JPH0351354U - - Google Patents
Info
- Publication number
- JPH0351354U JPH0351354U JP11178089U JP11178089U JPH0351354U JP H0351354 U JPH0351354 U JP H0351354U JP 11178089 U JP11178089 U JP 11178089U JP 11178089 U JP11178089 U JP 11178089U JP H0351354 U JPH0351354 U JP H0351354U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample holder
- holder according
- vacuum environment
- elastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005641 tunneling Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Sampling And Sample Adjustment (AREA)
Description
第１図は試料ホルダー概略図、第２図は第１実
施例試料ホルダー要部断面図、第３図は走査型ト
ンネル顕微鏡（ＳＴＭ）ヘツド部概略図、第４図
は第２実施例試料ホルダー要部断面図、第５図は
刃部形状概略図、第６図は第３実施例試料ホルダ
ー要部断面図をそれぞれ示したものである。
１……試料、３……長穴、５……ヒンジ部（弾
性部）、６，６ａ，６ｂ，６ｃ，６ｄ，６ｅ，６
ｆ，６ｇ，６ｈ……刃部。
Figure 1 is a schematic diagram of the sample holder, Figure 2 is a sectional view of the main part of the sample holder of the first embodiment, Figure 3 is a schematic diagram of the scanning tunneling microscope (STM) head, and Figure 4 is the sample holder of the second embodiment. FIG. 5 is a schematic view of the shape of the blade, and FIG. 6 is a cross-sectional view of the main part of the sample holder of the third embodiment. 1... Sample, 3... Long hole, 5... Hinge part (elastic part), 6, 6a, 6b, 6c, 6d, 6e, 6
f, 6g, 6h...Blade section.
Claims (1)
めの機構を備えていることを特徴とする試料ホル
ダー。 (2) 試料を保持する基板に弾性部を介して刃部
を設け、この刃部を弾性部でたわませて試料に押
圧することにより、真空環境内で試料をへき開す
るようにした機構を備えていることを特徴とする
請求項１記載の試料ホルダー。 (3) 基板による試料の保持機構は、試料の前後
端を開放して保持する構造からなり、試料の一端
を押すことにより数度へき開が行えるようにした
ことを特徴とする請求項２記載の試料ホルダー。 (4) 試料を保持する手段として弾性部材を介し
て行うことを特徴とする請求項２記載の試料ホル
ダー。 (5) 真空環境外より操作できる機構により、前
記刃部が弾性部でたわむようにしたことを特徴と
する請求項２記載の試料ホルダー。 (6) 走査型トンネル顕微鏡（ＳＴＭ）装置に設
置されることを特徴とする請求項２記載の試料ホ
ルダー。[Claims for Utility Model Registration] (1) A sample holder characterized by being equipped with a mechanism for cleaving a sample in a vacuum environment. (2) A mechanism in which a blade section is provided through an elastic section on the substrate that holds the sample, and this blade section is bent by the elastic section and pressed against the sample to cleave the sample in a vacuum environment. The sample holder according to claim 1, further comprising: (3) The sample holding mechanism by the substrate has a structure in which the sample is held with its front and rear ends open, and the sample can be cleaved several times by pushing one end of the sample. Specimen holder. (4) The sample holder according to claim 2, wherein the sample is held through an elastic member. (5) The sample holder according to claim 2, characterized in that the blade part is bent by an elastic part by a mechanism that can be operated from outside the vacuum environment. (6) The sample holder according to claim 2, wherein the sample holder is installed in a scanning tunneling microscope (STM) device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11178089U JPH0351354U (en) | 1989-09-25 | 1989-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11178089U JPH0351354U (en) | 1989-09-25 | 1989-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0351354U true JPH0351354U (en) | 1991-05-20 |
Family
ID=31660244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11178089U Pending JPH0351354U (en) | 1989-09-25 | 1989-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0351354U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010094708A (en) * | 2008-10-16 | 2010-04-30 | Amada Co Ltd | Safety protection system for laser machining |
-
1989
- 1989-09-25 JP JP11178089U patent/JPH0351354U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010094708A (en) * | 2008-10-16 | 2010-04-30 | Amada Co Ltd | Safety protection system for laser machining |
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