JPH033734U - - Google Patents
Info
- Publication number
- JPH033734U JPH033734U JP6467089U JP6467089U JPH033734U JP H033734 U JPH033734 U JP H033734U JP 6467089 U JP6467089 U JP 6467089U JP 6467089 U JP6467089 U JP 6467089U JP H033734 U JPH033734 U JP H033734U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- liquid raw
- vaporization section
- sealed chamber
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 10
- 230000008016 vaporization Effects 0.000 claims 4
- 238000009834 vaporization Methods 0.000 claims 4
- 239000011261 inert gas Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 2
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Description
第１図はこの考案の一実施例の構成図、第２図
はそれに用いるＭＦＣの要部の縦断面図、第３図
はそのＡ−Ａ′断面図、第４図は従来例の構成図
、第５図は他の従来例の構成図である。
１０……原料タンク、１１……Ｈｅガス配管、
１７……原料取出用配管、１７ａ……コイル状配
管、１８……加熱室、１９……密封室、２２……
ＭＦＣ、２５……気化ガス取出用配管、２６……
処理室。
Fig. 1 is a block diagram of an embodiment of this invention, Fig. 2 is a longitudinal cross-sectional view of the main parts of the MFC used therein, Fig. 3 is a cross-sectional view taken along line A-A', and Fig. 4 is a block diagram of a conventional example. , FIG. 5 is a block diagram of another conventional example. 10... Raw material tank, 11... He gas piping,
17... Piping for raw material extraction, 17a... Coiled pipe, 18... Heating chamber, 19... Sealed chamber, 22...
MFC, 25... Piping for vaporized gas extraction, 26...
processing room.
Claims (1)
タンクと、内部に液体原料気化部を備えた密封室
と、この密封室の液体原料気化部を加熱する加熱
手段と、一端が上記液体原料タンクの上部空間に
開口し他端が不活性ガス源に連結される不活性ガ
ス配管と、一端が上記液体原料タンクの貯溜液体
内に開口し他端が上記密封室の液体原料気化部の
一端に連結している液体原料取出用配管と、上記
液体原料取出用配管の途中に設けられる流量調節
計と、一端が上記液体原料気化部の他端と連結し
他端が処理室に延びる気化原料取出用配管を延設
したことを特徴とする蒸発器。 A liquid raw material tank that stores the liquid raw material leaving an upper space, a sealed chamber having a liquid raw material vaporization section inside, a heating means for heating the liquid raw material vaporization section of this sealed chamber, and one end of the liquid raw material tank. An inert gas pipe that opens into the upper space and has its other end connected to an inert gas source, and one end that opens into the stored liquid of the liquid raw material tank and the other end that is connected to one end of the liquid raw material vaporization section of the sealed chamber. a flow rate controller provided in the middle of the liquid raw material retrieval pipe; one end connected to the other end of the liquid raw material vaporization section and the other end extending to the processing chamber; An evaporator characterized by extended piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989064670U JPH0742481Y2 (en) | 1989-06-01 | 1989-06-01 | Evaporator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989064670U JPH0742481Y2 (en) | 1989-06-01 | 1989-06-01 | Evaporator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH033734U true JPH033734U (en) | 1991-01-16 |
| JPH0742481Y2 JPH0742481Y2 (en) | 1995-10-04 |
Family
ID=31595821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989064670U Expired - Lifetime JPH0742481Y2 (en) | 1989-06-01 | 1989-06-01 | Evaporator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0742481Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63291601A (en) * | 1987-05-21 | 1988-11-29 | Mitsubishi Electric Corp | Apparatus for controlling liquid material |
-
1989
- 1989-06-01 JP JP1989064670U patent/JPH0742481Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63291601A (en) * | 1987-05-21 | 1988-11-29 | Mitsubishi Electric Corp | Apparatus for controlling liquid material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0742481Y2 (en) | 1995-10-04 |