JPH0328647U - - Google Patents

Info

Publication number
JPH0328647U
JPH0328647U JP8962389U JP8962389U JPH0328647U JP H0328647 U JPH0328647 U JP H0328647U JP 8962389 U JP8962389 U JP 8962389U JP 8962389 U JP8962389 U JP 8962389U JP H0328647 U JPH0328647 U JP H0328647U
Authority
JP
Japan
Prior art keywords
data exchange
exchange room
room
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8962389U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8962389U priority Critical patent/JPH0328647U/ja
Publication of JPH0328647U publication Critical patent/JPH0328647U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面は本考案の一実施例の横断面図である。 １……装置本体部、２……主排気系、３……ゲ
ートバルブ、４……資料交換室、６……排気系、
１１……紫外線源、１２……電源。 The drawing is a cross-sectional view of one embodiment of the present invention. 1...Equipment body, 2...Main exhaust system, 3...Gate valve, 4...Data exchange room, 6...Exhaust system,
11...UV source, 12...Power source.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 資料交換室を備えた要高真空分析装置において
、資料交換室内に紫外線照射手段を配置した要高
真空分析装置の資料交換装置。 A data exchange device for a high vacuum analyzer equipped with a data exchange room, in which an ultraviolet irradiation means is placed in the data exchange room.
JP8962389U 1989-07-29 1989-07-29 Pending JPH0328647U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8962389U JPH0328647U (en) 1989-07-29 1989-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8962389U JPH0328647U (en) 1989-07-29 1989-07-29

Publications (1)

Publication Number Publication Date
JPH0328647U true JPH0328647U (en) 1991-03-22

Family

ID=31639195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8962389U Pending JPH0328647U (en) 1989-07-29 1989-07-29

Country Status (1)

Country Link
JP (1) JPH0328647U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005251656A (en) * 2004-03-05 2005-09-15 Ntp:Kk Sample washing device and sample washing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005251656A (en) * 2004-03-05 2005-09-15 Ntp:Kk Sample washing device and sample washing method

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