JPH0352212B2 - - Google Patents
Info
- Publication number
- JPH0352212B2 JPH0352212B2 JP58102488A JP10248883A JPH0352212B2 JP H0352212 B2 JPH0352212 B2 JP H0352212B2 JP 58102488 A JP58102488 A JP 58102488A JP 10248883 A JP10248883 A JP 10248883A JP H0352212 B2 JPH0352212 B2 JP H0352212B2
- Authority
- JP
- Japan
- Prior art keywords
- movement
- signal
- exposed
- value
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58102488A JPS59227121A (ja) | 1983-06-08 | 1983-06-08 | 荷電ビ−ム露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58102488A JPS59227121A (ja) | 1983-06-08 | 1983-06-08 | 荷電ビ−ム露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59227121A JPS59227121A (ja) | 1984-12-20 |
| JPH0352212B2 true JPH0352212B2 (de) | 1991-08-09 |
Family
ID=14328814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58102488A Granted JPS59227121A (ja) | 1983-06-08 | 1983-06-08 | 荷電ビ−ム露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59227121A (de) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55116108A (en) * | 1979-03-02 | 1980-09-06 | Hitachi Ltd | Positioning control system |
| JPS56153737A (en) * | 1980-04-30 | 1981-11-27 | Fujitsu Ltd | Exposing method for electron beam |
| JPS57162334A (en) * | 1981-03-31 | 1982-10-06 | Fujitsu Ltd | Electron beam exposing method |
-
1983
- 1983-06-08 JP JP58102488A patent/JPS59227121A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59227121A (ja) | 1984-12-20 |
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