JPH0354834Y2 - - Google Patents
Info
- Publication number
- JPH0354834Y2 JPH0354834Y2 JP18669985U JP18669985U JPH0354834Y2 JP H0354834 Y2 JPH0354834 Y2 JP H0354834Y2 JP 18669985 U JP18669985 U JP 18669985U JP 18669985 U JP18669985 U JP 18669985U JP H0354834 Y2 JPH0354834 Y2 JP H0354834Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- plane
- axis
- spindle
- support member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003754 machining Methods 0.000 claims description 21
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 description 13
- 238000005520 cutting process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 230000001186 cumulative effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は、例えばトランスフアー機械のステー
シヨンに設けられる数値制御可能な加工装置、特
にスピンドルの工具と被加工物との間で、高精度
を以て相対的な位置決めを可能ならしめるための
位置検出手段に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is a numerically controllable processing device installed in the station of a transfer machine, for example, which can be used with high precision between a spindle tool and a workpiece. The present invention relates to position detection means for enabling relative positioning.
本考案の加工装置に於ては1本の接触子により
3次元の位置検出を高精度に行なうため、上記接
触子の中間側部に第1の磁電変換素子、その先端
に第2、第3の磁電変換素子が夫々設けられてい
る。第1の磁電変換素子に対向してスピンドルホ
ルダーにはXY平面内に磁極の境界を有する第1
の磁石が配置され、被加工物の支持部材には第2
及び第3の磁電変換素子に対向して、YZ平面及
びZX平面内に磁極の境界を有する第2の磁石が
配設されており、第1の磁電変換素子により加工
送り中にZ方向の原位置の検出が行なわれ、また
第2、第3の磁電変換素子によつてX,Y方向の
位置検出が行なわれる。
In the processing device of the present invention, in order to perform three-dimensional position detection with high precision using one contact, a first magnetoelectric transducer is placed on the middle side of the contact, and second and third magnetoelectric transducers are placed on the tip of the first magnetoelectric transducer. magnetoelectric conversion elements are provided respectively. Opposed to the first magnetoelectric transducer, the spindle holder has a first magnet having a magnetic pole boundary in the XY plane.
A second magnet is arranged on the support member of the workpiece.
A second magnet having magnetic pole boundaries in the YZ plane and the ZX plane is disposed opposite to the third magnetoelectric conversion element, and the first magnetoelectric conversion element controls the original direction in the Z direction during machining and feeding. The position is detected, and the position in the X and Y directions is also detected by the second and third magnetoelectric conversion elements.
トランスフアー機械では、被加工物がジグまた
はパレツトに位置決め状態で支持され、それらに
よつて各ステーシヨンごとに位置決め状態で固定
される。そしてこの各ステーシヨンで加工ユニツ
トによつて必要な切削加工が施される。
In transfer machines, the workpieces are supported in position on jigs or pallets and are fixed in position by them at each station. Then, at each station, necessary cutting is performed by a processing unit.
近時、この種の加工ユニツトとして数値制御装
置を備えたものが用いられるようになり、被加工
物に対する工具の位置を自動的に割り出し、その
位置で必要な送り量(加工深さ)のもとに切削加
工を施すようにしている。 Recently, this type of machining unit has come to be equipped with a numerical control device, which automatically determines the position of the tool relative to the workpiece and determines the necessary feed amount (machining depth) at that position. The cutting process is applied to the parts.
ところで加工中に、加工ユニツト側の送りね
じ、スピンドル或いはコラムやベースなどが熱的
に変形し、またトランスフアー機械側のジグ自体
の寸法のばらつきやジグに対する被加工物の位置
決めのばらつき、更に部品相互の加工精度の累積
誤差などによつて、被加工物と加工ユニツトとの
間に相対的な位置決め誤差が生じている。 By the way, during machining, the feed screw, spindle, column, base, etc. on the machining unit side are thermally deformed, and there are also variations in the dimensions of the jig itself on the transfer machine side, variations in the positioning of the workpiece relative to the jig, and even parts. A relative positioning error occurs between the workpiece and the processing unit due to cumulative errors in mutual processing accuracy.
