JPH034151Y2

JPH034151Y2 -

Info

Publication number: JPH034151Y2
Application number: JP1982156901U
Authority: JP
Priority date: 1982-10-16
Filing date: 1982-10-16
Publication date: 1991-02-01
Also published as: JPS5960864U

Description

【考案の詳細な説明】本考案は一般に無塵乾燥機に関し、詳しくは無
塵乾燥機における送風用三相誘導電動機の回転方
向検出回路に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention generally relates to a dustless dryer, and more particularly to a rotational direction detection circuit for a three-phase induction motor for blowing air in a dustless dryer.

無塵乾燥機は半導体ウエハなどのように塵埃を
極度にきらう試料の乾燥を行なうもので、送風用
の三相誘導電動機を備え、フイルタを介して塵埃
を除去した空気を循環させることにより被乾燥物
の乾燥を行なう。 Dust-free dryers are used to dry samples that are extremely sensitive to dust, such as semiconductor wafers. They are equipped with a three-phase induction motor for blowing air, and circulate air from which dust has been removed through a filter. Dry things.

ところで、無塵乾燥機を設置する際にユーザー
が三相誘導電機を含めた給電線の配電盤への接続
を誤ることがある。このような誤りにより送風用
の三相誘導電動機に逆転が生ずると、フイルタに
とらえられた塵埃が乾燥機内に逆流することにな
り、乾燥機本来の目的を達成することができなく
なる。 By the way, when installing a dust-free dryer, a user may make a mistake in connecting a power supply line including a three-phase induction motor to a power distribution board. If the three-phase induction motor for blowing air is reversed due to such an error, the dust caught in the filter will flow back into the dryer, making it impossible to achieve the original purpose of the dryer.

本考案はこのような観点に基づいてなされたも
ので、その目的は、送風用三相誘導電動機の回転
方向の誤りを検出する回路をもうけ、且つ、当該
検出回路の駆動につき別電源を必要としないよう
に構成することにある。 The present invention was developed based on this viewpoint, and its purpose is to provide a circuit that detects an error in the rotation direction of a three-phase induction motor for air blowing, and to eliminate the need for a separate power source to drive the detection circuit. The problem lies in configuring it so that it does not occur.

この目的を達成するための本考案の特徴は、送
風用の三相誘導電動機を有し、フイルタを介して
塵埃を除去した空気を循環させて被乾燥の乾燥を
行なう無塵乾燥機において、前記三相誘導電動機
の各相に一対のフオトカツプラの各発光ダイオー
ドを互いに逆極性で並列接続し、当該各並列接続
の出力を三相全波整流回路に与え、当該整流回路
の出力に前記一対のフオトカツプラの各フオトト
ランジスタのOR接続を並列挿入し、各相に対応
する前記フオトトランジスタのOR接続の信号出
力の順序に応じて三相誘導電動機の回転方向の誤
りを検出するごとき無塵乾燥機における三相誘導
電動機の回転方向検出回路にある。以下図面によ
り本考案の実施例を説明する。 A feature of the present invention for achieving this purpose is that the dustless dryer has a three-phase induction motor for blowing air and circulates air from which dust has been removed through a filter to dry the dried material. The light emitting diodes of a pair of photo couplers are connected in parallel to each phase of a three-phase induction motor with opposite polarities, and the output of each parallel connection is given to a three-phase full-wave rectifier circuit, and the output of the rectifier circuit is connected to the light-emitting diodes of a pair of photo couplers. In a dust-free dryer, an OR connection of each phototransistor is inserted in parallel, and an error in the rotation direction of a three-phase induction motor is detected according to the order of signal output of the OR connection of the phototransistor corresponding to each phase. It is in the rotation direction detection circuit of a phase induction motor. Embodiments of the present invention will be described below with reference to the drawings.

