JPH0354567A - Film type resist and formation of resist - Google Patents
Film type resist and formation of resistInfo
- Publication number
- JPH0354567A JPH0354567A JP19019489A JP19019489A JPH0354567A JP H0354567 A JPH0354567 A JP H0354567A JP 19019489 A JP19019489 A JP 19019489A JP 19019489 A JP19019489 A JP 19019489A JP H0354567 A JPH0354567 A JP H0354567A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- support
- base
- layer
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Impression-Transfer Materials And Handling Thereof (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
(産業上の利用分野)
本発明は.多層構戒のフィルム型レジストに関する.詳
しくは,ネガ型もしくはボジ型のパターン原稿が不必要
で,かつ洗浄工程が不必要なフィルム型レジストに間す
る.
(従来の技術)
プリント基盤の製造において,エッチング,めっき処理
には,従来フィルム型レジストや液状レジストが用いら
れてきた.
例えば特公昭50−9177号公報に開示されたフィル
ム型レジストを用いる場合は,未露光領域中のレジスト
を現像液で除去する.特公昭60−46414号公報に
は.未露光部分を溶剤で除去するこ4となしに露光可能
な乾式現像性フィルム型レジストが提示されている.こ
の特公昭60−46414号公報技術は,未露光部分を
破断し.剥離によって除去するという技術であるが.フ
ィルム型レジストをロール状にせしめるため,レジスト
層上にカバーシ一トを設けないと.、プロンキングと称
するレジストとフィルムのはりつき,また未露光部分を
破断し剥離をするため,解像性が低下するという欠点を
有していた.
(発明が解決しようとする課題)
特公昭50−9177号公報の技術では,現像液で除去
するという工程を必要とするという問題があり,特公昭
60−46414号公報の技術では,プロッキングと解
像性の問題があった。[Detailed Description of the Invention] [Object of the Invention] (Field of Industrial Application) The present invention... Regarding film-type resists with multilayer structure. Specifically, we will use a film-type resist that does not require a negative or positive pattern original and does not require a cleaning process. (Conventional technology) In the production of printed circuit boards, film resists and liquid resists have traditionally been used for etching and plating. For example, when using the film type resist disclosed in Japanese Patent Publication No. 50-9177, the resist in unexposed areas is removed with a developer. In Japanese Patent Publication No. 60-46414. A dry-developable film-type resist that can be exposed to light without removing the unexposed areas with a solvent has been proposed. This technique disclosed in Japanese Patent Publication No. 60-46414 breaks the unexposed portion. The technique is to remove it by peeling it off. In order to form a film resist into a roll, a cover sheet must be placed on the resist layer. However, this method had the disadvantage of a decrease in resolution due to sticking of the resist and film, called pronking, and breakage and peeling of unexposed areas. (Problems to be Solved by the Invention) The technique disclosed in Japanese Patent Publication No. 50-9177 has the problem of requiring a step of removing with a developer, while the technique disclosed in Japanese Patent Publication No. 60-46414 has the problem of blocking and There was a problem with resolution.
また.いずれの技術もパターン形成用の原稿フィルムが
必要であるという工程上,コスト上の問題があった.
本発明は,上記欠点を解消したフィルム型レジストを提
供することを目的とする.
(課題を解決するための手段)
本発明は,支持体1上にレジスト層を設け,さらに該レ
ジスト上に低融点化合物を主成分とする熱溶融層および
,必要に応じてrM溶融層上に支持体2を設けた,フイ
ルム型レジストである.本発明に用いられる支持体1は
,通常熱転写リボンの支持体に使用されるポリエステル
フィルム.ポリエチレンフィルム,ポリアミドフィルム
,ポリイミドフィルム,コンデンサー紙等のものが望ま
しい。支持体2は,たとえばポリエステルフィルム,ポ
リエチレンフイルム,ボリプロビレンフィルム,コンデ
ンサー紙等のものがあげられる。Also. Both techniques had process and cost problems because they required original film for pattern formation. The object of the present invention is to provide a film-type resist that eliminates the above-mentioned drawbacks. (Means for Solving the Problems) The present invention provides a resist layer on a support 1, and further includes a heat melting layer containing a low melting point compound as a main component on the resist and, if necessary, a rM melting layer on the rM melting layer. This is a film type resist with a support 2. The support 1 used in the present invention is a polyester film commonly used as a support for thermal transfer ribbons. Preferably, polyethylene film, polyamide film, polyimide film, condenser paper, etc. are used. Examples of the support 2 include polyester film, polyethylene film, polypropylene film, and condenser paper.
