JPH0357811B2 - - Google Patents

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Publication number
JPH0357811B2
JPH0357811B2 JP58250578A JP25057883A JPH0357811B2 JP H0357811 B2 JPH0357811 B2 JP H0357811B2 JP 58250578 A JP58250578 A JP 58250578A JP 25057883 A JP25057883 A JP 25057883A JP H0357811 B2 JPH0357811 B2 JP H0357811B2
Authority
JP
Japan
Prior art keywords
gas
carbon atoms
oxygen
group
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58250578A
Other languages
Japanese (ja)
Other versions
JPS60143815A (en
Inventor
Susumu Ueno
Hirokazu Nomura
Hajime Kitamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP58250578A priority Critical patent/JPS60143815A/en
Publication of JPS60143815A publication Critical patent/JPS60143815A/en
Publication of JPH0357811B2 publication Critical patent/JPH0357811B2/ja
Granted legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D69/00Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12Composite membranes; Ultra-thin membranes
    • B01D69/125In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction
    • B01D69/127In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction using electrical discharge or plasma-polymerisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06Organic material
    • B01D71/44Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, not provided for in a single one of groups B01D71/26-B01D71/42

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Description

【発明の詳现な説明】[Detailed description of the invention]

本発明は、良奜な気䜓透過性を有するず共に気
䜓の遞択的分離機胜にすぐれた気䜓分離甚耇合成
圢䜓に関し、特には空気から高濃床の酞玠含有混
合ガスを埗るのに奜適ずされる気䜓分離甚耇合成
圢䜓の提䟛を目的ずする。 珟圚、省゚ネルギヌ、公害防止の芳点から高分
子薄膜を利甚した遞択的ガス分離技術が、埓来の
深冷液化分離法、吞着分離法にかわる技術ずしお
泚目されおいる。なかでも空気から高濃床の酞玠
含有混合ガスを埗るこずができるいわゆる酞玠富
化膜は生鮮品保存甚、医療甚、燃焌関連甚等倚く
の応甚甚途が期埅されおおり、その開発・補品化
が埅たれおいる。 䞊蚘酞玠富化膜に぀いおは、膜特性ずしお酞
玠窒玠の高分離胜を有し、か぀高透過速床高
凊理胜を有するこずが芁求されるのであるが、
珟圚詊䜜されおいるある皮の均質高分子材料の応
甚では比范的高分離胜が期埅できるが、ガス透過
速床が著しく小さく芁求特性を満たすこずがほず
んどできない。たた倚孔質物等の利甚では、比范
的高透過速床が期埅できるが、酞玠窒玠の高分
離胜を埗るこずはかなり困難である。 他方、酞玠富化膜を埗る䞀手段ずしお最近プラ
ズマ重合法の技術が怜蚎されおいる。すなわち、
この方法は比范的高透過速床をも぀適圓な支持䜓
たずえば均質薄膜支持䜓たたは倚孔質膜支持䜓䞊
に、プラズマ重合法の技術により、酞玠窒玠高
分離胜をも぀超薄膜を圢成させるずいう内容のも
のである。 本発明者らは、プラズマ重合膜の支持䜓ずしお
の芳点から怜蚎を重ねた結果、匏RCCSiR3匏
䞭のは䞀䟡炭化氎玠基で瀺される単量䜓化合
物を重合しお埗られる重合䜓薄膜ず有機化合物ガ
スのプラズマ重合膜ずの組合せによりきわめお良
奜な酞玠富化膜酞玠窒玠高分離胜ず酞玠高透
過速床を䜵せも぀膜が埗られるこずを先に確認
したのであるが、その埌実甚化に向けお皮々怜蚎
を加えた結果、䞊蚘単量䜓化合物の重合薄膜支
持䜓はプラズマ重合膜を圢成させる過皋におい
お、プラズマによる短波長の玫倖線にさらされる
ず耇合材ずしおの膜匷床が著しく劣化しおしたう
耐玫倖線に劣るこの、このため実甚性のある
酞玠富化膜を埗るこずが困難ずなるこずが刀明し
た。 本発明はかかる問題点を解決したものであ぀
お、これは䞀般匏 で瀺される単量䜓化合物ず、䞀般匏 で瀺される単量䜓化合物ずの共重合䜓成圢物衚面
に、有機けい玠化合物ガスの䜎枩プラズマ重合膜
を圢成させおなる気䜓分離甚耇合成圢䜓に関する
ものである。 䞊蚘䞀般匏の単独重合䜓は耐玫倖線匷床
に劣るが、䞀般匏のものず共重合化するこ
ずにより耐玫倖線匷床が栌段に向䞊するずいう利
点が䞎えられ、か぀このものは本発明の耇合成圢
䜓におけるプラズマ重合膜の支持䜓ずしお芁求さ
れる酞玠ガスの透過速床が充分に高いものである
こず、および䞀般匏の単独重合䜓に比范し
お、キダステむング法等による成暡性もすぐれお
いるこずが確認された。 以䞋本発明を詳现に説明する。 前蚘䞀般匏およびにおいお、R1
は氎玠原子たたは炭玠数〜の䞀䟡炭化氎玠基
たずえばメチル基、゚チル基、プロピル基、ブチ
ル基、およびこれらの䞀䟡炭化氎玠基の氎玠原子
が郚分的にハロゲン原子等で眮換した䞀䟡炭化氎
玠基であり、たたR2、R3、R4、R5およびR6は氎
玠原子、ハロゲン原子、炭玠数〜の䞀䟡炭化
氎玠基たずえばメチル基、゚チル基、プロピル
基、ブチル基、ビニル基、アリル基、およびこれ
らの䞀䟡炭化氎玠基の氎玠原子が郚分的にハロゲ
ン原子等で眮換した䞀䟡炭化氎玠基、たたは炭玠
数〜のアルコキシ基たずえばメトキシ基、゚
トキシ基、プロポキシ基、プトキシ基である。さ
らに匏䞭のは酞玠原子、炭玠数〜の二䟡炭
化氎玠基たずえばメチレン基、゚チレン基、プロ
ピレン基、たたは匏−〔−SiR7R8−〕oで瀺
される基である。該匏䞭のR7およびR8は炭玠数
〜の䞀䟡炭化氎玠基たずえばメチル基、゚チ
ル基、プロピル基、ブチル基、ビニル基、アリル
基およびこれらの䞀䟡炭化氎玠基の氎玠原子がハ
ロゲン原子等で眮換した䞀䟡炭化氎玠基であり、
は〜の数である。 䞀般匏およびに盞圓する単量䜓化
合物の望たしいものを䟋瀺すれば次のずおりであ
る。ただし、以䞋の蚘茉においおMeはメチル基、
Etぱチル基をそれぞれ瀺す。 Me−≡−SiMe3、Et−≡−Si
Me3、Me−≡−SiEt3、Me−≡−
SiOMe3、HC≡−SiMe3、Me−≡−
SiMeCl2、Me−≡−SiMeH2、 HC≡−SiMe2−CH2−SiMe3、Me−
≡−SiMe2−OH2−SiMe3、Me−≡
−SiMe2−−SiMe3、Me−≡−Si
Me2−CH2CH2−SiMe3、Me−≡−Si
Me2−−SiMe2−−SiMe3、Me−
≡−SiMe2−CH2−SiMe2−CHCH2、
Me−≡−SiMe2−CH2−SiCl3、Me−
≡−SiMe2−CH2−SiOMe3。 䞊蚘に䟋瀺した䞀般匏の単量䜓化合物ず
䞀般匏の単量䜓化合物ずの共重合䜓は次の
劂くしお埗られる。すなわち、該有機䞍飜和化合
