JPH0344571A - Measuring apparatus of constant of dielectric material - Google Patents
Measuring apparatus of constant of dielectric materialInfo
- Publication number
- JPH0344571A JPH0344571A JP18007489A JP18007489A JPH0344571A JP H0344571 A JPH0344571 A JP H0344571A JP 18007489 A JP18007489 A JP 18007489A JP 18007489 A JP18007489 A JP 18007489A JP H0344571 A JPH0344571 A JP H0344571A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- frequency
- sample
- temperature
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003989 dielectric material Substances 0.000 title claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 22
- 238000005259 measurement Methods 0.000 claims abstract description 5
- 238000010168 coupling process Methods 0.000 claims description 26
- 238000005859 coupling reaction Methods 0.000 claims description 26
- 230000008878 coupling Effects 0.000 claims description 24
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 2
- 101100518501 Mus musculus Spp1 gene Proteins 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 230000010355 oscillation Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
Abstract
Description
【発明の詳細な説明】
（ａ）産業上の利用分野
この発明は誘電体材料定数を測定する装置に関し、特に
誘電体試料の温度特性を測定するための装置に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application This invention relates to an apparatus for measuring dielectric material constants, and more particularly to an apparatus for measuring temperature characteristics of a dielectric sample.
（ｂ）従来の技術
誘電体試料をシールドケース内に配置して、ＴＥ０１，
１ （一般的にはｎ＝１）あるいはＴ Ｅ ｏ ｔδモ
ードの共振周波数を測定し、ついで、このケースを恒温
槽に入れて加熱し、熱的に平衡状態に近づけた後、再び
共振周波数を測定してその温度特性を測定する方法が知
られている。(b) Conventional technology A dielectric sample is placed inside a shield case and TE01,
1 (generally n = 1) or T E o tδ mode is measured, then the case is placed in a thermostatic oven and heated to bring it close to a thermal equilibrium state, and then the resonant frequency is increased again. A method of measuring the temperature characteristics thereof is known.
ところが、恒温槽を用いる方法では装置が大型になるば
かりでなく、誘電体試料が所定の温度まで上昇して平衡
状態に達するまでに長時間を要してしまう。However, the method using a constant temperature bath not only increases the size of the apparatus, but also requires a long time for the dielectric sample to rise to a predetermined temperature and reach an equilibrium state.
そこで、本願出願人は特開昭６２−２１１５６６号にて
、誘電体試料を直接高周波加熱することによって上記従
来の問題点を解消した、誘電体材料定数の測定方法およ
び測定装置について出願している。Therefore, the applicant has filed an application in Japanese Patent Laid-Open No. 62-211566 for a method and apparatus for measuring dielectric material constants, which solves the above conventional problems by directly heating a dielectric sample with high frequency. .
ここで上記出願の実施例について簡単に示す。Examples of the above-mentioned application will now be briefly described.
第４図は装置の概略図であり、同図において１４は有底
円筒状のシールドケースであり、このシールドケース１
４の内部の略中央部に支持棒１８によって、中空筒状の
誘電体試料１６が固定されている。また、シールドケー
ス１４の側壁には対向する位置に入力用コネクタ３ｏお
よび出力用コネクタ３２が取り付けられ、それぞれに結
合ループなどの結合手段が設けられている。この人力用
コネクタ３０および出力用コネクタ３２間にネットワー
クアナライザ３４が接続されている。さらに、シールド
ケース１４の側壁にはもう１つのコネクタ３６が取り付
けられ、このコネクタ３６にも結合ループなどの結合手
段が設けられている。このコネクタ３６に加熱用高周波
注入装置３８が接続されている。FIG. 4 is a schematic diagram of the device, and in the same figure, 14 is a cylindrical shield case with a bottom, and this shield case 1
A hollow cylindrical dielectric sample 16 is fixed approximately at the center of the inside of the sample 4 by a support rod 18 . Further, an input connector 3o and an output connector 32 are attached to the side wall of the shield case 14 at opposing positions, and each is provided with coupling means such as a coupling loop. A network analyzer 34 is connected between the human power connector 30 and the output connector 32. Furthermore, another connector 36 is attached to the side wall of the shield case 14, and this connector 36 is also provided with coupling means such as a coupling loop. A heating high-frequency injection device 38 is connected to this connector 36 .
