JPH0328647U - - Google Patents
Info
- Publication number
- JPH0328647U JPH0328647U JP8962389U JP8962389U JPH0328647U JP H0328647 U JPH0328647 U JP H0328647U JP 8962389 U JP8962389 U JP 8962389U JP 8962389 U JP8962389 U JP 8962389U JP H0328647 U JPH0328647 U JP H0328647U
- Authority
- JP
- Japan
- Prior art keywords
- data exchange
- exchange room
- room
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
図面は本考案の一実施例の横断面図である。
１……装置本体部、２……主排気系、３……ゲ
ートバルブ、４……資料交換室、６……排気系、
１１……紫外線源、１２……電源。
ートバルブ、４……資料交換室、６……排気系、
１１……紫外線源、１２……電源。
Claims (1)
- 資料交換室を備えた要高真空分析装置において
、資料交換室内に紫外線照射手段を配置した要高
真空分析装置の資料交換装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8962389U JPH0328647U (ja) | 1989-07-29 | 1989-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8962389U JPH0328647U (ja) | 1989-07-29 | 1989-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0328647U true JPH0328647U (ja) | 1991-03-22 |
Family
ID=31639195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8962389U Pending JPH0328647U (ja) | 1989-07-29 | 1989-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328647U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005251656A (ja) * | 2004-03-05 | 2005-09-15 | Ntp:Kk | 試料洗浄装置および試料洗浄方法 |
-
1989
- 1989-07-29 JP JP8962389U patent/JPH0328647U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005251656A (ja) * | 2004-03-05 | 2005-09-15 | Ntp:Kk | 試料洗浄装置および試料洗浄方法 |