JPH0349102A - マイクロ波無電極光源装置用のランプ冷却装置 - Google Patents

マイクロ波無電極光源装置用のランプ冷却装置

Info

Publication number
JPH0349102A
JPH0349102A JP2164346A JP16434690A JPH0349102A JP H0349102 A JPH0349102 A JP H0349102A JP 2164346 A JP2164346 A JP 2164346A JP 16434690 A JP16434690 A JP 16434690A JP H0349102 A JPH0349102 A JP H0349102A
Authority
JP
Japan
Prior art keywords
lamp
light source
microwave
source device
electrodeless light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2164346A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0361282B2 (2
Inventor
Michael G Ury
マイケル・ジー・ユリー
Charles H Wood
チャールズ・エイチ・ウッド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fusion Systems Corp
Original Assignee
Fusion Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/381,482 external-priority patent/US4507587A/en
Priority claimed from US06/381,481 external-priority patent/US4485332A/en
Application filed by Fusion Systems Corp filed Critical Fusion Systems Corp
Publication of JPH0349102A publication Critical patent/JPH0349102A/ja
Publication of JPH0361282B2 publication Critical patent/JPH0361282B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
JP2164346A 1982-05-24 1990-06-25 マイクロ波無電極光源装置用のランプ冷却装置 Granted JPH0349102A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US381,482 1982-05-24
US381,481 1982-05-24
US06/381,482 US4507587A (en) 1982-05-24 1982-05-24 Microwave generated electrodeless lamp for producing bright output
US06/381,481 US4485332A (en) 1982-05-24 1982-05-24 Method & apparatus for cooling electrodeless lamps

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58090140A Division JPS5986153A (ja) 1982-05-24 1983-05-24 マイクロ波無電極光源装置

Publications (2)

Publication Number Publication Date
JPH0349102A true JPH0349102A (ja) 1991-03-01
JPH0361282B2 JPH0361282B2 (2) 1991-09-19

Family

ID=27009406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2164346A Granted JPH0349102A (ja) 1982-05-24 1990-06-25 マイクロ波無電極光源装置用のランプ冷却装置

Country Status (2)

Country Link
JP (1) JPH0349102A (2)
DE (2) DE3318795A1 (2)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3823766A1 (de) * 1987-07-15 1989-01-26 Fusion Systems Corp Verfahren und vorrichtung zum aendern der emissionseigenschaften einer elektrodenlosen lampe
DE3920628A1 (de) * 1988-06-24 1989-12-28 Fusion Systems Corp Elektrodenlose leuchte zur kopplung mit einer kleinen lampe
US5334913A (en) * 1993-01-13 1994-08-02 Fusion Systems Corporation Microwave powered lamp having a non-conductive reflector within the microwave cavity
US6518703B1 (en) 1998-03-16 2003-02-11 Matsushita Electrical Industrial Co., Ltd. Electrodeless discharge energy supply apparatus and electrodeless discharge lamp device using surface wave transmission line
US6737809B2 (en) 2000-07-31 2004-05-18 Luxim Corporation Plasma lamp with dielectric waveguide
DE10231258A1 (de) * 2002-07-11 2004-01-22 Philips Intellectual Property & Standards Gmbh Entladungslampe mit Kühleinrichtung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1024246A (en) * 1973-08-22 1978-01-10 Donald M. Spero Apparatus and method for generating radiation
US4042850A (en) * 1976-03-17 1977-08-16 Fusion Systems Corporation Microwave generated radiation apparatus
US4532427A (en) * 1982-03-29 1985-07-30 Fusion Systems Corp. Method and apparatus for performing deep UV photolithography

Also Published As

Publication number Publication date
DE8315211U1 (de) 1986-11-20
JPH0361282B2 (2) 1991-09-19
DE3318795A1 (de) 1983-12-15

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