JPH0361584A - Data recording medium - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to optical recording elements, optical discs, document image files,
This invention relates to information recording media that can be used in optical cards, etc.

[Prior Art] Conventionally, heat mode (melting, vaporization type) recordable information recording media include A, Q, Cr, Cus A u
Metal films such as s N iST is B i (Nikkan Kogyo Shimbun: April 14, 1987 edition), or Te, T
Chalcogenide films such as e compounds [M, Terao,
et al: J, AI] p1. Phys, 50.68
81 (1979)] are known. However, since the metal film has poor laser light absorption efficiency, it requires a strong laser light and time (100mW x 1μ5ec) during recording.
, the sensitivity is insufficient for recording at high speed rotation, and
This method has the disadvantage that noise during reproduction tends to increase due to the swelling around the bit that occurs during bit formation. Further, the chalcogenide vapor-deposited film has the disadvantage that it deteriorates due to heat, humidity, and the like.

As a phase change type information recording medium, chalcogen films such as Te5Te compounds [S, R.

Ovs old n5ky; Appl, Phy's, IetL,
18.254 (1971)], but it has the disadvantage that the reflectance change during recording is about 10% and the contrast is small.

In addition, for bubble mode recording, a sputtered film such as In CH4-02 [Sakumon, Ozawa, Okao, Aki, Optical Memory Symposium 85, 39 (1985) US
P4,735.8881 is known, but the constituent component is In that is easily oxidized, and the In or In in the film is
Since 2O3 and organic components exist separately as clusters, there are problems with long-term stability and stability under high humidity. Furthermore, since the protrusion of the bubble, which is the recording portion, is as small as 1000, there is a drawback that the contrast is also reduced.

As an information recording medium consisting of a polymer layer containing fine metal particles in a dispersed state, an information recording medium prepared by dispersing an organometallic complex in a polymer and thermally decomposing it has been proposed in JP-A-6377785. . However, when producing a recording film on a plastic substrate such as polycarbonate or polymethyl methacrylate, the decomposition temperature of the organometallic complex is limited to below the decomposition temperature of the plastic substrate (~100°C), so the organometallic complex that can actually be used is are extremely rare. Further, the combination is limited depending on the dispersibility, solubility, etc. of the organometallic complex and polymer.

Furthermore, the information recording medium described in JP-A-63-77785 is manufactured by a wet method, which has the problem of increasing the number of steps in the manufacturing process.

Chalcogen-based thin films that utilize crystal-crystalline or crystal-amorphous phase changes are well known as information recording media that can record, reproduce, and erase information by irradiation with electromagnetic waves, particularly laser beams. Phase-change information recording media can be overridden by a beam beam, which is difficult to do with magneto-optical recording media, and the optical system on the drive side is simple, so research and development into them has recently become active. Representative materials include Ge-Te, Ge-Te-9b, and Ge-Te disclosed in USP 3.530,441.
-8SGe-8e -5SGe-8e-Sb, Ge-A
s-3e.

In-Te, 5e-Tes, 5e-As, etc. are known. In addition, for the purpose of improving stability and high-speed crystallization, Ge
-Au to Te system (Japanese Patent Application Laid-open No. 61-219692), S
n and Au (Japanese Unexamined Patent Publication No. 11i1-270190), Pb (
Proposals for materials containing additives such as JP-A-62-19490),
Ge-Te-5 for the purpose of improving the repeatability of recording and erasing.
Material with specified composition ratio of e-3b (Japanese Patent Application Laid-Open No. 62-734
38) proposals have also been made.

However, it cannot be said that none of these can satisfy all of the properties required of a daily changing rewritable information recording medium. In particular, the most important issues to be solved are improving recording sensitivity and erasing sensitivity, preventing a decrease in erasing ratio due to unerased areas during override, and extending the lifespan of recorded and unrecorded areas.