第１図は本考案による回転方向検出回路の一実
施例で、参照番号１は送風用の三相誘導電動機を
示す。三相誘導電動機１の各相Ｕ，Ｖ，Ｗに一対
のフオトカップラ２Ａ，２Ｂ，２Ｃ，４Ａ，４
Ｂ，４Ｃの各発光ダイオードDA１，DA２，DB
１，DB２，DC１，DC２が互いに逆極性で並列
接続される。一対のフオトカツプラは参照番号
2Aと4A，2Bと4B及び2Cと4Cで示される。フオ
トカツプラ２Ａ−４Ａにおいて、ダイオードDA
１はトランジスタTA１に、DA２はTA２に対応
する。フオトカツプラ２Ｂ−４ＢにおいてはDB
１がTB１に、DB２がTB２に対応し、更に、フ
オトカツプラ２Ｃ−４Ｃにおいても同様にDC１
がTC１に、DC２がTC２に対応する。フオトカ
ツプラのダイオード接続２Ａ，２Ｂ，２Ｃの出力
は三相全波整流回路３に与えられる。当該整流回
路３はフオトカツプラのダイオード接続に流れる
電流を整流し後続の論理回路の電源を作り出すも
ので、この結果、別に検出回路用の駆動電源をも
うける必要がなくなる。整流回路３の出力はツエ
ナーダイオードZDを介して定電圧化され後続の
論理回路の電源ラインを形成する。フオトカツプ
ラのトランジスタは各々対応するものがOR接続
４Ａ，４Ｂ，４Ｃされて上記電源ラインに並列挿
入される。当該OR接続は例えば４Ａを例にとれ
ば対応するダイオード接続２Ａの各ダイオードい
ずれかの導通に応じてその出力を与える。参照番
号５はＲ−Ｓフリツプフロツプで、OR接続４Ａ
の出力をセツト入力とし、OR接続４Ｃの出力を
リセツト入力とする。当該フリツプフロツプ５の
Ｑ出力は次段のＤフリツプフロツプ６のＤ入力と
される。Ｄフリツプフロツプ６はクロツク入力
CKとしてOR接続４Ｂの出力を受け、そのＱ出
力で表示用発光ダイオード７を駆動する。 FIG. 1 shows an embodiment of the rotation direction detection circuit according to the present invention, and reference numeral 1 indicates a three-phase induction motor for blowing air. A pair of photocouplers 2A, 2B, 2C, 4A, 4 for each phase U, V, W of the three-phase induction motor 1
B, 4C light emitting diodes DA1, DA2, DB
1, DB2, DC1, and DC2 are connected in parallel with each other with opposite polarities. A pair of photoshoplets are reference numbers
Indicated by 2A and 4A, 2B and 4B, and 2C and 4C. In Photokatsupura 2A-4A, diode DA
1 corresponds to the transistor TA1, and DA2 corresponds to the transistor TA2. DB for Foto Katsupura 2B-4B
1 corresponds to TB1, DB2 corresponds to TB2, and in addition, DC1 corresponds to Photocoupler 2C-4C as well.
corresponds to TC1, and DC2 corresponds to TC2. The outputs of the diode connections 2A, 2B, and 2C of the photo coupler are given to a three-phase full-wave rectifier circuit 3. The rectifier circuit 3 rectifies the current flowing through the diode connection of the photocoupler to create a power source for the subsequent logic circuit. As a result, there is no need to provide a separate drive power source for the detection circuit. The output of the rectifier circuit 3 is made into a constant voltage via a Zener diode ZD and forms a power supply line for the subsequent logic circuit. Corresponding photocoupler transistors are OR-connected 4A, 4B, and 4C and inserted in parallel to the power supply line. Taking 4A as an example, the OR connection provides an output depending on conduction of any of the diodes in the corresponding diode connection 2A. Reference number 5 is an R-S flip-flop, OR connection 4A
The output of 4C is used as the set input, and the output of OR connection 4C is used as the reset input. The Q output of the flip-flop 5 is used as the D input of the D flip-flop 6 at the next stage. D flip-flop 6 is a clock input
The output of the OR connection 4B is received as CK, and the display light emitting diode 7 is driven by its Q output.

第２図及び第３図は上記回路の動作タイムチヤ
ートで、第２図は各相の接続が正常の場合、第３
図は各相の接続に誤りが生じた場合を示す。な
お、第２図及第３図の各符号は第１図の同一符号
の箇所の信号波形を示す。以下第２図及び第３図
を併用して第１図の回路動作を説明する。 Figures 2 and 3 are operation time charts of the above circuit. Figure 2 shows that when each phase is connected normally, the third
The figure shows a case where an error occurs in the connection of each phase. Note that each reference symbol in FIGS. 2 and 3 indicates a signal waveform at the same reference number in FIG. 1. The operation of the circuit shown in FIG. 1 will be described below with reference to FIGS. 2 and 3.

