JPH0334317Y2 - - Google Patents

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Publication number
JPH0334317Y2
JPH0334317Y2 JP1985099616U JP9961685U JPH0334317Y2 JP H0334317 Y2 JPH0334317 Y2 JP H0334317Y2 JP 1985099616 U JP1985099616 U JP 1985099616U JP 9961685 U JP9961685 U JP 9961685U JP H0334317 Y2 JPH0334317 Y2 JP H0334317Y2
Authority
JP
Japan
Prior art keywords
shaped electrodes
cleaning tank
rod
shaped
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985099616U
Other languages
Japanese (ja)
Other versions
JPS6210090U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985099616U priority Critical patent/JPH0334317Y2/ja
Publication of JPS6210090U publication Critical patent/JPS6210090U/ja
Application granted granted Critical
Publication of JPH0334317Y2 publication Critical patent/JPH0334317Y2/ja
Expired legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Description

【考案の詳細な説明】 産業上の利用分野 本考案は、洗浄力を強化した超音波洗浄機に関
するものである。
[Detailed Description of the Invention] Industrial Application Field The present invention relates to an ultrasonic cleaner with enhanced cleaning power.

従来技術 従来、超音波洗浄機として、洗浄槽の底部に圧
電基板が設けられ、この圧電基板に発振器が接続
され、また洗浄槽に水や洗浄液を入れ、発振器を
駆動させると、圧電基板から超音波が発生し、洗
浄槽に入れた被洗浄物を超音波によつて洗浄する
ようにしたものが提案されている。
Conventional technology Conventionally, in an ultrasonic cleaning machine, a piezoelectric substrate is provided at the bottom of a cleaning tank, and an oscillator is connected to this piezoelectric substrate.When water or cleaning liquid is poured into the cleaning tank and the oscillator is driven, ultrasonic waves are emitted from the piezoelectric substrate. A system has been proposed in which a sound wave is generated and an object to be cleaned placed in a cleaning tank is cleaned by the ultrasonic wave.

考案が解決しようとする問題点 このように構成された従来の超音波洗浄機で
は、圧電基板から発生する超音波は基板から細い
ビームとなつて放射されるので、被洗浄物体が複
雑な形状をしている場合は隅々まで超音波が届か
ず、洗浄ムラができるという欠点があつた。
Problems that the invention aims to solve In conventional ultrasonic cleaning machines configured in this way, the ultrasonic waves generated from the piezoelectric substrate are emitted from the substrate in the form of a narrow beam, so the object to be cleaned has a complex shape. However, if the cleaning method is used, the ultrasonic waves cannot reach every corner, resulting in uneven cleaning.

問題点を解決するための手段 本考案は、上記問題点を解決するために、洗浄
槽の底部または洗浄槽全体を圧電基板で構成し、
上記洗浄槽の底部及び/または洗浄槽全体に複数
の棒状電極またはコ字状電極及び櫛型電極を形成
し、これらの棒状電極またはコ字状電極と櫛型電
極の間に可変周波数発振器を接続したことを特徴
とする。
Means for Solving the Problems In order to solve the above problems, the present invention configures the bottom of the cleaning tank or the entire cleaning tank with a piezoelectric substrate,
A plurality of rod-shaped electrodes, U-shaped electrodes, and comb-shaped electrodes are formed at the bottom of the cleaning tank and/or the entire cleaning tank, and a variable frequency oscillator is connected between these rod-shaped electrodes or U-shaped electrodes and the comb-shaped electrode. It is characterized by what it did.

