JPH0337842A - Production of stamper for information recording medium - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Usage of +* Business 1-] The present invention provides an optical card, an optical disk, and a compact disk 47. This invention relates to a method for manufacturing a stamper for an information nC recording medium for duplicating an information recording medium on which information is recorded and reproduced.

[Prior art] Information record 2, L for video discs, compact discs, etc.
In order to obtain an information recording medium with JF3 groups of tracking grooves and information bits formed on its surface, a stamper with a fine pattern engraved in accordance with the conventional information recording method is used. : Contraction molding method ■ Injection 11 Contraction 1JI1
．． ■Injection molding method and ■Ft]・Polymer method (2P method)
: Information recording media J, (
A board is being produced.

As a method of manufacturing such a standber for information recording media, Japanese Patent Application Laid-Open No. 62-217422, Obtronics [Military 7
Vol. 5 Si (+988) P115-120: Manufacturing technology of optical disk stamper], Electronic materials [Vol. 27, 2
No. 7 (+988), pages 51-57: Optical disc manufacturing process, etc., and a typical manufacturing process for a standber for an information recording medium consists of the following steps.

First, apply photoresist to a plate such as glass using a coating machine such as a spinner to form a predetermined film Pl! Play 1 te.

Next, for -a, an exposure machine such as a laser cutting machine is used for tracking. M and ++': fF
A fine pattern containing a desired gate protrusion exclusively for the J bit is exposed. Thereafter, through processes such as paddle development, a glass master disc with a desired fine pattern patterned thereon is obtained.

This glass ifl plate has a silver mirror, breath electrolytic nickel plating,
A silver or nickel film is deposited by sputtering, etc. and then subjected to ET conversion and other treatments.Furthermore, nickel electroforming is performed on this to form a predetermined thickness, and when the nickel layer is peeled off from the glass master, the father is formed.・You can get a stamper.

Next, after washing off the photoresist attached to the surface of this father stamper, a stripping treatment using a chromic acid solution is applied to the surface of the father stamper.・1 nickel on the stamper
% to the desired y′I, and then the nickel layer is ♀II fti from the father stamper to i4? The stanbar that is used is the master stanbar.

In the same way as in history, by applying a nickel coating to this mother stamper and peeling it off, the stamper becomes 11? I can do that.

Using the stambar obtained through such a process,
+I transferred from the fine pattern provided on the glass master disk
Substrates for LI information recording media are manufactured.

In addition, as described in the manufacturing process of magneto-optical disks (Electronic Materials (1988)), recently, fine patterns with irregularities such as tracking grooves and information bits are engraved on the glass master using the tri-etching method. However, attempts have also been made to manufacture substrates for information recording media using standbars manufactured using the obtained higher quality glass master disks.

[Problems to be solved by the invention] However, in the conventional example described above, the fine pattern provided on the glass master is copied (duplicated) through the steps of father stamper → mother stamper → stamper based on the glass master. Therefore, there is a drawback that the precision of the fine pattern formed on the stand bar is inferior to the fine pattern initially formed on the glass master disk.

Therefore, a stand bar with a fine pattern of high characteristics is used.
Nickel li,j, which should be able to be mass-produced at low cost
, : Although this is a method for manufacturing a 3-year stambar, it is also possible to perform nickel electroforming on a glass master plate and then peel it off to use the resulting father stamper as a stambar, or to make a predetermined number of father stampers. - A stamper must be manufactured and is expensive.

The cause of deterioration is glass fiber;
The process consists of repeating the process of copying from stamper to mother stamper to stamper.

For example, if you make 3 mother stampers from a father stamper and 3 stampers from each mother stamper, you will ultimately get 9 stampers from one glass master. be able to. However, in the conventional method of manufacturing stampers, when producing a mother stamper from a father stamper, the fazeau stamper is subjected to a peeling process, and then nickel is coated.
A mother stamper was obtained by cutting the f-ni casting to a desired JJJ and peeling off the nickel layer.

This peeling treatment is performed using a chromic acid solution on the Niratil surface P.
, vi oxidation treatment. Therefore, it is thought that a very thin porous T't oxide film is formed on the peeled surface layer, but due to the peeling process, the 1:? The micropatterns of each of the three mother stampers degraded with the same number of treatments, and the stampers obtained from the mother stampers also had R
Degradation of the gl+ pattern will occur with the same number of treatments, respectively.