このような測定装置において、加熱用高周波注入装置３
８が誘電体共振器１２内に高周波電力を注入する。これ
により誘電体試料１６が高周波加熱される。一方、ネッ
トワークアナライザ３４はコネクタ３０および３２間に
結合された誘電体共振器１２の共振周波数などを測定す
る。In such a measuring device, the heating high frequency injection device 3
8 injects high frequency power into the dielectric resonator 12. As a result, the dielectric sample 16 is heated with high frequency. On the other hand, the network analyzer 34 measures the resonant frequency of the dielectric resonator 12 coupled between the connectors 30 and 32.
このようにして誘電体試料１６が所定温度であるときの
共振周波数を測定することによって誘電体試料の温度特
性を求めることができる。By measuring the resonance frequency when the dielectric sample 16 is at a predetermined temperature in this manner, the temperature characteristics of the dielectric sample can be determined.
（Ｃ１発明が解決しようとする課題
このように、誘電体試料を直接高周波加熱する方法によ
れば、恒温槽を用いる方法に比較して誘電体試料の加熱
速度が改善される。しかし、この場合、高周波電力が誘
電体共振器に効率よく注入され、注入された高周波電力
が効率的に誘電体試料によって消費されなければならな
い。(C1 Problem to be Solved by the Invention As described above, according to the method of directly heating the dielectric sample with high frequency, the heating rate of the dielectric sample is improved compared to the method using a constant temperature bath. However, in this case , high-frequency power must be efficiently injected into the dielectric resonator, and the injected high-frequency power must be efficiently consumed by the dielectric sample.
この発明の目的は、誘電体試料を高効率で加熱できるよ
うにし、測定時間をより短縮化できるようにした誘電体
材料定数測定装置を提供することにある。An object of the present invention is to provide a dielectric material constant measuring device that can heat a dielectric sample with high efficiency and further shorten measurement time.
（ｄ）課題を解決するための手段
この発明の誘電体材料定数測定装置は、シールドケース
内に誘電体試料が配置され、信号入出力用の複数の結合
手段が設けられた誘電体共振器と信号人力用結合手段と
信号出力用結合手段間に接続されて、誘電体共振器の共
振周波数を測定する共振周波数測定手段と、
特定の結合手段に前記共振周波数と同一周波数の高周波
電力を注入して前記誘電体試料を共振モードと同一モー
ドで加熱する高周波電力注入手段と、
からなり前記誘電体試料の異なる温度における共振周波
数から誘電体試料の所定の材料定数を求めることを特徴
としている。(d) Means for Solving the Problems The dielectric material constant measuring device of the present invention includes a dielectric resonator in which a dielectric sample is placed inside a shield case and a plurality of coupling means for signal input and output are provided. Resonant frequency measuring means connected between the signal human power coupling means and the signal output coupling means to measure the resonant frequency of the dielectric resonator; a high-frequency power injection means for heating the dielectric sample in the same mode as the resonance mode; and determining a predetermined material constant of the dielectric sample from the resonance frequency at different temperatures of the dielectric sample.
（８１作用
この発明の誘電体材料定数測定装置においては、シール
ドケース内に誘電体試料が配置されるとともに、信号の
入出力用の結合手段が複数個設けられて誘電体共振器が
構成され、共振周波数測定手段は、誘電体共振器の信号
人力用結合手段と信号出力用結合手段間に接続されて、
誘電体共振器の共振周波数を測定する。また、高周波電
力注入手段は、特定の結合手段に前記共振周波数と同一
周波数の高周波電力を注入して誘電体試料を共振モード
と同一モードで高周波加熱する。(81 Effect) In the dielectric material constant measuring device of the present invention, a dielectric sample is placed in a shield case, and a dielectric resonator is configured by providing a plurality of coupling means for inputting and outputting signals, The resonance frequency measuring means is connected between the signal human power coupling means and the signal output coupling means of the dielectric resonator,
Measure the resonant frequency of the dielectric resonator. Further, the high frequency power injection means injects high frequency power having the same frequency as the resonance frequency into the specific coupling means to high frequency heat the dielectric sample in the same mode as the resonance mode.
