JPH0331111B2 - - Google Patents
Info
- Publication number
- JPH0331111B2 JPH0331111B2 JP26087784A JP26087784A JPH0331111B2 JP H0331111 B2 JPH0331111 B2 JP H0331111B2 JP 26087784 A JP26087784 A JP 26087784A JP 26087784 A JP26087784 A JP 26087784A JP H0331111 B2 JPH0331111 B2 JP H0331111B2
- Authority
- JP
- Japan
- Prior art keywords
- organic solvent
- pressure
- cleaned
- tank
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003960 organic solvent Substances 0.000 claims description 22
- 238000001035 drying Methods 0.000 claims description 19
- 238000009835 boiling Methods 0.000 claims description 8
- 238000005406 washing Methods 0.000 claims description 4
- 239000002904 solvent Substances 0.000 description 16
- 230000000694 effects Effects 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は有機溶剤蒸気乾燥方法に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an organic solvent vapor drying method.
（従来の技術）
従来の此種蒸気乾燥手段は、第３図に示すよう
に、乾燥槽１内に貯留した有機溶剤２中にヒータ
３を挿入して加熱し、有機溶剤が沸点以上になる
と蒸気（以下溶剤蒸気と称す）４が発生し、上部
に設けた凝縮コイル５中を流れる冷却水により凝
縮して受樋６で受液し、水分離器７に送つて水と
分離させ、有機溶剤のみを乾燥槽１内に戻す。前
記溶剤蒸気４中に汚れたもの、或いは水分のつい
た被洗浄物８を入れると、溶剤蒸気が凝縮して液
化し、被洗浄物８の表面に沿つて流下し、この流
下に伴つて付着している汚物を流下させ、或いは
表面についた水分等を洗い流し、更に、被洗浄物
８が有機溶剤の沸点温度まで温度上昇することに
より乾燥させる。(Prior art) As shown in FIG. 3, this type of conventional steam drying means heats an organic solvent 2 stored in a drying tank 1 by inserting a heater 3 thereinto. Steam (hereinafter referred to as solvent vapor) 4 is generated, condensed by cooling water flowing through a condensing coil 5 installed at the top, received in a receiving gutter 6, sent to a water separator 7 to be separated from water, and organic Only the solvent is returned to the drying tank 1. When a dirty or moist object to be cleaned 8 is placed in the solvent vapor 4, the solvent vapor condenses and liquefies, flows down along the surface of the object to be cleaned 8, and adheres as it flows down. The cleaning object 8 is dried by letting the dirt flowing down or washing away moisture etc. adhering to the surface, and then increasing the temperature of the object 8 to the boiling point of the organic solvent.
又、溶剤蒸気４中に加熱コイル９を設置し、タ
ンク１０の中に入れた油をヒータ１１で加熱し、
ポンプ１２で加熱コイル９中を循環させることに
より、溶剤蒸気４を更に温度上昇させて、被洗浄
物８の薄物（熱容量の小さいもの）のしみの少な
い乾燥効果を得るようにしている。 In addition, a heating coil 9 is installed in the solvent vapor 4, and the oil placed in the tank 10 is heated with a heater 11.
By circulating the solvent vapor 4 through the heating coil 9 using the pump 12, the temperature of the solvent vapor 4 is further increased, thereby obtaining an effect of drying thin objects 8 to be cleaned (those having a small heat capacity) with less staining.
（発明が解決しようとする問題点）
しかし、前記手段においては、加熱コイルの伝
熱面積が大きくとれないため、溶剤蒸気を上昇さ
せるのに限界がある。それ故、乾燥効果において
不十分な点があつた。(Problems to be Solved by the Invention) However, in the above-mentioned means, since the heat transfer area of the heating coil cannot be made large, there is a limit in raising the solvent vapor. Therefore, the drying effect was insufficient.
（問題点を解決するための手段）
本発明における有機溶剤蒸気乾燥方法において
は、有機溶剤を常圧での沸点温度より高い温度に
上昇させ、沸点温度より高い蒸気を、有機溶剤の
蒸気中にある被洗浄物に吹き付け、洗浄乾燥を行
うものである。
(Means for Solving the Problems) In the organic solvent vapor drying method of the present invention, the organic solvent is raised to a temperature higher than the boiling point temperature at normal pressure, and the vapor higher than the boiling point temperature is added to the organic solvent vapor. It is sprayed onto an object to be cleaned and dried.
（作 用）
本発明においては従来と同様に、有機溶剤の溶
剤蒸気中に被洗浄物を入れ、溶剤蒸気により洗浄
及び乾燥を行う。このように、洗浄及び乾燥を行
つている被洗浄物に、常圧での沸点温度より高い
温度に高圧下で上昇させた溶剤蒸気を吹き付け、
より一層の汚れ薄として洗浄効果をあげる。(Function) In the present invention, as in the conventional method, the object to be cleaned is placed in the solvent vapor of an organic solvent, and the object is cleaned and dried by the solvent vapor. In this way, solvent vapor raised under high pressure to a temperature higher than the boiling point at normal pressure is sprayed onto the object being cleaned and dried,
Improves the cleaning effect by removing dirt even further.
（実施例）
本発明方法の第１実施例を第１図に基いて詳細
に説明すると、乾燥槽１内において、有機溶剤２
とヒータ３で加熱し、溶剤蒸気４を発生させ、溶
剤蒸気４中に被洗浄物８を入れて、被洗浄物８に
付着している汚れを落したり、水分を取り除いた
りして乾燥する。尚、図中５は凝縮コイル、６は
受樋である。(Example) A first example of the method of the present invention will be described in detail based on FIG. 1. In a drying tank 1, an organic solvent 2
The object to be cleaned 8 is heated by a heater 3 to generate solvent vapor 4, and the object 8 to be cleaned is placed in the solvent vapor 4 to remove dirt and moisture from the object 8 and dry it. In addition, in the figure, 5 is a condensing coil, and 6 is a receiving gutter.
一方、乾燥槽１と並んで圧力容器１３を設置
し、この圧力容器１３内に有機溶剤２を充填し、
この有機溶剤２の導管１４途中に設置したフイル
タ１５及びポンプ１６で循環させて、常時清浄に
保つようにしている。そして、有機溶剤２中にヒ
ータ１７を挿入して有機溶剤２を加熱する。この
加熱により温度上昇させ、常圧での沸点より温度
を上昇させると、圧力が２〜３気圧上昇すること
になる。この圧力は、温度調整器１８でヒータ１
７をコントロールして一定温度に上昇させること
により一定に保つようになつている。尚圧力容器
１３には圧力計１９を設けて測定し、圧力安全弁
２０で設定圧以上に圧力が上昇した際に、開放し
て内部圧力を低下させるようになつている。 On the other hand, a pressure vessel 13 is installed alongside the drying tank 1, and an organic solvent 2 is filled in this pressure vessel 13.
The organic solvent 2 is circulated through a filter 15 and a pump 16 installed in the middle of the conduit 14 to keep it clean at all times. Then, the heater 17 is inserted into the organic solvent 2 to heat the organic solvent 2. When the temperature is raised by this heating and the temperature is raised above the boiling point at normal pressure, the pressure will rise by 2 to 3 atmospheres. This pressure is adjusted by the temperature regulator 18 to the heater 1.
7 is controlled to raise the temperature to a constant level and keep it constant. A pressure gauge 19 is provided in the pressure vessel 13 to measure the pressure, and when the pressure rises above a set pressure with a pressure safety valve 20, the pressure safety valve 20 is opened to lower the internal pressure.
圧力容器１３は下部に排出導管２１を設け、乾
燥槽１に設置したノズル又は孔を設けた複数個の
噴射具２２，２２の噴射用導管２３，２３と連通
する。この排出導管２１はフイルタ２４と電磁弁
２５を設け、各噴射用導管２３，２３に夫々流量
調整弁２６，２６を設けている。そして、電磁弁
２５を開き、流量調整弁２６，２６にて流量を調
節して高圧高温の有機溶剤液を噴射具２２，２２
から噴射して被洗浄物８に吹き付ける。乾燥槽１
内は大気圧なので０気圧であり、噴射具２２，２
２から噴射した溶剤液は圧力が高いため、急に圧
力だけが０に開放されるが、温度は常圧の沸点よ
り高いので、急速に溶剤が蒸気となり、温度の高
い蒸気が被洗浄物８に吹き付けられ、汚れを落
し、且つ洗浄効果をあげる。 The pressure vessel 13 is provided with a discharge conduit 21 at its lower part and communicates with injection conduits 23, 23 of a plurality of injection tools 22, 22 provided with nozzles or holes installed in the drying tank 1. This discharge conduit 21 is provided with a filter 24 and a solenoid valve 25, and each injection conduit 23, 23 is provided with a flow rate regulating valve 26, 26, respectively. Then, the solenoid valve 25 is opened, the flow rate is adjusted with the flow rate adjustment valves 26, 26, and the high pressure and high temperature organic solvent liquid is sprayed onto the injection tools 22, 22.
It is sprayed onto the object 8 to be cleaned. Drying tank 1
Since the inside is atmospheric pressure, it is 0 atmosphere, and the injection tools 22, 2
Since the pressure of the solvent liquid injected from 2 is high, only the pressure is suddenly released to 0, but since the temperature is higher than the boiling point of normal pressure, the solvent quickly turns into steam, and the high-temperature steam flows to the object to be cleaned 8. It is sprayed onto the skin to remove dirt and improve cleaning effects.
