JPH0341345A - Weight and dew condensation sensor - Google Patents
Weight and dew condensation sensorInfo
- Publication number
- JPH0341345A JPH0341345A JP1177540A JP17754089A JPH0341345A JP H0341345 A JPH0341345 A JP H0341345A JP 1177540 A JP1177540 A JP 1177540A JP 17754089 A JP17754089 A JP 17754089A JP H0341345 A JPH0341345 A JP H0341345A
- Authority
- JP
- Japan
- Prior art keywords
- film
- dew condensation
- insulating substrate
- weight
- electrode film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Calibration Of Command Recording Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は重量と結露を単一の素子で検出できるセンサに
関するもので、調理器などに利用される。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a sensor that can detect weight and dew condensation with a single element, and is used in cooking appliances and the like.
従来の技術
従来、重量センサとして、特公平1−1352号公報に
示されるように、一対の絶縁性基板を一定間隔で隔て、
接着層により固定し、さらに一対の絶縁性基板の互いに
対向する表面に電極膜を形成した静電容量型重量センサ
が知られている。一対の絶縁性基板の一方をダイアフラ
ムとして利用し、このダイアフラムに重量が印加された
ときのダイアプラムの変形を静電容量変化として検出す
ることにより、重量を検出している。BACKGROUND ART Conventionally, as shown in Japanese Patent Publication No. 1-1352, a weight sensor has been used, as shown in Japanese Patent Publication No. 1-1352.
A capacitive weight sensor is known that is fixed by an adhesive layer and further has electrode films formed on mutually opposing surfaces of a pair of insulating substrates. Weight is detected by using one of a pair of insulating substrates as a diaphragm, and detecting deformation of the diaphragm as a change in capacitance when weight is applied to the diaphragm.
また、結露センサは種りの種類が知られているが、代表
的温度センサとして、「結露センサ」(ナショナルテク
ニカルレポート、Vo124. No、3197843
6−443頁、万円、他)に示されるように、吸水性樹
脂とカーボンから成る結露検知膜を絶縁性基板に形成し
た結露センサが知られている。結露検知膜のインピーダ
ンスが結露により変化することを利用して、結露を検出
している。In addition, there are various types of dew condensation sensors, but a typical temperature sensor is the "dew condensation sensor" (National Technical Report, Vo124. No. 3197843).
A dew condensation sensor is known in which a dew condensation detection film made of a water-absorbing resin and carbon is formed on an insulating substrate, as shown on page 6-443, 10,000 yen, et al. Condensation is detected by utilizing the fact that the impedance of the dew condensation detection film changes due to condensation.
このように、従来、重量と結露を個別に検出できるセン
サは公知であるが、単一の素子で両者を検出できるもの
は知られていない。As described above, sensors that can detect weight and dew condensation separately are known, but there are no sensors that can detect both with a single element.
発明が解決しようとする課題
例えば、電子レンジなどの調理器で食品重量を検出する
場合、十分な精度で検出するために、結露により誤動作
防止を必要とした。しかし、重量と結露を単一の素子で
検出できるセンサは知られテイナイので、この誤動作防
止をするには2個のそれぞれのセンサを使用しなければ
ならなかった。Problems to be Solved by the Invention For example, when detecting the weight of food using a cooking device such as a microwave oven, it is necessary to prevent malfunctions due to condensation in order to detect the weight with sufficient accuracy. However, since no sensor is known that can detect weight and dew condensation with a single element, two separate sensors had to be used to prevent this malfunction.
このため、湿度補償が複雑になり、高価格になるという
課題があった。For this reason, there was a problem that humidity compensation became complicated and the cost became high.
そこで本発明の目的は、重量と結露を単一の素子で検出
できる重量結露センサを提供することである。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a weight condensation sensor that can detect weight and dew condensation with a single element.
課題を解決するための手段
本発明の重量結露センサは、第1絶縁性基板と、前記第
1絶縁性基板の表面に形成された第1電極膜と、前記第
1電極膜と対向して一定の間隔で隔てられ、接着層によ
り固定された第2絶縁性基板と、前記第2絶縁性基板の
表面に前記電極膜と対向して形成された第2電極膜と、
前記第2絶縁性基板の他の表面に形成された一対の第3
電極膜と、前記一対の第3電極膜に電気的に接続された
結露検知膜とを備えた構成である。Means for Solving the Problems The weight condensation sensor of the present invention includes a first insulating substrate, a first electrode film formed on the surface of the first insulating substrate, and a fixed electrode film opposite to the first electrode film. a second insulating substrate separated by an interval of and fixed by an adhesive layer; a second electrode film formed on the surface of the second insulating substrate to face the electrode film;
a pair of third insulating substrates formed on the other surface of the second insulating substrate;
This configuration includes an electrode film and a dew condensation detection film electrically connected to the pair of third electrode films.