従つて加工ユニツトがあらかじめ設定された数
値制御プログラム通りに位置決めや送り量を高精
度で制御したとしても、上記のような熱的変形や
各部分の寸法的なばらつきによつて被加工物に加
工誤差が現れることになる。 Therefore, even if the processing unit controls the positioning and feed amount with high accuracy according to a preset numerical control program, the processing of the workpiece may be affected due to the thermal deformation and dimensional variations of each part as described above. An error will appear.
そこで、本件実用新案登録出願人は実願昭59−
99669号の考案により、被加工物から一定の距離
の部分でスピンドル側のセンサーによつて、被加
工物とスピンドル側の工具との間で、相対的な位
置を割り出した後に、数値制御によつて加工深さ
を規制する技術を既に提案している。
Therefore, the applicant for utility model registration filed the utility model application in 1983.
With the invention of No. 99669, the relative position between the workpiece and the tool on the spindle is determined by a sensor on the spindle at a certain distance from the workpiece, and then the relative position is determined by numerical control. We have already proposed a technology to regulate the machining depth.
上記の考案によつて高い精度の加工が実現した
ものの、スピンドルの送り方向の位置を設定する
とき、すなわちセンサーによる基準位置の検出動
作時にスピンドルを回転位置割り出しする手段が
必要であると共に一時的に送り停止の状態になる
ためロスタイムが発生し、加工能率上の問題が残
つていた。 Although high-precision machining has been achieved with the above invention, when setting the position of the spindle in the feed direction, that is, when the sensor detects the reference position, a means to determine the rotational position of the spindle is required, and a temporary Loss time occurred because the feed stopped, and problems with machining efficiency remained.
このため本件出願人は更に実願昭60−61111号
の考案に於て、スピンドルの送り過程で、回転1
を設定機能を必要とせず、かつ送り運動から基準
位置の割り出し、さらに続く切削運動を連続的に
能率良く実行できる加工装置を提案した。 Therefore, in the invention of Utility Application No. 60-61111, the applicant further proposed that in the process of feeding the spindle,
We have proposed a processing device that does not require a setting function and can determine the reference position from the feed motion and perform the subsequent cutting motion continuously and efficiently.
しかしこの装置では一方向(Z方向)の位置し
が検出補正することができない問題があり、また
その位置検出用磁石の設置位置が限定されてい
た。 However, this device has the problem that the position in one direction (Z direction) cannot be detected and corrected, and the installation position of the position detection magnet is limited.
本考案の目的はかかる従来技術の問題点を改良
して、1本の接触子により3次元の位置検出を高
精度に行なうと共に加工送り中にZ方向の原位置
を検出補正することを可能にして検出時間を短縮
し、更には零にした高精度加工装置を提供するに
ある。 The purpose of the present invention is to improve the problems of the prior art, and to make it possible to perform three-dimensional position detection with high accuracy using a single contactor, and to detect and correct the original position in the Z direction during processing feed. The object of the present invention is to provide a high-precision machining device in which the detection time is shortened to zero.
〔問題点を解決するための手段〕
本考案は上記目的を達成するため、X軸、Y
軸、Z軸の3次元の軸方向に数値制御可能な加工
ユニツトに設けられ、進退手段によつて進退され
る接触子と、上記接触子の進出時に該接触子の位
置を決める基準面を備えた被加工物の支持部材
と、上記接触子に設けられ、それぞれZ軸、X
軸、Y軸方向の位置検出を行う第1、第2、第3
の磁電変換素子と、上記加工ユニツトのスピンド
ル側に固定され、XY平面内に磁極の境界を有す
る第1の磁石と、上記支持部材に設けられ、YZ
平面及びZX平面内に磁極の境界を有する第2の
磁石とを備え、上記接触子の上記基準面による位
置決め状態で、上記第2の磁石のYZ平面内の磁
極の境界に上記第2の磁電変換素子を対向させ、
上記第2の磁石のZX平面内の磁極の境界に上記
第3の磁電変換素子を対向させると共に、上記第
1の磁石の加工動作での移動域と対向する位置に
上記第1の磁電変換素子を配置している。[Means for solving the problem] In order to achieve the above purpose, the present invention
The processing unit is provided in a processing unit that can be numerically controlled in the three-dimensional axial directions of the axis and the Z-axis, and includes a contact that is advanced and retreated by an advancing and retracting means, and a reference surface that determines the position of the contact when the contact advances. The support member for the workpiece and the contactor are provided on the Z-axis and X-axis, respectively.
