JPH0360142A - Semiconductor measuring equipment - Google Patents
Semiconductor measuring equipmentInfo
- Publication number
- JPH0360142A JPH0360142A JP1196152A JP19615289A JPH0360142A JP H0360142 A JPH0360142 A JP H0360142A JP 1196152 A JP1196152 A JP 1196152A JP 19615289 A JP19615289 A JP 19615289A JP H0360142 A JPH0360142 A JP H0360142A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- semiconductor sample
- groove
- semiconductor
- metal fitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 46
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 14
- 230000000717 retained effect Effects 0.000 abstract 1
- 238000005201 scrubbing Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 8
- 238000005452 bending Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
【産業上の利用分野〕
本発明は半導体測定装置に関し、特に走査型電子顕微鏡
の改良に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor measuring device, and more particularly to an improvement in a scanning electron microscope.
従来、この種の半導体測定装置は第５図及び第６図に示
すように半導体試料ｌを固定するために、台座２の上面
に溝２ａが設けられており、半導体試料ｌを台座２の溝
２ａ内に差し込み、該半導体試料ｌを溝２ａの一方の側
壁２ｂにあてがって立掛け、バネ性をもつＵ字状固定金
具５を撓めてこれを半導体試料ｌと溝２ａの他方の側壁
２Ｃとの隙間に圧入し、固定金具５のばね力でもって半
導体試料１を台座２に固定していた。Conventionally, in this type of semiconductor measuring device, a groove 2a is provided on the upper surface of a pedestal 2 in order to fix the semiconductor sample l, as shown in FIGS. 5 and 6. 2a, the semiconductor sample l is placed against one side wall 2b of the groove 2a, and the semiconductor sample l is placed against the other side wall 2c of the groove 2a by bending the U-shaped fixing metal fitting 5 having spring properties. The semiconductor sample 1 was fixed to the pedestal 2 by the spring force of the fixing fitting 5.
上述した従来の半導体測定装置は、半導体試料ｌを台座
２に固定させる際、固定金具５を半導体試料１の測定面
側より圧入するので、半導体試料１や固定金具５の形状
のバラツキにより、半導体試料ｌの測定面に固定金具５
が接触して半導体試料ｌの測定面を破壊するという欠点
がある。In the conventional semiconductor measuring device described above, when fixing the semiconductor sample l to the pedestal 2, the fixing fitting 5 is press-fitted from the measurement surface side of the semiconductor sample 1. Therefore, due to variations in the shape of the semiconductor sample 1 and the fixing fitting 5, Fixing bracket 5 on the measurement surface of sample l
There is a disadvantage that the measurement surface of the semiconductor sample 1 may be destroyed by contact.
本発明の目的は前記課題を解決した半導体測定装置を提
供することにある。An object of the present invention is to provide a semiconductor measuring device that solves the above problems.
上述した従来の半導体測定装置は固定金具を半導体試料
の測定面側より圧入させていたのに対し、本発明は半導
体試料の側面側より固定金具を動かすこと、又は、半導
体試料を固定金具で挾むことにより、半導体試料を台座
に固定するという相違点を有する。In contrast to the conventional semiconductor measuring device described above, in which the fixture is press-fitted from the measurement surface side of the semiconductor sample, the present invention allows the fixture to be moved from the side surface of the semiconductor sample, or the semiconductor sample to be held between the fixtures. The difference is that the semiconductor sample is fixed to the pedestal by attaching it to the pedestal.
前記目的を達成するため、本発明の半導体装置装置は台
座と、前記台座に試料を固定する金具とを備えた半導体
測定装置において、試料を台座に挟圧保持する固定金具
を開閉可能に設けたものである。In order to achieve the above object, the semiconductor device of the present invention is a semiconductor measuring device equipped with a pedestal and a metal fitting for fixing a sample to the pedestal, in which the fixing metal fitting for holding the sample on the pedestal under pressure can be opened and closed. It is something.
以下、本発明の実施例を図により説明する。 Embodiments of the present invention will be described below with reference to the drawings.
（実施例１）
第１図、第２図は本発明の実施例１を示す平面図及び側
面図である。(Example 1) FIGS. 1 and 2 are a plan view and a side view showing Example 1 of the present invention.
図において、台座２の上面には半導体試料１の板厚より
巾広の溝２ａ、 ２ａ・・・が設けられている。In the figure, grooves 2a, 2a, . . . , which are wider than the thickness of the semiconductor sample 1, are provided on the upper surface of the pedestal 2.
本発明は台座２の溝２ａの底部に位置させて操作棒４を
溝２ａを横切って摺動可能に設け、各溝２ａ内に試料用
固定金具５を溝２ａの側壁に対し平行に立掛けて備え付
け、各試料用固定金具５を操作棒４に垂直に取付け、さ
らに操作棒４を固定金具５が溝２ａの側壁に圧着する方
向に付勢したものである。In the present invention, the operating rod 4 is positioned at the bottom of the groove 2a of the pedestal 2 so as to be slidable across the groove 2a, and a sample fixture 5 is placed in each groove 2a in parallel to the side wall of the groove 2a. Each sample fixing fitting 5 is attached perpendicularly to the operating rod 4, and the operating rod 4 is biased in a direction in which the fixing fitting 5 is pressed against the side wall of the groove 2a.
