JPH0341299U - - Google Patents
Info
- Publication number
- JPH0341299U JPH0341299U JP10334789U JP10334789U JPH0341299U JP H0341299 U JPH0341299 U JP H0341299U JP 10334789 U JP10334789 U JP 10334789U JP 10334789 U JP10334789 U JP 10334789U JP H0341299 U JPH0341299 U JP H0341299U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- pipe
- purge
- supply pipe
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Description
図面はこの考案の一実施例の構成図である。
１……シリンダーボツクス、２，３，４，５…
…ボンベ、６，７，８，９……ガス供給手段、２
２……第１のパージ配管、３０……第２のパージ
配管。
The drawing is a block diagram of one embodiment of this invention. 1...Cylinder box, 2, 3, 4, 5...
...Cylinder, 6, 7, 8, 9...Gas supply means, 2
2...first purge piping, 30...second purge piping.
Claims (1)
空間と、上記ボンベからボツクス外に延びて所定
の製造ラインに材料ガスを供給するガス供給配管
と、始端側がパージガス源から上記ガス供給配管
の始端側に延び上記ガス供給配管を流路としてガ
ス供給配管の中間部から終端側が分岐するパージ
配管と、上記両配管の中間部から真空排気部に延
びる真空排気配管と、上記ガス供給配管の始端に
着脱自在に材料ガスボンベを連結する連結部とを
備え、上記パージガス供給源から常時パージガス
を流す管路を上記パージ配管の終端側に連結した
ことを特徴とするシリンダーボツクス。 (2) 上記パージガス供給源から常時流すパージ
ガスの流量を常時検出する検知器と、この検知器
による検出値が一定の値より低くなつた場合に外
部警報を発する警報器を備えた請求項(1)記載の
シリンダーボツクス。[Scope of Claim for Utility Model Registration] (1) A storage space for storing a cylinder filled with a material gas, a gas supply pipe extending from the cylinder to the outside of the box and supplying the material gas to a predetermined production line, and a starting end thereof. A purge pipe that extends from the purge gas source to the starting end of the gas supply pipe and branches from the middle part of the gas supply pipe to the terminal end using the gas supply pipe as a flow path, and a vacuum exhaust pipe that extends from the middle part of both pipes to the vacuum exhaust part. and a connection part that removably connects a material gas cylinder to the starting end of the gas supply pipe, and a pipe line through which purge gas is constantly supplied from the purge gas supply source is connected to the terminal end of the purge pipe. Box. (2) Claim (1) comprising a detector that constantly detects the flow rate of the purge gas constantly flowing from the purge gas supply source, and an alarm that issues an external alarm when the detected value by this detector becomes lower than a certain value. ) cylinder box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10334789U JPH0341299U (en) | 1989-08-31 | 1989-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10334789U JPH0341299U (en) | 1989-08-31 | 1989-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0341299U true JPH0341299U (en) | 1991-04-19 |
Family
ID=31652189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10334789U Pending JPH0341299U (en) | 1989-08-31 | 1989-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341299U (en) |
-
1989
- 1989-08-31 JP JP10334789U patent/JPH0341299U/ja active Pending
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