作 用 本考案は、底部及び/または洗浄槽全体の圧電
基板に設けられた複数の棒状電極またはコ字状電
極と櫛型電極に可変周波数信号を供給して発生し
た超音波ビームを振らせることにより、洗浄ムラ
がなくなり、また周波数を可変とすることにより
洗浄槽内で固定した定在波がなくなり、さらに洗
浄槽全体を圧電基板となるセラミツクで作ること
により洗浄槽が耐蝕性及び耐薬品性を有してコン
パクトになり、また高周波化による洗浄能力が向
上するという利点がある。
Function The present invention supplies a variable frequency signal to a plurality of rod-shaped electrodes or U-shaped electrodes and comb-shaped electrodes provided on the piezoelectric substrate at the bottom and/or the entire cleaning tank to cause the generated ultrasonic beam to oscillate. This eliminates uneven cleaning, and by making the frequency variable, fixed standing waves are eliminated within the cleaning tank.Furthermore, by making the entire cleaning tank from ceramic, which serves as a piezoelectric substrate, the cleaning tank has corrosion and chemical resistance. It has the advantage of being compact and has improved cleaning ability due to higher frequency.

実施例 第1図は、本考案の原理を説明するための図
で、圧電基板1の上に棒状電極2a,2b,2
c,2dが平行に配置され、この棒状電極2a,
2b,2c,2dに端子3a,3b,3c,3d
が接続されている。またこの棒状電極2a,2
b,2c,2dの間に電極4a,4b,4c,4
dが配置され、この電極4a,4b,4c,4d
の一端の共通電極5が接続されて櫛型電極が構成
され、この共通電極5はアースされている。そし
て、端子3aと3b及び3cと3dを対にした端
子Ta,Tbから所定の周波数の電気信号を供給す
ると、第2図に示すように液体と固体の境界に沿
つた表面から音波が発生する。この角度θは、 θ=sin1Vc/df=sin1λf/d で与えられる。但し、dは電極4a,4b,4
c,4d……の間隔、Vcは液体中の音波の伝搬
速度、λfは周波数での音波の波長である。な
お、第2図において、表面音波は100MH以下で
は「ラム波」であり、それ以上の高周波では「レ
イリー波」が有効であるが、洗浄機にはラム波を
使用する。
Embodiment FIG. 1 is a diagram for explaining the principle of the present invention, in which rod-shaped electrodes 2a, 2b, 2
c, 2d are arranged in parallel, and these rod-shaped electrodes 2a,
Terminals 3a, 3b, 3c, 3d to 2b, 2c, 2d
is connected. Moreover, these rod-shaped electrodes 2a, 2
electrodes 4a, 4b, 4c, 4 between b, 2c, 2d
d are arranged, and these electrodes 4a, 4b, 4c, 4d
A common electrode 5 at one end is connected to form a comb-shaped electrode, and this common electrode 5 is grounded. Then, when an electric signal of a predetermined frequency is supplied from terminals Ta and Tb, which are paired terminals 3a and 3b and 3c and 3d, sound waves are generated from the surface along the boundary between liquid and solid, as shown in Figure 2. . This angle θ is given by θ=sin 1 Vc/df=sin 1 λ f /d. However, d is the electrode 4a, 4b, 4
c, 4d..., Vc is the propagation velocity of the sound wave in the liquid, and λ f is the wavelength of the sound wave in frequency. In Figure 2, surface sound waves are "Lamb waves" at frequencies below 100 MH, and "Rayleigh waves" are effective at higher frequencies, but Lamb waves are used in cleaning machines.

第3図は、本考案の1実施例の超音波洗浄機の
断面図を示したもので、洗浄槽9は底部に圧電セ
ラミツク基板10が設けられ、この圧電セラミツ
ク基板10にの洗浄液11が接触しない面に第1
図に示した複数の棒状電極12及び櫛型電極13
が形成され、この棒状電極12と櫛型電極13に
可変周波数発振器14が接続されている。
FIG. 3 shows a sectional view of an ultrasonic cleaning machine according to an embodiment of the present invention, in which the cleaning tank 9 is provided with a piezoelectric ceramic substrate 10 at the bottom, and the cleaning liquid 11 comes into contact with the piezoelectric ceramic substrate 10. No. 1 on the side that doesn't
A plurality of rod-shaped electrodes 12 and comb-shaped electrodes 13 shown in the figure
A variable frequency oscillator 14 is connected to the rod-shaped electrode 12 and the comb-shaped electrode 13.