このように、誘電体共振器の共振モードと同一モードで
高周波電力が加えられるため、高周波電力が誘電体共振
器に最も高い効率で注入され、注入された高周波電力の
殆どが誘電体試料で消費される。このため、誘電体試料
が速やかに発熱する。また、誘電体試料の加熱により、
誘電体試料の誘電率の温度係数および線膨張係数に応じ
て共振周波数が変化するが、常にその時の共振周波数の
高周波電力が注入されるため、誘電体試料の温度に関わ
らず、継続的に高効率で誘電体試料が加熱される。した
がって誘電体試料を短時間に所定温度まで上昇させるこ
とが可能となる。In this way, the high-frequency power is applied in the same mode as the resonance mode of the dielectric resonator, so the high-frequency power is injected into the dielectric resonator with the highest efficiency, and most of the injected high-frequency power is consumed by the dielectric sample. be done. Therefore, the dielectric sample quickly generates heat. In addition, by heating the dielectric sample,
The resonant frequency changes depending on the temperature coefficient of permittivity and linear expansion coefficient of the dielectric sample, but since the high frequency power at the resonant frequency at that time is always injected, the high frequency power remains constant regardless of the temperature of the dielectric sample. The dielectric sample is heated with high efficiency. Therefore, it becomes possible to raise the dielectric sample to a predetermined temperature in a short time.
＜ｒ＞実施例
この発明の実施例である誘電体材料定数測定装置の構成
を第１図に、また、同測定装置に用いられる誘電体共振
器の縦断面図を第２図にそれぞれ示す。<r> Embodiment FIG. 1 shows the configuration of a dielectric material constant measuring device according to an embodiment of the present invention, and FIG. 2 shows a vertical cross-sectional view of a dielectric resonator used in the same measuring device.
第１図において１２は誘電体共振器であり、同図では、
その概略横断面を示している。この誘電体共振器１２は
、例えはアルミニュームあるいはその合金などの導電材
料からなるシールドケースを含む。このシールドケース
は円筒状部５０を側壁とし、下部に底板５１を取り付け
、上部に蓋５２を被せて構威している。なお、シールド
ケースとしてセラミックのような誘電体にシールド電極
を形成したものを用いてもよい。In FIG. 1, 12 is a dielectric resonator;
A schematic cross section is shown. The dielectric resonator 12 includes a shield case made of a conductive material such as aluminum or an alloy thereof. This shield case has a cylindrical part 50 as a side wall, a bottom plate 51 attached to the lower part, and a lid 52 covering the upper part. Note that a shield case in which a shield electrode is formed on a dielectric material such as ceramic may be used.
第２図に示すように、シールドケース内には低誘電率の
誘電体例えばフォルステライトなどからなる円筒状の支
持台５３によって中空円筒状の誘電体試料１６を載置す
ることによって、この誘電体試料１６をシールドケース
内の略中央部に固定している。シールドケースの一部を
構成する前記側壁５０には、誘電体試料１６と略同−高
さの位置３箇所にコネクタ３０．３２および３６を設け
ている。これらのコネクタにはそれぞれ中心導体とアー
ス間に結合ループ３０ａ、３２ａおよび３６ａを設けて
いる。さらに、側壁５０の他の箇所に誘電体試料の温度
測定用窓５４および真空排気用排気孔５５を設けている
。真空排気装置４９は側壁５０と底板５１からなるシー
ルドケースに対して蓋５２を一定圧力で真空吸着させる
とともに、内部を真空にするためのものである。As shown in FIG. 2, a hollow cylindrical dielectric sample 16 is placed inside the shield case using a cylindrical support 53 made of a dielectric material with a low dielectric constant, such as forsterite. The sample 16 is fixed approximately at the center inside the shield case. Connectors 30, 32 and 36 are provided at three positions on the side wall 50, which constitutes a part of the shield case, at approximately the same height as the dielectric sample 16. Each of these connectors has a coupling loop 30a, 32a and 36a between the center conductor and ground. Furthermore, a window 54 for measuring the temperature of the dielectric sample and an exhaust hole 55 for evacuation are provided at other locations on the side wall 50. The vacuum evacuation device 49 is used to vacuum-adsorb the lid 52 at a constant pressure to the shield case consisting of the side wall 50 and the bottom plate 51, and to evacuate the inside.