物を、トル゚ン、シクロヘキサンなどの有機溶媒
䞭で、WCl6、NbCl5、TaCl5などの重合觊媒の存
圚䞋に枩床30〜130℃で反応させるこずにより共
重合反応が行われ、生成した共重合䜓は必芁に応
じ、沈でんさせ、粟補し、回収される。 䞀般匏の単量䜓化合物ず䞀般匏の
単量䜓化合物ずの共重合モル比は、 0.01≊≊0.45 ずなるようにするこずが望たしく、䞊蚘モル比が
0.45以䞊になるず共重合䜓は酞玠透過速床が急激
に䜎䞋するし、他方0.01以䞋になるず十分な耐玫
倖線匷床が埗られない。 このようにしお埗られる共重合䜓は、その組成
によ぀おも倚少倉化するが、十分な耐玫倖線匷床
を有し、酞玠の透過特性ずしお酞玠透過係数
PO2×10-7cm3STPcm2・cmHg・sec以
䞊、PO2PN21.5〜2.0の特性をも぀おいる。 なお、共重合䜓はトル゚ン、シクロヘキサンな
どの有機溶媒溶液ずしお適圓な圢にキダステむン
グするこずによ぀お皮々の厚みを有するフむルム
を圢成するこずができる。もちろん、薄膜化によ
る操䜜䞊の問題をカバヌするため、䞍織垃、基
垃、倚孔質膜あるいは他の薄膜フむルム䞊に䞊蚘
重合䜓フむルムを圢成せしめおもよい。 䞊蚘倚孔質膜ずしおは、たずえば倚孔質ポリプ
ロピレンフむルム、倚孔質ポリ゚チレンフむル
ム、倚孔質ポリサルホンフむルム、倚孔質酢酞セ
ルロヌスフむルム、倚孔質四ふ぀化゚チレンフむ
ルム、倚孔質ポリむミドフむルム等が䟋瀺され
る。 本発明は共重合䜓成圢物たずえばフむルム
衚面に有機けい玠化合物ガスの䜎枩プラズマ重合
膜を圢成し、これにより高い気䜓分離胜等に高酞
玠ガス窒玠ガス分離胜を付䞎するのであるが、
有機けい玠化合物ガスの䜎枩プラズマ重合膜を圢
成する方法ずしおは䜎枩プラズマ発生装眮内に重
合䜓成圢品を装入し、この装眮内に有機けい玠化
合物のガスを流通させながら、装眮内を10トル以
䞋の圧力に調敎保持し、このガス圧力䞋に䜎枩プ
ラズマを発生させ、該成圢品を䜎枩プラズマにさ
らす方法によればよい。なお、有機けい玠化合物
ず共に、ヘリりム、アルゎン等の䞍掻性ガス、窒
玠、酞玠、空気、氎玠、氎蒞気、二酞化炭玠、䞀
酞化炭玠等の無機ガスを共存させおもよい。 䞊蚘方法においお、有機けい玠化合物ガスの装
眮内における圧力が高すぎるず成圢䜓衚面ぞのプ
ラズマ重合膜の圢成が困難ずなるので、この䜎枩
プラズマのガス圧力は10トル以䞋であるこずが奜
たしく、特には0.001〜トルの範囲であるこず
が奜たしい。このガス圧力における䜎枩プラズマ
により、すぐれたガス分離特性を有するプラズマ
重合膜が圢成される。 なお、䜎枩プラズマを発生させる電気的条件ず
しおは、たずえば電極に10KHz〜100MHz、10W
〜100KWの電力を印加すればよく、内郚電極、
倖郚電極無電極のいずれの方匏を䜿甚しおも
よい。 共重合䜓成圢品を䞊蚘した諞条件のもずに発生
させた䜎枩プラズマにさらし、その衚面に有機け
い玠化合物のプラズマ重合膜を圢成せしめる膜厚
ずしおは、0.005〜1Ό、奜たしくは0.02〜0.2Όずす
るこずがよい。膜厚が薄すぎる堎合は、本発明の
目的ずする分離係数の向䞊は䞍十分ずなり、たた
膜厚が厚くなりすぎた堎合には、分離係数は向䞊
するもののガスの透過性は悪くなり、本発明の利
点は倱われる。 䞊蚘膜厚を圢成せしめる凊理時間ずしおは、印
加電力によ぀おも盞違するが、䞀般には数秒〜数
分皋床で十分である。 本発明におけるプラズマ凊理においお、装眮内
に䟛絊される有機けい玠化合物の具䜓的䟋瀺をあ
げれば次のずおりである。 有機けい玠化合物 トリメチルクロロシラン、トリメチルメトキシ
シラン、トリメチル゚トキシシラン、ビニルゞメ
チルクロロシラン、ビニルゞメルメトキシシラ
ン、ビニルゞメチル゚トキシシラン、゚チニルゞ
メチルメトキシシラン、゚チニルゞメチルクロロ
シラン、メチルクロロメチルメトキシクロロシラ
ン、トリ゚チルメトキシシラン、ゞメチルクロロ
メチル゚トキシシラン、ゞメチルクロロメチルク
ロロシラン、ゞメチルプニルメトキシシラン、
−クロロ゚チニルゞメチルクロロシラン、−
クロロ゚チルゞメチルメトキシシラン、ゞメチル
ゞクロロシラン、ゞメチルゞメトキシシラン、ゞ
゚チルゞメトキシシラン、ゞメチルゞ゚トキシシ
ラン、ビニルメチルゞクロロシラン、ビニルメチ
ルゞメトキシシラン、−クロロ゚チルメチルゞ
メトキシシラン、ビニルメチルゞ゚トキシシラ
ン、クロロメチルメチルゞクロロシラン、ゞメト
キシメチルプニルシラン、クロロメチルメチル
ゞメトキシシラン、メチルトリメトキシシラン、
メチルトリニトキシシラン、ビニルトリメトキシ
シラン、プニルトリメトキシシラン、クロロメ
チルトリメトキシシラン、−クロロ゚チルトリ
メトキシシラン、トリフロロプロピルトリクロロ
シラン、テトラビニルシラン、トリビニルメチル
シラン、ゞビニルゞメチルシラン、ビニルトリメ
チルシラン、ゞビニルテトラメチルゞシロキサ
ン、ゞクロロメチルテトラメチルゞシロキサン、
ゞ゚チニルテトラメチルゞシロキサン、テトラメ
チルゞシロキサン、ヘキサメチルゞシロキサン、
ヘキサメチルゞシラザン、オクタメチルシクロテ
トラシロキサン、ヘキサメチルシルプニレンな
ど。 ぀ぎに比范䟋および実斜䟋をあげるが、本発明
はこれに限定されるものではない。 比范䟋  トル゚ン200に重合觊媒TaCl5を溶解し、
぀いで単量䜓化合物ずしおMe−≡−Si
Me3を20添加し、80℃の枩床で時間重合を
行぀た。生成した重合䜓を過剰メタノヌル䞭で沈
柱、粟補した。この結果ほが定量的に匏
The present invention relates to a composite molded article for gas separation that has good gas permeability and excellent gas selective separation function, and is particularly suitable for gas separation that is suitable for obtaining a high-concentration oxygen-containing mixed gas from air. The purpose is to provide a composite molded article for use. Currently, selective gas separation technology using polymer thin films is attracting attention as an alternative to the conventional cryogenic liquefaction separation method and adsorption separation method from the viewpoint of energy saving and pollution prevention. Among these, so-called oxygen-enriching membranes, which can obtain a highly concentrated oxygen-containing mixed gas from air, are expected to have many applications such as preservation of perishables, medical use, and combustion-related uses, and their development and commercialization are Waiting. The above-mentioned oxygen enrichment membrane is required to have high oxygen/nitrogen separation ability and high permeation rate (high throughput) as membrane characteristics.