In other words, there is a large difference in the deterioration of the fine pattern between one stamper [1] and the ninth stamper, even if the stampers are manufactured through the same E process. Also, since the nickel peels off from each other repeatedly, it has the disadvantage of being prone to scratches or fine patterns.

In addition, as mentioned in the prior art, a method has recently been attempted in which a glass master is subjected to dry etching to produce a stub bar, but this method has the disadvantage of making it difficult to separate the glass master from the stub bar.

The disadvantages of the conventional example are listed below in bullet points.

m -- In the general manufacturing method of nickel electroforming stamper, since the fine pattern deteriorates, a father stamper with less deterioration is used as the stamper. Therefore, a cheap stand bar cannot be expected.

(2) The method for manufacturing inexpensive nickel electroformed stump bars involves repeatedly manufacturing copies, but this results in differences in the deterioration of the fine patterns of the stump bars. This results in unstable quality (variations) and poor reliability.

(3)j;lli Basically, since the structure is such that electroforming and peeling of nickel is repeatedly performed, there is a drawback that the fine pattern of the information recording medium is easily scratched.

(4) If a fine pattern with irregularities such as tracking grooves and information pits is engraved and a stub bar is made using a higher quality glass master, the glass surface may peel off or be soft and easily scratched. There are drawbacks.

The present invention has been made in view of the conventional method and technology for manufacturing standbars for information recording media, and provides a new standbar that does not cause deterioration of fine patterns caused by copying standbars from glass master discs. -Provides a manufacturing method for.

[Means for Solving the Problems] The present invention provides a process of forming a resist film on a glass substrate and cutting the resist film to form a fine uneven pattern to produce a glass master, and a process of manufacturing a glass master by forming a resist film on a glass substrate. A process of dry etching to produce a father stamper, a process of forming a resin base material on the obtained father stamper and peeling it off to produce a mother stamper,
A metal conductive film is formed on the obtained mother stamper,
After forming an electroforming common material on this electrode 21 by electroforming,
7) A method for producing a stamp bar for an i-information recording medium, characterized in that it comprises a step of peeling off the metal conductive coating 1 from the mother stamper together with the i-base material to produce a stamp bar, and In the step of manufacturing the mother stamper, a plurality of father stampers are fixed to a stand for a stamper, and a mother stamper with a plurality of stamps is produced, thereby manufacturing a stamper with multiple stampers. be.

According to the method of the present invention, there is no need to perform a stripping process using a chromic acid solution to create 74 stampers by duplication, and the process can be simplified because the father stamper is formed by tri-etching the glass master. Deterioration of fine patterns can be suppressed. Also, since the mother stamper is manufactured from a resin base material, the separation from the father stamper is relatively blind, making it difficult to scratch the group surface. As a result, an excellent stand bar with high quality stability and reliability can be easily obtained.

The present invention will be described below with reference to the drawings.

FIG. 1 is a process explanatory diagram showing the procedure according to the method of the present invention. The substrate that can be used may be a known glass substrate such as blue plate glass, and the resist film formed on the plate using a spinner or the like may be a known resist film. Cutting can be performed by laser cutting, contact exposure, etc., and a predetermined uneven pattern is formed, followed by development to create a resist pattern, which is used as a glass master.

In order to manufacture a multi-piece mother stamper, for example, the father stamper that has been obtained may be fixed by bonding it with an epoxy adhesive or the like on a mounting stand of a glass plate. In this case, it is preferable to form grooves in advance in consideration of the layer thickness of the father stamper and the adhesive material.

FIG. 2 is a schematic diagram of what is obtained in each step of the method for producing a standber for an information recording medium according to the present invention, and what is shown at section -E in this figure is a partially enlarged schematic cross-sectional view. In the figure, 7 is a glass substrate such as blue plate glass, 5 is a resist pattern for forming the unevenness of the stanbar, 1 is a glass master disk with resist patterned on a glass blowing plate, and 2 is a
The father stamper 53 is a mother stamper obtained by dry etching a glass master disk to form a fine pattern with a predetermined depth.
The stamper 14 is a stamper for a full-fledged recording medium in which a mother stamper is subjected to conductive treatment and a co-material is formed by TL casting.

The obtained glass master disk is then etched along a concavo-convex pattern by tri-etching to form fine patterns such as tracking grooves and information bits, thereby forming a father stamper. The surface of the obtained Fazo tambour has a photoresist crosspiece 7 blue, which is
For example, it may be removed by oxygen plasma, asoasing, or the like.

