JPH0357588B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to an improvement in a method for manufacturing an airtight terminal having a metal outer ring manufactured by drawing press.

BACKGROUND ART Airtight terminals used as heads of relatively low-power semiconductor devices are manufactured using a metal outer ring formed by drawing and pressing a thin metal plate made of Kovar or the like. This type of airtight terminal has a structure shown in FIGS. 1 and 2, for example. In the figure,
1A is a metal outer ring, which includes a top plate part 2, a cylindrical part 3,
It has a flange part 4, a protrusion part 5 for polarity indication provided on a part of the flange part 4, and a plurality of (four in the illustrated example) through holes 6 bored in the top plate part 2. Reference numeral 7 denotes a glass filled inside the metal outer ring 1A, and lead wires 8 made of Kovar or the like are inserted into each of the through holes 6, and each lead wire 8 is hermetically sealed to the metal outer ring 1A through the glass 7. and is insulated and sealed.

Such a hermetic terminal is conventionally manufactured as shown in FIG. That is, using a sealing jig 9 having a recess 10 for storing the metal outer ring 1A made of graphite and a plurality of holes 11 for inserting the lead wire 8 provided at the bottom of the recess 10, as shown in the figure. Then, the metal outer ring 1A is placed upside down and housed in the recess 10 of the sealing jig 9, and the disk-shaped sintered glass tablet 70 is placed inside the metal outer ring 1A. Each hole 11 of the sealing jig 9 passes through the through hole 6 of the tablet 70 and the metal outer ring 1A.
Insert the lead wire 8 into. In this state, the whole is heated to melt the sintered glass tablet 70, and then the whole is cooled to obtain the hermetic terminal shown in FIGS. 1 and 2.

By the way, in the airtight terminal with the above structure,
As shown in FIG. 1, when the metal outer ring 1A has a protrusion 5 for polarity indication on a part of the flange portion 4, a recess into which the protrusion 5 fits is provided in the sealing jig 9. As shown in FIG. When using a metal outer ring 1B that does not have a protrusion 5, the metal outer ring 1B is attached to the sealing jig 9.
The disadvantage is that the lead wire 8 cannot be completely prevented from rotating within the recess 10, and as shown in the figure, the lead wire 8 may become eccentric from the center of the through hole 6, or if it is excessively large, it may come into contact with the inner surface of the through hole 6. It was hot.

On the other hand, since the metal outer ring 1A is manufactured by drawing press, the through hole 6 has a relatively smooth cut surface 61 and a relatively rough fracture surface 62, as shown in FIG. Then, the molten glass 7 has a cut surface 6
1 is easy to get wet, but the broken surface 62 is difficult to get wet, so that a cavity 12 where the glass 7 does not get wet is likely to be formed as shown in the figure. If such a cavity 12 were formed, the plating liquid etc. that entered the cavity 12 during finish plating could not be completely removed, resulting in a drawback of causing rust and the like.

Therefore, the main object of the present invention is to provide an airtight terminal in which the metal outer ring does not rotate relative to the sintered glass tablet and each lead wire can be properly sealed in the center of each through hole in the metal outer ring. An object of the present invention is to provide a manufacturing method.

Another object of the present invention is to provide a manufacturing method in which glass reliably wets the fracture surface of the through hole.

To summarize, the present invention can be summarized as follows: As described above, a metal outer ring is installed around the through hole of a sintered glass tablet to be glass-sealed in combination with a metal outer ring having a through hole at a position eccentric from the center of the top plate. A protruding part with a height equal to or less than the wall thickness dimension is provided, this protruding part is fitted into the through hole of the metal outer ring, and the entire sintered glass tablet is assembled without stacking other sintered glass tablets. It is characterized by being hermetically sealed by heating.

Embodiments of the invention will be described below with reference to the drawings.