Although relatively high separation performance can be expected in the application of certain types of homogeneous polymer materials that are currently being prototyped, the gas permeation rate is extremely low and it is almost impossible to meet the required characteristics. Furthermore, when using porous materials, a relatively high permeation rate can be expected, but it is quite difficult to obtain a high oxygen/nitrogen separation ability. On the other hand, plasma polymerization technology has recently been studied as a means of obtaining an oxygen-enriched film. That is,
This method involves forming an ultra-thin film with high oxygen/nitrogen separation ability on a suitable support with a relatively high permeation rate, such as a homogeneous thin film support or a porous film support, using plasma polymerization technology. belongs to. As a result of repeated studies from the viewpoint of a support for plasma-polymerized membranes, the present inventors discovered that a monomer compound represented by the formula RC=CSiR 3 (R in the formula is a monovalent hydrocarbon group) was polymerized. It was previously confirmed that an extremely good oxygen-enriched membrane (a membrane with both high oxygen/nitrogen separation ability and high oxygen permeation rate) can be obtained by combining the resulting polymer thin film with a plasma-polymerized membrane of organic compound gas. However, as a result of various studies aimed at practical application, it was found that the polymerized thin film (support) of the monomer compound described above undergoes compounding when exposed to short-wavelength ultraviolet rays from plasma during the process of forming a plasma-polymerized film. It has been found that the strength of the film as a material deteriorates significantly (its UV resistance is poor), making it difficult to obtain a practical oxygen-enriched film. The present invention solves these problems, and is based on the general formula The monomer compound represented by and the general formula The present invention relates to a composite molded article for gas separation, in which a low-temperature plasma polymerized film of organosilicon compound gas is formed on the surface of a copolymer molded article with a monomer compound shown in the following. Although the homopolymer of the above general formula () has poor ultraviolet resistance, copolymerization with that of the general formula () has the advantage of significantly improving the ultraviolet resistance, and this polymer can be used according to the present invention. The permeation rate of oxygen gas required as a support for the plasma polymerized membrane in the composite molded product is sufficiently high, and compared to the homopolymer of the general formula (), it is easier to mold by casting method etc. It was also confirmed that the quality was excellent. The present invention will be explained in detail below. In the general formulas () and (), R 1
is a hydrogen atom or a monovalent hydrocarbon group having 1 to 4 carbon atoms, such as a methyl group, an ethyl group, a propyl group, a butyl group, or a monovalent hydrocarbon group in which the hydrogen atom of these monovalent hydrocarbon groups is partially substituted with a halogen atom, etc. R 2 , R 3 , R 4 , R 5 and R 6 are hydrogen atoms, halogen atoms, monovalent hydrocarbon groups having 1 to 4 carbon atoms, such as methyl, ethyl, propyl, Butyl group, vinyl group, allyl group, monovalent hydrocarbon groups in which the hydrogen atoms of these monovalent hydrocarbon groups are partially substituted with halogen atoms, etc., or alkoxy groups having 1 to 8 carbon atoms, such as methoxy group, ethoxy group, propoxy group, and poxy group. Furthermore, A in the formula is an oxygen atom, a divalent hydrocarbon group having 1 to 4 carbon atoms, such as a methylene group, an ethylene group, a propylene group, or represented by the formula -[O-Si(R 7 )(R 8 )-] o It is a group that can be used. In the formula, R 7 and R 8 are monovalent hydrocarbon groups having 1 to 4 carbon atoms, such as methyl group, ethyl group, propyl group, butyl group, vinyl group, allyl group, and hydrogen atoms of these monovalent hydrocarbon groups. is a monovalent hydrocarbon group substituted with a halogen atom etc.,