このように構成された本実施例の超音波洗浄機
では、棒状電極12及び櫛型電極13に可変周波
数発振器14から可変周波数の電力を供給する
と、洗浄液11内に表面弾性波(ラム波)である
音波が発生するが、この音波は上記式で示したよ
うに発生角度が変わるので、洗浄液11内に入れ
た被洗浄物が複雑な構造であつても隅々まで音波
が到達するので、洗浄ムラがなくなるという利点
がある。また従来の超音波洗浄機では低周波の超
音波が発生するが、本実施例では高周波の超音波
であり、この高周波化により洗浄能力が向上す
る。
In the ultrasonic cleaning machine of this embodiment configured in this way, when variable frequency power is supplied from the variable frequency oscillator 14 to the rod-shaped electrode 12 and the comb-shaped electrode 13, surface acoustic waves (Lamb waves) are generated in the cleaning liquid 11. A certain sound wave is generated, but the angle of generation of this sound wave changes as shown in the above equation, so even if the object to be cleaned placed in the cleaning liquid 11 has a complicated structure, the sound wave will reach every corner, making it easy to clean. This has the advantage of eliminating unevenness. Further, conventional ultrasonic cleaners generate low-frequency ultrasonic waves, but in this embodiment, high-frequency ultrasonic waves are generated, and the cleaning ability is improved by increasing the frequency.

なお、上記実施例では、洗浄槽9の底部に圧電
セラミツク基板10を設けたが、洗浄槽9全体を
圧電セラミツクで構成してもよい。その場合は、
洗浄槽9の底面ばかりでなく、側面にも棒状電極
12及び櫛型電極13を設けることができるの
で、あらゆる角度の音波が発生し、洗浄ムラがな
くなるという利点がある。また洗浄槽9全体を圧
電セラミツクで構成することにより、洗浄槽9が
耐蝕性、耐薬品性を有し、またコンパクトになる
という利点がある。また、上記実施例では、棒状
電棒を使用したが、この棒状電極の一端を接続し
たコ字状電極とすることもできる。
In the above embodiment, the piezoelectric ceramic substrate 10 is provided at the bottom of the cleaning tank 9, but the entire cleaning tank 9 may be made of piezoelectric ceramic. In that case,
Since the rod-shaped electrodes 12 and the comb-shaped electrodes 13 can be provided not only on the bottom surface of the cleaning tank 9 but also on the side surfaces, there is an advantage that sound waves from all angles are generated and uneven cleaning is eliminated. Moreover, by constructing the entire cleaning tank 9 from piezoelectric ceramic, there is an advantage that the cleaning tank 9 has corrosion resistance, chemical resistance, and is compact. Further, in the above embodiment, a rod-shaped electric rod is used, but it is also possible to use a U-shaped electrode with one end of the rod-shaped electrode connected.

考案の効果 以上の説明から明らかなように、本考案は、洗
浄槽の底部または洗浄槽全体を圧電セラミツクで
構成し、この圧電セラミツクに設けられた複数の
棒状電極またはコ字状電極と櫛型電極に可変周波
数信号を供給して発生した超音波ビームを振らせ
ることにより、洗浄ムラがなくなり、また周波数
を可変とすることにより洗浄槽内で固定した定在
波がなくなり、さらに洗浄槽全体を圧電セラミツ
クで作ることにより洗浄槽が耐蝕性及び耐薬品性
を有してコンパクトになり、また高周波化による
洗浄能力が向上するという利点がある。
Effects of the Invention As is clear from the above explanation, the present invention consists of a piezoelectric ceramic for the bottom of the cleaning tank or the entire cleaning tank, and a plurality of rod-shaped electrodes or U-shaped electrodes provided on the piezoelectric ceramic and a comb-shaped electrode. By supplying a variable frequency signal to the electrode and causing the generated ultrasonic beam to oscillate, uneven cleaning can be eliminated, and by making the frequency variable, fixed standing waves within the cleaning tank can be eliminated, and the entire cleaning tank can be By making the cleaning tank from piezoelectric ceramic, it has the advantage of being corrosion resistant and chemical resistant, making it compact, and also improving the cleaning ability due to the use of high frequency waves.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の原理を説明するための構成
図、第2図は第1図の構成により音波を発生する
ための説明図、第3図は本考案の第1実施例の超
音波洗浄機の断面図である。 1……圧電基板、9……洗浄槽、10……圧電
セラミツク基板、11……洗浄液、12……棒状
電極、13……櫛型電極、14……可変周波数発
振器。
Fig. 1 is a configuration diagram for explaining the principle of the present invention, Fig. 2 is an explanatory diagram for generating sound waves using the configuration of Fig. 1, and Fig. 3 is an ultrasonic cleaning of the first embodiment of the present invention. FIG. DESCRIPTION OF SYMBOLS 1... Piezoelectric substrate, 9... Cleaning tank, 10... Piezoelectric ceramic substrate, 11... Cleaning liquid, 12... Rod-shaped electrode, 13... Comb-shaped electrode, 14... Variable frequency oscillator.