Among the various technical issues mentioned above, long-term stabilization of recorded and unrecorded areas is the top priority issue for both write-once and rewritable information recording media. Therefore, as one method for solving this problem, an information recording medium in which a light-absorbing substance is dispersed in a transparent matrix has been proposed.

As a matrix, Si, A, 17. Ti.

Various Mg oxides have been proposed in Japanese Patent Application Laid-Open No. 57-208648. Furthermore, in JP-A-63-173240, SiO2, Sin, and Si, which have low thermal conductivity, are used as a matrix.
3N4, TiO2, ZnZnS5ZnOSA 03, A
N N, MMgO5Ge.

Metal oxides, metal nitrides, metal sulfides, and metal carbides, such as SiC, ZrO2, and NbzOs, are being considered. However, with matrices made of inorganic materials such as metal oxides, metal nitrides, metal sulfides, and metal carbides, repeated recording and erasing causes crystal cough formation and crystal growth, which causes unerased areas and grain boundary noise. /H.

On the other hand, examples of considering the use of organic materials as a matrix are JP-A No. 80-124038 and JP-A No. 63-20583.
2 and JP-A-63-206721.

These publications disclose examples in which white organic thin films in which fine metal particles are dispersed by homogeneous sputtering of a substance such as Te and a heat-resistant resin are used as information recording media. In addition, IEICE technical research report CP) I83-58 describes Te and CH
It has been disclosed that an information recording medium is manufactured using a reactive sputtering method according to No. 4. However, in the film forming method described above, that is, the film forming method using simultaneous sputtering of metal and organic material or reactive sputtering, it is difficult to control the particle size and dispersion state of fine metal particles such as Te. In addition, since the organic matrix is prepared by glow discharge, the reaction pressure is 10"-"t
In the sputtering method, agglomeration of the dispersed substances could not be avoided, and miniaturization was difficult.

[Problems to be Solved by the Invention] The present invention has been made in view of the problems of the prior art as described above. The purpose of this invention is to provide an information recording medium with good performance.

[Means for Solving the Problems] The present inventors have intensively studied the use of a thin film synthesized from an organic metal compound as a starting material by a glow discharge decomposition method as a recording film of an information recording medium. However, when only an organometallic compound was used as a starting material, it was impossible to supply a transition metal, making it impossible to synthesize a recording layer containing a transition metal. However, the inventors have discovered that it is possible to synthesize a recording film in which fine metal particles are uniformly dispersed when an organometallic complex is used as a starting material, leading to the completion of the present invention.

That is, according to the present invention, in an information recording medium comprising a recording layer provided on a substrate, the recording layer is made of a plasma polymerized film of an organometallic complex formed by a glow discharge decomposition method. Blue report S self-recorded media power (provided by one person).

The information recording medium of the present invention will be explained in detail below.

The information recording medium of the present invention uses an organometallic complex as a starting material on a desired substrate set in a vacuum reaction chamber, and forms a plasma polymerized film of the organometallic complex by a glow discharge decomposition method to form a recording layer. It is made by

Examples of starting materials used to form the recording layer of the information recording medium of the present invention include iron-containing materials, such as iron (
III) Acetylacetonatoferrocene, or Tyrone, ethylenediamine, 2,2'-dipyridine,
1.10-phenanthroline, dithiol, oxine,
Iron complexes containing chelating reagents such as thioxine and 3-mercapto-p-cresol are used.

Cobalt compounds include cobalt (II) acetylacetonate, cobalt (III) acetylacetonate, cobaltocene, tyron, ethylenediamine, 2,2'-dipyridine, 1,10-phenanthroline, dithiol, oxine, thioxine, 3- Cobalt complexes with chelating reagents such as mercapto-p-cresol are used.

Examples of nickel compounds include nickel acetylacetonate (NiAA), dimethylglyoxime, benzyldioxime, cyclohexane-1,2-dionedioxime, tyron, ethylenediamine, 2,2'-dipyridine, 1,10-phenanthroline, and dithiol. A nickel complex having one or two chelating reagents such as , oxine, thioxine, and 3-mercapto-p-cresol is used.