支持体1上に設けられるレジスト層は,塗布後固化する
ことができるレジストで.たとえば熱硬化樹脂,活性エ
ネールギ一線硬化樹脂等が例示できる。The resist layer provided on the support 1 is a resist that can be solidified after being applied. For example, thermosetting resins, active energy single-line curing resins, etc. can be used.
本発明では,支持体1上にレジスト層および該レジスト
上に低融点化合物を主成分とする熱溶融層を設けるが,
常温では熱溶融層は固体で,支持体2に対する接着力が
小さいか.ほとんどない。このため,プロソキングとい
う問題もほとんどない。In the present invention, a resist layer is provided on the support 1, and a heat-melting layer containing a low melting point compound as a main component is provided on the resist.
Is the thermally fused layer solid at room temperature and has low adhesion to the support 2? rare. For this reason, there is almost no problem with prosoking.
上記の目的を達成する低融点化合物としては,ポリエチ
レンワックス.バラフィンワックス,酸化ワックス,カ
ルナバワックス.キャンデリラワックス,長鎖アルキル
の脂肪族アルコールとアクリル酸もしくメタクリル酸の
エステル.たとえばオレイルアルコール,ミリスチルア
ルコール,ステアリルアルコール,セチルアルコール,
エイコサノール等のアクリル酸エステル,メタクリル酸
エステル等が例示できる.
該低融点化合物は,上記のレジストと混合して用いても
よく.該低融点化合物の割合は,上記のレジスト100
重量部に対して.10〜500重量部が好ましく,より
好ましくは,20〜300重量部がよい.
本発明のフィルム型レジストは.支持体1上にレジスト
層および該レジスト層上に低融点化合物を主威分とする
熱溶融層上に支持体2.あるいは所望の基材を重ね,サ
ーマルプリンターにて支持体l側から加熱し.所望の画
像を描き,該サーマルプリンターの熱で熱溶融層を融解
することにより,レジスト層と混合させ,およびもしく
は,支持体2または所望の基材との接着力を高め,支持
体2あるいは所望の基材とを接着せしめる.その後支持
体1を@離し,所望の画像を支持体2あるいは所望の基
材上に残存せしめ5所望のレジスト画像を得る.なお,
支持体2を用いた場合は.次に得られた所望の画像と,
たとえばプリント基盤と熱圧着し,次いで支持体2を@
離する.支持体2と混合レジスト層との接着力は.混合
されたレジスト層と所望の基材との接着力より低くする
ことが望ましく,必要に応じ加熱することにより接着力
の差を生じさせるようにしてもよい.また,本発明のフ
イルム型レジストの熱付加前においては.支持体lとレ
ジスト層との接着力は,支持体2もしくは所望の基材と
熱溶融層との接着力は小さい.接着力の調整は,不飽和
二重結合を有する化合物もしくはフィルム性付与ポリマ
ーもしくは.粘着性付与物質の量を調整することで可能
となる.粘着性付与物質としては,生ゴム.スチレンー
ブタジエン共重合体.スチレンーブタジエンースチレン
共重合体.エチレンー酢酸ビヒニル共重合体,ボリブタ
ジエンスチレンーイソブレン共重合体.ポリイソブチレ
ン.ポリアクリル酸,ポリビニルブチルエーテル等があ
げられる.該粘着性付与物質の量は,塗料の100重量
部に対し5重量部〜IOO重量部が好ましい,
サーマルプリンターなどによる加熱は,支持体l側から
行うのが望ましい.これは,支持体2や所望の基材への
転写を確実にするためである。但し,場合によっては,
支持体2側から加熱することもできる.なお,所望の基
材に得られたレジストのレジスト性を向上するため,レ
ヅストの種類により活性エネルギー線を照射,あるいは
熱付与を行いレジストを硬化させることもできる。Polyethylene wax is a low-melting compound that achieves the above purpose. Paraffin wax, oxidized wax, carnauba wax. Candelilla wax, an ester of long-chain alkyl fatty alcohol and acrylic or methacrylic acid. For example, oleyl alcohol, myristyl alcohol, stearyl alcohol, cetyl alcohol,
Examples include acrylic esters such as eicosanol, and methacrylic esters. The low melting point compound may be used in combination with the above resist. The proportion of the low melting point compound is the same as that of the above resist 100.