以上のように構威した誘電体共振器に次に述べる各種回
路装置を接続することによって測定装置を構成している
。スイッチ５８はコネクタ３２および同軸ケーブル５６
からの信号を選択的に方向性結合器へ供給する回路であ
り、後述するように誘電体試料を高周波加熱するときに
開状態にして、結合ループ３２ａに結合した高周波電力
を後述する周波数カウンタおよび正帰還回路に回り込ま
ないようにする。方向性結合器４０は入力信号を分配し
て周波数カウンタ４３およびローパスフィルタ４１へそ
れぞれ供給する。ローパスフィルタ４１は誘電体共振器
１２がＴＥ□δモードで発振する周波数を濾波し、その
他の高次調波成分をカットする。アンプ４２はローパス
フィルタ４１の出力信号を増幅して同軸ケーブル５７、
同軸コネクタ３０および結合ループ３０ａを介して誘電
体共振器１２へ信号を加える。前記同軸ケーブル５６、
スイッチ５８．方向性結合器４０．ローパスフィルタ４
１．アンプ４２および同軸ケーブル５７は誘電体共振器
１２に対する正帰還回路として作動させる。すなわちこ
の正帰還回路による位相差がＴＥ、、δモードの共振周
波数におけ、る波長の整数倍となるように線路長を設定
している。従って誘電体共振器１２と正帰還回路からな
る発振回路は誘電体共振器１２の共振周波数で発振する
。A measuring device is constructed by connecting various circuit devices described below to the dielectric resonator configured as described above. Switch 58 connects connector 32 and coaxial cable 56
This is a circuit that selectively supplies signals from the directional coupler to the directional coupler, and is opened when high-frequency heating a dielectric sample as described later, and the high-frequency power coupled to the coupling loop 32a is connected to the frequency counter and the directional coupler described later. Avoid looping around into the positive feedback circuit. Directional coupler 40 distributes the input signal and supplies it to frequency counter 43 and low-pass filter 41, respectively. The low-pass filter 41 filters the frequency at which the dielectric resonator 12 oscillates in the TE□δ mode, and cuts other high-order harmonic components. The amplifier 42 amplifies the output signal of the low-pass filter 41 and connects it to the coaxial cable 57,
Signals are applied to dielectric resonator 12 via coaxial connector 30 and coupling loop 30a. the coaxial cable 56;
Switch 58. Directional coupler 40. Low pass filter 4
1. Amplifier 42 and coaxial cable 57 are operated as a positive feedback circuit for dielectric resonator 12. That is, the line length is set so that the phase difference caused by this positive feedback circuit is an integral multiple of the wavelength at the resonance frequency of the TE, .delta. modes. Therefore, the oscillation circuit consisting of the dielectric resonator 12 and the positive feedback circuit oscillates at the resonant frequency of the dielectric resonator 12.
周波数カウンタ４３はこの発振回路の発振周波数を測定
する。A frequency counter 43 measures the oscillation frequency of this oscillation circuit.
温度センサ４４は例えば放射温度計からなり、誘電体共
振器の窓部５４を通して誘電体試料１６の放射熱を測定
する。信号発生器４６は制御装置４５から与えられる制
御信号に基づき、周波数カウンタ４３の測定した周波数
に等しい周波数の信号を発生する。ハイパワーアンプ４
７はその信号を電力増幅する。Ｑｅ調整機構４８は結合
ループ３６ａの外部Ｑ（Ｑｅ）を調整するとともに、ハ
イパワーアンプ４７の出力をコネクタ３６を介して誘電
体共振器１２内へ注入する。このとき、結合ループ３６
ｊは第２図に示すように、上記発振回路用の信号入力用
結合ループ３０ａおよび信号出力用結合ループ３２ａと
同様に、誘電体試料の中央高さ位置に設けたため、ＴＥ
、、δモードの電磁界分布が発生し、これにより誘電体
試料１６が発熱する。The temperature sensor 44 is composed of, for example, a radiation thermometer, and measures the radiation heat of the dielectric sample 16 through the window 54 of the dielectric resonator. The signal generator 46 generates a signal having a frequency equal to the frequency measured by the frequency counter 43 based on a control signal given from the control device 45. high power amplifier 4
7 power amplifies the signal. The Qe adjustment mechanism 48 adjusts the external Q (Qe) of the coupling loop 36a and injects the output of the high power amplifier 47 into the dielectric resonator 12 via the connector 36. At this time, the coupling loop 36
As shown in FIG. 2, like the signal input coupling loop 30a and signal output coupling loop 32a for the oscillation circuit, j is provided at the center height of the dielectric sample, so that the TE
,, δ mode electromagnetic field distribution is generated, which causes the dielectric sample 16 to generate heat.
