JPH0332236B2 - - Google Patents
Info
- Publication number
- JPH0332236B2 JPH0332236B2 JP61080673A JP8067386A JPH0332236B2 JP H0332236 B2 JPH0332236 B2 JP H0332236B2 JP 61080673 A JP61080673 A JP 61080673A JP 8067386 A JP8067386 A JP 8067386A JP H0332236 B2 JPH0332236 B2 JP H0332236B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- piezoelectric
- piece
- element piece
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は圧電素子片のわん曲変位を作動源と
した圧電アクチユエータに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a piezoelectric actuator whose actuation source is the curvature displacement of a piezoelectric element piece.
従来、この種の圧電アクチユエータとしては第
6図に示すものが知られている。ここに用いられ
る圧電素子片101は電気的に分極したPZT等
から成る圧電層102,103の間に黄銅のよう
な導電材料の薄片104を介挿した積層構造とな
つており、各圧電層102,103の外側面は銀
又はニツケルのような導電材料の薄層105,1
06にて覆われている。この圧電素子片101は
圧電層102,103の基端部を片持ばり式に支
持している。
Conventionally, as this type of piezoelectric actuator, one shown in FIG. 6 is known. The piezoelectric element piece 101 used here has a laminated structure in which a thin piece 104 of a conductive material such as brass is inserted between piezoelectric layers 102 and 103 made of electrically polarized PZT or the like. , 103 are coated with a thin layer 105,1 of conductive material such as silver or nickel.
Covered by 06. This piezoelectric element piece 101 supports the base end portions of the piezoelectric layers 102 and 103 in a cantilevered manner.
一方、上方の薄層105は端子107を介して
160ボルト程度の比較的高電圧の電源に接続され
るとともに、下方の薄層106は接地に接続され
る。そして、中央の薄片104は双極双投スイツ
チ108を介して高い正電位又は接地電位のいず
れかに選択的に接続される。 On the other hand, the upper thin layer 105 is connected via the terminal 107.
While connected to a relatively high voltage power source, on the order of 160 volts, the lower lamina 106 is connected to ground. The center lamella 104 is then selectively connected to either a high positive potential or ground potential via a double pole double throw switch 108.
今、双極双投スイツチ108を選択的に切換え
ると、薄片104は高い正電位又は接地電位に接
続され、上方の圧電層102又は下方の圧電層1
03に動作電圧が印加される。すなわち、正電圧
が上方の圧電層102に印加されると圧電素子片
101は基端部を支点Pにして上方にわん曲変位
される。又逆に正電圧が下方の圧電素子片101
に印加されると、圧電素子片101は基端部を支
点Pにして下方にわん曲変位される。このわん曲
変位に応じて圧電素子片101の自由端に固着さ
れた可動片は上下方向に可動する。 Now, selectively toggling the double-pole, double-throw switch 108 connects the lamina 104 to a high positive potential or to ground potential, either to the upper piezoelectric layer 102 or to the lower piezoelectric layer 1.
An operating voltage is applied to 03. That is, when a positive voltage is applied to the upper piezoelectric layer 102, the piezoelectric element piece 101 is curved upward with its base end serving as a fulcrum P. Conversely, the piezoelectric element piece 101 where the positive voltage is downward
, the piezoelectric element piece 101 is bent downward with its base end as a fulcrum P. In response to this curved displacement, the movable piece fixed to the free end of the piezoelectric element piece 101 moves in the vertical direction.
上記従来技術にあつては、圧電層102,10
3の基端部を固定して片持ばり式に支持している
ため、圧電素子片の動作が抑えられてしまい十分
なわん曲変位および作動力を得ることができない
問題を有する。特に、電気信号を機械動作に変換
することによりブライユ点字文字を表示するよう
な所謂点字セルに従来の圧電アクチユエータを適
用させた場合、初期押圧力を十分に得ることがで
きず、軽く触れただけでは指先に十分な触覚が得
られず点字文字を正確に読み取ることができなく
なる。また、圧電素子片のわん曲変位量に対して
特に規制する手段を構じていないため、圧電素子
片の有する特性が一義的に決定されてしまう問題
を有している。
In the above conventional technology, the piezoelectric layers 102, 10
Since the proximal end of the piezoelectric element 3 is fixed and supported in a cantilever manner, the movement of the piezoelectric element piece is suppressed and there is a problem in that sufficient bending displacement and operating force cannot be obtained. In particular, when conventional piezoelectric actuators are applied to so-called Braille cells that display Braille characters by converting electrical signals into mechanical motions, it is difficult to obtain sufficient initial pressing force, and even when touched lightly, In this case, the fingertips do not have sufficient tactile sensation, making it impossible to read Braille characters accurately. Furthermore, since there is no means for specifically regulating the amount of curved displacement of the piezoelectric element piece, there is a problem in that the characteristics of the piezoelectric element piece are uniquely determined.
