JPH0478497U - - Google Patents

Info

Publication number
JPH0478497U
JPH0478497U JP12022690U JP12022690U JPH0478497U JP H0478497 U JPH0478497 U JP H0478497U JP 12022690 U JP12022690 U JP 12022690U JP 12022690 U JP12022690 U JP 12022690U JP H0478497 U JPH0478497 U JP H0478497U
Authority
JP
Japan
Prior art keywords
substrate
heating plate
heating
heating device
transporting means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12022690U
Other languages
English (en)
Other versions
JP2511692Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12022690U priority Critical patent/JP2511692Y2/ja
Publication of JPH0478497U publication Critical patent/JPH0478497U/ja
Application granted granted Critical
Publication of JP2511692Y2 publication Critical patent/JP2511692Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Tunnel Furnaces (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の動作説明図、第２
図はこの実施例の斜視図、第３図は正面図、また
第１Ａ図は他の実施例の動作説明図である。 １０，１０Ａ……加熱板、１２，１２Ａ……ス
トツパ、１４……基板、１８……搬送手段。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 所定温度に管理された加熱板上に基板を載
    置して前記基板を均一に加熱する基板の加熱装置
    において、 上面を僅かに傾けて保持されこの低い位置側に
    ストツパが突設されている加熱板と、前記基板を
    略水平に保持しつつ前記加熱板上に運ぶ搬送手段
    とを備えることを特徴とする基板の加熱装置。 (2) 前記加熱板は前記搬送手段による基板の搬
    送方向に複数配列され、前記搬送手段は各加熱板
    にそれぞれ同期して各基板を搬送するようにした
    請求項(1)の基板の加熱装置。 (3) 前記加熱板は前記搬送手段の搬送方向側の
    一辺が低くなるように傾いている請求項(1)また
    は(2)の基板の加熱装置。
JP12022690U 1990-11-19 1990-11-19 基板の加熱装置 Expired - Fee Related JP2511692Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12022690U JP2511692Y2 (ja) 1990-11-19 1990-11-19 基板の加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12022690U JP2511692Y2 (ja) 1990-11-19 1990-11-19 基板の加熱装置

Publications (2)

Publication Number Publication Date
JPH0478497U true JPH0478497U (ja) 1992-07-08
JP2511692Y2 JP2511692Y2 (ja) 1996-09-25

Family

ID=31868141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12022690U Expired - Fee Related JP2511692Y2 (ja) 1990-11-19 1990-11-19 基板の加熱装置

Country Status (1)

Country Link
JP (1) JP2511692Y2 (ja)

Also Published As

Publication number Publication date
JP2511692Y2 (ja) 1996-09-25

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Legal Events

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