JPH033733U - - Google Patents

Info

Publication number
JPH033733U
JPH033733U JP6407589U JP6407589U JPH033733U JP H033733 U JPH033733 U JP H033733U JP 6407589 U JP6407589 U JP 6407589U JP 6407589 U JP6407589 U JP 6407589U JP H033733 U JPH033733 U JP H033733U
Authority
JP
Japan
Prior art keywords
gas introduction
ceiling
reaction chamber
reaction gas
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6407589U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6407589U priority Critical patent/JPH033733U/ja
Publication of JPH033733U publication Critical patent/JPH033733U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す骨子図、第２
図は該実施例でウエーハを処理した場合の生成膜
膜厚分布図、第３図は従来例を示す骨子図、第４
図は該従来例でウエーハを処理した場合の生成膜
膜厚分布図である。 ３……反応室、６，６ａ，６ｂ……ウエーハ、
９……天井、１０……反応ガス導入路、１１……
ガス導入口を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 反応室の側面及び天井面に沿つて、反応ガス導
    入路を形成し、反応ガス導入口を反応室の天井に
    開口せしめたことを特徴とする縦形拡散装置。
JP6407589U 1989-06-01 1989-06-01 Pending JPH033733U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6407589U JPH033733U (ja) 1989-06-01 1989-06-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6407589U JPH033733U (ja) 1989-06-01 1989-06-01

Publications (1)

Publication Number Publication Date
JPH033733U true JPH033733U (ja) 1991-01-16

Family

ID=31594690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6407589U Pending JPH033733U (ja) 1989-06-01 1989-06-01

Country Status (1)

Country Link
JP (1) JPH033733U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005320043A (ja) * 2004-05-11 2005-11-17 Wakon Danbooru Kk 段ボール桁材及びその桁材を用いた紙製パレット

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130523A (ja) * 1987-11-17 1989-05-23 Toshiba Ceramics Co Ltd 半導体用縦型熱処理炉

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130523A (ja) * 1987-11-17 1989-05-23 Toshiba Ceramics Co Ltd 半導体用縦型熱処理炉

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005320043A (ja) * 2004-05-11 2005-11-17 Wakon Danbooru Kk 段ボール桁材及びその桁材を用いた紙製パレット

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