この発明は上記の問題点に着目してなされたも
ので、大きな初期作動力およびわん曲変位を得る
ことができ、かつ作動力とわん曲変位量を任意に
設定し得る圧電アクチユエータを提供することを
目的とする。 The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a piezoelectric actuator that can obtain a large initial actuation force and bending displacement, and can arbitrarily set the actuation force and the amount of bending displacement. With the goal.
この発明は第1図に示すように弾性導電材料か
ら成る薄片1の両板面に圧電材料から成る圧電層
2,3を積層して圧電素子片4を構成し、この圧
電素子片4の基端側に位置する薄片1の基端部1
aを固定手段5により固定するとともに、圧電素
子片4の略中央部分を支持手段6によりわん曲変
位の自由度をもたせて支持したことを特徴とす
る。
As shown in FIG. 1, a piezoelectric element piece 4 is constructed by laminating piezoelectric layers 2 and 3 made of piezoelectric material on both plate surfaces of a thin piece 1 made of an elastic conductive material, and the base of this piezoelectric element piece 4 is Base end 1 of the thin piece 1 located on the end side
A is fixed by a fixing means 5, and a substantially central portion of the piezoelectric element piece 4 is supported by a supporting means 6 with a degree of freedom in curvature displacement.
この発明の圧電アクチユエータは圧電素子片4
に外部から電界を加えることにより、圧電層2,
3にひずみが生じて薄片1の基端と圧電素子片4
の略中央部を支点にしてわん曲変位する。このと
き、支持手段6を自由端側または基端側に移動さ
せて支点をずらすことにより、圧電素子片4の作
動力とわん曲変位量を調整することができる。 The piezoelectric actuator of this invention has a piezoelectric element piece 4
By applying an external electric field to the piezoelectric layer 2,
3 is strained, causing the base end of the thin piece 1 and the piezoelectric element piece 4 to
Displaces in a curved manner using the approximate center of the fulcrum as a fulcrum. At this time, by moving the supporting means 6 toward the free end side or the base end side and shifting the fulcrum, the operating force and amount of bending displacement of the piezoelectric element piece 4 can be adjusted.
以下、この発明の一実施例を図面に従い説明す
る。第2図において11は圧電素子片で、この圧
電素子片11は圧電材料例えばPZTから成る圧
電層12,13の間にリン青銅又はコバールのよ
うな弾性導電材料から成る薄片14を介挿した積
層構造をなし、圧電層12,13の外側面を銀の
ような導電材料から成る薄層15,16にて覆う
とともに、圧電層12,13の先端の間を銀製の
薄片17にて短絡している。本実施例ではかかる
圧電素子片11として巾2mm、厚さ0.96mm、全長
91mm程度の巾狭かつ肉厚で長さの比較的大きなも
のを用いている。この圧電素子片11は基端側よ
り突出する薄片14の基端部14aを固定手段例
えば半田18等を用いてプリント基板の配線パタ
ーン上に電気的に接続して固定される。さらに、
圧電素子片11の略中央部を支持手段例えば相対
向する面に突起部19a,19bを形成したU字
形状の支点部材19によりわん曲変位の自由度を
もたせて支持する。この場合、支点部材19の支
点位置Pを基端側の薄片14の先端から50.2mmの
位置、すなわち圧電素子片11(全長91mm)の中
心より若干図示右側にずらした位置にて圧電素子
片11のわん曲変位および作動力のバランスが最
適となることが実験的に確認されている。
An embodiment of the present invention will be described below with reference to the drawings. In FIG. 2, 11 is a piezoelectric element piece, and this piezoelectric element piece 11 is a laminated layer in which a thin piece 14 made of an elastic conductive material such as phosphor bronze or Kovar is inserted between piezoelectric layers 12 and 13 made of a piezoelectric material, for example, PZT. The outer surfaces of the piezoelectric layers 12 and 13 are covered with thin layers 15 and 16 made of a conductive material such as silver, and the ends of the piezoelectric layers 12 and 13 are short-circuited with a thin silver piece 17. There is. In this embodiment, the piezoelectric element piece 11 has a width of 2 mm, a thickness of 0.96 mm, and a total length of
A piece with a narrow width of about 91 mm, a thick wall, and a relatively long length is used. This piezoelectric element piece 11 is fixed by electrically connecting the base end 14a of the thin piece 14 protruding from the base end side to the wiring pattern of the printed circuit board using a fixing means such as solder 18 or the like. moreover,