n is a number from 1 to 3. Examples of desirable monomer compounds corresponding to general formulas () and () are as follows. However, in the following description, Me is a methyl group,
Et each represents an ethyl group. Me-C≡C-Si(Me) 3 , Et-C≡C-Si
(Me) 3 , Me-C≡C-Si(Et) 3 , Me-C≡C-
Si(OMe) 3 , HC≡C-Si(Me) 3 , Me-C≡C-
Si(Me) Cl2 , Me-C≡C-Si(Me) H2 , HC≡C-Si(Me) 2- CH2 -Si(Me) 3 , Me-C
≡C-Si(Me) 2 -OH 2 -Si(Me) 3 , Me-C≡C
-Si(Me) 2 -O-Si(Me) 3 , Me-C≡C-Si
(Me) 2 −CH 2 CH 2 −Si(Me) 3 , Me−C≡C−Si
(Me) 2 -O-Si(Me) 2 -O-Si(Me) 3 , Me-C
≡C-Si(Me) 2 -CH 2 -Si(Me) 2 -CH=CH 2 ,
Me-C≡C-Si(Me) 2 -CH 2 -SiCl 3 , Me-C
≡C-Si(Me) 2 -CH2 -Si(OMe) 3 . The copolymer of the monomer compound of the general formula () and the monomer compound of the general formula () exemplified above can be obtained as follows. That is, a copolymerization reaction is carried out by reacting the organic unsaturated compound in an organic solvent such as toluene or cyclohexane in the presence of a polymerization catalyst such as WCl 6 , NbCl 5 or TaCl 5 at a temperature of 30 to 130°C. The copolymer produced is precipitated, purified, and recovered as necessary. The copolymerization molar ratio of the monomer compound of general formula () and the monomer compound of general formula () is preferably 0.01≩()/()+()≩0.45, and the above molar The ratio is
When it is 0.45 or more, the oxygen permeation rate of the copolymer decreases rapidly, and on the other hand, when it is 0.01 or less, sufficient ultraviolet resistance strength cannot be obtained. Although the copolymer obtained in this way varies somewhat depending on its composition, it has sufficient UV resistance and has an oxygen permeability coefficient (PO 2 ) of 5×10 -7 cm 3 as an oxygen permeation property. (STP)/cm 2 · cmHg · sec or more, PO 2 /PN 2 = 1.5 to 2.0. The copolymer can be cast into a suitable form as a solution in an organic solvent such as toluene or cyclohexane to form films having various thicknesses. Of course, the polymer film may be formed on a nonwoven fabric, a base fabric, a porous membrane, or other thin film in order to overcome the operational problems caused by thinning the film. Examples of the porous membrane include porous polypropylene film, porous polyethylene film, porous polysulfone film, porous cellulose acetate film, porous ethylene tetrafluoride film, and porous polyimide film. The present invention is directed to copolymer molded products (e.g. films).
A low-temperature plasma polymerized film of organosilicon compound gas is formed on the surface, which provides high gas separation performance and high oxygen/nitrogen gas separation performance.