As a copper compound, for example, copper acetylacetoner-l (C
uAA), and Tyrone, ethylenediamine, 2.2'
A copper complex having one or two chelating reagents such as -dipyridine, 1,10-phenanthroline, dithiol, oxine, thioxine, and 3-mercapto-p-cresol is used.

As the titanium compound, for example, diisopropoxytitanium bis(acetylacetonato) bis(acetylacetonato)titanium oxide and the like are used.

As the tellurium compound, tellurium diisopropoquine diacetylacetonate or the like is used.

As the selenium compound, selenium diisopropoxy diacetylacetonate or the like is used.

Others include La, Ce, Pr, Nd55m, and Gd.

D3/% Er, Yb, 5cSYSThs Mn.

Cyclopentadienyl compounds such as Mg can be used.

Furthermore, C a s S r s B with high vapor pressure
B, La, Ce, YSSm, Tb, Er5YbSV.

Acetylacetonate complexes such as Nb can be used.

Further, in the above-mentioned organometallic complexes, halogen-organometallic complexes in which some or all of the hydrogen atoms are replaced with halogen atoms such as fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms can also be used.

The organometallic complex used in the present invention is particularly preferably one in which the standard electrode potential of the central metal to which the organic substance is coordinated is -0.50 V or more.

In this case, the ligand is not particularly limited.

The standard electrode potential is a measure of the ionization tendency of metals and the oxidizing or reducing power in a redox system. Table 1 shows standard electrode potentials of typical metals. Fe s Co SN t SS as the central metal of the preferred organometallic complex
n s Cu s A g etc. can be used. Of course, even for metals not listed in Table 1, the standard electrode potential is -0,5
If it is 0V or more, it can be preferably used.

table Standard electrode potential (El) Pt”+2e;jPt l.

As a method for forming the recording layer (plasma polymerized film) in the present invention, DC glow discharge decomposition method and AC glow discharge decomposition method are suitable. The discharge decomposition method itself is a known technique.An example of film forming conditions by rr glow discharge decomposition is as follows.The monomer heating evaporation temperature is such that the vapor pressure of the material (organometallic complex) is 10 ' to
It is desirable to maintain the temperature at about rr-100 torr. The value in parentheses indicates the preferred range.

rr frequency -100KIIz ~50Ml1z (1
3,58MIIz)rr power-1~500W (5~
200W) reaction pressure car 0.001~10torr (0,
05~2 torr) Substrate temperature...-50~300℃
(0 to 200℃) If the substrate temperature in this glow discharge decomposition method is within the above range, it is possible to form a film while discharging, to form a film after maintaining it at a constant temperature, or to form a film in stages. It is also possible to form a film by changing the temperature.

Although the material of the square plate is not limited, various metals, glass, polymer films, ceramics, inorganic single crystal substrates, etc. are suitably used.

It goes without saying that other reactants, carrier gas, impurities, etc. may be present during the reaction as necessary.

In this way, a plasma-polymerized film (recording film) of the organometallic complex is formed on the desired substrate, and the thickness of this film is preferably in the range of 5oλ to 5μm, more preferably 100μm to 2μm.
It is m.

Depending on the purpose, a desired substrate for producing the information recording medium of the present invention may be coated with a thin film of SiO2°Si3N4 or the like in advance.

Further, the information recording medium of the present invention may further include other layers depending on the purpose (for example, a protective layer such as 5i02, Si3N+, SiC, Ai)N, an adhesive layer such as an ultraviolet curable resin, and a polymethyl methacrylate, polycarbonate, etc. Protective plate; AI SC
reflective layer such as r, Au, etc.).

Electromagnetic waves are used to record, reproduce, and erase information on the information recording medium of the present invention, and various types of electromagnetic waves can be used such as laser light, electron beams, X-rays, ultraviolet rays, visible rays, infrared rays, and microwaves. However, a small and compact semiconductor laser beam, which is advantageous when attached to a drive, is optimal.