The father stamper may be used alone, or the abducted stamper may be transferred to a stand for the stamper. If multiple father stampers are installed in white, the same number of mother stampers and stampers can be produced, increasing efficiency.

Next, a mother stamper is manufactured by molding and peeling the resin J1c material using a father stamper.The materials that can be used for the resin stamping material include epoxy acrylate resin and urethane acrylate resin as ultraviolet curing resins. The resin, polyester acrylate resin, or PMMA resin may be used for formation, such as the 2P (photopolymer) method or the 7-coni molding method.

The formed mother stamper has a 2Qt Kel film on the surface,
The conductive tlQ is formed by depositing a silver film or the like using a sputtering device or the like. Next, a layer of an electroformed co-material having a predetermined thickness is formed on the four-electrified film using an electroforming device, and then peeled off to obtain a stand bar.

As shown in FIG. 2, in the method of the present invention, a father stamper is produced from a glass master without using a peeling process, and a plurality of mother stampers can be produced from one father stamper. Since the mother stamper uses a resin material, conventional peeling treatment using dichromic acid, etc. is not necessary, and as a result, it is easily peeled off, and the fine pattern of the father stamper does not deteriorate, making it possible to create multiple mother stampers. The mother stamper's VL thin pattern does not deteriorate even if Stan bar is mother
Although obtained from a stamper through a conventional peeling process, pattern degradation is not increased because the stamper is only made from one mother stamper or 61 pieces.

FIG. 3 is a schematic diagram illustrating a conventional method for manufacturing a standber for an information recording medium, and the upper part of the figure is a partially enlarged schematic cross-sectional view.

In the figure, 7 is a glass substrate such as blue plate glass, 5 is a resist pattern for forming the unevenness of the stanbar,
The father stamper 16 is obtained by applying a resist to the above-mentioned glass substrate and buttering it, and 2 is a glass JM board subjected to conductive treatment, forming a base material by electroforming, and peeling it off. A mother stamper 14 obtained by subjecting a stamper to a peeling process, forming a base material by electroforming, and peeling it off is information obtained by subjecting a mother stamper to a peeling process, forming a base material by electroforming, and peeling it off. This is a stand bar for recording media.

Compared to the method of the present invention shown in Figure 2, in the conventional method shown in Figure 3, peeling treatment is performed in each step of manufacturing the father stamper, mother stamper 1, and stamper, and only one father stamper is used. Since a plurality of mother stampers 11 are used for stamping a plurality of stampers from one mother stamper, the deterioration of the fine pattern increases.

FIG. 4 schematically shows each manufacturing process according to the method of the present invention.

First, a resist pattern 5 for forming the irregularities of the stand bar is formed on a glass substrate 7 made of blue plate glass or the like (A), and then this is dry-etched to form a fine pattern of a predetermined depth (B). ), Obtain Fazo Stamper 2 by removing the residual resist (C)
Then, a resin base material is applied to the father stamper.
・Form the stanbar 3 (D), then peel off the mother stanbar 3, form a conductive film 8 on the peeled surface to form an electroforming base material (E), and then form the electrolytic 317 layer. If you peel it off, you will get stamper 4 (G)
.

To make a multi-cavity mother stamper, use the 5th U.
What is necessary is to do as shown in A. That is, the Fazo stamper 2 obtained in FIG. 4(C) is placed on the multi-cavity stamper mounting stand 10 that holds the father stamper, and the Fazo stamper 2 and the 99-cavity stamper frame are assembled together. A) 1st multi-cavity father stamper-h with resin co-material 11 fixed via stirring joint 9 for joining
B), ♀ 11 is separated to obtain a multi-layer mother stamper I+ (C), and a conductive film 8 is applied to the peeled surface of the multi-layer mother stamper (conductive film 8 for forming the material). D), further form an electroformed layer 12'' on the mother stamper by electric ZJI (E), and peel it off to obtain a stamper 12 (F).

Although FIG. 7 is a schematic perspective view showing an example of a multi-piece father stamper that can be used in the process of manufacturing a multi-piece stamper, the shape is not limited thereto.

Also, as shown in Fig. 5, considering the thickness of the Fazo tumbar and the adhesive layer, it is preferable to form the construction stand in a concave shape in advance and make the surface on which the tree IFt is formed flat. (A) in Figure 6 (same form as No. 51*I), (B
), (C), etc. That is,
In (B), a large number of Fazo stampers 2 for information recording media are adhered to predetermined positions on the stand 10 for the stamper using an epoxy adhesive, and several S pieces are also taken to make the resin forming surface flat. Connect the top cover 13 of the stamper stand with epoxy resin 41? A multi-cavity fazo stamper as shown in Fig. 7 is manufactured by adhering with an adhesive.

