardly changes as shown by the solid line C in FIG. Therefore, in this example, a predetermined distance X is set in advance in consideration of printing errors of the conductor film 6 and wear of the cutting wheel. The above-mentioned drawbacks can be avoided by performing cutting by only a small amount and using the position after cutting as the origin of trimming. In other words, taking into account the variation, the distance
. If " is cut in advance, the position O shown in FIG. 17A becomes the origin position. This origin position is always a position where the conductive film 6 is contacted and where the resonant frequency change of the dielectric resonator has a slope with respect to a unit cutting amount. Therefore, as is clear from the figure, the desired frequency change can always be obtained in accordance with the amount of cutting. When this trimming to find the origin is completed, the fine adjustment feed mechanism is operated to return the cutting tool 20 to the initial position of the fine adjustment feed (step 80B), and the workbench 210 is also returned to the desired position (step 609). Furthermore, the coarse adjustment feed mechanism is operated in the opposite manner to the above to return it to the initial position (step 6).
10). Next, the air cylinder mechanism 303 is driven to
00 is moved in the direction of arrow B, and the probe 301 is inserted into the through hole 2 of the workpiece W so that it protrudes from the open end surface 1a by the length k as described above (step 611). Then, in the next step 612, the resonant frequency of the workpiece W is measured. A flowchart of this measurement is shown in FIG. That is, first, set the center frequency of the spectrum analyzer 402 and set the bandwidth to 20MH2 (
Step 701). The center frequency of the sweep is initially set manually by the measurer to the target frequency. For example, 900 Mt(z
be selected. Next, a high frequency signal that has been swept, for example, once in this frequency width is supplied from the signal generator 401 to the measurement tool 301 (
Step 702). The resonance frequency F1 is measured using the spectrum analyzer 402 (step 703). Next, the center frequency of the spectrum analyzer 402 is set to this frequency F1, and the sweep bandwidth is set to 5 MHz (step 704).
, the signal that has been swept only once is supplied to the measurement tool 301 (step 705). Then, the spectrum analyzer 402 measures the resonance frequency. The obtained frequency is set as F2 (step 706
). In this way, by changing the frequency width of the sweep into two stages, the resonance frequency (F2) can be measured with higher accuracy. That is, spectrum analyzer 402
Now, the output signal from the measuring tool 301 is sampled in the frequency direction, and the level at each frequency point is stored as digital data. Then, using two or more sample data adjacent to each frequency point, the slope of the level at that frequency point is investigated, and the point where the slope becomes zero is detected as the frequency of the peak level. In this case, the number of samplings in the frequency direction is determined by the capacity of the memory. Therefore, the frequency pitch of the data samples depends on the sweep bandwidth, and the narrower the bandwidth, the smaller the frequency pitch, allowing more accurate measurements. However, since the resonant frequency of the dielectric resonator is not known at first, it is better to sweep over a relatively wide bandwidth. Therefore, in this example, after first increasing the sweep bandwidth and detecting the approximate value of the resonant frequency,
The sweep bandwidth is narrowed to measure the resonant frequency with finer accuracy. Next, it is determined whether the measured frequency F2 is within the standard, that is, the difference from the target frequency FO is within a predetermined range, for example, within 500 kHz (step 707). If the result of the determination is within the standard, the process returns to the main flowchart. On the other hand, if the result of the determination is that it is outside the standard, the cutting amount (trimming amount) X is determined from the difference ΔF from the target frequency FO (step 708). Then proceed to the main flowchart. In this case, the cutting amount is determined by the predetermined workpiece W as described above.
, the conductive film 6 is gradually cut, and the relationship between cutting amount and frequency change at that time, for example, the slope of the frequency change per unit cutting amount, is determined, and this slope is stored in the memory provided in the spectrum analyzer 402. Place, measuring tool 3
The slope is determined from the measurement result measured at 00 by referring to the slope stored in this memory. In this case, if the dielectric resonator is polished too much and the resonant frequency fc becomes higher than the standard value, it cannot be corrected and becomes a defective product as described above. In the invention, the slope information stored in the memory is the largest among the slopes of the plurality of dielectric resonators. That is, as mentioned above, when the printing accuracy of the conductor film 6 is poor, the distance d between the coupling hole 5 and the conductor film 6 is not constant. As shown in FIG. 16A, when the distance d is short, the cutting wheel 22 comes into contact with the conductive film 6 more in the direction of this distance, so the cutting area per unit cutting amount increases, and the cutting amount The slope of the relationship between -frequency change Δf increases as shown by K (large) in FIG. 17B. On the other hand, as shown in FIG. 16B, when the distance d is large, the cutting wheel 2
2 comes into contact with the conductive film 6 only a little, so the cutting area per unit cutting amount decreases, and the slope becomes small as shown by K (small) in FIG. 17B. In this way, the slope varies depending on the dielectric resonator. For this reason, if a workpiece W with a large cutting area is trimmed with a trimming amount calculated by calculation from the slope calculated for a workpiece W with a small cutting area, over-shaving will occur, resulting in a large number of defective products. Therefore, in this invention,
The largest slope among the plurality of dielectric resonators is selected and stored in the memory. That is, FIG. 20 is a flowchart for determining this inclination. First, cutting is performed to find the origin in the same manner as described above (step 801). This is because when calculating this slope, if the origin position is not correct as described above, an error will occur in the calculated slope. Next, the resonant frequency f at the trimming origin is determined in the same manner as in the measurement flowchart described above. (Step 8)