実施例において、半導体試料ｌを台座２の溝２ａに挿入
できるように、スプリング３に抗して操作棒４を押し、
試料用固定金具５を溝２ａの側壁から引き離し、固定金
具５と溝２ａの側壁との間にスペースを確保する。次に
、操作棒４を押しながら半導体試料ｌを、固定金具５と
溝２ａの側壁との間に形成された前記スペース内に差し
込み、半導体試料ｌのバランスをとりながら、操作棒４
を離し、半導体試料１を第１図に一点鎖線で示すように
スプリング３のばね力を利用して溝２ａの側壁と固定金
具５との間で挟圧保持し、これを台座２に固定する。In the embodiment, the operating rod 4 is pushed against the spring 3 so that the semiconductor sample l can be inserted into the groove 2a of the pedestal 2,
The sample fixture 5 is pulled away from the side wall of the groove 2a to ensure a space between the fixture 5 and the side wall of the groove 2a. Next, while pushing the operating rod 4, insert the semiconductor sample l into the space formed between the fixture 5 and the side wall of the groove 2a, and while balancing the semiconductor sample l, hold the operating rod 4.
The semiconductor sample 1 is held under pressure between the side wall of the groove 2a and the fixture 5 using the spring force of the spring 3, as shown by the dashed line in FIG. .
本実施例によれば、半導体試料ｌを差し込む際には固定
金具５が開いており、半導体試料１と固定金具５とが擦
り合うことがなく、半導体試料ｌの測定面を破壊するこ
とがない。According to this embodiment, the fixture 5 is open when the semiconductor sample 1 is inserted, so that the semiconductor sample 1 and the fixture 5 do not rub against each other, and the measurement surface of the semiconductor sample 1 is not damaged. .
（実施例２）
第３図は本発明の実施例２を示す平面図、第４図は同側
面図である。(Example 2) FIG. 3 is a plan view showing Example 2 of the present invention, and FIG. 4 is a side view of the same.
本実施例では、台座２の溝２ａ内にバネ性をもつクリッ
プ状固定金具５を備え付けたものであり、固定金具５を
バネ力に抗して押し開き、半導体試料１をバランスをと
りながら、固定金具５に押入し、半導体試料ｌをクリッ
プ状固定金具５でばね力を利用して挟圧保持して固定す
る。In this embodiment, a clip-shaped fixing fitting 5 having spring properties is installed in the groove 2a of the pedestal 2. The fixing fitting 5 is pushed open against the spring force, and while the semiconductor sample 1 is balanced, The semiconductor sample 1 is pushed into the fixing metal fitting 5 and held by the clip-shaped fixing metal fitting 5 under pressure using spring force.
本実施例では固定金具５を押し開いて半導体試料ｌを挿
入するので、半導体試料ｌの測定面と固定金具５とが擦
り合うことがなく、半導体試料１の測定面の破壊を防止
できる。In this embodiment, the fixture 5 is pushed open and the semiconductor sample 1 is inserted, so the measurement surface of the semiconductor sample 1 and the fixture 5 do not rub against each other, and damage to the measurement surface of the semiconductor sample 1 can be prevented.
［発明の効果］
以上説明したように本発明は半導体試料と試料用固定金
具の擦り合いを防止し、半導体試料の測定面の破壊をな
くすことができる効果がある。[Effects of the Invention] As explained above, the present invention has the effect of preventing the semiconductor sample and the sample fixture from rubbing against each other, and eliminating damage to the measurement surface of the semiconductor sample.
第１図及び第３図は本発明の第１及び第２の実施例を示
す平面図、第２図及び第４図は第１図及び第３図の側面
図、第５図は従来の半導体測定装置を示す平面図、第６
図は第５図の側面図である。
１・・・半導体試料 ２・・・台座２・・・
溝 ３・・・スプリング４・・・操
作棒 ５・・・固定金具第２図
２ｃＬ
第５図
第６図1 and 3 are plan views showing the first and second embodiments of the present invention, FIGS. 2 and 4 are side views of FIGS. 1 and 3, and FIG. 5 is a conventional semiconductor device. Plan view showing the measuring device, No. 6
The figure is a side view of FIG. 1... Semiconductor sample 2... Pedestal 2...
Groove 3...Spring 4...Operation rod 5...Fixing bracket Fig. 2 2cL Fig. 5 Fig. 6
Claims (1)
た半導体測定装置において、試料を台座に挟圧保持する
固定金具を開閉可能に設けたことを特徴とする半導体測
定装置。(1) A semiconductor measuring device comprising a pedestal and a metal fitting for fixing a sample to the pedestal, characterized in that the fixing metal fitting for holding the sample on the pedestal under pressure can be opened and closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1196152A JPH0360142A (en) | 1989-07-28 | 1989-07-28 | Semiconductor measuring equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1196152A JPH0360142A (en) | 1989-07-28 | 1989-07-28 | Semiconductor measuring equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0360142A true JPH0360142A (en) | 1991-03-15 |
Family
ID=16353074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1196152A Pending JPH0360142A (en) | 1989-07-28 | 1989-07-28 | Semiconductor measuring equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0360142A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0619253U (en) * | 1992-08-19 | 1994-03-11 | 株式会社ニコン | Sample holder |
| CN107452586A (en) * | 2017-07-29 | 2017-12-08 | 哈尔滨理工大学 | A kind of fixture suitable in Quanta200 SEM |
-
1989
- 1989-07-28 JP JP1196152A patent/JPH0360142A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0619253U (en) * | 1992-08-19 | 1994-03-11 | 株式会社ニコン | Sample holder |
| CN107452586A (en) * | 2017-07-29 | 2017-12-08 | 哈尔滨理工大学 | A kind of fixture suitable in Quanta200 SEM |
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