1st, 2nd, and 3rd for position detection in the axis and Y-axis directions
a first magnet fixed to the spindle side of the processing unit and having a magnetic pole boundary in the XY plane;
a second magnet having a magnetic pole boundary in the YZ plane of the second magnet, and a second magnet having a magnetic pole boundary in the YZ plane of the second magnet when the contact is positioned by the reference plane. With the conversion elements facing each other,
The third magnetoelectric transducer is placed to face the boundary of the magnetic poles of the second magnet in the ZX plane, and the first magnetoelectric transducer is placed at a position facing the movement range of the first magnet in the machining operation. are placed.
上記構成の加工装置に於て、スピンドルが復帰
位置に戻つている状態で、接触子の先端が前記支
持部材の基準面に当接すると、第2、第3の磁電
変換素子は第2の磁石の磁極パターンと近接対向
して、X,Y方向の位置検出が行なわれる。これ
と並行してスピンドルを含む加工ユニツトを進出
させるが、この時、上記検出の結果、X,Y方向
の位置がずれていれば、数値制御装置は第2、第
3の磁電変換素子からの出力信号を受けて数値制
御プログラムをそのずれ量だけ補正し、X,Y軸
のサーボモータが駆動制御される。
In the processing device configured as described above, when the tip of the contact comes into contact with the reference surface of the support member while the spindle has returned to the return position, the second and third magnetoelectric transducers are connected to the second magnet. Position detection in the X and Y directions is performed in close opposition to the magnetic pole pattern. In parallel with this, the processing unit including the spindle is advanced. At this time, if the position in the X and Y directions is shifted as a result of the above detection, the numerical control device Upon receiving the output signal, the numerical control program is corrected by the amount of deviation, and the servo motors for the X and Y axes are driven and controlled.
上記加工ユニツトの進出途中で前記第1の磁石
が第1の磁電変換素子と対向すると、該素子によ
り上記磁石の磁極境界が検出され、数値制御装置
は第1の磁電変換素子からの出力信号を受けて前
記プログラムをスタートして切削加工のためのス
ピンドルの送り運動を行なう。 When the first magnet faces the first magneto-electric transducer while the processing unit is advancing, the element detects the magnetic pole boundary of the magnet, and the numerical control device receives the output signal from the first magneto-electric transducer. Then, the program is started and the spindle is fed for cutting.
以下図面に示す実施例を参照して本考案を説明
すると、第1図及び第2図は本考案による高精度
加工装置1の一実施例の主要部を示す。この高精
度加工装置1は数値制御装置2によつてX,Y,
Zの3次元の軸方向に制御される加工ユニツト3
を備えている。この加工ユニツト3はシリンダー
4によつて進退されるZ軸方向の接触子5、この
接触子5の先端部分近傍にX,Y方向センサーと
しての第2及び第3の磁電変換素子6,7(例え
ば磁気アナログセンサー)を有し、また接触子5
の中間側部にZ方向センサーとしての第1の磁電
変換素子8を設けてある。
The present invention will be described below with reference to an embodiment shown in the drawings. FIGS. 1 and 2 show the main parts of an embodiment of a high-precision processing apparatus 1 according to the present invention. This high-precision machining device 1 uses a numerical control device 2 to control X, Y,
Processing unit 3 controlled in the three-dimensional axis direction of Z
It is equipped with This processing unit 3 includes a contactor 5 in the Z-axis direction that is moved forward and backward by a cylinder 4, and second and third magnetoelectric conversion elements 6, 7 ( e.g. magnetic analog sensor), and also has a contact 5
A first magnetoelectric transducer 8 as a Z-direction sensor is provided at the middle side.