02). Next, cutting is performed by a certain minute distance (step 80B). The position away from the origin by the amount of cutting is x,
(n-1, 2,...N). Then, the resonance frequency f1 at the position xfi of the cutting amount is measured (step 804). Then, step 808 and step 804 are repeated N times, for example, 12 times, and if it is determined that the 12 times have been repeated (step 805), the process proceeds to step 806. In step 806, the slope Km (mm l , 2...M) is determined from xe and f by the least squares method and is stored. Steps 801 to 806 above are performed for M pieces, for example, 10 pieces W, and when it is determined that the pieces have been finished for 10 pieces (step 807), step 8
Proceeding to step 08, the maximum slope among the slopes Km for the 10 workpieces W is determined, and this is set as the slope K of the rear end/soto. Then, this maximum slope K is stored in the memory of the spectrum analyzer 402, and the cutting amount X is calculated based on this stored slope K. As described above, the resonance frequency and the cutting amount X are determined using the measurement flowchart. In step 707 of step 612 of this measurement, the work W
When it is determined that the resonance frequency is within the standard, the process proceeds to step 1313, where the air cylinder mechanism 303 is driven to move the measuring tool 300 backward in the direction of arrow A. Then, the clamp mechanism 212 is driven to release the clamp on the workpiece (step 614), and the workpiece W is carried out (step 615). On the other hand, in step 612 of measurement, the resonant frequency is out of specification;
When it is determined that the value is lower than the standard value, step 70 is performed.
Proceed to step [ilB via step 8. Note that when the resonant frequency is higher than the standard value, although not shown, the work W is considered to be a defective product and is carried out without being trimmed. At this time, for example, a mark can be added using ink or the like to indicate that the product is defective. In step 616, after retracting the measuring tool 300, the air cylinder mechanism 509 is controlled to control the bar 1. The pull-up member 501 comes into contact with the end surface 1b of the workpiece W, and the workpiece W
is backed up (step 617). Next, the rough adjustment feed of the cutting device 100, that is, the air cylinder mechanisms 80 and 62 are controlled, and the insertion member 65 is inserted into the mounting plate 50 (step 61
8). After that, the workbench 210 moves in the direction of arrow C. is moved to the origin position (step 619). Next, the cutting whetstone 22 of the cutting tool 20 is cut into the open end surface 1 of the work W.
A fine adjustment feed is performed until a predetermined cutting depth is reached and the contact state is reached (step 620). Next, the workbench 210 is moved by the cutting amount X determined in step 612 of measurement, and trimming is performed (step 62
1). When trimming is complete, operate the fine adjustment feed mechanism,
Step of returning the cutting tool 20 to the initial position for fine adjustment feed! 2) The workbench 210 is also returned to its initial position (step 623). Furthermore, the coarse adjustment feed mechanism is also returned to its initial position (step 624). Next, the measuring tool 300 is
is moved in the direction of arrow B, and the probe 301 is inserted into the through hole 2 of the workpiece W so that it protrudes by a length k from the open end surface 1a (step 625). Then, in the next step 626, the resonance frequency of the workpiece W is measured and the cutting amount X is calculated in the same manner as in step 1i12. When it is determined in step 626 of this measurement that the resonant frequency of the workpiece W is within the standard, the process returns to step 613, the measuring tool 300 is moved back, the clamp on the workpiece is released (step 614), and the workpiece W is carried out. (Step 615). On the other hand, if it is determined in the measurement step 626 that the resonance frequency is out of the standard, the process proceeds to step 627, where the measuring tool 300 is moved backward, and then returns to step 617, and the steps from step 617 onward are repeated. Through the above procedure, the resonant frequency of the workpiece, that is, the dielectric resonator W, can be automatically brought within the standard. In the above example, a measuring element made of a conductor rod having a diameter smaller than the diameter of the through hole for forming the inner conductor of the dielectric resonator as the workpiece is used, and this measuring element is inserted into the through hole to perform measurement. Since this is done, the resonant frequency of the workpiece can be measured without contacting the workpiece. Therefore, the frequency characteristics can be accurately measured without damaging the work unlike the conventional example in which measurements are made by bringing the probe into contact with the work. Furthermore, according to the above example, the measuring tool can be placed on the terminal end surface side of the dielectric electronic component, and the cutting tool can be placed on the open end surface side of the dielectric electronic component. Therefore, the measuring tool and the cutting tool do not have overlapping placement spaces, and therefore,
A linear motion mechanism can be used as the moving mechanism, and the configuration of the automatic trimming device is simplified. In the above example, a spectrum analyzer with a computer function was used, but a separate computer for control is provided, and this separate computer receives data from the spectrum analyzer, performs measurements and calculates the amount of cutting. Of course, the entire system may be controlled. Further, the cutting direction moving mechanism may move the cutting tool 20 in the cutting direction instead of moving the workbench 210. Alternatively, the cutting tool 20 and the measuring tool 300 may be fixed, and the workbench 210 may be moved in the directions A and B1 and further in the directions C and D. Further, the electronic components to be trimmed are not limited to dielectric electrons such as the dielectric resonator as in the above example, and it goes without saying that the present invention can be applied to trimming various electronic components.

