JPH03568B2 - - Google Patents
Info
- Publication number
- JPH03568B2 JPH03568B2 JP2446282A JP2446282A JPH03568B2 JP H03568 B2 JPH03568 B2 JP H03568B2 JP 2446282 A JP2446282 A JP 2446282A JP 2446282 A JP2446282 A JP 2446282A JP H03568 B2 JPH03568 B2 JP H03568B2
- Authority
- JP
- Japan
- Prior art keywords
- focal length
- pinhole
- microlens
- reference circle
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0228—Testing optical properties by measuring refractive power
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、短焦点マイクロレンズ（例えば焦点
距離は２mm、レンズ径２mmφ）の焦点距離測定方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for measuring the focal length of a short-focus microlens (for example, focal length is 2 mm, lens diameter is 2 mmφ).
焦点距離は光学常数のうちの基本的数値である
ので、その測定法は古くからいろいろと考えられ
ている。大きく分けると、
(a) 直接測定法
焦点距離の定義に従い、レンズ系に平行光束
を入射させ焦点と主点の位置を直接測定し、そ
れらの間隔として焦点距離を求める方法。
Since focal length is a fundamental numerical value among optical constants, various methods of measuring it have been considered for a long time. Broadly speaking, they can be divided into: (a) Direct measurement method A method in which, according to the definition of focal length, a parallel beam of light is incident on the lens system, the positions of the focal point and principal point are directly measured, and the focal length is determined as the distance between them.
(b) 結像関係式を利用する方法
一般の結像関係式には焦点距離がレンズの基
本常数として含まれている場合が多いので、物
体および像の位置や大きさを測定し、これらの
結像関係式を利用して間接的に焦点距離を求め
る方法がある。(b) Method of using the imaging relational equation Since the general imaging relational equation often includes the focal length as a fundamental constant of the lens, it is necessary to measure the position and size of the object and image, and calculate these values. There is a method of indirectly determining the focal length using the imaging relational expression.
(a)の方法のように平行光（束）を用いる場合、
精密なコリメータが必要であり、平行光（束）の
入射角を利用する場合、正確な角度測定装置が必
要で、要するに装置の精密性が要求される。
When using parallel light (bundle) as in method (a),
A precise collimator is required, and when using the incident angle of parallel light (bundle), an accurate angle measuring device is required, and in short, the precision of the device is required.
また、(b)の結像関係式を利用する場合、像が小
さいためマイクロ測定が必要であるので、短焦点
マイクロレンズの焦点距離測定に使用することは
困難である。 Furthermore, when using the imaging relational expression (b), micro-measurement is required because the image is small, so it is difficult to use it for measuring the focal length of a short-focus microlens.
本発明は、被検マイクロレンズの一方の面側に
配した基準円を他方の面側に配したピンホールに
一致させるように結像させて、基準円の面とピン
ホールの面間の距離を測定することにより、マイ
クロレンズの焦点距離を測定するようにしたこと
を特徴とする。
The present invention focuses on a reference circle placed on one surface of a microlens to be tested so as to match a pinhole placed on the other surface, and the distance between the surface of the reference circle and the surface of the pinhole is The present invention is characterized in that the focal length of the microlens is measured by measuring .
被検マイクロレンズの焦点距離ｆに比べて、基
準円の像とマイクロレンズによつてピンホールに
一致するように結像された像との距離ｌが十分大
きいときは、基準円の直径Ｄ、ピンホールの直径
ｄとするとｆ＝ｄ／Ｄ＋ｄｌの式が成り立ち、Ｄ、
ｄを一定とするとｌを測定するだけでマイクロレ
ンズの焦点距離を簡易に測定することができる。
When the distance l between the image of the reference circle and the image formed by the microlens to match the pinhole is sufficiently large compared to the focal length f of the microlens to be tested, the diameter D of the reference circle is If the diameter of the pinhole is d, then the formula f=d/D+dl holds true, and if D and d are constant, the focal length of the microlens can be easily measured by simply measuring l.
本発明を第１図に示す実施例で説明する。焦点
距離を測定しようとする被検マイクロレンズ１の
一方の両側に、直径Ｄの基準円３を有するテスト
チヤート２を距離ａをおいて配置し、被検マイク
ロレンズ１の他方の両側に、直径ｄのピンホール
を有するプレート５を距離ｂをおいて配置する。
プレート５は、基準円３がマイクロレンズ１によ
り結像される位置に調整して固定される。プレー
ト５の面側に結像される像の大きさは、拡大光学
装置６で観測しながら、ピンホール４の大きさと
一致するようにテストチヤート２の位置を軸方向
に移動させることにより調整される。なお、基準
円３の結像の大きさがピンホール４より大きい場
合は、基準円を観測できないが、ピンホール４よ
り小さい場合は、ピンホール内の平面に光学的に
結像（視覚的には見えない）され、その結像は拡
大光学装置６等の光学装置を用いることにより観
測することができる。
The present invention will be explained using an embodiment shown in FIG. A test chart 2 having a reference circle 3 with a diameter D is placed at a distance a on both sides of one of the test microlenses 1 whose focal length is to be measured, and a test chart 2 with a diameter A plate 5 having pinholes d is placed at a distance b.