In addition, in (C), a convex part is provided at a predetermined position on the mounting base 10 for a multi-piece stamper, and the Fazo stamper 2 for information recording media is fixed to the 411 part with an epoxy adhesive, and the resin is roughly coated. In order to make the forming surface flat, the upper cover 13 of the multi-piece stamper stand is adhered with epoxy adhesive, thereby forming the multi-piece father/stamper shown in FIG.
[Example 1 Example 1 A fuzuki stamper was manufactured. First, a resist layer 1 is formed on glass J and U plates 7 such as blue plate glass. Resist: Az13004.6CP (Company name: Hoechst Japan): Thinner = 1
: Dilute at a wL ratio of 2. Glass plate 7 with diluted resist
A resist film having a thickness of f 000λ is formed by applying the resist film at a spinner rotation speed of 3000 rpm. After that, using an exposure device such as a laser cutting machine or a contact exposure device PLA (company name: Canon), a predetermined uneven pattern (concentric circles, spirals, or stripes may be used; in this example, a spiral pattern is used). resist pattern 5 by cutting and developing the /f
Ninari, Glass J! I got the 1st edition. (Step (A) in Figure 4) Next, the glass master is heated to 1000 mm using a tri-etching device.
A father stamper 2 was obtained by etching a tracking groove consisting of a spiral guide groove with a pitch L, liμm, and a step i ooo, and a fine pattern with unevenness such as information phase pits. Figure 4 process (B)). The dry etching conditions were as described below.

*Dry etching conditions Vacuum degree I C2F.

Etching time: 5 min Next, after removing the photoresist adhering to the surface of this father stamper 2 using a method such as oxygen plasma ashing, a resin base material 3 is formed and peeled off.
Use it as a stamper. (Step (D) in FIG. 4) In the formation of this resin base material, so-called 2P (photopolymer) 7 was used. That is, on the father stamper 2, an epoxy acrylate resin (product name: MIIA-5000, company name: Mitsubishi Rayon) that is cured by ultraviolet rays is applied, and a diameter of 5 inches φ and a thickness of 1. Im
After covering the top with a glass substrate of No. m, ultraviolet rays were irradiated from the glass substrate side to cure the acrylate resin MRA-5000, and the mother stamper was obtained by peeling it off from the father stamper.

Next, a conductive film 8 was formed by depositing 1000 nickel IIQ on the surface of the mother stamper 3 made of 2P resin using a sputtering device. (Step (E) in Figure 4) Furthermore, by performing nickel I,', = ferrule using an electroforming device using the electroforming method shown below to form a nickel groove of 0.1 mm to 0.3 mm and peeling it off, A stambar for information recording media according to the present invention was manufactured. (Figure 4 process (F) and (
G)) Nickel sulfamate tetrahydrate whose composition ratio of the electroforming solution is shown in F [N: (81+2SO3)2.411□O] 5
00g/l boric acid [H, mouth 03] 3
5-38g71 Anti-bit agent 25
m1/I Example 2 In the manufacturing process of a stamper for information recording media shown in Figure 4, the so-called 2P (photopolymer) method was used as the resin straw material in the mother stamper manufacturing method of step (D) shown in step 1. Using.

An epoxy acrylate resin (product name: MRA-5000, company name: Mitsubishi Rayon) that is cured by ultraviolet rays is applied onto the father stamper 2 on which a spiral guide pattern with a pitch of 1.6 μm and a step height of 1000 A is formed. After covering the top with PMMA or PC with a diameter of 5 inches φ and a thickness of 1.1 mm, UV rays are irradiated from the top lid side to harden the acrylate resin M-5000, and it is peeled off from the father stamper. I named it Mother Stamper. Thereafter, a stub bar for an information recording medium was manufactured through the same steps as in Jifii Example 1.

Example 3 A prepolymer containing a resin monomer or melting is used as a resin co-material in the mother stamper manufacturing method of step (D) shown in the 4th UA manufacturing process diagram of a stamper for information recording media. A mother stamper was manufactured using a cast molding method. In other words, the pitch is 12 μm and the step difference is 300
A spacer was provided around the fazeau tambour 2 in which a striped guide groove of 0λ was formed, and the cell was assembled. Lower 3r to the cell! A prepolymer (liquid resin) having the composition shown in is injected and cured at 120°C for 10 hours,
Thereafter, the mother stamper was obtained by peeling it off from the father stamper. Thereafter, a stamper for an information recording medium was manufactured through the same steps as in Example 1.