For parts by weight. It is preferably 10 to 500 parts by weight, more preferably 20 to 300 parts by weight. The film type resist of the present invention is. A resist layer is formed on the support 1, and a heat melting layer containing a low melting point compound as a main component is formed on the resist layer, and the support 2 is formed on the resist layer. Alternatively, the desired base materials are stacked and heated from the support L side using a thermal printer. By drawing a desired image and melting the hot-melt layer with the heat of the thermal printer, it is mixed with the resist layer and/or increases the adhesion to the support 2 or a desired base material. and the base material. Thereafter, the support 1 is released and the desired image is left on the support 2 or the desired base material to obtain the desired resist image. In addition,
When using support 2. Next, the desired image obtained and
For example, heat and press the print board and then attach the support 2 @
Let go. The adhesive strength between the support 2 and the mixed resist layer is. It is desirable that the adhesive strength be lower than the adhesive strength between the mixed resist layer and the desired base material, and if necessary, heating may be applied to create a difference in adhesive strength. In addition, before applying heat to the film resist of the present invention. The adhesive strength between the support 1 and the resist layer is low, as is the adhesive strength between the support 2 or the desired base material and the hot melt layer. Adhesive strength can be adjusted using compounds with unsaturated double bonds or polymers that impart film properties. This is possible by adjusting the amount of tackifier. Raw rubber is used as a tackifier. Styrene-butadiene copolymer. Styrene-butadiene-styrene copolymer. Ethylene-vinyl acetate copolymer, polybutadiene-styrene-isobrene copolymer. Polyisobutylene. Examples include polyacrylic acid and polyvinyl butyl ether. The amount of the tackifying substance is preferably 5 parts by weight to 100 parts by weight per 100 parts by weight of the paint.Heating with a thermal printer or the like is preferably performed from the support l side. This is to ensure transfer to the support 2 or a desired base material. However, in some cases,
Heating can also be done from the support 2 side. Note that in order to improve the resist properties of the resist obtained on the desired base material, the resist may be hardened by irradiation with active energy rays or by applying heat, depending on the type of resist.
通常のフィルム型レジストと比較するとプリント基盤上
でのパターン作戒のためのパターン原稿が不必要である
し,かつ硬化後の洗浄工程も不必要である. また.最
近回路パターンはコンピュータの使用により,CRT上
で作或することが多くなってきているが.本発明の利点
としてコンピュータからサーマルプリンターに出力する
ことで省力化が可能となる.
本発明では.支持体1上のレジスト層の厚さは.10〜
100μmの範囲がよく,熱溶融層は0. 1〜10μ
mの範囲が好ましい。本発明のフイルム型レジストは,
支持体1上に通常のリバース方式のコーターを用いて実
現できる.
