JPH0229521U - - Google Patents
Info
- Publication number
- JPH0229521U JPH0229521U JP10715788U JP10715788U JPH0229521U JP H0229521 U JPH0229521 U JP H0229521U JP 10715788 U JP10715788 U JP 10715788U JP 10715788 U JP10715788 U JP 10715788U JP H0229521 U JPH0229521 U JP H0229521U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- gas introduction
- raw material
- material gas
- introduction pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案ＭＯＣＶＤ装置の一実施例を示
す断面図、第２図は従来のＭＯＣＶＤ装置の断面
図である。 １…反応管、２…第１原料ガス導入管、３…排
気管、４…サセプタ、５…基板、６…高周波加熱
コイル、７…第２原料ガス導入管、８…シヤツタ
、９…雰囲気ガス導入管。
す断面図、第２図は従来のＭＯＣＶＤ装置の断面
図である。 １…反応管、２…第１原料ガス導入管、３…排
気管、４…サセプタ、５…基板、６…高周波加熱
コイル、７…第２原料ガス導入管、８…シヤツタ
、９…雰囲気ガス導入管。
Claims (1)
- 反応管と、該反応管に連通した原料ガス導入管
と上記反応管内に配され、基板を載置するサセプ
タと、上記原料ガス導入管と上記サセプタの間に
設けられた開閉自在のシヤツタと、を具備するこ
とを特徴とするＭＯＣＶＤ装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10715788U JPH0229521U (ja) | 1988-08-12 | 1988-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10715788U JPH0229521U (ja) | 1988-08-12 | 1988-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0229521U true JPH0229521U (ja) | 1990-02-26 |
Family
ID=31341319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10715788U Pending JPH0229521U (ja) | 1988-08-12 | 1988-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229521U (ja) |
-
1988
- 1988-08-12 JP JP10715788U patent/JPH0229521U/ja active Pending
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