JPH0341844U - - Google Patents

Info

Publication number
JPH0341844U
JPH0341844U JP10373189U JP10373189U JPH0341844U JP H0341844 U JPH0341844 U JP H0341844U JP 10373189 U JP10373189 U JP 10373189U JP 10373189 U JP10373189 U JP 10373189U JP H0341844 U JPH0341844 U JP H0341844U
Authority
JP
Japan
Prior art keywords
sputtering
adhering member
film adhering
tray
conveying tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10373189U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10373189U priority Critical patent/JPH0341844U/ja
Publication of JPH0341844U publication Critical patent/JPH0341844U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図はこの考案のスパツタリング装置の搬送
トレイの正面図、第２図は第１図のＡ−Ａ線にお
ける断面図、第３図は搬送トレイの他の実施例の
断面図、第４図は搬送トレイのさらに他の実施例
の断面図、第５図は従来一般のスパツタリング装
置の概略構成を示す図、第６図は被膜付着部材の
温度対保磁力との関係を示す図である。 １……搬送トレイ、１ａ……保持片、１ａ１…
…嵌合溝、１ａ２……嵌合溝、１ｂ……貫通孔、
１ｂ１……貫通小孔、２……被膜付着部材、３…
…加熱装置、３ａ……ヒーター、４……スパツタ
リング装置、４ａ……Ｃｒのスパツタリングター
ゲツト、４ｂ……Ｃｏ−Ｎｉ−Ｃｒのスパツタリ
ングターゲツト、４ｃ……Ｃのスパツタリングタ
ーゲツト。

Claims (1)

  1. 【実用新案登録請求の範囲】 搬送トレイ１に被膜付着部材２をセツトし、こ
    の搬送トレイ１を、スパツタリング装置４を構成
    する複数に連設して配設した各スパツタリングタ
    ーゲツトに順次移動させて多層膜を形成するスパ
    ツタリング装置において、 前記搬送トレイ１は、被膜付着部材２のセツト
    部分に、熱伝導が小さく耐熱性の良い被膜付着部
    材２の保持片１ａを設けて構成したことを特徴と
    するスパツタリング装置の搬送トレイ。
JP10373189U 1989-09-04 1989-09-04 Pending JPH0341844U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10373189U JPH0341844U (ja) 1989-09-04 1989-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10373189U JPH0341844U (ja) 1989-09-04 1989-09-04

Publications (1)

Publication Number Publication Date
JPH0341844U true JPH0341844U (ja) 1991-04-22

Family

ID=31652554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10373189U Pending JPH0341844U (ja) 1989-09-04 1989-09-04

Country Status (1)

Country Link
JP (1) JPH0341844U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208067A (ja) * 1983-05-13 1984-11-26 Hitachi Ltd 連続スパッタ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208067A (ja) * 1983-05-13 1984-11-26 Hitachi Ltd 連続スパッタ装置

Similar Documents

Publication Publication Date Title
JPH0341844U (ja)
DE69007596D1 (de) Empfangselement für thermische Farbübertragung mit Unterschicht für die Farbbildempfangsschicht.
JPS6429890A (en) Marker sleeve assembly
JPH03113340U (ja)
JPH0478497U (ja)
Lang et al. Cost 501 Project UK 10 part 3: Thermal fatigue damage of Fecralloy steel-sprayed and co-extruded tubing
JPS6222957U (ja)
JPS6440553U (ja)
JPS60102889U (ja) 熱収縮性チユ−ブ用加熱装置
JPS6237730U (ja)
JPH0168872U (ja)
JPS60122956U (ja) 加熱定着ロ−ラ
DE69021842D1 (de) Wärmeübertragungsdrucken mit Widerstandsblatt und Elektrodenköpfen.
JPS6075058U (ja) 熱転写プリンタ
JPS62144855U (ja)
JPS6440554U (ja)
JPH04567U (ja)
JPH03124874U (ja)
JPH0285170U (ja)
JPS6386258U (ja)
JPH03112749U (ja)
GALIN Heat transfer in the boundary layer on a plate with a given heat flux or wall temperature distribution after an initial unheated section(Heat exchange in laminar and turbulent boundary layers on plate for arbitrary heat flux distribution taking into account initial unheated plate segment)
JPS6151307U (ja)
JPS59129554U (ja) 転写箔
JPS6225529U (ja)