JPH0328508Y2 - - Google Patents

Info

Publication number
JPH0328508Y2
JPH0328508Y2 JP1984011239U JP1123984U JPH0328508Y2 JP H0328508 Y2 JPH0328508 Y2 JP H0328508Y2 JP 1984011239 U JP1984011239 U JP 1984011239U JP 1123984 U JP1123984 U JP 1123984U JP H0328508 Y2 JPH0328508 Y2 JP H0328508Y2
Authority
JP
Japan
Prior art keywords
holes
wall
sample chamber
plate
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984011239U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60124035U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984011239U priority Critical patent/JPS60124035U/ja
Publication of JPS60124035U publication Critical patent/JPS60124035U/ja
Application granted granted Critical
Publication of JPH0328508Y2 publication Critical patent/JPH0328508Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
JP1984011239U 1984-01-30 1984-01-30 電子ビーム描画装置における試料室の恒温装置 Granted JPS60124035U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984011239U JPS60124035U (ja) 1984-01-30 1984-01-30 電子ビーム描画装置における試料室の恒温装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984011239U JPS60124035U (ja) 1984-01-30 1984-01-30 電子ビーム描画装置における試料室の恒温装置

Publications (2)

Publication Number Publication Date
JPS60124035U JPS60124035U (ja) 1985-08-21
JPH0328508Y2 true JPH0328508Y2 (de) 1991-06-19

Family

ID=30493174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984011239U Granted JPS60124035U (ja) 1984-01-30 1984-01-30 電子ビーム描画装置における試料室の恒温装置

Country Status (1)

Country Link
JP (1) JPS60124035U (de)

Also Published As

Publication number Publication date
JPS60124035U (ja) 1985-08-21

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