作用
第1絶縁性基板をダイアフラムとして利用し、このダイ
アプラムに重量が印加されたときのダイアフラムの変形
を第1電極膜と第2電極膜の間の静電容量変化として検
出することにより重量を検出できる。また、第2絶縁性
基板の他の表面に形成された結露検知膜の抵抗値が結露
により変化するので、一対の第3電極膜の間の抵抗値変
化を検出することにより結露を検出できる。The weight is detected by using the first insulating substrate as a diaphragm and detecting the deformation of the diaphragm as a change in capacitance between the first electrode film and the second electrode film when weight is applied to the diaphragm. can. Further, since the resistance value of the dew condensation detection film formed on the other surface of the second insulating substrate changes due to dew condensation, dew condensation can be detected by detecting the change in the resistance value between the pair of third electrode films.
実施例
以下、本発明の一実施例を添付図面にもとづいて説明す
る。第1図は本発明の重量結露センサの断面図である。Embodiment Hereinafter, one embodiment of the present invention will be described based on the accompanying drawings. FIG. 1 is a sectional view of the weight condensation sensor of the present invention.
第1絶縁性基板1の表面に第1電極膜2を形成し、他方
で第2絶縁性基板3の一方の表面に第2電極膜4を形成
した。この後、第1電極膜2と第2電極膜4とが互いに
対向するようにして、第1絶縁性基板1と第2絶縁性基
板3を接着層5を用いて一定間隔を隔て、固定した。次
に、第2絶縁性基板3の他の表面に一対の電極膜6およ
び結露検知膜7を形成した。第1および第2絶縁性基板
1.3として、アルミナ板、硝子板などが用いられる。A first electrode film 2 was formed on the surface of the first insulating substrate 1, and a second electrode film 4 was formed on one surface of the second insulating substrate 3. Thereafter, the first insulating substrate 1 and the second insulating substrate 3 were fixed at a constant interval using the adhesive layer 5, with the first electrode film 2 and the second electrode film 4 facing each other. . Next, a pair of electrode films 6 and a dew condensation detection film 7 were formed on the other surface of the second insulating substrate 3. An alumina plate, a glass plate, etc. are used as the first and second insulating substrates 1.3.
第1電極膜2、第2電極膜4および一対の第3電極膜6
として、焼成導電性厚膜あるいは薄膜、蒸着あるいはス
パッタ導電性薄膜などが用いられる。接着層5として、
焼成硝子膜、樹脂膜などが用いられる。また、結露検知
膜7として導電性吸湿膜が用いられる。A first electrode film 2, a second electrode film 4, and a pair of third electrode films 6
As the material, a fired conductive thick film or thin film, a vapor-deposited or sputtered conductive thin film, etc. are used. As the adhesive layer 5,
A fired glass film, a resin film, etc. are used. Furthermore, a conductive moisture absorption film is used as the dew condensation detection film 7.
アルミナ絶縁性基板1の厚さを約0.6陥、第1電極膜
2と第2電極膜4の対向面積を約2.5CC接接層6の
厚さ(アルミナ絶縁性基板1と感温基板3の間の間隔)
を約50μmとし、第2図に示すように、アルごす絶縁
性基板1の中央部に荷重を印加して、第1電極膜2と第
2電極膜4の間の静電容量値を測定した。荷重がOkg
、 2kg、 4kgのとき、静電容量値は約51
pF、約54.5PF、約60pFを示し、荷重が増加
する共に静電容量値は増加した。しかし、例えば、荷重
をOkg一定に保ち、周囲の相対湿度が100%を越え
て、第1電極膜2や第2電極膜4の表面に結露水が付着
するようになると、静電容量値は1%以上増加した。こ
の静電容量値の増加は200g以上の重量測定誤差に相
当するので、電子レンジなど調理器に用いられた場合、
誤動作を招き易い。このような場合、結露を検知して誤
動作を防止する必要がある。The thickness of the alumina insulating substrate 1 is approximately 0.6 mm, the opposing area of the first electrode film 2 and the second electrode film 4 is approximately 2.5 mm, and the thickness of the contact layer 6 (the thickness of the alumina insulating substrate 1 and the temperature-sensitive (distance between boards 3)
is approximately 50 μm, and as shown in FIG. 2, a load is applied to the center of the aluminum insulating substrate 1, and the capacitance value between the first electrode film 2 and the second electrode film 4 is measured. did. Load is Okg
, 2kg, 4kg, the capacitance value is approximately 51
pF, about 54.5PF, and about 60pF, and the capacitance value increased as the load increased. However, for example, if the load is kept constant at Okg and the surrounding relative humidity exceeds 100%, and dew condensation water begins to adhere to the surfaces of the first electrode film 2 and second electrode film 4, the capacitance value will decrease. It increased by more than 1%. This increase in capacitance value corresponds to a weight measurement error of 200 g or more, so when used in cooking appliances such as microwave ovens,
Easy to cause malfunction. In such cases, it is necessary to detect dew condensation to prevent malfunctions.
導電性吸湿膜は結露条件でその抵抗値が急激に変化する
ので、結露検知膜7として有用である。The conductive moisture absorption film is useful as the dew condensation detection film 7 because its resistance value changes rapidly under dew condensation conditions.