A substantially central portion of the piezoelectric element piece 11 is supported by support means, such as a U-shaped fulcrum member 19 having protrusions 19a and 19b formed on opposing surfaces, with a degree of freedom in curvature displacement. In this case, the piezoelectric element piece 11 is placed at a position where the fulcrum position P of the fulcrum member 19 is 50.2 mm from the tip of the thin piece 14 on the base end side, that is, a position slightly shifted to the right in the drawing from the center of the piezoelectric element piece 11 (total length 91 mm). It has been experimentally confirmed that the balance between the curved displacement and the operating force is optimal.
上述の圧電素子片11の薄片14には図示しな
い電源供給回路が、また圧電層13には図示しな
い接地回路が接続されており、圧電素子片11に
電源供給回路による正極性の直流電圧と逆極性の
直流電圧が供給される。 A power supply circuit (not shown) is connected to the thin piece 14 of the piezoelectric element piece 11, and a grounding circuit (not shown) is connected to the piezoelectric layer 13. A polarized DC voltage is supplied.
かかる圧電アクチユエータは例えばブライユ点
字文字を表示する点字セルに用いられる。所謂点
字セルにあつては、図に示すように圧電素子片1
1の自由端部の先端に可動片として触知ピン20
が取付けられる。所謂点字セルは第3図a,bに
示すように、基体31を構成する支持板32の両
板面に夫々溝部33を4本ずつ形成し、各溝部3
3に上述の圧電アクチユエータ34の圧電素子片
11を階段状にセツトすることで、触指走査部3
5の表面より8個の触知ピン20の首部20aが
突出可能に設けられ、4×2のブライユ点字を表
示することができる。この場合、触知ピン20は
その頭部が同一高さに揃えられ、各圧電素子片1
1のわん曲変位に応じて上下方向に移動可能に保
持される。ここでは、圧電素子11の製造による
上向きまたは下向きの偏倚のバラツキを吸収する
ために、圧電素子片11に逆極性の直流電圧を印
加し下向きにわん曲変位させた状態で、触知ピン
20の頭部が触指走査部35の表面より突出しな
いように高さ調整される。その後で、圧電素子片
11の薄片14は基体31に一体に設けられた電
子回路部品を搭載したプリント基板36の配線パ
ターン上に固定される。 Such piezoelectric actuators are used, for example, in Braille cells for displaying Braille characters. In the case of a so-called Braille cell, as shown in the figure, a piezoelectric element piece 1
A tactile pin 20 is provided as a movable piece at the tip of the free end of 1.
is installed. As shown in FIGS. 3a and 3b, the so-called Braille cell has four grooves 33 formed on both sides of the support plate 32 constituting the base 31.
By setting the piezoelectric element pieces 11 of the piezoelectric actuator 34 described above in a stepwise manner in 3, the tactile scanning section 3
The neck portions 20a of eight tactile pins 20 are provided so as to be able to protrude from the surface of 5, and 4×2 Braille characters can be displayed. In this case, the heads of the tactile pins 20 are aligned at the same height, and each piezoelectric element piece 1
It is held movable in the vertical direction according to the curved displacement of 1. Here, in order to absorb variations in upward or downward deflection due to the manufacture of the piezoelectric element 11, a direct current voltage of opposite polarity is applied to the piezoelectric element piece 11, and the tactile pin 20 is bent downward. The height is adjusted so that the head does not protrude beyond the surface of the tactile scanning section 35. Thereafter, the thin piece 14 of the piezoelectric element piece 11 is fixed onto the wiring pattern of a printed circuit board 36 that is integrally provided with the base body 31 and has electronic circuit components mounted thereon.