As a method for forming a low-temperature plasma polymerized film of organosilicon compound gas, a polymer molded product is placed in a low-temperature plasma generator, and while the organosilicon compound gas is flowing through the device, the inside of the device is heated for 10 minutes. A method may be used in which the pressure is adjusted and maintained at a pressure of Torr or less, low-temperature plasma is generated under this gas pressure, and the molded article is exposed to the low-temperature plasma. In addition, an inert gas such as helium or argon, or an inorganic gas such as nitrogen, oxygen, air, hydrogen, water vapor, carbon dioxide, or carbon monoxide may coexist with the organosilicon compound. In the above method, if the pressure of the organosilicon compound gas in the apparatus is too high, it will be difficult to form a plasma polymerized film on the surface of the compact, so the gas pressure of this low-temperature plasma is preferably 10 torr or less, In particular, a range of 0.001 to 5 Torr is preferred. The low temperature plasma at this gas pressure forms a plasma polymerized membrane with excellent gas separation properties. The electrical conditions for generating low-temperature plasma are, for example, 10KHz to 100MHz and 10W on the electrode.
It is enough to apply ~100KW power, and the internal electrode,
Any type of external electrode (electrodeless) may be used. The copolymer molded product is exposed to low-temperature plasma generated under the above conditions, and the film thickness for forming a plasma polymerized film of an organosilicon compound on its surface is 0.005 to 1Ό, preferably 0.02 to 0.2Ό. It is preferable to set it to Ό. If the film thickness is too thin, the improvement in the separation coefficient that is the objective of the present invention will not be sufficient; if the film thickness is too thick, although the separation coefficient will be improved, the gas permeability will deteriorate, which is a problem in the present invention. The advantage of the invention is lost. The processing time for forming the above film thickness varies depending on the applied power, but generally several seconds to several minutes is sufficient. In the plasma treatment according to the present invention, specific examples of the organosilicon compounds supplied into the apparatus are as follows. Organosilicon compounds Trimethylchlorosilane, trimethylmethoxysilane, trimethylethoxysilane, vinyldimethylchlorosilane, vinyldimermethoxysilane, vinyldimethylethoxysilane, ethynyldimethylmethoxysilane, ethynyldimethylchlorosilane, methylchloromethylmethoxychlorosilane, triethylmethoxysilane, dimethyl Chloromethylethoxysilane, dimethylchloromethylchlorosilane, dimethylphenylmethoxysilane,
2-chloroethynyldimethylchlorosilane, 2-
Chloroethyldimethylmethoxysilane, dimethyldichlorosilane, dimethyldimethoxysilane, diethyldimethoxysilane, dimethyldiethoxysilane, vinylmethyldichlorosilane, vinylmethyldimethoxysilane, 2-chloroethylmethyldimethoxysilane, vinylmethyldiethoxysilane, chloromethylmethyl Dichlorosilane, dimethoxymethylphenylsilane, chloromethylmethyldimethoxysilane, methyltrimethoxysilane,
Methyltrinitoxysilane, vinyltrimethoxysilane, phenyltrimethoxysilane, chloromethyltrimethoxysilane, 2-chloroethyltrimethoxysilane, trifluoropropyltrichlorosilane, tetravinylsilane, trivinylmethylsilane, divinyldimethylsilane, vinyltrimethyl Silane, divinyltetramethyldisiloxane, dichloromethyltetramethyldisiloxane,
Diethynyltetramethyldisiloxane, tetramethyldisiloxane, hexamethyldisiloxane,
Hexamethyldisilazane, octamethylcyclotetrasiloxane, hexamethylsilphenylene, etc. Next, comparative examples and examples will be given, but the present invention is not limited thereto. Comparative Example 1 1g of polymerization catalyst TaCl 5 was dissolved in 200g of toluene,
Then, as a monomer compound, Me-C≡C-Si
20g of (Me) 3 was added and polymerization was carried out at a temperature of 80°C for 5 hours. The produced polymer was purified by precipitation in excess methanol. This results almost quantitatively in the equation

