JPH0353847U - - Google Patents
Info
- Publication number
- JPH0353847U JPH0353847U JP11485989U JP11485989U JPH0353847U JP H0353847 U JPH0353847 U JP H0353847U JP 11485989 U JP11485989 U JP 11485989U JP 11485989 U JP11485989 U JP 11485989U JP H0353847 U JPH0353847 U JP H0353847U
- Authority
- JP
- Japan
- Prior art keywords
- appearance
- back side
- checker
- defective
- abnormalities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 2
- 230000005856 abnormality Effects 0.000 claims 2
- 230000002950 deficient Effects 0.000 claims 2
- 239000012780 transparent material Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は、この考案の実施例である表面打点式
裏面外観チエツカの構成図を、また、第２図に従
来使用していたピンセツトの斜視図を示す。
１……光軸合わせ用光源、２ａ，２ｂ，２ｃ…
…反射鏡、３……接眼レンズ、４……打点用マー
カ、５……透明ガラス台、６……ウエール、７…
…裏面外観チヤツカ（光学顕微鏡型）。
FIG. 1 shows a configuration diagram of a front-side dotting type back-side appearance checker which is an embodiment of this invention, and FIG. 2 shows a perspective view of tweezers conventionally used. 1...Light source for optical axis alignment, 2a, 2b, 2c...
...Reflector, 3...Eyepiece, 4...Dot marker, 5...Transparent glass stand, 6...Wale, 7...
...Back side appearance checker (optical microscope type).
Claims (1)
ーハの素子形成面の裏面側の外観異常を観察でき
る裏面外観チエツカと裏面側に外観異常が発見さ
れた不良チツプに表面から不良コークを打点する
マーキング部とを有する表面打点式裏面外観チエ
ツカ。 A backside appearance checker that allows you to observe any appearance abnormalities on the back side of the element forming surface of a wafer supported on a transparent material stand such as transparent glass, and a marking machine that applies defective caulk from the surface to defective chips where appearance abnormalities are found on the back side. A surface dot type back appearance checker with a section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485989U JPH0353847U (en) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485989U JPH0353847U (en) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353847U true JPH0353847U (en) | 1991-05-24 |
Family
ID=31663207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11485989U Pending JPH0353847U (en) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353847U (en) |
-
1989
- 1989-09-29 JP JP11485989U patent/JPH0353847U/ja active Pending
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