JPH0338541Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a two-port solenoid valve suitable for use in places where dust discharge is undesirable.

[Conventional technology]

Two-port solenoid valves used in semiconductor devices and the like, which are used in a state where a wafer is directly contacted with a feeding fluid, need to remove dust generated when the valve is turned on and off. Further, a two-port solenoid valve that suppresses dust generation is required not only in the semiconductor device described above but also in various fields.

In general, dust is generated when objects collide or slide, and in particular, dust is generated much more when objects slide than when objects collide. In a normal solenoid valve, there are sliding parts not only in the movable iron core, but also between the spring and the spring seat that receives it.
Generation of metal dust in these parts cannot be avoided. Further, even if the sliding portion is coated with resin, a large amount of resin dust will be generated, and the problem will not be solved.

[Problem that the invention attempts to solve]

The purpose of the present invention is to enable the valve to be opened and closed by simply moving the valve body that makes up the movable core into and out of contact with the valve seat without having the above-mentioned sliding parts, thereby reducing the generation of dust. It is an object of the present invention to provide a two-port solenoid valve having an effectively suppressed valve structure.

[Means for solving problems]

In order to achieve the above object, the two-port solenoid valve of the present invention has a valve seat in the flow path from the inlet port to the outlet port, and a valve body that is provided with a valve body that approaches and separates from the valve seat to open and close it. and a two-port solenoid valve equipped with an electromagnetic operation section for opening and closing the valve body, wherein the valve body is constructed by covering a plate-shaped magnetic pole piece with a flexible member made of a low-dusting material, The elastic part of the flexible member provides elasticity to press the valve body against the valve seat, and the through hole provided in the flexible member equalizes the pressure on both sides of the valve body. The supporting portion is supported by the valve body, and the electromagnetic operating portion is configured such that a core around which a coil is wound has a magnetic pole surface facing the magnetic pole piece of the valve body.

[Effect]

When the coil in a two-port solenoid valve is not energized, the valve body is seated on the valve seat by the elasticity provided by the elastic part of the flexible member, and the valve body is held against the valve seat by the fluid pressure acting behind it. It's sealed.

When the coil is energized, the core attracts the magnetic pole piece of the valve body against the force of the elastic portion, thereby opening the valve seat.

When opening and closing such a valve body, the 2-port solenoid valve has no sliding parts such as a sliding part of the valve body or a spring, and the valve body simply moves in and out of contact with the valve seat, so dust is not generated. The emissions are kept to a minimum and their emissions are suppressed.

〔Example〕

1 to 3 show an embodiment of the two-port solenoid valve of the present invention.

This two-port solenoid valve includes a valve body 1 and an electromagnetic operating section 2, and the valve body 1 is provided with an inlet port 3, an outlet port 4, and a valve chamber 5 located in a flow path between them. , a valve seat 6 is opened in the valve chamber 5.

Valve body 8 that approaches and separates from the valve seat 6 to open and close it
The plate-shaped magnetic pole piece 9 is made of Teflon (registered trademark).
It is constructed by covering it with a flexible member 10 made of a low dust-emitting material such as. The valve body 8 is disposed between a strap seal 11 interposed between the valve body 1 and the electromagnetic operating part 2 and a valve seat 6 installed opposite to the strap seal 11, and the flexible member 10 The peripheral support part 12 is supported around the valve chamber 5 by being sandwiched between the valve body 1 and the electromagnetic operation part 2, and the valve is supported between the peripheral support part 12 and the embedded part of the magnetic pole piece 9. An elastic part 13 having elasticity for pressing the body 8 against the valve seat 6, and a through hole for allowing pressure fluid to flow between the flexible member 10 and the strap seal 11 to equalize the pressure on both sides. There are 14. The elastic portion 13 also functions to keep the contact surface of the valve body 8 against the valve seat 6 constant. Further, in order to prevent the valve body 8 from being brought into contact with the strap seal 11 by the pressure of the fluid and coming into close contact with the entire surface and restricting the inflow of fluid behind it, the strap seal 11 of the flexible member 10 is
A protrusion 15 is provided on the opposite surface.