以下に,実施例で本発明をさらに詳細に説明する.実施
例1
厚さ25μmのポリエステルフィルム(F−1)上に下
記に示すm威の紫外線硬化レジスト(A1)をリバース
方式のコーターで固形分の厚さが30μmとなるように
塗布をし,乾燥後,ステアリルアルコールとメタクリル
酸のエステル50重量部,上記紫外線硬化レジスト(A
−1)49.9重量部及び【−ブチルアントラキノン0
. 1重量部からなる低融点化合物(B−1)の溶剤分
散塗料をリバース方式のコーターで固形分の厚さが2μ
mとなるように塗工し9次いでコロナ放電処理をした厚
さ25μmのポリエステルフィルム(F−2)を貼り合
わせた.得られた多層構戒のフィルム型レジストをA4
の大きさに切断し,ライン型のサーマルプリンターに装
着し任意の回路パターンを印字した。その後, (F
−1)のポリエステルフィルムを剥離したところ,(F
−2)のポリエステルフィルム上に回路パターンが形威
された.プリント基盤と回路パターン面が向合わせにな
るように(F−2)のポリエステルフィルムを重ね,熱
圧着をし,ポリエステルフィルム側から紫外線(IKW
のランプ,30cI1の距離で10秒間)を照射して回
路パターン部分を硬化させた。Compared to normal film-type resists, there is no need for a pattern original to prepare the pattern on the printed substrate, and there is no need for a cleaning process after curing. Also. Recently, due to the use of computers, circuit patterns are increasingly being created on CRTs. An advantage of the present invention is that it can save labor by outputting from a computer to a thermal printer. In the present invention. The thickness of the resist layer on support 1 is . 10~
The range of 100 μm is good, and the thermal melting layer is 0. 1~10μ
A range of m is preferred. The film resist of the present invention is
This can be achieved by using a normal reverse type coater on the support 1. The present invention will be explained in more detail below using Examples. Example 1 On a polyester film (F-1) with a thickness of 25 μm, an ultraviolet curing resist (A1) of m strength shown below was applied using a reverse coater so that the solid content was 30 μm thick, and dried. After that, 50 parts by weight of ester of stearyl alcohol and methacrylic acid, the above ultraviolet curing resist (A
-1) 49.9 parts by weight and [-butylanthraquinone 0
.. A solvent-dispersed paint containing 1 part by weight of a low melting point compound (B-1) was coated with a reverse coater until the solid content was 2μ thick.
A polyester film (F-2) with a thickness of 25 μm, which had been coated to give a thickness of 9 m and then subjected to corona discharge treatment, was bonded to the film. The obtained multi-layered film resist is A4
It was cut to size and attached to a line-type thermal printer to print an arbitrary circuit pattern. After that, (F
-1) When the polyester film was peeled off, (F
-2) A circuit pattern was formed on the polyester film. Layer the polyester film (F-2) so that the printed circuit board and circuit pattern side face each other, heat and press, and apply ultraviolet rays (IKW) from the polyester film side.
The circuit pattern portion was cured by irradiating with a lamp of 30 cI1 for 10 seconds.
その後(F−2)のポリエステルフィルムを剥がし,プ
リント基盤上に回路パターンを形威せしめた。Thereafter, the polyester film (F-2) was peeled off to reveal the circuit pattern on the printed board.
紫外線硬化レジスト(A−1)
メタクリル酸メチル′−イタコン酸共重合体(モル比1
7対1) ・ 25重量部ペンタエ
リスリトール・トリアクリル酸エステル7重量部
ミヒラーズケトン 0. 3重量部ク
リスタルバイオレット 0.06重量部スチレ
ンーブタジエン共重合体 5重量部メチルエチル
ケトン 70重量部トルエン
4 2. 6 4重量部実施例2
実施例lで(B−1)の代わりに,ξリスチルアルコー
ルとアクリル酸のエステル40重量部,紫外線硬化塗料
(A−1)59.9重量部およびミヒラーズケトン0.
1重量部からなる低融点化合物(B−2)の溶剤分散塗
料を用いた以外は実施例1と同様にして,プリント基盤
上に回路パターンが形威されているのを確認した.
実施例3
厚さ25μmのポリエステルフィルム(F−1)上に下
記に示す組戒の熱硬化レジス}(A−2)をリバース方
式のコーターで固形分の厚さが30μmとなるように塗
布し.乾燥後.ステアリン酸とへキサメチレンジアξン
をモル比1対1で反応させた低融点化合物(B−2)の
トルエン溶液をリバース方式のコーターで固形分の厚さ
が2μmとなるように塗工した.得られた多層構戒のフ
ィルム型レジストをA4の大きさに切断し,レジストお
よび熱溶融層が構威されている面をプリント基盤と重ね
,ライン型のサーマルプリンターに装着し任意の回路パ
ターンを印字し. (F−1)のポリエステルフィル
ムを#1離したところ.プリント基盤上に回路パターン
が形威された.