第１図に示した制御装置４５はパーソナルコンピュータ
などから構威し、前記周波数カウンタ４３および温度セ
ンサ４４の測定結果をそれぞれ読み込み、上記信号発生
器４６を制御する。The control device 45 shown in FIG. 1 is configured from a personal computer or the like, reads the measurement results of the frequency counter 43 and the temperature sensor 44, and controls the signal generator 46.
ところで、誘電体試料１６を含む誘電体共振器１２の無
負荷Ｑ（Ｑｏ）は次式で与えられる。By the way, the no-load Q (Qo) of the dielectric resonator 12 including the dielectric sample 16 is given by the following equation.
１／Ｑｏ＝（１／Ｑ□） ＋（１／Ｑｄｇ） ＋、（１
／Ｑｃ）ここで口□は誘電体試料の誘電損失に関するＱ
Ｏｏは支持台５３の誘電損失に関するＱ、 ＱＣはシ
ールドケースのジュール損に関するＱであるこのような
誘電体共振器１２に対し、高周波電力を注入する際、結
合ループ３６ａの外部Ｑ（Ｑｅ）を誘電体共振器１２の
無負荷Ｑ（Ｑｏ）に近似ないし一致させるとともに、信
号発生器４６の出力する信号の周波数を誘電体共振器１
２の共振周波数に一致させることによって、誘電体共振
器（結合ループ３６ａ）からの反射を最小にする。1/Qo=(1/Q□) +(1/Qdg) +, (1
/Qc) Here, □ is Q regarding the dielectric loss of the dielectric sample.
Oo is the Q related to the dielectric loss of the support base 53, and QC is the Q related to the Joule loss of the shield case. When injecting high frequency power into such a dielectric resonator 12, the external Q (Qe) of the coupling loop 36a is In addition to approximating or matching the no-load Q (Qo) of the dielectric resonator 12, the frequency of the signal output from the signal generator 46 is
By matching the resonant frequency of 2, reflections from the dielectric resonator (coupling loop 36a) are minimized.
このことによって、高周波電力の殆どが誘電体共振器に
注入され、この注入された高周波電力のうちＱ ｏ ／
Ｑａ＋の割合で誘電体試料１６が加熱され発熱する。As a result, most of the high frequency power is injected into the dielectric resonator, and out of this injected high frequency power, Q o /
The dielectric sample 16 is heated and generates heat at a rate of Qa+.
一般に誘電体試料の周波数の温度係数η、は次式で与え
られる。Generally, the frequency temperature coefficient η of a dielectric sample is given by the following equation.
ηｆ ＝（１／ｆｌ）（ｆｇ −ｆｌ）／（Ｔ２−ＴＩ
）ここでＴｌは加熱前の温度、Ｔ２は加熱後の温度ｆｌ
は温度ＴＩにおける共振周波数、ｆｇは温度Ｔ２におけ
る共振周波数である。ηf = (1/fl) (fg - fl)/(T2-TI
) Here, Tl is the temperature before heating, T2 is the temperature after heating fl
is the resonant frequency at temperature TI, and fg is the resonant frequency at temperature T2.
すなわち２点の温度について誘電体共振器の共振周波数
を測定することによって、誘電体試料の周波数の温度係
数を求めることができる。That is, by measuring the resonant frequency of the dielectric resonator at two temperatures, the temperature coefficient of the frequency of the dielectric sample can be determined.