On the other hand, the electromagnetic operation section 2 has a coil 23 wound around a core 21 having a plurality of magnetic pole surfaces 22 facing the valve body 1, and a support plate 24 excluding the magnetic pole surfaces 22 attached thereto. It is constructed by touching. This support plate 24 is made of a non-magnetic material and prevents deformation of the strap seal 11 due to fluid pressure.
is formed into a thin film in order to reduce the distance between the magnetic pole face 22 and the surface of the magnetic pole piece 9;
This prevents its deformation.

FIG. 1 shows a state in which the coil 23 in the two-port solenoid valve is not energized, and the valve body 8 is connected to the flexible member 1.
It is seated on the valve seat 6 by the elasticity of the elastic part 13 of 0. In this case, the valve body 8 has an opening area of the valve seat 6 and a pressure difference P ₁ − between the inlet port 3 and the outlet port 4.
It is sealed by a force equal to the product of P ₂ .

When the coil 23 is energized, the core 21 attracts the magnetic pole piece 9, and accordingly, the valve body 8 is attracted to the strap seal 11 side, so that the valve seat 6 is opened.

When the valve body 8 is opened and closed, the two-port solenoid valve has no sliding parts, that is, there is no sliding part of the movable core like in a normal solenoid valve, and there is also no sliding of the movable core like in a normal solenoid valve. Since there is no sliding between the valve body 8 and the flexible member 10 attached to the magnetic pole piece 9, the valve body 8 only contacts the valve seat 6 and the strap seal 11 alternately, so the generation of dust is minimized. is retained, and its emission is suppressed. In this case, the general dust generation is as mentioned above.
Sliding is much more common than collision of parts, but
In the above two-port solenoid valve, since there are no sliding parts, the generation of dust is significantly suppressed.

Therefore, the two-port solenoid valve described above can be effectively used in various fields such as semiconductor devices where it is necessary to suppress dust generated by turning on and off a valve.

In the embodiment shown in FIGS. 2 and 3, a rectangular valve body having a magnetic pole piece with a rectangular planar shape is used, but these are similar to the embodiment shown in FIGS. 4 and 5. The planar shape can also be circular as shown in FIG. In this case, the planar shape is the second
Although this embodiment is different from the embodiment shown in FIG. 3 and FIG. 3, there is no substantial difference in the functions and operations of each part, so the same or corresponding parts in the drawings will be given the same reference numerals and their explanations will be omitted.

[Effect of idea]

According to the two-port solenoid valve of the present invention,
The valve opening/closing mechanism within the valve body does not have any sliding parts, and the valve can be opened and closed simply by the movement of the valve element that makes up the movable core into and out of contact with the valve seat, which sufficiently suppresses dust generation. be able to.

[Brief explanation of the drawing]

Fig. 1 is a cross-sectional view showing an embodiment of the two-port solenoid valve of the present invention, Fig. 2 is a bottom view of its electromagnetic operating section, Fig. 3 is a plan view of its valve body, and Fig. 4 is another embodiment. Fig. 5 is a bottom view of the electromagnetic operating section in Fig. 5, and Fig. 5 is a plan view of the valve body. 1... Valve body, 2... Solenoid operation section, 3... Inlet port, 4... Outlet port, 6... Valve seat, 8...
Valve body, 9... Magnetic pole piece, 10... Flexible member, 12...
...Peripheral support part, 13...Elastic part, 14...Through hole,
21...core, 22...magnetic pole surface, 23...coil.

Claims (1)

[Scope of Claim for Utility Model Registration] A valve body provided with a valve seat in a flow path from an inlet port to an outlet port, and a valve body that approaches and separates from the valve seat to open and close it, and the opening and closing operation of the valve body. In a two-port solenoid valve equipped with an electromagnetic operation section, the valve body is constructed by covering a plate-shaped magnetic pole piece with a flexible member made of a low-dusting material, and the elastic part of the flexible member In addition to providing elasticity for pressing the valve body against the valve seat, the pressure on both sides of the valve body is equalized by a through hole provided in the flexible member, and the peripheral support portion of the flexible member is supported by the valve body. A two-port solenoid valve, characterized in that, in the electromagnetic operating section, a core around which a coil is wound has a magnetic pole surface that faces a magnetic pole piece of the valve body.