FIG. 1 shows an example of a configuration when the present invention is applied to an optical disc. Note that the present invention is not limited to this example, and it goes without saying that various modifications and changes can be made. In the figure, 1 is a desired substrate, on which a recording layer 2 whose both sides are covered with a protective layer 3 is provided,
Furthermore, a protection plate 4 is provided on the top layer.

As mentioned above, the recording layer 2 is formed of a plasma-polymerized film of an organometallic medium by glow discharge decomposition, and preferably the light-absorbing material 6 (metal fine particles) is uniformly distributed in the carbon-based material 5 as shown in the figure. It is in a dispersed state.

In the plasma polymerized film constituting the recording layer of the information recording medium of the present invention, the hydrocarbon material constituting the matrix is a highly crosslinked hydrocarbon polymer, i.
- Carbon, graphite, diamond and their composites. These carbonaceous substances have C as a main component, and can contain H, N, O, etc. as necessary. The amount of metal fine particles dispersed in this matrix is usually in the range of 5 to 95% by weight, preferably 20 to 80% by weight. The size of the fine particles is preferably 50nI11 or less, particularly 30nm or less.

The film thickness is not particularly limited, but is usually in the range of 10 to 1000 nm, preferably 20 to 500 nm.

[Example code] The present invention will be explained in more detail below using examples.

Example 1 A glass plate, a silicon wafer, polyethylene terephthalate, and polycarbonate were used as substrates. A recording film with a thickness of 1100 nm was formed on the substrate by plasma polymerization using copper acetylacetonate as a starting material by glow discharge decomposition, and an optical disc was produced. Created. An apparatus having the structure shown in FIG. 2 was used to form the recording film. In the figure, ll is the substrate,
12 is copper acetylacetonate, 13 is RF electrode, L4
is a counter electrode, 15 is an RF power supply, 16 is a vacuum gauge, 17 is an oil diffusion pump, 18 is a surface rotation pump, 19 is a substrate iFA
temperature control unit, 20 is a thermocouple, 21 is Mo
It's a heater. Further, the film forming conditions are as follows.

・Substrate temperature: 25℃ ・Heating temperature of copper acetylacetonate = 80℃ ・Reaction pressure crab I X 10' torr ・High frequency crab 70
W, 13.56M1lzThe recording film of each optical disk produced as described above was subjected to Fourier transform infrared spectroscopy (hereinafter referred to as PTIR) and X-ray photoelectron spectroscopy (hereinafter referred to as X
When observed using a transmission electron microscope (hereinafter referred to as PS) and a transmission electron microscope (hereinafter referred to as TEM), the obtained recording film was approximately 10 nn+
It was found that this is a carbon-based thin film in which fine copper particles with a particle size controlled to be uniformly dispersed.

We also tested this recording film using high-sensitivity differential scanning calorimetry (
As a result of thermal analysis using DSC (hereinafter referred to as DSC) and thermogravimetric analysis (hereinafter referred to as TGA), an exothermic peak and weight loss, which were considered to be due to thermal decomposition, were observed at 250°C.

Next, in order to evaluate the recording characteristics of this recording film, a recording film with a thickness of 1100 nm was formed on a pregrooved polycarbonate substrate, and an optical disc was manufactured. Note that the recording film was formed using the above-mentioned apparatus under the same conditions as above. When the thus produced optical disk was rotated at 1800 rpa+ and a laser beam was irradiated onto the recording film at a laser power of 5o+W, a clear change in reflectance was observed. As a result of observing the recording portion using a scanning electron microscope (hereinafter referred to as SEM), a bubble shape with a smooth surface and a height of 300 nm was observed.

C/N was 55 dB. Further, the reflectance of the recording film immediately after formation was 65%, which was 1. No change in reflectance was observed even after this film was left in an environment of 30° C. and 90% humidity for 300 days.

