JPH0353678U

JPH0353678U -

Info

Publication number: JPH0353678U
Application number: JP11512589U
Authority: JP
Priority date: 1989-09-30
Filing date: 1989-09-30
Publication date: 1991-05-23

Description

[Brief explanation of drawings]

第１図乃至第３図は本考案の真空バルブの一実
施例を示す図であり、第１図は斜視図、第２図は
正面図、第３図Ａは第２図のＡ矢視断面図、第３
図Ｂは第２図のＢ矢視断面図である。１……ガイド部材、２……連結板、３……弁体
、４……駆動シリンダ、５……ガイド溝、６……
柱状支持部材、７……ガイドローラ、８……スラ
イド溝、９……駆動ロツド、１０……駆動ローラ
、１１……真空室壁面、１２……開口部。 1 to 3 are views showing one embodiment of the vacuum valve of the present invention, in which FIG. 1 is a perspective view, FIG. 2 is a front view, and FIG. Figure, 3rd
Figure B is a cross-sectional view taken along arrow B in Figure 2. DESCRIPTION OF SYMBOLS 1... Guide member, 2... Connection plate, 3... Valve body, 4... Drive cylinder, 5... Guide groove, 6...
Column support member, 7... Guide roller, 8... Slide groove, 9... Drive rod, 10... Drive roller, 11... Vacuum chamber wall surface, 12... Opening.

Claims

[Claims for Utility Model Registration] A vacuum valve for opening and closing an opening provided in a wall of a vacuum chamber, comprising: a pair of guide members disposed on the outer surface of the opening to face each other across the opening; and a guide. a pair of guide members; guide grooves provided in the same shape at two locations on the upper and lower sides of opposing surfaces of the members, each having a vertical portion extending in the up-down direction and a horizontal portion or an inclined portion extending from the upper end of the vertical portion toward the back side; and a pair of guide members. There are guide rollers inserted into the respective guide grooves of the guide member at the top and bottom on both sides of the guide roller, and as each guide roller moves within the guide groove, it moves up and down and back and forth to the open position. a valve body that moves between a closed position and a closed position; a slide groove provided on both sides of the valve body and extending in the front-rear direction; 1. A vacuum valve comprising: a drive cylinder having a drive roller that engages with a slide groove of a valve body at the tip of a drive rod.