熱硬化レジスト(A−2)
エビコート1001 (シェル化学社製エボキシ樹脂
’) 18.3重量部ジ
シアンジアごド 1.6重量部ジメ
チルアミノメチルフェノール 0. 1重量部メチル
エチルケトン 60重量部トルエン
20重量部比較例1
実施例1で(B−1)の低融点化合物の層を抜いた,ラ
インプリンターで回路パターンを印字したが,(F−1
)のポリエステルフィルムをはくリした所,はくリする
場所は不定で, (F−2)のポリエステル上には回
路パターンは形威されていなかった。Ultraviolet curing resist (A-1) Methyl methacrylate'-itaconic acid copolymer (molar ratio 1
7:1) 25 parts by weight of pentaerythritol triacrylate 7 parts by weight of Michler's ketone 0. 3 parts by weight Crystal violet 0.06 parts by weight Styrene-butadiene copolymer 5 parts by weight Methyl ethyl ketone 70 parts by weight Toluene
4 2. 6 4 parts by weight Example 2 In Example 1, instead of (B-1), 40 parts by weight of ester of ξ listyl alcohol and acrylic acid, 59.9 parts by weight of ultraviolet curing paint (A-1) and 0.6 parts by weight of Michler's ketone were added.
It was confirmed that the circuit pattern was formed on the printed circuit board in the same manner as in Example 1 except that a solvent-dispersed paint containing 1 part by weight of the low melting point compound (B-2) was used. Example 3 On a polyester film (F-1) with a thickness of 25 μm, a thermosetting resist of the composition shown below (A-2) was coated with a reverse coater so that the solid content was 30 μm thick. .. After drying. A toluene solution of a low melting point compound (B-2) made by reacting stearic acid and hexamethylene diane at a molar ratio of 1:1 was applied using a reverse coater so that the solid content was 2 μm thick. .. The resulting multi-layered film-type resist is cut into A4 size pieces, the side with the resist and heat-melting layer is stacked on the printed circuit board, and placed in a line-type thermal printer to print any circuit pattern. Print it. (F-1) Polyester film separated by #1. The circuit pattern was imprinted on the printed circuit board. Thermosetting resist (A-2) Ebicoat 1001 (epoxy resin manufactured by Shell Chemical Co., Ltd.) 18.3 parts by weight Dicyandiago 1.6 parts by weight Dimethylaminomethylphenol 0. 1 part by weight methyl ethyl ketone 60 parts by weight toluene
20 parts by weight Comparative Example 1 A circuit pattern was printed using a line printer in which the layer of the low melting point compound (B-1) was removed in Example 1, but (F-1)
) The polyester film of (F-2) was peeled off at an unspecified location, and no circuit pattern was visible on the polyester of (F-2).
比較例2
実施例1で(F−2)のコロナ放電処理をしたポリエス
テルフィルムの代わりに(F−1)のポリエステルフィ
ルムと同じポリエステルフィルム(F−3)を用いて,
実施例1と同様にした.ラインプリンターで回路パター
ンを印字したが(F−1)のポリエステルフィルムをは
くリした所,全く転写せず(F−3)のポリエステルフ
ィルム上には回路パターンは形威されなかった。Comparative Example 2 Using the same polyester film (F-3) as the polyester film (F-1) in place of the corona discharge treated polyester film (F-2) in Example 1,
The same procedure as in Example 1 was carried out. A circuit pattern was printed using a line printer, but when the polyester film (F-1) was peeled off, no circuit pattern was visible on the polyester film (F-3), which was not transferred at all.
Claims (3)
点化合物を主成分とする熱溶融層,さらに必要に応じて
該熱溶融層上に支持体2を設けたことを特徴とするフィ
ルム型レジスト。1. 1. A film type resist comprising a resist layer on a support 1, a heat melting layer containing a low melting point compound as a main component on the resist, and a support 2 on the heat melting layer if necessary.