(Blend composition) Methyl methacrylate 70 parts by weight Tert-butyl methacrylate 25 parts by weight Polyethylene glycol dimethacrylate (molecular weight 620) 5f [h1 part Example 4 As shown in the manufacturing process diagram of a stamper for an information recording medium in FIG. A multi-cavity stamper was manufactured using the father stamper in step (C). That is, to explain using the manufacturing process diagram of the S multi-piece stamper shown in Figure 5, the father stamper 2 is placed on the multi-piece stamper mounting stand 10.
are glued using 1g epoxy adhesive. The pear-shaped joint 10 for the multi-cavity stamper is grooved with the JtJ pattern of the father stamper 2 and the joint 1M9. The father stamper thus obtained has the configuration shown in FIG. 6(A).

Grooving was carried out in a circular shape using a metal tire mont grindstone. Next, in the same manner as in Example 2, an epoxy acrylate-based epoxy acrylate resin that is cured by ultraviolet rays was applied to E of the multi-cavity father stamper shown in Fig. 7. Resin (product name: MRA
-5000 (company name F) and cover the top with PMMA or PC with a diameter of 20 inches and a thickness of 3.5 mm, then irradiate ultraviolet rays from the top lid side and apply acrylate resin MRA-5000. Harden, multi-cavity mother
I got Stamper 11.

Next, a 1000 nickel film is deposited on the surface of the multi-piece mother stamper 11 using a sputtering device to form a conductive film. Furthermore, nickel electroforming is performed using a die casting device to form a nickel of 0.1 mm to 0.0 mm. : A 1 mm thick nickel layer was formed and peeled off to produce a multi-piece stand bar 12.

[Effects of the Invention] As explained above, the standber for information recording medium of the present invention
According to the production method, a mother stamper is made from a resin base material using a fazo stamper with irregularities such as tracking grooves and information pits by dry etching. The croup surface of the stanbar is scratch-resistant, making it a mother stanbar.
This has the effect of shortening the manufacturing time. Further, by using the configuration of the present invention, it is possible to manufacture a stand bar for information recording media with stable quality and high reliability.

Further, in the process of manufacturing a mother stamper using a resin material, a multi-piece stamper can be manufactured by using a multi-piece mother stamper.

By using this multi-piece stamper, a plurality of information recording medium substrates can be manufactured at one time. As an effect, a significant improvement in production efficiency is achieved, and it becomes possible to reduce the cost of information recording media.

[Brief explanation of drawings]

Figure 1 is an explanatory diagram showing the flow of the method for producing a standber for information recording media of the present invention, and Figure 2 is a diagram schematically showing the flow of the method of the present invention. Schematic cross-sectional view, Figure 3 is a diagram schematically showing the flow in the conventional method, and one part is a schematic cross-sectional view of a fine pattern;
Fig. 24 is a process diagram for manufacturing standbars in the order of (A) → (G) by the method of the present invention, and Figure 5 is a process diagram for manufacturing standbars in the order of (A) → (F) by the method of the present invention. - FIG. 6 is a manufacturing method explanatory diagram showing an aspect of the multi-cavity father stamper according to the present invention, and FIG. 7 is a schematic perspective view of the multi-cavity father stamper according to the present invention. . l... Glass master disc 2... Father stamper 3... Resin base material (mother stamper) 4... Stamper for information recording medium 5... Resist pattern 6... Mother stamper 7 ...Glass substrate 8...Conductive film 9...Joining layer 0...Multi-cavity stamper mounting stand 1...Multi-cavity mother stamper 2...Multi-cavity stamper

Claims (1)

[Claims] 1. A step of forming a resist film on a glass substrate and cutting the resist film to form a fine uneven pattern to produce a glass master;
A process of etching to produce a father stamper, a process of forming a resin base material on the obtained father stamper and peeling it off to produce a mother stamper, forming a metal conductive film on the obtained mother stamper, A stamper for an information recording medium, comprising the steps of forming an electroformed base material by electroforming, and then peeling off the metal conductive film together with the electroformed base material from the mother stamper to produce a stamper. Production method. 2. In the process of manufacturing the mother stamper,
2. The method according to claim 1, wherein the multiple stamper is manufactured by fixing a plurality of the father stampers to a stamper mounting stand and manufacturing a multiple mother stamper.