JPH0341U - - Google Patents
Info
- Publication number
- JPH0341U JPH0341U JP14373289U JP14373289U JPH0341U JP H0341 U JPH0341 U JP H0341U JP 14373289 U JP14373289 U JP 14373289U JP 14373289 U JP14373289 U JP 14373289U JP H0341 U JPH0341 U JP H0341U
- Authority
- JP
- Japan
- Prior art keywords
- passageway
- rotating shaft
- fitting hole
- loaded article
- incoming object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003566 sealing material Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 1
- 239000013072 incoming material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図はこの考案の一実施例の断面図、第２図
はそのハウジングの正面図、第３図は同じくその
ハウジングおよび回転軸を示す部分拡大断面図、
第４図Ａ，Ｂは各々同じくその動作説明図、第５
図は従来のゲートバルブの断面図である。
１…真空槽である処理室、２…イオン源、３…
真空槽である予備室、５…ハウジング、６…搬入
物、７…搬入物通過路、８…軸嵌合孔、９…回転
軸、１０…通過孔、１１，１２…シール材。
FIG. 1 is a sectional view of an embodiment of the invention, FIG. 2 is a front view of its housing, and FIG. 3 is a partially enlarged sectional view showing the housing and rotating shaft.
Figures 4A and B are respectively explanatory diagrams of the operation, and Figure 5
The figure is a sectional view of a conventional gate valve. 1... Processing chamber which is a vacuum chamber, 2... Ion source, 3...
Preliminary chamber which is a vacuum chamber, 5... Housing, 6... Incoming material, 7... Incoming material passing path, 8... Shaft fitting hole, 9... Rotating shaft, 10... Passing hole, 11, 12... Sealing material.
Claims (1)
搬入物通過路と交差する軸嵌合孔を有するハウジ
ングと、前記搬入物通過路に連通する通過孔を有
し前記軸嵌合孔に回転自在に嵌合して前記搬入物
通過路を開閉する回転軸と、前記回転軸の外面に
設けられて前記搬入物通過路を閉じる前記回転軸
の回転角度で前記軸嵌合孔内面の前記搬入物通過
路の開口周縁を密閉するシール材とを備えた真空
処理装置。 (2) シール材のシヨア硬さを５５〜７０とした
請求項(1)記載の真空処理装置。[Scope of Claim for Utility Model Registration] (1) A housing having an incoming object passageway opening into a vacuum chamber, a shaft fitting hole intersecting this incoming object passageway, and a passage hole communicating with the incoming object passageway. and a rotating shaft that rotatably fits into the shaft fitting hole to open and close the loaded article passageway, and a rotation angle of the rotating shaft that is provided on the outer surface of the rotating shaft and closes the loaded article passageway. and a sealing material for sealing the opening periphery of the loaded article passage on the inner surface of the shaft fitting hole. (2) The vacuum processing apparatus according to claim (1), wherein the sealing material has a shore hardness of 55 to 70.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14373289U JPH0341U (en) | 1989-02-23 | 1989-12-12 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2117589 | 1989-02-23 | ||
| JP14373289U JPH0341U (en) | 1989-02-23 | 1989-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0341U true JPH0341U (en) | 1991-01-07 |
Family
ID=31717458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14373289U Pending JPH0341U (en) | 1989-02-23 | 1989-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002212955A (en) * | 2001-01-22 | 2002-07-31 | Kanai:Kk | Positioning ruler for anchor bolt and positioning device |
-
1989
- 1989-12-12 JP JP14373289U patent/JPH0341U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002212955A (en) * | 2001-01-22 | 2002-07-31 | Kanai:Kk | Positioning ruler for anchor bolt and positioning device |
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