例えば、第2絶縁性基板3の他の表面に櫛形状の一対の
第3電極膜6とナイロンなどの吸湿性樹脂にカーボン粒
子を分散した導電性吸湿膜7を形成したとき、その抵抗
値は相対湿度94%以下で20にΩ以下であるが、相対
湿度100%で200 kΩ以上に急激に増加した。こ
の抵抗値変化から結露が検出できる。For example, when a pair of comb-shaped third electrode films 6 and a conductive hygroscopic film 7 in which carbon particles are dispersed in a hygroscopic resin such as nylon are formed on the other surface of the second insulating substrate 3, the resistance value is It was less than 20 Ω at relative humidity of 94% or less, but rapidly increased to more than 200 kΩ at 100% relative humidity. Condensation can be detected from this change in resistance value.
このように本発明の重量結露センサは、単一の素子で静
電容量値から重量を検出できるとともに結露検知膜7の
抵抗値から結露も検知できる。As described above, the weight condensation sensor of the present invention can detect weight from the capacitance value with a single element, and can also detect dew condensation from the resistance value of the dew condensation detection film 7.
発明の効果
以上述べてきたように、本発明によれば次に示す効果が
得られる。Effects of the Invention As described above, according to the present invention, the following effects can be obtained.
(1)単一の素子で重量と結露が同時に測定できる。(1) Weight and dew condensation can be measured simultaneously with a single element.
(2) このため結露に起因する重量測定の誤差によ
る誤動作を防止できる。(2) Therefore, malfunctions due to errors in weight measurement due to dew condensation can be prevented.
第1図は本発明の一実施例を示す重量温度センサの断面
図、第2図は重量測定時のダイアフラムの変形を示す断
面図である。
1・・・・・・第1絶縁性基板、2・・・・・・第1電
極膜、3・・・・・・第2絶縁性基板、4・・・・・・
第2電極膜、5・・・・・・接着層、6・・・・・・一
対の第3電極膜、7・・・・・・結露検知膜。FIG. 1 is a sectional view of a weight temperature sensor showing an embodiment of the present invention, and FIG. 2 is a sectional view showing deformation of a diaphragm during weight measurement. 1... First insulating substrate, 2... First electrode film, 3... Second insulating substrate, 4...
2nd electrode film, 5... adhesive layer, 6... a pair of third electrode films, 7... dew condensation detection film.
Claims (3)
層により固定された第2絶縁性基板と、前記第2絶縁性
基板の表面に前記電極膜と対向して形成された第2電極
膜と、 前記第2絶縁性基板の他の表面に形成された一対の第3
電極膜と、前記一対の第3電極膜に電気的に接続された
結露検知膜とから成る重量結露センサ。(1) a first insulating substrate; a first electrode film formed on the surface of the first insulating substrate; and a first electrode film facing the first electrode film, separated from the first electrode film at a constant interval, and fixed by an adhesive layer. a second insulating substrate; a second electrode film formed on a surface of the second insulating substrate to face the electrode film; and a pair of third electrode films formed on the other surface of the second insulating substrate.
A weight condensation sensor comprising an electrode film and a dew condensation detection film electrically connected to the pair of third electrode films.
変化する膜で構成された特許請求の範囲第1項記載の重
量結露センサ。(2) The weight condensation sensor according to claim 1, wherein the dew condensation detection film is composed of a film whose impedance changes depending on relative humidity.
れた特許請求の範囲第2項記載の重量結露センサ。(3) The weight condensation sensor according to claim 2, wherein the dew condensation detection film is composed of a water-supplying resin and carbon particles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1177540A JPH0341345A (en) | 1989-07-10 | 1989-07-10 | Weight and dew condensation sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1177540A JPH0341345A (en) | 1989-07-10 | 1989-07-10 | Weight and dew condensation sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0341345A true JPH0341345A (en) | 1991-02-21 |
Family
ID=16032732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1177540A Pending JPH0341345A (en) | 1989-07-10 | 1989-07-10 | Weight and dew condensation sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341345A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980696A (en) * | 2012-12-05 | 2013-03-20 | 东南大学 | Contact type resistance pressure sensor in micromechanical system and measuring method thereof |
| CN103196592A (en) * | 2013-04-10 | 2013-07-10 | 东南大学 | Testing structure and testing method for micro-machine residual stress |
| KR20230082590A (en) * | 2021-12-01 | 2023-06-08 | 주식회사 마스터벨그로우 | Dew-condensation detecting sensor and monitoring system for greenhouse thereof |
-
1989
- 1989-07-10 JP JP1177540A patent/JPH0341345A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980696A (en) * | 2012-12-05 | 2013-03-20 | 东南大学 | Contact type resistance pressure sensor in micromechanical system and measuring method thereof |
| CN103196592A (en) * | 2013-04-10 | 2013-07-10 | 东南大学 | Testing structure and testing method for micro-machine residual stress |
| KR20230082590A (en) * | 2021-12-01 | 2023-06-08 | 주식회사 마스터벨그로우 | Dew-condensation detecting sensor and monitoring system for greenhouse thereof |
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