JPH0341930U - - Google Patents
Info
- Publication number
- JPH0341930U JPH0341930U JP10245289U JP10245289U JPH0341930U JP H0341930 U JPH0341930 U JP H0341930U JP 10245289 U JP10245289 U JP 10245289U JP 10245289 U JP10245289 U JP 10245289U JP H0341930 U JPH0341930 U JP H0341930U
- Authority
- JP
- Japan
- Prior art keywords
- mound
- turntable
- semiconductor wafer
- liquid
- cutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10245289U JPH0341930U (2) | 1989-08-31 | 1989-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10245289U JPH0341930U (2) | 1989-08-31 | 1989-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0341930U true JPH0341930U (2) | 1991-04-22 |
Family
ID=31651348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10245289U Pending JPH0341930U (2) | 1989-08-31 | 1989-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341930U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100659843B1 (ko) * | 2005-12-28 | 2006-12-19 | 동부일렉트로닉스 주식회사 | Ｃｍｐ 장비의 순수 절감 장치 |
-
1989
- 1989-08-31 JP JP10245289U patent/JPH0341930U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100659843B1 (ko) * | 2005-12-28 | 2006-12-19 | 동부일렉트로닉스 주식회사 | Ｃｍｐ 장비의 순수 절감 장치 |
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