このようにして構成された点字セルの各圧電ア
クチユエータ34に、逆極性の直流電圧を印加し
て予備付勢すことで各圧電素子片11は支点部材
19を支点にして触知ピン20の頭部が触指走査
部35の表面より突出しないように下方にわん曲
変位する。この状態で図示しない点字文字指定回
路により選定された圧電アクチユエータ34に正
極性の直流電圧が印加されると、圧電素子片11
は支点部材19を支点にして上向きにわん曲変位
し、触指走査部の表面より触知ピン20の頭部が
突出して所望の点字文字が表示される。 By applying a DC voltage of opposite polarity to each piezoelectric actuator 34 of the braille cell configured in this manner and pre-energizing it, each piezoelectric element piece 11 is activated by using the fulcrum member 19 as a fulcrum and the head of the tactile pin 20. The tactile scanning section 35 is curved downward so as not to protrude from the surface of the tactile scanning section 35. In this state, when a positive DC voltage is applied to the piezoelectric actuator 34 selected by the braille character designation circuit (not shown), the piezoelectric element piece 11
is bent upward using the fulcrum member 19 as a fulcrum, and the head of the tactile pin 20 protrudes from the surface of the tactile scanning section to display the desired Braille character.
かかる圧電アクチユエータ34によれば、圧電
素子片11に逆極性の直流電圧を印加すると第4
図中実線で示すように下方にわん曲変位する。ま
た、圧電素子片11に正極性の直流電圧を印加す
ると第4図中一点鎖線で示すように上方にわん曲
変位する。このとき、圧電素子片11の略中央部
分に位置する支点部材19にてそのわん曲変位が
抑えられるため、その時の反作用力が薄片14に
加わり薄片14の弾性力が圧電素子片11の基端
側に作用し、自由端側の作動力が増長せしめられ
る。同時に、薄片14の弾性により圧電素子片1
1の自由度が増して従来のものに比べて大きくわ
ん曲変位する。 According to the piezoelectric actuator 34, when a DC voltage of opposite polarity is applied to the piezoelectric element piece 11, the fourth
It is curved downward as shown by the solid line in the figure. Further, when a positive DC voltage is applied to the piezoelectric element piece 11, the piezoelectric element piece 11 is curved upward as shown by the dashed line in FIG. At this time, the fulcrum member 19 located approximately in the center of the piezoelectric element piece 11 suppresses its curved displacement, so that the reaction force at that time is applied to the thin piece 14 and the elastic force of the thin piece 14 is applied to the base of the piezoelectric element piece 11. The actuating force on the free end side is increased. At the same time, due to the elasticity of the thin piece 14, the piezoelectric element piece 1
1 degree of freedom is increased, allowing for larger curved displacements than conventional ones.
ちなみに、本発明による圧電アクチユエータと
従来の圧電アクチユエータを用意して押圧力とわ
ん曲変位の関係を調べたところ、中央下部に支点
を設けた片持ばり式の従来品に対しては第5図a
に示すような特性が得られ、本発明品に対しては
第5図bに示すような特性が得られた。 By the way, when we prepared a piezoelectric actuator according to the present invention and a conventional piezoelectric actuator and investigated the relationship between pressing force and bending displacement, we found that the conventional piezoelectric actuator, which is a cantilever type with a fulcrum at the lower center, was found to have the same characteristics as shown in Fig. 5. a
The characteristics shown in FIG. 5B were obtained for the product of the present invention.
この結果、本発明品は従来品に比べて大きな初
期押圧力およびわん曲変位が得られることが判
る。 As a result, it can be seen that the product of the present invention can obtain a larger initial pressing force and bending displacement than the conventional product.