The plate 5 is adjusted and fixed at a position where the reference circle 3 is imaged by the microlens 1. The size of the image formed on the surface side of the plate 5 is adjusted by moving the position of the test chart 2 in the axial direction to match the size of the pinhole 4 while observing it with the magnifying optical device 6. Ru. Note that if the image size of the reference circle 3 is larger than the pinhole 4, the reference circle cannot be observed, but if it is smaller than the pinhole 4, it will be optically imaged (visually) on the plane inside the pinhole. (not visible), and its image formation can be observed by using an optical device such as the magnifying optical device 6.
この時、被検マイクロレンズ１の焦点距離ｆに
比べて、テストチヤート２からピンホール４の面
までの距離ｌが十分大きい場合は次式が成立つ。 At this time, if the distance l from the test chart 2 to the surface of the pinhole 4 is sufficiently larger than the focal length f of the microlens 1 to be tested, the following equation holds true.
ｆ＝ｄ／Ｄ＋ｄｌ (1)
Ｄ、ｄが一定であるから、ｌを測定すればｆが
求まる。厳密にはレンズの主点間距離ｔ（図示省
略）も考慮する必要があるので、ｆ＝ｄ／Ｄ＋ｄ
（ｌ−ｔ）とするべきであるが、ｌ≫ｔなので(1)
式のようになる。 f=d/D+dl (1) Since D and d are constant, f can be found by measuring l. Strictly speaking, it is necessary to consider the distance t between the principal points of the lens (not shown), so f = d/D + d (lt), but since l≫t, (1)
It becomes like the formula.
次に第１図において、Ｄ＝100mm、ｄ＝１mmと
した時の測定誤差を計算する。 Next, in FIG. 1, the measurement error will be calculated when D=100 mm and d=1 mm.
近似式を使わない場合は、次の式が成立つ。 If no approximation formula is used, the following formula holds.
１／ａ＋１／ｂ＝１／ｆ
ａ＋ｂ＋ｔ＝ｌ
ｂ／ａ＝ｄ／Ｄ＝0.01
上の３つの式より
ｆ＝ab／ａ＋ｂ＝0.01a2／ｌ−ｔ (2)
ａ＝202、ｂ＝2.02、ｔ＝１、ｌ＝205.2を(1)、
(2)に代入してｆを求めると
(1)式より ｆ＝2.03
(2)式より ｆ＝２
となつて、本発明の方法で十分目的を達すること
ができることが判る。 1/a+1/b=1/f a+b+t=l b/a=d/D=0.01 From the three equations above, f=ab/a+b=0.01a 2 /l-t (2) a=202, b=2.02 , t=1, l=205.2 (1),
Substituting into (2) to find f, we get f=2.03 from equation (1) and f=2 from equation (2), which shows that the method of the present invention can sufficiently achieve the objective.
なお、第２図は他の実施例を示し、第１図のピ
ンホールと拡大光学装置を用いる代わりに、イメ
ージフアイバ光学装置を用いた例で、イメージフ
アイバーの受像面に、所定の径で基準円３が結像
されるように基準円３の軸方向位置を調整する。 Note that FIG. 2 shows another embodiment in which an image fiber optical device is used instead of the pinhole and magnifying optical device shown in FIG. The axial position of the reference circle 3 is adjusted so that the circle 3 is imaged.
本発明は、以上説明したような焦点距離の装定
方法であるので、テストチヤート上の基準円と結
像面との距離を測定するのみであるから、測定が
簡易であり、短焦点距離のレンズの測定にはきわ
めて有効な方法で、焦点距離測定装置全体を簡単
に構成することができる。
The present invention is a method for setting the focal length as described above, and only measures the distance between the reference circle on the test chart and the imaging plane, so the measurement is simple. This is an extremely effective method for measuring lenses, and the entire focal length measuring device can be constructed easily.
第１図は本発明の焦点距離測定方法の一実施例
説明図、第２図は他の実施例説明図である。
１……被検マイクロレンズ、２……テストチヤ
ート、３……基準円、４……ピンホール、５……
ピンホール４を有するプレート、６……拡大光学
装置、７……イメージフアイバ光学装置。
FIG. 1 is an explanatory diagram of one embodiment of the focal length measuring method of the present invention, and FIG. 2 is an explanatory diagram of another embodiment. 1...Test microlens, 2...Test chart, 3...Reference circle, 4...Pinhole, 5...
Plate with pinhole 4, 6... enlarging optical device, 7... image fiber optical device.
Claims (1)
有するテストチヤートを配し、他方の面側にピン
ホールを有するプレートを配し、被検マイクロレ
ンズで基準円をプレートのピンホールと一致する
ように結像させたときのテストチヤート面とプレ
ート面間の距離ｌを測定することにより、基準円
の直径Ｄとピンホールの直径ｄとから焦点距離を
測定することを特徴とするマイクロレンズの焦点
距離測定方法。 ２ 基準円の直径Ｄとピンホールの直径ｄとの結
像倍率ｄ／Ｄをできるだけ小さくして測定するこ
とを特徴とする特許請求の範囲第１項記載のマイ
クロレンズの焦点距離測定方法。 ３ 基準円の結像をピンホールと一致させるに拡
大光学装置で観測しながら行うことを特徴とする
特許請求の範囲第１項または第２項記載のマイク
ロレンズの焦点距離測定方法。[Claims] 1. A test chart having a reference circle is arranged on both sides of one side of the microlens to be tested, a plate having a pinhole is arranged on the other side, and the reference circle is set on the plate using the microlens to be tested. The focal length is measured from the diameter D of the reference circle and the diameter d of the pinhole by measuring the distance l between the test chart surface and the plate surface when the image is focused to coincide with the pinhole. A method for measuring the focal length of a microlens. 2. The method for measuring the focal length of a microlens according to claim 1, wherein the measurement is carried out by making the imaging magnification d/D between the diameter D of the reference circle and the diameter d of the pinhole as small as possible. 3. A method for measuring the focal length of a microlens according to claim 1 or 2, characterized in that the imaging of the reference circle is made to coincide with the pinhole while being observed using a magnifying optical device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2446282A JPS58142242A (en) | 1982-02-19 | 1982-02-19 | Measuring method for focus distance of microlens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2446282A JPS58142242A (en) | 1982-02-19 | 1982-02-19 | Measuring method for focus distance of microlens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58142242A JPS58142242A (en) | 1983-08-24 |
| JPH03568B2 true JPH03568B2 (en) | 1991-01-08 |
Family
ID=12138830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2446282A Granted JPS58142242A (en) | 1982-02-19 | 1982-02-19 | Measuring method for focus distance of microlens |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58142242A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101704859B1 (en) * | 2013-06-18 | 2017-02-08 | 주식회사 엘지화학 | Focus distance measurement method and apparatus of microlens |
| US10151962B2 (en) * | 2016-09-29 | 2018-12-11 | Mitutoyo Corporation | Variable focal length lens system with focus monitoring and control |
-
1982
- 1982-02-19 JP JP2446282A patent/JPS58142242A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58142242A (en) | 1983-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101403650B (en) | Differential confocal combination ultra-long focal length measurement method and device | |
| CN101408478A (en) | Method and apparatus for measuring cofocal combined ultra-long focal distance | |
| CN103293879A (en) | Objective wave aberration detection system | |
| CN101493376B (en) | Method and device for measuring ultra-long focal length with pentaprism combination | |
| US3619067A (en) | Method and apparatus for determining optical focal distance | |
| CN1072354C (en) | Light beam direction micro drift detection system | |
| JPH03568B2 (en) | ||
| CN105180820B (en) | A test system and test method for the inner surface of a transparent capillary | |
| CN116086776B (en) | Device and method for detecting divergence angle of collimated light beam | |
| CN109001141B (en) | Infrared optical material impurity testing method | |
| JP2521736B2 (en) | Microscope adjustment inspection device | |
| JP2672771B2 (en) | Through hole inner diameter measuring device | |
| DE102017001524B4 (en) | Arrangement for measuring at least partially reflective surfaces | |
| JPS60247133A (en) | Focal-length measuring method of lens by using moire fringe | |
| RU2025692C1 (en) | Method of measurement of characteristics of optical systems: focal distances and decentering | |
| CN102829715B (en) | Return-type large-bore long-working-distance auto-collimating microscopic monitor | |
| JP2565496B2 (en) | Imaging device for the object to be inspected | |
| US1649106A (en) | Device for testing bolt threads | |
| Golden et al. | Study of an instrument for sensing errors in a telescope wavefront | |
| Lindlein et al. | Optical measurement methods for refractive microlenses and arrays | |
| JPH0569362B2 (en) | ||
| SU913183A1 (en) | Refraction index non-uniformity determination method | |
| RU2146355C1 (en) | Method measuring thickness of sheet glass and device for its realization | |
| CN120351858A (en) | Self-alignment type laser triangle lens thickness measuring device and method | |
| Udupa et al. | Optical testing of a gamma-ray telescope mirror |