Z方向のスピンドル9はスピンドルホルダー1
0によつて接触子5と平行に支持されており、ス
ピンドルホルダー10に固定した環状のベアリン
グ押え11の1箇所には棒状磁石12(第1の磁
石)が固定され、この磁石はXY平面内に磁極の
境界を有するように設けられている。即ち、スピ
ンドルの軸方向にN,S磁極が配してある。 The spindle 9 in the Z direction is the spindle holder 1
A bar-shaped magnet 12 (first magnet) is fixed at one location of an annular bearing holder 11 fixed to a spindle holder 10, and this magnet is It is provided so that the boundary of the magnetic pole is located at the boundary of the magnetic pole. That is, N and S magnetic poles are arranged in the axial direction of the spindle.
一方、被加工物13はトランスフアー装置14
によつてパレツトなどの支持部材15と共に加工
ユニツト3の正面側、つまり加工シテーシヨンに
順次案内されてくる。この実施例では支持部材1
5の側面で被加工物13が支持されており、スピ
ンドル9の先端に取り付けられた刃具16によつ
て所定の加工が行なわれるようになつている。 On the other hand, the workpiece 13 is transferred to the transfer device 14
They are sequentially guided along with supporting members 15 such as pallets to the front side of the processing unit 3, that is, to the processing station. In this embodiment, the support member 1
A workpiece 13 is supported on the side surface of the spindle 9, and a cutter 16 attached to the tip of the spindle 9 performs a predetermined process.
更に支持部材15の上側面には、接触子5の先
端が当設する基準面17及び前記X,Y方向セン
サーと対向配置されたX,Y磁石18(第2の磁
石)がYZ平面及びZX平面内に磁極の境界を有す
るように設けられている。 Further, on the upper surface of the support member 15, there is a reference surface 17 on which the tip of the contactor 5 is placed, and an X, Y magnet 18 (second magnet) disposed facing the X, Y direction sensor. It is provided so that the boundaries of the magnetic poles are in a plane.
X,Y磁石18は、例えば第3図に示すよう
に、N,S極の境界が水平、垂直なマグネツトパ
ターンを有しており、その中心部に前記基準面1
7が配置されており、支持部材がX,Y方向の基
準位置に正しくセツトされている場合には、X,
Y方向の上記N,S極の境界に前記X,Y方向セ
ンサー6,7が対向するようになつていて、数値
制御装置2の加工プログラムは上記N,S極の境
界を原点として組込んである。 For example, as shown in FIG. 3, the X, Y magnet 18 has a magnet pattern in which the boundaries between the N and S poles are horizontal and vertical, and the reference plane 1 is located in the center of the magnet pattern.
7 is placed and the support member is correctly set at the reference position in the X and Y directions,
The X and Y direction sensors 6 and 7 are arranged to face the boundary between the N and S poles in the Y direction, and the machining program of the numerical control device 2 incorporates the boundary between the N and S poles as the origin. be.
以上のような構成の高精度加工装置1におい
て、加工ユニツト3の加工動作は数値制御装置2
のNC加工プログラムに従つて実行される。ま
ず、最初に、スピンドル9が復帰位置に戻つてい
る状態でシリンダー4が動作し、接触子5を前進
させることによつて、その先端が基準面17に当
接される。これによつてX,Y方向センサー6,
7はX,Y磁石18の前記N,S極の境界に近接
対向することになるが、各種変位、累積誤差のた
め若干上記境界からずれている場合には、上記セ
ンサーから境界からのずれ量に応じたアナログ出
力が発生され、数値制御装置2に送られる。具体
的にはずれ量に応じたアナログ出力をデジタル変
換した数値制御装置に送り、数値制御装置には予
めずれ量とデイジタル値の関係が記憶されている
ので、ずれ量だけプログラムが自動で補正され
る。 In the high-precision machining device 1 configured as described above, the machining operation of the machining unit 3 is controlled by the numerical control device 2.