【匏】の䞻鎖構造匏を有する重合䜓 が埗られた。 この重合䜓を䜿甚しおトル゚ン溶液によるキダ
ステむング法により厚さ3Όの薄膜を䜜成した。
これを詊料ずする。぀ぎにこの詊料に200W
の高圧氎銀ランプにお48時間UV光を照射した。
これを詊料ずする。 詊料をプラズマ装眮内にセツトし、装眮内を
0.01トルたで枛圧埌ビニルトリメチルシランガス
を装眮内に導入し、圧力を0.4トルに調敎保持し
た。この状態で13.56MHz100Wの高呚波電力を印
加し、詊料䞊に分間プラズマ重合凊理を行぀
たものを詊料、同様にしお13.56MHz5kWの高
呚波電力を印加し、20秒間プラズマ重合凊理を行
぀たものを詊料ずした。さらに詊料のプラズ
マ重合凊理を行わなか぀た面を200Wの高圧氎銀
ランプにお10時間UV光を照射した。これを詊料
ずする。詊料〜に぀いおGPCにお枬定し
た分子量の倉化および酞玠ガス透過速床PO2、
酞玠−窒玠分離係数PO2PN2を枬定し、膜
の機械的匷床ずガス透過特性を評䟡した。結果を
衚−に瀺す。 実斜䟋  トル゚ン200に重合觊媒TaCl5を溶解し、
単量䜓化合物ずしおMe−≡−SiMe3これ
をずするを19、 Me−≡−SiMe2−CH2−SiMe3これ
をずするをモル比
0.031添加し80℃で時間重合したずころ、 の䞻鎖構造匏を有する重合䜓が埗られた。 この重合䜓を䜿甚しおトル゚ン溶液によるキダ
ステむング法により厚さ3Όの薄膜を䜜成した。
これを詊料ずする。぀ぎにこの詊料に200W
の高圧氎銀ランプにお48時間UV光を照射した。
これを詊料ずする。 詊料をプラズマ装眮内にセツトし、装眮内を
0.01トルたで枛圧埌ビニルトリメチルシランガス
を装眮内に導入し、圧力を0.4トルに調敎保持し
た。この状態で13.56MHz100Wの高呚波電力を印
加し、詊料䞊に分間プラズマ重合凊理を行぀
たものを詊料、同様にしお13.56MHz5kWの高
呚波電力を印加し、20秒間プラズマ重合凊理を行
぀たものを凊理ずした。さらに詊料のプラズ
マ重合凊理を行わなか぀た面を200Wの高圧氎銀
ランプにお10時間UV光を照射した。これを詊料
ずする。詊料〜に぀いおGPCにお枬定し
た分子量の倉化及び酞玠ガス透過速床
PO2、酞玠−窒玠分離係数PO2PN2を枬
定し、膜の機械的匷床ずガス透過特性を評䟡し
た。結果を衚−に瀺す。 実斜䟋  実斜䟋においお、単量䜓化合物を10、
を10に倉曎しモル比0.38、他
の重合条件、プラズマ重合条件、UV照射条件を
同䞀にしおそれぞれ詊料、、、、を詊
䜜した。 これらに぀いお分子量、酞玠ガス透過速床
PO2、酞玠−窒玠分離係数PO2PN2を枬
定した。結果を衚−に瀺す。 実斜䟋  実斜䟋においお、単量䜓化合物を15、お
よび匏Me−≡−SiMe2−−SiMe3こ
れをずするの単量䜓を䜿甚したモル比
0.18ほかは重合条件を同様にし
お、 の䞻鎖構造匏を有する重合䜓を埗た。 これに぀いお、補膜、プラズマ重合条件、UV
照射条件を同䞀にしおそれぞれ詊料、、、
、を詊䜜し、前䟋同様諞詊隓を行぀た。結果
を衚−に瀺す。 実斜䟋  実斜䟋においお、単量䜓化合物を18、お
よび匏Me−≡−SiMe2−SiCl3これを
ずするの単量䜓を䜿甚したモル比
0.068ほかは重合条件を同様にしお、 の䞻鎖構造匏を有する重合䜓を埗た。 これに぀いお、補膜、プラズマ重合条件、UV
照射条件を同䞀にしおそれぞれ詊料、、、
、を詊䜜し、前䟋同様諞詊隓を行぀た。結果
を衚−に瀺す。
A polymer having the main chain structural formula of [Formula] was obtained. Using this polymer, a thin film with a thickness of 3 ÎŒm was prepared by a casting method using a toluene solution.
This is designated as sample A. Next, apply 200W to this sample A.
UV light was irradiated for 48 hours using a high-pressure mercury lamp.
This is designated as sample B. Set sample A in the plasma device and check the inside of the device.
After reducing the pressure to 0.01 Torr, vinyltrimethylsilane gas was introduced into the apparatus, and the pressure was adjusted and maintained at 0.4 Torr. In this state, high-frequency power of 13.56MHz 100W was applied and plasma polymerization was performed on sample A for 5 minutes. Sample C was obtained. Similarly, high-frequency power of 13.56MHz 5kW was applied and plasma polymerization was performed for 20 seconds on sample A. was designated as sample D. Further, the surface of Sample C that had not been subjected to plasma polymerization treatment was irradiated with UV light for 10 hours using a 200W high-pressure mercury lamp. This is designated as sample E. Changes in molecular weight and oxygen gas permeation rate (PO 2 ) measured by GPC for samples A to E,
The oxygen-nitrogen separation coefficient (PO 2 /PN 2 ) was measured to evaluate the mechanical strength and gas permeation properties of the membrane. The results are shown in Table-1. Example 1 1g of polymerization catalyst TaCl 5 was dissolved in 200g of toluene,