点化合物を主成分とする熱溶融層と支持体2を積層し,
画像に応じて支持体1側より熱(加熱)付加し支持体1
を剥離し,支持体2上に所望の画像を得,次に支持体2
の画像と所望の基材を重ね,熱(加熱)付加し,レジス
ト層および熱溶融層からなる画像を所望の基材に転写す
ることを特徴とするレジスト形成方法2. A resist layer is laminated on a support 1, and a heat melting layer containing a low melting point compound as a main component and a support 2 are laminated on the resist,
Depending on the image, heat is applied from the support 1 side to support 1.
is peeled off to obtain the desired image on the support 2, and then the support 2 is peeled off.
A resist forming method characterized by overlapping an image of the above image with a desired base material, applying heat (heating), and transferring an image consisting of a resist layer and a heat-fused layer to a desired base material.
点化合物を主成分とする熱溶融層と支持体2を積層し,
画像に応じて支持体1側より熱(加熱)付加し,支持体
1を剥離することにより,レジスト層および熱溶融層か
らなる画像を,所望の基材に転写することを特徴とする
レジスト形成方法3. A resist layer is laminated on a support 1, and a heat melting layer containing a low melting point compound as a main component and a support 2 are laminated on the resist,
Resist formation characterized by transferring an image consisting of a resist layer and a heat-melting layer to a desired base material by applying heat (heating) from the support 1 side according to the image and peeling off the support 1. Method
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190194A JP2656115B2 (en) | 1989-07-21 | 1989-07-21 | Film type resist and resist forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190194A JP2656115B2 (en) | 1989-07-21 | 1989-07-21 | Film type resist and resist forming method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0354567A true JPH0354567A (en) | 1991-03-08 |
| JP2656115B2 JP2656115B2 (en) | 1997-09-24 |
Family
ID=16254015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1190194A Expired - Fee Related JP2656115B2 (en) | 1989-07-21 | 1989-07-21 | Film type resist and resist forming method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2656115B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03114419A (en) * | 1990-08-30 | 1991-05-15 | Iseki Foods Eng Co Ltd | Apparatus for treatment of cereals |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60133789A (en) * | 1983-12-21 | 1985-07-16 | 株式会社精工舎 | Circuit board and method of producing same |
| JPS61144092A (en) * | 1984-12-18 | 1986-07-01 | ダイセル化学工業株式会社 | Circuit formation for printed wiring board by heat transfer |
| JPS6338286A (en) * | 1986-08-04 | 1988-02-18 | 松下電器産業株式会社 | Manufacturing system of printed board |
| JPS6338283A (en) * | 1986-08-04 | 1988-02-18 | 松下電器産業株式会社 | Printed circuit board manufacturing equipment |
| JPS6338284A (en) * | 1986-08-04 | 1988-02-18 | 松下電器産業株式会社 | Printed circuit board manufacturing equipment |
-
1989
- 1989-07-21 JP JP1190194A patent/JP2656115B2/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60133789A (en) * | 1983-12-21 | 1985-07-16 | 株式会社精工舎 | Circuit board and method of producing same |
| JPS61144092A (en) * | 1984-12-18 | 1986-07-01 | ダイセル化学工業株式会社 | Circuit formation for printed wiring board by heat transfer |
| JPS6338286A (en) * | 1986-08-04 | 1988-02-18 | 松下電器産業株式会社 | Manufacturing system of printed board |
| JPS6338283A (en) * | 1986-08-04 | 1988-02-18 | 松下電器産業株式会社 | Printed circuit board manufacturing equipment |
| JPS6338284A (en) * | 1986-08-04 | 1988-02-18 | 松下電器産業株式会社 | Printed circuit board manufacturing equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03114419A (en) * | 1990-08-30 | 1991-05-15 | Iseki Foods Eng Co Ltd | Apparatus for treatment of cereals |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2656115B2 (en) | 1997-09-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |