JPH03504768A - 特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム - Google Patents

特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム

Info

Publication number: JPH03504768A
Authority: JP; Japan
Prior art keywords: interferometer system; lens; tune; measurement; interferometer
Prior art date: 1989-03-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP2504544A

Other languages

English (en)

Japanese (ja)

Inventor

ロイクス，ゲルハルト

ラツェクキ，レーネ

Original Assignee

ドクター・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-03-21

Filing date

1990-03-15

Publication date

1991-10-17

1990-03-15 Application filed by ドクター・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング filed Critical ドクター・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング

1991-10-17 Publication of JPH03504768A publication Critical patent/JPH03504768A/ja

Status Pending legal-status Critical Current

Links

230000033001 locomotion Effects 0.000 title claims description 15
238000005259 measurement Methods 0.000 claims description 87
239000003365 glass fiber Substances 0.000 claims description 25
230000003287 optical effect Effects 0.000 claims description 19
230000010287 polarization Effects 0.000 claims description 18
230000006798 recombination Effects 0.000 claims description 8
238000005215 recombination Methods 0.000 claims description 8
230000000295 complement effect Effects 0.000 claims description 7
GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 4
238000001514 detection method Methods 0.000 claims description 3
239000000463 material Substances 0.000 claims description 3
230000008878 coupling Effects 0.000 claims description 2
238000010168 coupling process Methods 0.000 claims description 2
238000005859 coupling reaction Methods 0.000 claims description 2
230000010363 phase shift Effects 0.000 claims description 2
238000004611 spectroscopical analysis Methods 0.000 claims description 2
239000004020 conductor Substances 0.000 claims 3
230000011514 reflex Effects 0.000 claims 2
229910003327 LiNbO3 Inorganic materials 0.000 claims 1
230000001939 inductive effect Effects 0.000 claims 1
235000012431 wafers Nutrition 0.000 description 14
230000000694 effects Effects 0.000 description 7
230000002452 interceptive effect Effects 0.000 description 7
238000000034 method Methods 0.000 description 7
238000011156 evaluation Methods 0.000 description 4
239000000835 fiber Substances 0.000 description 4
239000011521 glass Substances 0.000 description 4
239000004606 Fillers/Extenders Substances 0.000 description 2
238000013461 design Methods 0.000 description 2
238000006073 displacement reaction Methods 0.000 description 2
239000004615 ingredient Substances 0.000 description 2
238000012545 processing Methods 0.000 description 2
238000013519 translation Methods 0.000 description 2
238000009966 trimming Methods 0.000 description 2
JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
241000257465 Echinoidea Species 0.000 description 1
229910001218 Gallium arsenide Inorganic materials 0.000 description 1
230000035559 beat frequency Effects 0.000 description 1
BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
238000010276 construction Methods 0.000 description 1
239000000356 contaminant Substances 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
238000005137 deposition process Methods 0.000 description 1
238000001035 drying Methods 0.000 description 1
238000004870 electrical engineering Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
230000007613 environmental effect Effects 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
239000011152 fibreglass Substances 0.000 description 1
238000011089 mechanical engineering Methods 0.000 description 1
238000011017 operating method Methods 0.000 description 1
230000003534 oscillatory effect Effects 0.000 description 1
239000002245 particle Substances 0.000 description 1
230000005855 radiation Effects 0.000 description 1
230000035945 sensitivity Effects 0.000 description 1
238000000926 separation method Methods 0.000 description 1
239000007787 solid Substances 0.000 description 1
241000894007 species Species 0.000 description 1
239000000126 substance Substances 0.000 description 1
238000012360 testing method Methods 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)

JP2504544A 1989-03-21 1990-03-15 特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム Pending JPH03504768A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
AT65289A AT392537B (de)	1989-03-21	1989-03-21	Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
AT652/89		1989-03-21

Publications (1)

Publication Number	Publication Date
JPH03504768A true JPH03504768A (ja)	1991-10-17

Family

ID=3496240

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2504544A Pending JPH03504768A (ja)	1989-03-21	1990-03-15	特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム

Country Status (4)