As a monomer compound, 19 g of Me-C≡C-Si(Me) 3 (this is referred to as A), Me-C≡C-Si(Me) 2 -CH 2 -Si(Me) 3 (this is referred to as B ) is 1g (molar ratio B/(A+B)=
0.031) and polymerized at 80℃ for 5 hours, A polymer having the main chain structural formula was obtained. Using this polymer, a thin film with a thickness of 3 ÎŒm was prepared by a casting method using a toluene solution.
This is designated as sample F. Next, apply 200W to this sample F.
UV light was irradiated for 48 hours using a high-pressure mercury lamp.
This is designated as sample G. Set sample F in the plasma device and check the inside of the device.
After reducing the pressure to 0.01 Torr, vinyltrimethylsilane gas was introduced into the apparatus, and the pressure was adjusted and maintained at 0.4 Torr. In this state, a high frequency power of 13.56 MHz 100 W was applied and plasma polymerization was performed on sample F for 5 minutes. Sample H was obtained. Similarly, high frequency power of 13.56 MHz 5 kW was applied and plasma polymerization was performed for 20 seconds on sample F. was treated as the treatment. Further, the surface of Sample H that had not been subjected to plasma polymerization treatment was irradiated with UV light for 10 hours using a 200 W high-pressure mercury lamp. This is designated as sample J. For samples F to J, changes in molecular weight (), oxygen gas permeation rate (PO 2 ), and oxygen-nitrogen separation coefficient (PO 2 /PN 2 ) were measured using GPC, and the mechanical strength and gas permeation characteristics of the membrane were determined. was evaluated. The results are shown in Table-1. Example 2 In Example 1, 10 g of monomer compound A, B
was changed to 10 g (molar ratio B/A+B=0.38), and other polymerization conditions, plasma polymerization conditions, and UV irradiation conditions were kept the same to prepare samples K, L, M, N, and O, respectively. The molecular weight, oxygen gas permeation rate ( PO2 ), and oxygen-nitrogen separation coefficient ( PO2 / PN2 ) were measured for these. The results are shown in Table-1. Example 3 In Example 1, 15 g of monomer compound A and 5 g of a monomer of the formula Me-C≡C-Si(Me) 2 -O-Si(Me) 3 (this is designated as C) The polymerization conditions were the same except for the used (molar ratio C/A + C = 0.18), A polymer having the main chain structural formula was obtained. Regarding this, film formation, plasma polymerization conditions, UV
Under the same irradiation conditions, samples P, Q, R,
We made prototypes of S and T and conducted various tests as in the previous example. The results are shown in Table-1. Example 4 In Example 1, 18 g of monomer compound A and the formula Me-C≡C-Si(Me) 2 -SiCl 3 (which was converted to D
2g of the monomer (molar ratio D/A
+D=0.068) Other polymerization conditions were the same, A polymer having the main chain structural formula was obtained. Regarding this, film formation, plasma polymerization conditions, UV
Under the same irradiation conditions, samples U, V, W,
We made prototypes of X and Y and conducted various tests as in the previous example. The results are shown in Table-1.