次に、上記制御装置４５の処理手順を第３図に示すフロ
ーチャートに基づいて説明する。まず、現在の誘電体試
料の温度ｔｏを温度センサ４４により測定し、これを加
熱前の誘電体試料の温度Ｔｌとして記憶する（ｎｌ−４
ｎ２）。続いて、スイッチ５８を閉じて誘電体共振器を
共振させ、その時の共振周波数ｆＯを測定し、これを加
熱前の共振周波数Ｆ１として記憶する（ｎ３→ｎ４）。Next, the processing procedure of the control device 45 will be explained based on the flowchart shown in FIG. First, the current temperature to of the dielectric sample is measured by the temperature sensor 44, and this is stored as the temperature Tl of the dielectric sample before heating (nl-4
n2). Subsequently, the switch 58 is closed to cause the dielectric resonator to resonate, and the resonance frequency fO at that time is measured and stored as the resonance frequency F1 before heating (n3→n4).
その後、スイッチ５８を開けて信号発生器４６へ制御信
号を与えて、前記ｆＯに等しい周波数の信号を発生させ
、これにより誘電体試料１６を高周波加熱する（ｎ５）
。一定時間加熱を行った後、信号発生器４６の動作を停
止させて誘電体試料１６の温度ｔｏを測定する（ｎ６）
。誘電体試料Ｉ６の現在の温度ｔｏが所定温度Ｔ２未満
であれば、スイッチ５８を再び閉して共振周波数ｆＯを
測定する（ｎ７→ｎ８）。続いて、信号発生器４６へ制
御信号を与えて、今測定した共振周波数ｆＯに等しい周
波数の信号を発生させる。誘電体試料１６の温度が所定
温度Ｔ２に達するまで上記共振周波数の測定およびその
周波数による高周波加熱を繰り返し行い、誘電体試料１
６の温度ｔｏが所定温度Ｔ２に達した時、その時の共振
周波数ｆＯを加熱後の共振周波数Ｆ２として記憶する（
ｎ７→ｎ９）。その後、加熱前の温度ＴＩにおける共振
周波数Ｆｌと加熱後の温度Ｔ２における共振周波数Ｆ２
とによって誘電体試料の周波数の温度係数を算出する（
ｎｌＯ）。After that, the switch 58 is opened and a control signal is given to the signal generator 46 to generate a signal with a frequency equal to the fO, thereby heating the dielectric sample 16 with high frequency (n5).
. After heating for a certain period of time, the operation of the signal generator 46 is stopped and the temperature to of the dielectric sample 16 is measured (n6).
. If the current temperature to of the dielectric sample I6 is less than the predetermined temperature T2, the switch 58 is closed again and the resonant frequency fO is measured (n7→n8). Subsequently, a control signal is applied to the signal generator 46 to generate a signal having a frequency equal to the resonant frequency fO just measured. The measurement of the resonant frequency and the high-frequency heating using the frequency are repeated until the temperature of the dielectric sample 16 reaches a predetermined temperature T2.
When the temperature to of 6 reaches the predetermined temperature T2, the resonant frequency fO at that time is stored as the resonant frequency F2 after heating (
n7→n9). After that, the resonant frequency Fl at the temperature TI before heating and the resonant frequency F2 at the temperature T2 after heating
Calculate the temperature coefficient of the frequency of the dielectric sample by (
nlO).
ｆｇ）発明の効果
この発明によれば、誘電体試料をシールドケース内に配
置してなる誘電体共振器に対し、その共振周波数と同一
周波数の高周波電力を注入して、誘電体試料を共振モー
ドと同一モードで加熱するように構成したことにより、
最も高い効率で誘電体共振器に高周波電力が注入され、
その大部分が誘電体試料によって消費されることになり
、しかも誘電体試料の発熱に応じて共振周波数が変化す
る場合でも、常に共振周波数の高周波電力が注入される
ため、誘電体試料を継続的に高効率で加熱することがで
きる。これにより、誘電体試料を速やかに所定温度まで
加熱して、短時間に誘電体材料定数の測定を行うことが
できるようになる。fg) Effect of the Invention According to the invention, high frequency power having the same frequency as the resonant frequency is injected into a dielectric resonator formed by disposing a dielectric sample in a shield case, and the dielectric sample is placed in a resonant mode. By configuring it to heat in the same mode as
High frequency power is injected into the dielectric resonator with the highest efficiency,
Most of the power is consumed by the dielectric sample, and even if the resonant frequency changes as the dielectric sample heats up, high-frequency power at the resonant frequency is always injected, so the dielectric sample can be continuously can be heated with high efficiency. This makes it possible to quickly heat the dielectric sample to a predetermined temperature and measure the dielectric material constants in a short time.
