JPH0343652U - - Google Patents
Info
- Publication number
- JPH0343652U JPH0343652U JP10366289U JP10366289U JPH0343652U JP H0343652 U JPH0343652 U JP H0343652U JP 10366289 U JP10366289 U JP 10366289U JP 10366289 U JP10366289 U JP 10366289U JP H0343652 U JPH0343652 U JP H0343652U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- layers
- transparent film
- attached
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図１，２は本考案の一実施例によるペリク
ルの断面図と平面図、第２図は従来例によるペリ
クルの断面図である。
図において、１１はフレーム、１１Ａは下側フ
レーム、１１Ｂは中間層で樹脂層、１１Ｃは上側
フレーム、２はニトロセルローズからなる透明膜
、３はレチクル、４は両面テープ、である。
1 and 2 are a sectional view and a plan view of a pellicle according to an embodiment of the present invention, and FIG. 2 is a sectional view of a pellicle according to a conventional example. In the figure, 11 is a frame, 11A is a lower frame, 11B is an intermediate resin layer, 11C is an upper frame, 2 is a transparent film made of nitrocellulose, 3 is a reticle, and 4 is a double-sided tape.
Claims (1)
の光を透過するものであり、 前記フレームは露光領域が中空の枠であつて、
レチクル上に貼付されるものであり、透明膜の貼
付面に平行な２つの層と、これらの層の間に挟ま
れ且つこれらの層より柔軟な材質の中間層とから
なる３層を含む多層構造であることを特徴とする
ペリクル。[Claims for Utility Model Registration] The invention comprises a transparent film and a frame, the transparent film is attached to the frame and transmits light for projection exposure, and the frame is a frame with a hollow exposure area; ,
A multilayer film that is attached to the reticle and includes three layers: two layers parallel to the attachment surface of the transparent film, and an intermediate layer sandwiched between these layers and made of a softer material than these layers. A pellicle characterized by a structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10366289U JPH0343652U (en) | 1989-09-04 | 1989-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10366289U JPH0343652U (en) | 1989-09-04 | 1989-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0343652U true JPH0343652U (en) | 1991-04-24 |
Family
ID=31652485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10366289U Pending JPH0343652U (en) | 1989-09-04 | 1989-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343652U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016072149A1 (en) * | 2014-11-04 | 2016-05-12 | 日本軽金属株式会社 | Pellicle support frame and production method |
| KR20220056609A (en) * | 2020-10-28 | 2022-05-06 | 주식회사 에프에스티 | Pellicle frame for EUV(extreme ultraviolet) lithography and method for fabricating the same |
-
1989
- 1989-09-04 JP JP10366289U patent/JPH0343652U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016072149A1 (en) * | 2014-11-04 | 2016-05-12 | 日本軽金属株式会社 | Pellicle support frame and production method |
| KR20170080582A (en) * | 2014-11-04 | 2017-07-10 | 니폰게이긴조쿠가부시키가이샤 | Pellicle support frame and production method |
| US10642151B2 (en) | 2014-11-04 | 2020-05-05 | Nippon Light Metal Company, Ltd. | Pellicle support frame and production method |
| KR20220056609A (en) * | 2020-10-28 | 2022-05-06 | 주식회사 에프에스티 | Pellicle frame for EUV(extreme ultraviolet) lithography and method for fabricating the same |