しかも、本発明品は支点部材19左右に移動さ
せることにより、押圧力とわん曲変位量を調整す
ることができる。すなわち、支点部材19を自由
端側に移動させると押圧力が高まり、かつ支点部
材19を基端側に移動させるとわん曲変位が高ま
る。実施例の場合には、薄片14の基端から50.2
mmの地点にて押圧力とわん曲変位のバランスがと
れた圧電アクチユエータが得られる。 Moreover, in the product of the present invention, the pressing force and the amount of bending displacement can be adjusted by moving the fulcrum member 19 left and right. That is, moving the fulcrum member 19 toward the free end increases the pressing force, and moving the fulcrum member 19 toward the proximal end increases the bending displacement. In the case of the embodiment, 50.2 from the base end of the thin piece 14
A piezoelectric actuator with a well-balanced pressing force and bending displacement at a point of mm can be obtained.
したがつて、このような構成の圧電アクチユエ
ータによると、圧電素子片11が薄片14の基端
と支点部材19を支点にしてわん曲変位させるこ
とにより、圧電素子片11の自由端側に大きな曲
げモーメントを加えることができるため、安定し
たわん曲変位と作動力が得られ、点字セルにあつ
ては触知ピン20を介して良質の点字表示を行な
うことができる。しかも、支点部材19のベスト
位置を中心に左右に移動させることにより、押圧
力およびわん曲変位量を任意に調整することがで
きるため、設計仕様に巾をもたせることができ
る。 Therefore, according to the piezoelectric actuator having such a configuration, by causing the piezoelectric element piece 11 to bend and displace using the base end of the thin piece 14 and the fulcrum member 19 as fulcrums, a large bending is caused to the free end side of the piezoelectric element piece 11. Since a moment can be applied, stable bending displacement and actuation force can be obtained, and in the case of a Braille cell, high-quality Braille display can be performed via the tactile pin 20. Furthermore, by moving the fulcrum member 19 from side to side around the best position, the pressing force and the amount of bending displacement can be arbitrarily adjusted, so that design specifications can be varied.
なお、この発明は上記実施例にのみ限定されず
要旨を変更しない範囲で適宜変形して実施でき
る。 It should be noted that the present invention is not limited to the above-mentioned embodiments, but can be implemented with appropriate modifications without changing the gist.
例えば上記実施例ではこの発明を点字セルに適
用させたが、電気的変化を力学系に変換できるア
クチユエータであればどんなものにも適用させる
ことができる。 For example, in the above embodiment, the present invention was applied to a Braille cell, but it can be applied to any actuator that can convert electrical changes into a dynamic system.
以上述べたように、この発明によれば大きな初
期作動力およびわん曲変位を得ることができ、か
つ作動力とわん曲変位量を任意に設定し得る特長
を有する。
As described above, the present invention has the advantage that a large initial actuation force and bending displacement can be obtained, and the actuation force and the amount of bending displacement can be set arbitrarily.
第1図は本発明の圧電アクチユエータを示す構
成図、第2図は本発明の一実施例を示す概略的な
構成図、第3図a,bは同実施を用いて構成した
点字セルを示しa正面図、bは平面図、第4図は
同実施例の動作を説明するための説明図、第5図
a,bはそれぞれ従来例と同実施例の特性を示す
特性図、第6図は従来の圧電アクチユエータを示
す構成図である。
1,14…薄片、1a…基端部、2,3,1
2,13…圧電層、4,11…圧電素子片、5…
固定手段、6…支持手段、15,16…薄層、1
7…薄片、18…半田、19…支点部材、19
a,19b…突起部、20…触知ピン、20a…
首部、31…基体、32…支持板、33…溝部、
34…圧電アクチユエータ、35…触指走査部、
36…プリント基板。
Fig. 1 is a block diagram showing a piezoelectric actuator of the present invention, Fig. 2 is a schematic block diagram showing an embodiment of the present invention, and Figs. 3 a and b show a Braille cell constructed using the same embodiment. a is a front view, b is a plan view, FIG. 4 is an explanatory diagram for explaining the operation of the same embodiment, FIGS. 5 a and b are characteristic diagrams showing the characteristics of the conventional example and the same embodiment, respectively, and FIG. 6 1 is a configuration diagram showing a conventional piezoelectric actuator. 1, 14... thin piece, 1a... proximal end, 2, 3, 1
2, 13... Piezoelectric layer, 4, 11... Piezoelectric element piece, 5...
