JPH0334060U - - Google Patents

Info

Publication number
JPH0334060U
JPH0334060U JP1989095423U JP9542389U JPH0334060U JP H0334060 U JPH0334060 U JP H0334060U JP 1989095423 U JP1989095423 U JP 1989095423U JP 9542389 U JP9542389 U JP 9542389U JP H0334060 U JPH0334060 U JP H0334060U
Authority
JP
Japan
Prior art keywords
vacuum chamber
window
window glass
vacuum
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989095423U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989095423U priority Critical patent/JPH0334060U/ja
Publication of JPH0334060U publication Critical patent/JPH0334060U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図ないし第３図は本考案の実施例を示し、
第１図は真空蒸着装置の断面図、第２図は同装置
の観察機構部分の側面断面図、第３図は同装置の
真空チヤンバ内から観察機構部分を見た正面図で
ある。また、第４図および第５図は従来例を示し
、第４図は真空蒸着装置の観察機構部分の側面断
面図、第５図は同装置の真空チヤンバ内から観察
機構部分を見た正面図である。 １……真空蒸着装置、２……真空チヤンバ、４
……試料、６……蒸着源、８……窓部、１０……
窓ガラス、１４……透明板、２０……遮蔽板、２
４……貫通孔、Ｘ……蒸着物質。

Claims (1)

  1. 【実用新案登録請求の範囲】 試料と蒸発源とが内部に配置される真空チヤン
    バを備え、この真空チヤンバの一部には内部観察
    用の窓部が形成され、この窓部が窓ガラスで封止
    されてなる真空蒸着装置において、 前記真空チヤンバ内の前記窓ガラスの対向位置
    には、窓ガラスよりも広い面積をもつガラス等で
    できた円形あるいは扇形の透明板が回転可能に設
    けられ、また、真空チヤンバの内壁には前記透明
    板を覆う遮蔽板が取り付けられ、この遮蔽板の一
    部には貫通孔が前記窓ガラスと同心に形成されて
    いることを特徴とする真空蒸着装置。
JP1989095423U 1989-08-14 1989-08-14 Pending JPH0334060U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989095423U JPH0334060U (ja) 1989-08-14 1989-08-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989095423U JPH0334060U (ja) 1989-08-14 1989-08-14

Publications (1)

Publication Number Publication Date
JPH0334060U true JPH0334060U (ja) 1991-04-03

Family

ID=31644684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989095423U Pending JPH0334060U (ja) 1989-08-14 1989-08-14

Country Status (1)

Country Link
JP (1) JPH0334060U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008044664A (ja) * 2006-08-21 2008-02-28 Asahi Breweries Ltd 段ボールの手切れ防止

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008044664A (ja) * 2006-08-21 2008-02-28 Asahi Breweries Ltd 段ボールの手切れ防止

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