Country	Link
EP (1)	EP0422143A1 (de)
JP (1)	JPH03504768A (de)
AT (1)	AT392537B (de)
WO (1)	WO1990011484A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2015230259A (ja) *	2014-06-05	2015-12-21	日本電信電話株式会社	距離計測装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CA2080023A1 (en) *	1990-04-23	1991-10-24	Monty Glass	Interferometry systems and methods
US5491550A (en) *	1990-08-31	1996-02-13	Commonwealth Scientific And Industrial Research Organization	Interference methods and interference microscopes for measuring energy path length differences, path length between two locaitons or for determiing refractive index
FR2676808B1 (fr) *	1991-05-21	1993-08-13	Commissariat Energie Atomique	Dispositif de mesure d'une caracteristique d'un objet en optique integree, par interferometrie.
US5291267A (en) *	1992-01-22	1994-03-01	Hewlett-Packard Company	Optical low-coherence reflectometry using optical amplification
FR2696545B1 (fr) *	1992-10-06	1994-12-30	Suisse Electronique Microtech	Interféromètre comprenant un ensemble intégré et une unité réfléchissante séparés l'un de l'autre par une région de mesure.
FR2696546B1 (fr) *	1992-10-06	1994-12-30	Suisse Electronique Microtech	Interféromètre comprenant un ensemble intégré et un miroir séparés l'un de l'autre par une région de mesure.
FR2699269B1 (fr) *	1992-12-10	1995-01-13	Merlin Gerin	Dispositif de mesure interferrométrique.
DE102011005937B4 (de) *	2011-03-23	2020-10-22	Dr. Johannes Heidenhain Gmbh	Vorrichtung zur interferentiellen Abstandsmessung
DE102013209833B4 (de) *	2013-05-27	2024-09-26	Polytec Gmbh	Vibrometer mit einem optischen Interferometer
EP3415874A1 (de) *	2017-06-14	2018-12-19	IMEC vzw	Sensorvorrichtung, messsystem und verfahren zur erkennung eines externen einflusses
EP3415887B1 (de)	2017-06-14	2020-03-18	IMEC vzw	Kraftmessvorrichtung und kraftmesssystem
CN115039022A (zh) *	2019-12-11	2022-09-09	洛克利光子有限公司	用于外差干涉测量的移频器以及具有此类移频器的用于外差干涉测量的装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6412204A (en) *	1987-07-07	1989-01-17	Topcon Corp	Optical ic interferometer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4609290A (en) *	1983-06-06	1986-09-02	Mcdonnell Douglas Corporation	Passive homodyne demodulator and sensor system
US4522495A (en) *	1983-06-13	1985-06-11	The United States Of America As Represented By The Secretary Of The Navy	Optical sensing devices
SE447601B (sv) *	1985-04-04	1986-11-24	Ericsson Telefon Ab L M	Fiberoptisk interferometer
GB2182223A (en) *	1985-10-23	1987-05-07	Stc Plc	Optical fibre reflectometer
DE3616393C1 (en) *	1986-05-15	1987-07-02	Daimler Benz Ag	Two-frequency laser interferometer
DE3918812A1 (de) *	1988-06-13	1989-12-28	Kerner Anna	Entfernungsmessendes heterodynes interferometer
CH678109A5 (de) *	1988-06-13	1991-07-31	Althis Ag

1989
- 1989-03-21 AT AT65289A patent/AT392537B/de not_active IP Right Cessation
1990
- 1990-03-15 WO PCT/EP1990/000423 patent/WO1990011484A1/de not_active Ceased
- 1990-03-15 EP EP19900904355 patent/EP0422143A1/de not_active Withdrawn
- 1990-03-15 JP JP2504544A patent/JPH03504768A/ja active Pending

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6412204A (en) *	1987-07-07	1989-01-17	Topcon Corp	Optical ic interferometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2015230259A (ja) *	2014-06-05	2015-12-21	日本電信電話株式会社	距離計測装置

Also Published As

Publication number	Publication date
EP0422143A1 (de)	1991-04-17
ATA65289A (de)	1990-09-15
WO1990011484A1 (de)	1990-10-04
AT392537B (de)	1991-04-25

Publication	Publication Date	Title
EP0250306B1 (de)	1992-09-23	Interferometer zur Winkelmessung
US7864336B2 (en)	2011-01-04	Compact Littrow encoder
US7259862B2 (en)	2007-08-21	Low-coherence interferometry optical sensor using a single wedge polarization readout interferometer
US4948254A (en)	1990-08-14	Light wave interference length-measuring apparatus
JP4316691B2 (ja)	2009-08-19	偏位を測定するための装置
US4752133A (en)	1988-06-21	Differential plane mirror interferometer
US4693605A (en)	1987-09-15	Differential plane mirror interferometer
US5164791A (en)	1992-11-17	Minute displacement detector using optical interferometry
EP0244275B1 (de)	1991-11-13	Winkelmessinterferometer
CN100595535C (zh)	2010-03-24	改进的波长检测器
US7355719B2 (en)	2008-04-08	Interferometer for measuring perpendicular translations
US5493395A (en)	1996-02-20	Wavelength variation measuring apparatus
JPH07101166B2 (ja)	1995-11-01	干渉計
CA2122782C (en)	1999-07-27	Apparatus for measuring an ambient physical parameter applied to a highly birefringent sensing fiber and method
JPH0342622B2 (de)	1991-06-27
US5541729A (en)	1996-07-30	Measuring apparatus utilizing diffraction of reflected and transmitted light
JPH11183116A (ja)	1999-07-09	光波干渉測定方法および装置
US6483593B1 (en)	2002-11-19	Hetrodyne interferometer and associated interferometric method
EP0239506A2 (de)	1987-09-30	Interferometer mit Differential Spiegelebene
TWI579525B (zh)	2017-04-21	運動物件之絕對定位距離與偏擺角度同步量測之光學系統與方法
US4345838A (en)	1982-08-24	Apparatus for spectrometer alignment
JPH11108614A (ja)	1999-04-23	光波干渉測定装置
GB2333834A (en)	1999-08-04	Interferometer with deadpath error compensation
US7372577B1 (en)	2008-05-13	Monolithic, spatially-separated, common path interferometer
US5493394A (en)	1996-02-20	Method and apparatus for use in measuring frequency difference between light signals

JPH03504768A - 特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム - Google Patents

Info

Links

Classifications

Landscapes

Applications Claiming Priority (2)

Publications (1)

Family

ID=3496240

Family Applications (1)

Country Status (4)

Cited By (1)

Families Citing this family (12)

Citations (1)

Family Cites Families (7)

Patent Citations (1)

Cited By (1)

Also Published As

Similar Documents