【衚】【table】

【衚】【table】

Claims (1)

【特蚱請求の範囲】  䞀般匏 で瀺される単量䜓化合物ず、䞀般匏 で瀺される単量䜓化合物ずの共重合䜓成圢物衚面
に、有機けい玠化合物ガスの䜎枩プラズマ重合膜
を圢成させおなる気䜓分離甚耇合成圢䜓。 䞊蚘各匏においお、R1は氎玠原子たたは炭玠
数〜の眮換もしくは非眮換䞀䟡炭化氎玠基、
R2、R3、R4、R5およびR6は氎玠原子、ハロゲン
原子、炭玠数〜の眮換もしくは非眮換䞀䟡炭
化氎玠基、たたは炭玠数〜のアルコキシ基、
は酞玠原子、炭玠数〜の二䟡炭化氎玠基、
たたは匏〔−−SiR7R8〕oで瀺される二䟡
の基、R7およびR8は炭玠数〜の眮換もしく
は非眮換䞀䟡炭化氎玠基、は〜の数であ
る。
[Claims] 1. General formula The monomer compound represented by and the general formula A composite molded article for gas separation, comprising a low-temperature plasma polymerized film of organosilicon compound gas formed on the surface of a copolymer molded article with a monomer compound represented by: In each of the above formulas, R 1 is a hydrogen atom or a substituted or unsubstituted monovalent hydrocarbon group having 1 to 4 carbon atoms,
R 2 , R 3 , R 4 , R 5 and R 6 are hydrogen atoms, halogen atoms, substituted or unsubstituted monovalent hydrocarbon groups having 1 to 4 carbon atoms, or alkoxy groups having 1 to 8 carbon atoms;
A is an oxygen atom, a divalent hydrocarbon group having 1 to 4 carbon atoms,
or a divalent group represented by the formula [-O-Si( R7 )( R8 )] o , R7 and R8 are substituted or unsubstituted monovalent hydrocarbon groups having 1 to 4 carbon atoms, and n is 1 The number is ~3.
JP58250578A 1983-12-29 1983-12-29 Composite molded body for gas separation Granted JPS60143815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58250578A JPS60143815A (en) 1983-12-29 1983-12-29 Composite molded body for gas separation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58250578A JPS60143815A (en) 1983-12-29 1983-12-29 Composite molded body for gas separation

Publications (2)

Publication Number Publication Date
JPS60143815A JPS60143815A (en) 1985-07-30
JPH0357811B2 true JPH0357811B2 (en) 1991-09-03

Family

ID=17209970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58250578A Granted JPS60143815A (en) 1983-12-29 1983-12-29 Composite molded body for gas separation

Country Status (1)

Country Link
JP (1) JPS60143815A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987002904A1 (en) * 1985-11-14 1987-05-21 Sagami Chemical Research Center Polymer membrane for separating liquid mixture
US4657564A (en) * 1985-12-13 1987-04-14 Air Products And Chemicals, Inc. Fluorinated polymeric membranes for gas separation processes
JPH0761428B2 (en) * 1989-03-09 1995-07-05 束䞋電噚産業株匏䌚瀟 Permselective membrane and method for producing the same

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