第２図に示すように各相の相順が正しく与えら
れている場合の時間幅t₁，t₂，t₃を考える。時間
幅t₁においては、Ｖ相からＷ相に電流が流れＵ相
には流れない。従つて、ダイオードDB１とDC２
が発光しこれに対応するトランジスタTB１と
TC２がオンしてＢ点及びＣ点が“Ｌ”レベレと
なる。ダイオードDA１及びDA２は点灯しない
ため、トランジスタTA１及びTA２は共にオフ
であり、従つてＡ点は“Ｈ”レベルとなつてい
る。次の時間幅t₂においては、Ｕ相からＷ相には
流れない。従つて、第DA１及びDC１が発光し
てトランジスタTA１及びTC１がオンとなり、
Ａ点及びＣ点が“Ｌ”レベルとなる。Ｖ相には電
流が流れないので、Ｂ点は“Ｈ”レベルである。
更に、時間幅t₃においては同様の考え方に従いＣ
点のみが“Ｈ”レベル、Ａ点及びＢ点は“Ｌ”レ
ベルとなる。以後同様に繰返えされる。従つて、
各相Ｕ，Ｖ，Ｗが正常に電源に結線されていれ
ば、第２図に示すように、Ａ点、Ｂ点、Ｃ点は順
に“Ｈ”レベルを繰返えす。Ｒ−Ｓフリツプフロ
ツプ５はＡ点の“Ｈ”でセツトされＣ点の“Ｈ”
でリセツトされる。Ｄフリツプフロツプ６はＲ−
Ｓフリツプフロツプ５の出力とＢ点の信号を受け
るので相順が正しい場合にはそのＱ出力は常に
“Ｈ”レベルとなり、表示用発光ダイオード７を
点灯する。 Consider the time widths t ₁ , t ₂ , and t ₃ when the phase order of each phase is given correctly as shown in FIG. 2. In the time width _t1 , current flows from the V phase to the W phase and does not flow to the U phase. Therefore, diodes DB1 and DC2
emits light and the corresponding transistor TB1 and
TC2 turns on and points B and C become "L" level. Since the diodes DA1 and DA2 do not light up, the transistors TA1 and TA2 are both off, and therefore the point A is at the "H" level. In the next time width _t2 , there is no flow from the U phase to the W phase. Therefore, DA1 and DC1 emit light and transistors TA1 and TC1 are turned on,
Point A and point C become "L" level. Since no current flows through the V phase, point B is at the "H" level.
Furthermore, in the time width t ₃ , following the same idea, C
Only the point is at the "H" level, and the A and B points are at the "L" level. The same process is repeated thereafter. Therefore,
If the phases U, V, and W are normally connected to the power supply, points A, B, and C repeat the "H" level in sequence, as shown in FIG. The R-S flip-flop 5 is set at "H" at point A and "H" at point C.
It will be reset with . D flip-flop 6 is R-
Since it receives the output of the S flip-flop 5 and the signal at the point B, if the phase order is correct, its Q output is always at the "H" level and lights up the display light emitting diode 7.

一方、結線誤りで相違いを生じた場合には、第
３図に示すように、Ａ点、Ｃ点、Ｂ点の順で
“Ｈ”レベルが移動することになる。この結果、
Ｒ−Ｓフリツプフロツプ５のＱ出力が図のように
なり、Ｄフリツプフロツプ６のＱ出力が“Ｌ”レ
ベルとなつて表示用発光ダイオード７が消灯状態
になる。 On the other hand, if a difference occurs due to a wiring error, the "H" level will shift in the order of point A, point C, and point B, as shown in FIG. As a result,
The Q output of the R-S flip-flop 5 becomes as shown in the figure, the Q output of the D flip-flop 6 becomes "L" level, and the display light emitting diode 7 is turned off.

なお、本実施例では相違いの場合に表示を与え
るとしたが、表示と共に若しくはこれに代えてト
ライアツク等の電力制御素子を駆動しモータ１の
電源を断とすることも可能である。 In this embodiment, a display is given in the case of a difference, but it is also possible to turn off the power to the motor 1 by driving a power control element such as a triax together with or in place of the display.

以上設明したように本考案によれば、無塵乾燥
機における送風用三相誘導電動機の回転方向の誤
りを検出することができ、しかも当該検出回路の
駆動につき別の直流電源を用意する必要もない。 As established above, according to the present invention, it is possible to detect an error in the rotation direction of a three-phase induction motor for blowing air in a dust-free dryer, and it is not necessary to prepare a separate DC power source to drive the detection circuit. Nor.

[Brief explanation of the drawing]

第１図は本考案による回転方向検出回路の一実
施例、第２図及び第３図は第１図の構成の動作タ
イムチヤートである。１：送風用三相誘導電動機、DA１，DA２，
DB１，DB２，DC１，DC２：フオトダイオー
ド、TA１，TA１，TB１，TB２，TC１，TC
２：フオトトランジスタ、３：三相全波整流回
路、５：Ｒ−Ｓフリツプフロツプ、６：Ｄ−フリ
ツプフロツプ。 FIG. 1 is an embodiment of the rotational direction detection circuit according to the present invention, and FIGS. 2 and 3 are operation time charts of the configuration shown in FIG. 1. 1: Three-phase induction motor for air blowing, DA1, DA2,
DB1, DB2, DC1, DC2: Photodiode, TA1, TA1, TB1, TB2, TC1, TC
2: Phototransistor, 3: Three-phase full-wave rectifier circuit, 5: R-S flip-flop, 6: D-flip-flop.

Claims

[Scope of utility model registration request]

In a dustless dryer that has a three-phase induction motor for blowing air and that circulates air from which dust has been removed through a filter to dry the material to be dried, each phase of the three-phase induction motor is provided with a pair of photo couplers. Light emitting diodes are connected in parallel with each other with opposite polarities, the output of each parallel connection is given to a three-phase full-wave rectifier circuit, and the OR connection of each photo transistor of the pair of photo couplers is inserted in parallel to the output of the rectifier circuit, A rotational direction detection circuit for a three-phase induction motor in a dust-free dryer, characterized in that it detects an error in the rotational direction of the three-phase induction motor according to the order of OR-connected signal outputs of the phototransistors corresponding to each phase. .