Fixing means, 6... Supporting means, 15, 16... Thin layer, 1
7... thin piece, 18... solder, 19... fulcrum member, 19
a, 19b... protrusion, 20... tactile pin, 20a...
Neck, 31... Base, 32... Support plate, 33... Groove,
34...Piezoelectric actuator, 35...Touch scanning unit,
36...Printed circuit board.
Claims (1)
料から成る圧電層を積層した圧電素子片と、この
圧電素子片の基端側に位置する上記薄片の基端部
を固定する固定手段と、上記圧電素子片の略中央
部分をわん曲変位の自由度をもたせて支持する支
持手段とを具備したことを特徴とする圧電アクチ
ユエータ。1. A piezoelectric element piece in which a piezoelectric layer made of a piezoelectric material is laminated on both plate surfaces of a thin piece made of an elastic conductive material, and a fixing means for fixing the base end of the thin piece located on the base end side of the piezoelectric element piece; A piezoelectric actuator comprising: support means for supporting a substantially central portion of the piezoelectric element piece with a degree of freedom in curvature displacement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61080673A JPS62237780A (en) | 1986-04-08 | 1986-04-08 | Piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61080673A JPS62237780A (en) | 1986-04-08 | 1986-04-08 | Piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62237780A JPS62237780A (en) | 1987-10-17 |
| JPH0332236B2 true JPH0332236B2 (en) | 1991-05-10 |
Family
ID=13724873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61080673A Granted JPS62237780A (en) | 1986-04-08 | 1986-04-08 | Piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62237780A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0282667A (en) * | 1988-09-20 | 1990-03-23 | Toto Ltd | piezoelectric actuator |
| JPH04340280A (en) * | 1990-07-06 | 1992-11-26 | K G S Kk | piezoelectric actuator |
| US5404067A (en) * | 1990-08-10 | 1995-04-04 | Siemens Aktiengesellschaft | Bonded piezoelectric bending transducer and process for producing the same |
| US5068567A (en) * | 1990-10-26 | 1991-11-26 | General Electric Company | Apparatus for increasing the recoverable energy of a piezoelectric bender |
| JP2683982B2 (en) * | 1992-04-21 | 1997-12-03 | ワックデータサービス 株式会社 | Piezoelectric three-point support method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58103184A (en) * | 1981-12-15 | 1983-06-20 | Matsushita Electric Ind Co Ltd | Electromechanical transducer |
-
1986
- 1986-04-08 JP JP61080673A patent/JPS62237780A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62237780A (en) | 1987-10-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7775797B2 (en) | Electromechanical tactile braille cell assembly | |
| US4017697A (en) | Keyboard membrane switch having threshold force structure | |
| US3976899A (en) | Snap action mechanical-electrical piezoelectric transducer | |
| US3996428A (en) | Pushbutton keyboard assembly with over center diaphragm contact | |
| JP2002025374A (en) | EL sheet and switch using the same | |
| EP0837437A1 (en) | Graphic tactile cell | |
| US4112279A (en) | Piezoelectric relay construction | |
| JP6132341B2 (en) | Movable contact member and switch device using movable contact member | |
| JP2000267785A (en) | Keyboard device | |
| US20090260960A1 (en) | Switch for use in microelectromechanical systems (mems) and mems devices incorporating same | |
| KR960043455A (en) | Ultrasonic motor | |
| JPH0332236B2 (en) | ||
| JPWO2010110417A1 (en) | Actuator device and input device | |
| US4099037A (en) | Key board switch assembly having canti-levered leaf spring contact assembly on common conductive frame | |
| JP3713027B2 (en) | Braille cell | |
| JPH0737325Y2 (en) | Piezoelectric actuator | |
| GB2029105A (en) | Electric contact array for telephone keypad | |
| JPH036925Y2 (en) | ||
| JP2000173397A (en) | Switch device | |
| JPH0314055Y2 (en) | ||
| JPS6363097B2 (en) | ||
| JPH0213800B2 (en) | ||
| JPS6350740Y2 (en) | ||
| JP3824040B2 (en) | Keyboard device with touch control function | |
| JP4326672B2 (en) | pointing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |