JPH0357956U - - Google Patents
Info
- Publication number
- JPH0357956U JPH0357956U JP11860789U JP11860789U JPH0357956U JP H0357956 U JPH0357956 U JP H0357956U JP 11860789 U JP11860789 U JP 11860789U JP 11860789 U JP11860789 U JP 11860789U JP H0357956 U JPH0357956 U JP H0357956U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- processing
- sample
- ion
- processing chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 description 1
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Structure Of Printed Boards (AREA)
Description
第１図は、この考案の一実施例に係るイオン処
理装置を部分的に示す縦断面図である。第２図は
、この考案の他の実施例に係るイオン処理装置を
部分的に示す縦断面図である。第３図は、従来の
イオン注入装置の一例を部分的に示す縦断面図で
ある。
２，２ｃ……イオンビーム、４ａ〜４ｄ……処
理室、６ａ〜６ｄ……試料、８ａ〜８ｄ……ホル
ダ。
FIG. 1 is a longitudinal sectional view partially showing an ion processing apparatus according to an embodiment of this invention. FIG. 2 is a longitudinal sectional view partially showing an ion processing apparatus according to another embodiment of the invention. FIG. 3 is a longitudinal sectional view partially showing an example of a conventional ion implantation device. 2, 2c...Ion beam, 4a-4d...Processing chamber, 6a-6d...Sample, 8a-8d...Holder.
Claims (1)
試料を保持するホルダをそれぞれ有していて当該
試料を前記イオンビームを用いて処理する処理室
を複数段直列に設け、かつ最終段以外の処理室内
のホルダを、イオンビームを後段側へ通過させる
ことができるように可動にしたことを特徴とする
イオン処理装置。 For one beam line of ion beam,
A plurality of processing chambers each having a holder for holding a sample and processing the sample using the ion beam are provided in series, and the holders in the processing chambers other than the final stage allow the ion beam to pass through to the subsequent stage side. An ion processing device characterized in that it is movable so that it can be moved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11860789U JPH0357956U (en) | 1989-10-09 | 1989-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11860789U JPH0357956U (en) | 1989-10-09 | 1989-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0357956U true JPH0357956U (en) | 1991-06-05 |
Family
ID=31666761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11860789U Pending JPH0357956U (en) | 1989-10-09 | 1989-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0357956U (en) |
-
1989
- 1989-10-09 JP JP11860789U patent/JPH0357956U/ja active Pending
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