JPH0331920B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an oil diffusion pump, including starting,
This proposal is aimed at significantly shortening the operating time required for stopping, preventing oxidation and deterioration of hydraulic oil, saving energy, and simplifying the mechanism.

Conventional oil diffusion pumps have a hydraulic oil storage tank at the bottom of the casing, and a heater is attached to the bottom of the storage tank to heat and evaporate the hydraulic oil in the storage tank, so the casing, heater, and other components Another drawback is that the heat capacity of the hydraulic oil is large, and heat loss due to radiation, conduction, and convection is large, and the temperature rise and fall times are long. Also, if the vacuum is broken and a large amount of air is sent into the casing when the hydraulic oil is at a high temperature (200 to 300°C), the oil will come into contact with this large amount of air and oxidize, so the vacuum will not break. The drawback is that it cannot be done until the oil temperature has dropped sufficiently.

For the above reasons, in the conventional pump, it is necessary to spend 10 to 30 minutes each time it starts and stops, which is a major reason why the work efficiency cannot be improved.

Conventionally, as a method to eliminate the above drawbacks, a main vacuum valve with a relatively large and complicated structure was installed between the pump and the vacuum chamber, and an auxiliary vacuum valve and a vacuum chamber were installed between the oil diffusion pump and the auxiliary pump. Usually, a rough vacuum valve is provided between the oil diffusion pump and the auxiliary pump so as not to interfere with the operation of the oil diffusion pump when evacuating the vacuum chamber. However, this conventional method requires at least three valves, auxiliary pumps, etc., resulting in problems such as increased equipment costs, complicated operation, and increased equipment costs when automated.

The present invention is proposed in view of the above points,
A heater for heating the oil is built into the casing to eliminate the need to raise the temperature of the casing, and the condensed oil is guided outside the casing, and only the amount of oil necessary for evaporation is injected into the casing and heated. It is characterized by the fact that it shortens the temperature rise and cooling (starting and stopping) times, makes the pump more compact, and eliminates heat loss due to radiation, conduction, and convection from the casing, heater, etc.

The present invention will be described in detail below based on the figures.

1 is the casing, 2 is the intake hole, 3 is the exhaust hole, 4
1 is a nozzle assembly, 5 is a cooling pipe wound around the outer periphery of the casing 1, and 6 is a heating plate provided at the lower part of the inside of the casing 1 to partition the inside of the casing 1 into upper and lower parts. 7 is a fin installed on the heating plate 6;
1 is a heater attached to the lower surface of the heating plate 6; 9 is a connecting pipe to the heater 8; 10 is a cooling pipe attached to the lower surface of the heating plate 6; and 11 is a connecting pipe to the cooling pipe 10.

12 is the casing 1 from the bottom inside the casing 1
13 is a hydraulic oil injection pipe extended from the outside of the casing 1 onto the heating plate 6; 14 is the hydraulic oil discharge pipe 12 and the injection pipe 1;
This is a circulation pump installed between 3.

The oil diffusion pump according to the present invention has the above-mentioned configuration, and the hydraulic oil on the heating plate 6 is spread by the heater 8.
The oil is heated to 200 to 300°C and evaporated, and the evaporated oil rises within the nozzle assembly 4 and is ejected into the casing 1. The evaporated oil spouted into the casing 1 is condensed within the casing 1 by the cooling action of the cooling pipe 5, becomes liquid, and descends on the inner surface of the casing 1. This jetting action causes a downstream action on the air inside the casing 1 to perform an exhaust action, and the liquefied hydraulic oil flows down to the inner bottom of the casing 1 from the circulation slit 1' established between the inner wall of the casing 1 and the nozzle assembly 4. The required amount of hydraulic oil is supplied from the hydraulic oil discharge pipe 12 onto the heating plate 6 via the injection pipe 13 by the action of the circulation pump 14. On the other hand, air that has undergone a downstream action inside the casing 1 is discharged to the exhaust hole 3 side. Due to the above action, the vacuum chamber connected above the intake hole 2 is evacuated.

The present invention consists of the configuration and operation as described above, and the effects thereof will be listed next.

Since the heater is located inside the casing,
Since there is no need to heat the casing part, which has a large heat capacity, unlike conventional oil diffusion pumps, heat loss due to radiation, conduction, and convection from the casing part, which becomes hot, is extremely small.

Since there is no need to heat all of the oil except for the casing part, which has a large heat capacity, and during evaporation, the amount of heating heat and cooling heat required to start and stop this oil diffusion pump is much smaller than that of conventional oil diffusion pumps. .

Therefore, this oil diffusion pump can be started and stopped in an extremely short period of time.

In addition, during vacuum breaking or continuous evacuation, unlike conventional methods, the oil diffusion pump can be started and stopped in a short time without isolating it with a vacuum valve, eliminating the need for several vacuum valves and their complicated operations. It becomes necessary.

From the above points, the electric power required to operate the oil diffusion pump can be significantly reduced, and the equipment and operation can be simplified by shortening start-up and stop times.

[Brief explanation of the drawing]

The figure is a sectional view of an oil diffusion pump according to the present invention. 1... Casing, 2... Intake hole, 3... Exhaust hole, 4... Nozzle assembly, 5... Cooling pipe,
6... Heating plate, 7... Fin, 8... Heater, 9
... Heater connection pipe, 10 ... Cooling pipe, 11 ... Cooling pipe connection pipe, 12 ... Hydraulic oil discharge pipe, 13 ... Hydraulic oil injection pipe, 14 ... Circulation pump.

Claims (1)

[Claims] 1. The lower part of the casing is partitioned with a heating plate, a heater and a cooling pipe are attached to this heating plate, and the inner bottom of the casing and the upper surface of the heating plate are communicated with a hydraulic oil discharge pipe and an injection pipe, and the operating A quick-acting oil diffusion pump equipped with a circulation pump for oil circulation.