Claims (1)

【実用新案登録請求の範囲】 1 洗浄槽の底部または洗浄槽全体を圧電基板で
構成し、上記洗浄槽の底部及び/または洗浄槽
全体に複数の棒状電極またはコ字状電極及び櫛
型電極を形成し、これらの棒状電極またはコ字
状電極と櫛型電極の間に可変周波数発振器を接
続して棒状電極またはコ字状電極と櫛型電極に
よつて発生する表面弾性波(ラム波)を使うこ
とを特徴とする超音波洗浄機。 2 上記棒状電極またはコ字状電極及び櫛型電極
は上記洗浄槽の外面に設けられたことを特徴と
する実用新案登録請求の範囲第1項記載の超音
波洗浄機。
[Claims for Utility Model Registration] 1. The bottom of the cleaning tank or the entire cleaning tank is composed of a piezoelectric substrate, and the bottom of the cleaning tank and/or the entire cleaning tank is provided with a plurality of rod-shaped electrodes, U-shaped electrodes, and comb-shaped electrodes. A variable frequency oscillator is connected between these rod-shaped electrodes or U-shaped electrodes and comb-shaped electrodes to generate surface acoustic waves (Lamb waves) generated by the rod-shaped electrodes or U-shaped electrodes and comb-shaped electrodes. An ultrasonic cleaning machine that is characterized by its use. 2. The ultrasonic cleaning machine according to claim 1, wherein the rod-shaped electrode, the U-shaped electrode, and the comb-shaped electrode are provided on the outer surface of the cleaning tank.
JP1985099616U 1985-06-30 1985-06-30 Expired JPH0334317Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985099616U JPH0334317Y2 (en) 1985-06-30 1985-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985099616U JPH0334317Y2 (en) 1985-06-30 1985-06-30

Publications (2)

Publication Number Publication Date
JPS6210090U JPS6210090U (en) 1987-01-21
JPH0334317Y2 true JPH0334317Y2 (en) 1991-07-19

Family

ID=30968658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985099616U Expired JPH0334317Y2 (en) 1985-06-30 1985-06-30

Country Status (1)

Country Link
JP (1) JPH0334317Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7133944B2 (en) * 2018-03-01 2022-09-09 株式会社国際電気セミコンダクターサービス ULTRASONIC CLEANING DEVICE, CLEANING METHOD, AND VIBRATOR

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56102977A (en) * 1980-01-19 1981-08-17 Matsushita Electric Industrial Co Ltd Ultrasonic washer
JPS56141888A (en) * 1980-04-09 1981-11-05 Shimada Rika Kogyo Kk Ultrasonic washing device
JPS5842968A (en) * 1981-09-07 1983-03-12 Hitachi Ltd Ultrasonic probe
JPS60111387A (en) * 1983-11-21 1985-06-17 Hitachi Ltd Magnetic bubble memory element

Also Published As

Publication number Publication date
JPS6210090U (en) 1987-01-21

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