第１図はこの発明の実施例である誘電体材料定数測定装
置の構成図、第２図は同装置に用いられる誘電体共振器
の縦断面図である。第３図は同装置における制御装置の
処理手順を表すフローチャートである。第４図は従来の
測定装置の概略ブロック図である。
１２−誘電体共振器、
１６−誘電体試料、
３〇−信号入力用コネクタ、
３２−信号出力用コネクタ、
３０ａ、３２ａ−結合ループ、
３６−高周波電力注入用コネクタ、
３６ａ−結合ループ、
５〇−側壁、
５１−底板、
５２−蓋、
５３−支持台。
第
２
図
第４
図
３４
ＡＣ：、Ａ −FIG. 1 is a block diagram of a dielectric material constant measuring device according to an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of a dielectric resonator used in the device. FIG. 3 is a flowchart showing the processing procedure of the control device in the same device. FIG. 4 is a schematic block diagram of a conventional measuring device. 12-dielectric resonator, 16-dielectric sample, 30-signal input connector, 32-signal output connector, 30a, 32a-coupling loop, 36-high frequency power injection connector, 36a-coupling loop, 50 - side wall, 51 - bottom plate, 52 - lid, 53 - support stand. Figure 2 Figure 4 Figure 34 AC:, A -
Claims (1)
入出力用の複数の結合手段が設けられた誘電体共振器と
、 信号入力用結合手段と信号出力用結合手段間に接続され
て、誘電体共振器の共振周波数を測定する共振周波数測
定手段と、 特定の結合手段に前記共振周波数と同一周波数の高周波
電力を注入して前記誘電体試料を共振モードと同一モー
ドで加熱する高周波電力注入手段と、 からなり前記誘電体試料の異なる温度における共振周波
数から誘電体試料の所定の材料定数を求めることを特徴
とする誘電体材料定数測定装置。(1) A dielectric resonator in which a dielectric sample is disposed in a shield case, a dielectric resonator is provided with a plurality of coupling means for signal input and output, and a dielectric resonator is connected between the coupling means for signal input and the coupling means for signal output, Resonant frequency measurement means for measuring the resonant frequency of a dielectric resonator; and High frequency power injection for heating the dielectric sample in the same mode as the resonance mode by injecting high frequency power having the same frequency as the resonant frequency into a specific coupling means. A dielectric material constant measuring device comprising: means for determining a predetermined material constant of a dielectric sample from a resonance frequency of the dielectric sample at different temperatures.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1180074A JPH0820479B2 (en) | 1989-07-12 | 1989-07-12 | Dielectric material constant measuring device and dielectric material constant measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1180074A JPH0820479B2 (en) | 1989-07-12 | 1989-07-12 | Dielectric material constant measuring device and dielectric material constant measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0344571A true JPH0344571A (en) | 1991-02-26 |
| JPH0820479B2 JPH0820479B2 (en) | 1996-03-04 |
Family
ID=16077005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1180074A Expired - Fee Related JPH0820479B2 (en) | 1989-07-12 | 1989-07-12 | Dielectric material constant measuring device and dielectric material constant measuring method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0820479B2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6062092A (en) * | 1983-09-14 | 1985-04-10 | 松下電器産業株式会社 | High frequency heater |
| JPS6153839A (en) * | 1984-08-23 | 1986-03-17 | Sony Corp | Waveform shaping device |
| JPS62211566A (en) * | 1986-03-12 | 1987-09-17 | Murata Mfg Co Ltd | Method and instrument for measuring constant of dielectric material |
-
1989
- 1989-07-12 JP JP1180074A patent/JPH0820479B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6062092A (en) * | 1983-09-14 | 1985-04-10 | 松下電器産業株式会社 | High frequency heater |
| JPS6153839A (en) * | 1984-08-23 | 1986-03-17 | Sony Corp | Waveform shaping device |
| JPS62211566A (en) * | 1986-03-12 | 1987-09-17 | Murata Mfg Co Ltd | Method and instrument for measuring constant of dielectric material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0820479B2 (en) | 1996-03-04 |
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