It is executed according to the NC machining program. First, with the spindle 9 returning to the return position, the cylinder 4 is operated and the contact 5 is advanced so that its tip abuts against the reference surface 17. As a result, the X and Y direction sensors 6,
7 will be closely opposed to the boundary between the N and S poles of the X and Y magnets 18, but if it deviates slightly from the boundary due to various displacements and cumulative errors, the sensor will detect the amount of deviation from the boundary. An analog output corresponding to the value is generated and sent to the numerical control device 2. Specifically, the analog output corresponding to the amount of deviation is sent to a digitally converted numerical control device, and since the relationship between the amount of deviation and the digital value is stored in advance in the numerical control device, the program is automatically corrected by the amount of deviation. .
これと並行して加工ユニツト3はスピンドル9
を回転させながら、送り運動によつて前進し、刃
具16を被加工物13に接近させる。 In parallel with this, processing unit 3 spindle 9
While rotating, the cutting tool 16 moves forward by a feeding motion to bring the cutting tool 16 closer to the workpiece 13.
この前進過程、即ち加工動作中の移動域で、接
触子5が基準面17に当接し停止しているZ方向
センサー8が第1の磁石12と対向するようにな
り、その磁極境界を検出し、その検出信号を数値
制御装置2に送る。 In this forward movement process, that is, in the moving range during the machining operation, the Z direction sensor 8, which is stopped when the contact 5 comes into contact with the reference surface 17, comes to face the first magnet 12 and detects its magnetic pole boundary. , sends the detection signal to the numerical control device 2.
数値制御装置2は前記X,Y方向のずれ量だけ
前記プログラムを補正し、図示していないX,Y
軸のサーボモータが駆動制御されると共に前記Z
方向センサーからの検出信号に応答してプログラ
ムスタート(所定加工の原点として)させ、加工
ユニツト3をあらかじめ設定されている所定の送
り量だけ前進させることによつて刃具16により
被加工物13に所定深さの切削加工を施す。 The numerical control device 2 corrects the program by the amount of deviation in the X and Y directions, and
The servo motor of the axis is driven and controlled, and the Z
In response to the detection signal from the direction sensor, the program is started (as the origin of the predetermined machining), and the machining unit 3 is advanced by a predetermined feed amount, thereby causing the cutter 16 to move the workpiece 13 in a predetermined direction. Perform depth cutting.
なおZ方向の検出方式としては環状磁石を使用
した実願昭60−61111号の方式を採用しても良い。 Note that as a detection method in the Z direction, the method disclosed in Utility Model Application No. 60-61111, which uses an annular magnet, may be adopted.
またX,Y方向の検出方式としても、上記実施
例の如くX,Y方向の検出値よりずれ量を検出す
る方式だけでなく、X,Y方向センサーが完全に
第2の磁石の境界と対向するようにX,Y軸のサ
ーボモータを駆動して上記検出値に応じてX,Y
位置の補正を行なう方式を採用することもでき
る。 Furthermore, as a detection method in the X and Y directions, there is not only a method of detecting the amount of deviation from the detected values in the X and Y directions as in the above embodiment, but also a method in which the X and Y direction sensors are completely opposed to the boundary of the second magnet. The servo motors for the X and Y axes are driven so that the
It is also possible to adopt a method of correcting the position.
以上説明した所から明らかなように本考案によ
れば3次元に治具位置を検出補正できるのであら
ゆる加工に高精度で対応可能であり、しかも1本
の接触子を使用するだけであるから構成が簡単で
ある。また検出のための時間(加工に於けるロス
タイム)が非常に短く、効率の良い加工が行なえ
るばかりでなく、スピンドルの回転角度の割り出
し手段が不要である等実用上の効果顕著である。
そして本考案はトランスフアー機械に限らず一般
の数値制御加工装置に用いても同効である。
As is clear from the above explanation, according to the present invention, the jig position can be detected and corrected in three dimensions, making it possible to handle all kinds of machining with high precision.Furthermore, it is constructed using only one contactor. is easy. In addition, the detection time (loss time in machining) is very short, which not only allows efficient machining, but also has significant practical effects, such as eliminating the need for means for determining the rotation angle of the spindle.