FIG. 6 shows a sectional view of the assembled state before glass sealing. In the figure, reference numeral 13 denotes a sealing jig made of graphite, which has a recess 14 on the periphery of the flange portion 4 shown in FIG. It has a plurality of holes 15 for inserting the lead wires 8 provided at the bottom of the holder. The metal outer ring 1B is housed upside down in the recess 14 of the sealing jig 13, and the sintered glass tablet 71 is housed in the metal outer ring 1B. This sintered glass tablet 71 is different from the sintered glass tablet 70 shown in FIG. It has a protrusion 72 . This protrusion 7
The outer diameter of metal outer ring 1B is slightly smaller than the inner diameter of each through hole 6 of metal outer ring 1B, and its height is smaller than that of metal outer ring 1.
Metal outer ring 1 is used to reduce the dimension of the glass creeping up from the top plate part 2 of B (the descending dimension at the time of manufacture).
The thickness is set to be less than the wall thickness of the top plate portion 2 of B. This sintered glass tablet 71 is made by kneading fine glass powder with an organic binder, press-molding it into a predetermined shape, and then heating it at a temperature of about 500 to 600°C in an oxidizing atmosphere such as air to remove the organic binder. It was destroyed by fire. The lead wire 8 passes through the sintered glass tablet 71 and the through hole 6 to the sealing jig 1.
It is fitted into each hole 15 of No. 3. In this state, in a neutral or weakly reducing atmosphere, approximately 950 ~
Heat to a temperature of about 1050℃. Then, the sintered glass tablet 71 is melted, and the molten glass 7 is reliably filled inside the metal outer ring 1B, especially inside each through hole 6, and moreover, the protrusion 72 provided on the sintered glass tablet 71 Since rotation of the metal outer ring 1B is prevented, each lead wire 8 is accurately positioned at the center of each through hole 6 and hermetically sealed. After that, when the whole is cooled, the molten glass 7 is solidified, and as shown in FIG.
An airtight terminal is obtained in which the lead wires 8 are reliably wetted and each lead wire 8 is sealed at the center of each through hole 6.

Although the above embodiment has been described with reference to the case where there are four through holes 6, an arbitrary number of one or more through holes 6 may be provided at positions eccentric from the stop of the metal outer ring. Further, lead wires may not be sealed to some of the plurality of through holes 6. moreover,
The metal outer ring is not limited to one having no protrusion 5 on a part of the flange portion 4 as shown in FIG.
It will be obvious that it can also be implemented with a protrusion 5 as shown in FIG. Furthermore, the protrusion 72 of the sintered glass tablet 71 is not limited to being provided on one side, but may be provided on both sides. In this way, when the sintered glass tablet 71 is housed and arranged in the metal outer ring, there is no need to distinguish between the upper and lower sides, so there is an advantage that an automatic feeding system can be adopted.

As described above, this invention is combined and sealed with a metal outer ring having a cylindrical part manufactured by drawing press, a top plate part, and a through hole bored at a position eccentric from the center of the top plate part. A protrusion with a height equal to or less than the wall thickness of the metal outer ring is provided at a position corresponding to the through hole in the metal outer ring of the sintered glass tablet, and this protrusion is fitted into the through hole in the metal outer ring. Since this sintered glass tablet is sealed without stacking other sintered glass tablets, rotation of the metal outer ring is prevented even if there is no protrusion for polarity indication on the metal outer ring and flange. This prevents the lead wire from becoming eccentric from the center of the through hole in the metal outer ring or from coming into contact with the metal outer ring. Moreover, there is an effect that the glass does not get wet and a cavity is not formed on the entire inner surface of the through hole of the metal outer ring.

[Brief explanation of drawings]

Fig. 1 is a plan view of a header for a semiconductor device as an example of an airtight terminal, Fig. 2 is a sectional view taken along the - line in Fig. 1, and Fig. 3 is a glass plate for explaining the conventional manufacturing method of an airtight terminal. A sectional view showing the assembled state before sealing, FIG. 4 is an enlarged sectional view of the main part to explain one of the drawbacks of the airtight terminal manufactured by the conventional method, and FIG. 5 is an enlarged sectional view to explain other drawbacks. FIG. 3 is a plan view of the airtight terminal of FIG. FIG. 6 is a cross-sectional view showing an assembled state before glass sealing for explaining one embodiment of the method of the present invention, and FIG. 7 is an enlarged cross-sectional view of a main part of an airtight terminal manufactured by the method of the present invention. 1A, 1B...Metal outer ring, 2...Top plate part, 3...Cylindrical part, 6...Through hole, 7...Glass, 71...Sintered glass tablet, 72...Protrusion part, 8...Lead wire, 13...
Sealing jig.

Claims (1)

[Scope of Claims] 1. A metal outer ring having a cylindrical part manufactured by drawing press, a top plate part, and a through hole bored at a position eccentric from the center of the top plate part, in which a hole corresponding to the through hole is provided. A sintered glass tablet having a through hole is placed at a position where the metal outer ring is heated, and a lead wire is inserted through the through hole in the sintered glass tablet and into the through hole in the metal outer ring. A method for manufacturing an airtight terminal in which a sintered glass tablet is hermetically sealed by melting the sintered glass tablet, wherein a protrusion with a height equal to or less than the wall thickness of the metal outer ring is provided around the through hole of the sintered glass tablet; An airtight terminal characterized in that a protruding part is fitted into a through hole in a metal outer ring, and the entire sintered glass tablet is heated and hermetically sealed without stacking other sintered glass tablets. manufacturing method. 2. The method of manufacturing an airtight terminal according to claim 1, wherein the metal outer ring does not have a protrusion on its periphery.