JPH0352815U - - Google Patents

Info

Publication number
JPH0352815U
JPH0352815U JP11217189U JP11217189U JPH0352815U JP H0352815 U JPH0352815 U JP H0352815U JP 11217189 U JP11217189 U JP 11217189U JP 11217189 U JP11217189 U JP 11217189U JP H0352815 U JPH0352815 U JP H0352815U
Authority
JP
Japan
Prior art keywords
substrate
disk
holding part
groove
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11217189U
Other languages
English (en)
Other versions
JP2510127Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989112171U priority Critical patent/JP2510127Y2/ja
Publication of JPH0352815U publication Critical patent/JPH0352815U/ja
Application granted granted Critical
Publication of JP2510127Y2 publication Critical patent/JP2510127Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Description

【図面の簡単な説明】
第１図ないし第３図、および第５図ないし第７
図はそれぞれ本考案実施例、および従来の保持具
の構造を示すものであり、第１図、第５図は側面
図、第２図、第６図はそれぞれ第１図、第５図の
縦断面図、第３図、第７図はデイスク基板装荷状
態の部分拡大断面図第４図は保持具全体の外形斜
視図である。図において、 １……ホルダ板、２……基板装荷穴、３……溝
、３１……溝底面、３２……溝側面、４……基板
保持部、５……デイスク基板。

Claims (1)

    【実用新案登録請求の範囲】
  1. デイスク基板上に磁気記録層を成形するスパツ
    タ成膜工程で用いる磁気デイスクの成膜用保持具
    であり、直立姿勢のホルダ板に穿孔した基板装荷
    穴の下部内周面に沿つて溝付きの基板保持部を設
    け、該保持部の溝内に１枚ずつデイスク基板を落
    とし込んで垂直姿勢に保持するものにおいて、前
    記保持部の溝底面をデイスク基板の板厚よりも若
    干幅広な平坦面と成したことを特徴とする磁気デ
    イスクの成膜用保持具。
JP1989112171U 1989-09-26 1989-09-26 磁気ディスクの成膜用保持具 Expired - Lifetime JP2510127Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989112171U JP2510127Y2 (ja) 1989-09-26 1989-09-26 磁気ディスクの成膜用保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989112171U JP2510127Y2 (ja) 1989-09-26 1989-09-26 磁気ディスクの成膜用保持具

Publications (2)

Publication Number Publication Date
JPH0352815U true JPH0352815U (ja) 1991-05-22
JP2510127Y2 JP2510127Y2 (ja) 1996-09-11

Family

ID=31660621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989112171U Expired - Lifetime JP2510127Y2 (ja) 1989-09-26 1989-09-26 磁気ディスクの成膜用保持具

Country Status (1)

Country Link
JP (1) JP2510127Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007213730A (ja) * 2006-02-10 2007-08-23 Tdk Corp 基板保持装置及び磁気記録媒体の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63259838A (ja) * 1987-04-17 1988-10-26 Showa Denko Kk 磁性薄膜記録媒体の製造方法および製造装置
JPH0198165U (ja) * 1987-12-18 1989-06-30

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63259838A (ja) * 1987-04-17 1988-10-26 Showa Denko Kk 磁性薄膜記録媒体の製造方法および製造装置
JPH0198165U (ja) * 1987-12-18 1989-06-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007213730A (ja) * 2006-02-10 2007-08-23 Tdk Corp 基板保持装置及び磁気記録媒体の製造方法

Also Published As

Publication number Publication date
JP2510127Y2 (ja) 1996-09-11

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