【Effect of the invention】

As explained above, according to the present invention, everything from measurement to trimming can be carried out fully automatically, and the working efficiency of trimming can be greatly improved. In addition, in this invention, prior to the actual trimming, a certain amount is cut and the actual trimming is performed using that position as the origin position, so there may be positional variations in the cut part of the electronic component. Even when the cutting wheel of the cutting tool wears out, accurate trimming is possible without any effects. Furthermore, in order to obtain the cutting amount from the measured values, the relationship between the cutting amount and the change in characteristics is determined in advance for multiple electronic components, and the one with the largest change among them is stored in the storage means. Since the contents stored in the storage means are referred to, over-shaving can be prevented. Therefore, the defective rate can be reduced.

[Brief explanation of the drawing]

FIG. 1 shows an embodiment of the mechanical configuration of a trimming device according to the present invention, FIGS. 2 and 3 show an embodiment of a clamping mechanism, and FIGS. 4 and 5 show an example of a cutting device. Figures 6 to 8 are diagrams illustrating an embodiment of a workpiece backup mechanism, Figure 9 is a diagram illustrating an example of a measuring tool, and Figure 10 is a diagram illustrating a measurement state. Figure 11 is an equivalent circuit diagram during measurement, Figure 12 is a diagram showing an example of frequency characteristics of dielectric electronic components, Figure 13 is a diagram to explain the cutting state, and Figure 14 is a diagram for explaining the cutting state. 15 and 16 are diagrams for explaining the positional relationship between the conductive film and the cutting tool, and FIG. 17 is a diagram for explaining the positional relationship between the conductive film and the cutting tool. Characteristic diagram showing the relationship between cutting amount and frequency change, Fig. 18 is a flowchart for trimming, Fig. 19 is a flowchart for measurement, Fig. 2
Figure 0 is a flowchart for determining the slope of cutting amount vs. frequency change for determining the cutting amount, Figure 21 is a diagram showing an example of a dielectric electronic component, and Figures 22 to 24 are diagrams for explaining the same. It is. W; Workpiece 20; Cutting tool 22; Cutting wheel 30; Rough adjustment feed air cylinder mechanism 42; Fine adjustment feed ball screw drive mechanism 100; Cutting device 210; Work table 211, mounting table 212; Clamp mechanism 213; Ball screw 214; motor 300; measuring tool 301; measuring element 303; air cylinder mechanism 401; signal generator 402; receiving device (spectrum analyzer) 501;
Work backup parts

Claims (3)

[Claims] (1) A cutting tool including a clamp mechanism for fixing an electronic component, a measuring means for measuring characteristics of the electronic component, and a cutting member; a contact direction moving mechanism that moves the tool or the electronic component; a cutting direction moving mechanism that moves the cutting member in the cutting direction relative to the cutting portion of the electronic component; a storage means for storing information regarding characteristic changes; a calculation means for receiving the measurement results obtained by the measurement means and calculating a cutting amount from the measurement results by referring to the information stored in the storage means; An automatic trimming device for electronic parts, comprising: drive control means for driving the cutting direction movement mechanism according to the determined amount of grinding. (2) A means for obtaining information regarding changes in characteristics with respect to the amount of cutting of the electronic component is provided, and changes in characteristics with respect to the amount of cutting of a plurality of electronic components are determined, and among them, the information having the largest change in characteristics with respect to the unit amount of cutting is selected. Claim (1) characterized in that the memory is stored in the storage means (
1) Automatic trimming device for electronic components as described above. (3) The cut portion of the electronic component is cut by a predetermined amount, and the cutting for characteristic adjustment is performed using the position where the cut is made by the predetermined amount as the origin of adjustment. An automatic trimming device for electronic components according to claim (1) or (2).