次に、本発明の第２実施例を第２図に基いて説
明すると、洗浄乾燥槽１′をNo.１槽３０，No.２槽
３１、No.３槽３２の３つに分割し、No.１槽３０の
底に超音波振動子３３を固定して有機溶剤２中に
被洗浄物８を浸漬して超音波洗浄を行い、No.２槽
３１ですすぎを行い、No.３槽３２において被洗浄
物８に第１実施例と同様に噴射具２２，２２から
高圧高温の有機溶剤２を吹きつけるようになつて
いる。高圧容器１３は、導管３４にて予備槽３５
にて接続し、No.１槽３０と予備槽３５とを接続し
てNo.１槽３０から洗浄乾燥槽１′で使用した有機
溶剤を導入し、ポンプ３６で高圧容器１３に送る
ようになつている。尚高圧容器１３の操作は第１
実施例と同一なので、同一符号を付し説明を省略
する。 Next, a second embodiment of the present invention will be explained based on FIG. 2. The washing/drying tank 1' is divided into three tanks, No. 1 tank 30, No. 2 tank 31, and No. 3 tank 32. An ultrasonic vibrator 33 is fixed to the bottom of the No. 1 tank 30, and the object 8 to be cleaned is immersed in the organic solvent 2 for ultrasonic cleaning, rinsed in the No. 2 tank 31, and then washed in the No. 3 tank. 32, the object to be cleaned 8 is sprayed with high-pressure and high-temperature organic solvent 2 from spraying tools 22, 22, as in the first embodiment. The high pressure container 13 is connected to a preliminary tank 35 via a conduit 34.
The No. 1 tank 30 and the preliminary tank 35 are connected, and the organic solvent used in the washing/drying tank 1' is introduced from the No. 1 tank 30 and sent to the high-pressure container 13 by the pump 36. ing. The operation of the high pressure vessel 13 is the first
Since it is the same as the embodiment, the same reference numerals are given and the explanation is omitted.
本実施例では同じ有機溶剤を用いて超音波洗浄
から乾燥までを連続して行うことができる。 In this example, the steps from ultrasonic cleaning to drying can be performed continuously using the same organic solvent.
本発明においては、被洗浄物が乾燥槽内の溶剤
蒸気よりも高い温度となるため、乾燥効果をあげ
ることができる。
In the present invention, since the temperature of the object to be cleaned is higher than that of the solvent vapor in the drying tank, the drying effect can be improved.
特に、熱容量小さい薄物ガラス、シリコンウエ
ハー等に用いて効果がある。 It is particularly effective when used for thin glass, silicon wafers, etc. with low heat capacity.
第１図は本発明に係る有機溶剤乾燥方法の第１
実施例の断面図、第２図は第２実施例の断面図、
第３図は従来装置の断面図である。
図中２…有機溶剤、８…被洗浄物、１３…圧力
容器。
FIG. 1 shows the first method of organic solvent drying according to the present invention.
A sectional view of the embodiment, FIG. 2 is a sectional view of the second embodiment,
FIG. 3 is a sectional view of a conventional device. In the figure, 2...organic solvent, 8...object to be cleaned, 13...pressure vessel.
Claims (1)
圧力容器内で上昇させ、沸点温度より高い蒸気
を、有機溶剤の蒸気中にある被洗浄物に吹き付
け、洗浄乾燥を行うことを特徴とする有機溶剤蒸
気乾燥方法。1 The organic solvent is raised to a temperature higher than the boiling point at normal pressure in a pressure vessel, and steam higher than the boiling point is sprayed onto the object to be cleaned in the organic solvent vapor to perform washing and drying. Organic solvent vapor drying method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26087784A JPS61138582A (en) | 1984-12-12 | 1984-12-12 | Organic solvent vapor drying method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26087784A JPS61138582A (en) | 1984-12-12 | 1984-12-12 | Organic solvent vapor drying method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61138582A JPS61138582A (en) | 1986-06-26 |
| JPH0331111B2 true JPH0331111B2 (en) | 1991-05-02 |
Family
ID=17353992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26087784A Granted JPS61138582A (en) | 1984-12-12 | 1984-12-12 | Organic solvent vapor drying method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61138582A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5105556A (en) * | 1987-08-12 | 1992-04-21 | Hitachi, Ltd. | Vapor washing process and apparatus |
| JPS6443384A (en) * | 1987-08-12 | 1989-02-15 | Hitachi Ltd | Steam washing method and washer |
-
1984
- 1984-12-12 JP JP26087784A patent/JPS61138582A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61138582A (en) | 1986-06-26 |
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