The present invention is equally effective when used not only in transfer machines but also in general numerically controlled processing equipment.
第1図は本考案の一実施例の概略を示す側面
図、第2図はその要部拡大図、第3図は上記実施
例に於けるX,Y磁石のマグネツトパターンを例
示する図である。
1……高精度加工装置、2……数値制御装置、
3……加工ユニツト、4……シリンダー、5……
接触子、6,7,8……磁電変換素子、9……ス
ピンドル、10……スピンドルホルダー、12…
…第1の磁石、13……被加工物、15……支持
部材、16……刃具、。17……基準面、18…
…第2の磁石。
Fig. 1 is a side view showing an outline of an embodiment of the present invention, Fig. 2 is an enlarged view of its main parts, and Fig. 3 is a diagram illustrating the magnet pattern of the X and Y magnets in the above embodiment. be. 1... High precision processing equipment, 2... Numerical control device,
3... Processing unit, 4... Cylinder, 5...
Contactor, 6, 7, 8... Magnetoelectric conversion element, 9... Spindle, 10... Spindle holder, 12...
...first magnet, 13...workpiece, 15...support member, 16...cutting tool. 17...Reference surface, 18...
...Second magnet.
Claims (1)
可能な加工ユニツトに設けられ、進退手段によつ
て進退される接触子と、上記接触子の進出時に該
接触子の位置を決める基準面を備えた被加工物の
支持部材と、上記接触子に設けられ、それぞれZ
軸、X軸、Y軸方向の位置検出を行う第1、第
2、第3の磁電変換素子と、上記加工ユニツトの
スピンドル側に固定され、XY平面内に磁極の境
界を有する第1の磁石と、上記支持部材に設けら
れ、YZ平面及びZX平面内に磁極の境界を有する
第2の磁石とを備え、 上記接触子の上記基準面による位置決め状態
で、上記第2の磁石のYZ平面内の磁極の境界に
上記第2の磁電変換素子を対向させ、上記第2の
磁石のZX平面内の磁極の境界に上記第3の磁電
変換素子を対向させると共に、上記第1の磁石の
加工動作での移動域と対向する位置に上記第1の
磁電変換素子を配置したことを特徴とする高精度
加工装置。[Claims for Utility Model Registration] A contactor that is provided in a processing unit that can be numerically controlled in the three-dimensional axial directions of the X-axis, Y-axis, and Z-axis, and that is moved forward and backward by an advancing and retracting means, and the advancement of the contactor. a support member for the workpiece having a reference surface for determining the position of the contact; and a support member provided on the contact, each having a Z
first, second, and third magnetoelectric transducers that detect positions in the axial, X-axis, and Y-axis directions, and a first magnet fixed to the spindle side of the processing unit and having a magnetic pole boundary in the and a second magnet that is provided on the support member and has magnetic pole boundaries within the YZ plane and the ZX plane, and when the contactor is positioned according to the reference plane, the second magnet is located within the YZ plane. The second magnetoelectric conversion element is opposed to the boundaries of the magnetic poles of the second magnet, and the third magnetoelectric conversion element is opposed to the boundaries of the magnetic poles in the ZX plane of the second magnet, and the processing operation of the first magnet is performed. A high-precision machining device, characterized in that the first magnetoelectric transducer is disposed at a position facing the movement range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18669985U JPH0354834Y2 (en) | 1985-12-05 | 1985-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18669985U JPH0354834Y2 (en) | 1985-12-05 | 1985-12-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6295850U JPS6295850U (en) | 1987-06-18 |
| JPH0354834Y2 true JPH0354834Y2 (en) | 1991-12-04 |
Family
ID=31136496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18669985U Expired JPH0354834Y2 (en) | 1985-12-05 | 1985-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354834Y2 (en) |
-
1985
- 1985-12-05 JP JP18669985U patent/JPH0354834Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6295850U (en) | 1987-06-18 |
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