Example 2 A glass plate, a silicon wafer, polyethylene terephthalate, and polycarbonate were used as substrates. A recording film having a thickness of 1θani was formed on the substrate by plasma polymerization using nickel acetylacetonate as a starting material by glow discharge decomposition, and an optical disc was produced. Created. A device similar to that used in rush current N1 was used to form the recording film.

The film forming conditions are as follows.

・Substrate temperature: 25°C ・Heating temperature of nickel acetylacetonate 80°C ・Reaction pressure I X 10-”torr ・High frequency type 70W, 13.58MHz For the recording film of each optical disk prepared as above FTIR, XPS and TEM observations revealed that the recording film obtained was approximately 5nm.
It was found that this was a carbon-based thin film in which fine nickel particles with a particle size of IIl were uniformly dispersed. Further, as a result of thermal analysis of this recording film using high-sensitivity DSC and TGA, an exothermic peak and a weight loss, which are considered to be caused by thermal decomposition, were observed up to 250°C.

Next, in order to evaluate the recording characteristics of this recording film, a recording film with a thickness of 10 OnI and 11 was formed on a polycarbonate substrate with pregrooves, and an optical disc was manufactured. Note that the recording film was formed using the above-mentioned apparatus under the same conditions as above. When the thus produced optical disk was rotated at 1800 rpm and a laser beam was irradiated onto the recording film at a laser power of 5 mW, a clear change in reflectance was observed. As a result of observing the recording section using SEM, it was found that 300
A bubble shape with a smooth surface and a height of nIII was observed. C/N was 55 dB. In addition, the reflectance of the recording film immediately after formation was 40%, and this film was heated at 30°C and 190%.
No change in reflectance was observed even after being left in a humid environment for 300 days.

Example 3 A glass plate, a silicon wafer, polyethylene terephthalate, and polycarbonate were used as substrates, and a 100-inch thick recording film was plasma-polymerized on the substrates by glow discharge decomposition using tellurium diisopropoxy diacetylacetonate as a starting material. An optical disk was produced.

An apparatus similar to that used in Example 1 was used to form the recording film. The film forming conditions are as follows.

- Substrate temperature = 25°C - Heating temperature of tellurium diisopropoxy diacetylacetonate = 100°C - H2 flow rate: 100 SCCM - Reaction pressure crab I When FTIR, XPS and TEM observations were performed on the recording film of each optical disc, the recording film obtained was approximately 10
It was found that this was a carbon-based thin film in which tellurium fine particles whose particle size was controlled to be rv were uniformly dispersed. In addition, as a result of thermal analysis of this recording film using high-sensitivity DSC and TGA, 5
At temperatures up to 00°C, no exothermic peaks or low Qd were observed, which were considered to be due to thermal decomposition. The state of this film immediately after formation was amorphous.

Next, in order to evaluate the recording/erasing characteristics of this recording film, an optical disc having a structure of substrate/protective film A/recording film/protective layer B/adhesive layer/protective plate was prepared. The substrate is polycarbonate with pregrooves, and the protective films A and B are Si3N4.
A film was formed to a thickness of 100 nm using a sputtering method, an adhesive layer was formed by a coating method using an ultraviolet curable resin, and a 0.5 mm thick polycarbonate plate was used as a protective plate. Note that the recording film was formed using the above-mentioned apparatus under the same conditions.

While rotating the thus prepared optical disk at 1800 rpm, the power modulated laser beam was emitted at Eim/se.
When I fired at a linear speed of e and repeated recording and erasing, I found that 50
What is the C/N of dB and the cancellation ratio of 30 dB? , and sufficient recording and erasing characteristics were obtained.

Furthermore, 3 optical discs were recorded under the above conditions.
After being stored for 300 days in an environment of 0° C. and 90% humidity, the recorded characteristics were reproduced and the characteristics were the same as the initial characteristics.

Example 4 Temporary glass, silicon wafer, polyethylene terephthalate, and polycarbonate were used as substrates, and glow discharge decomposition was performed on the substrates using triethyl indium selenium diisopropoquine diacetylacetonate, trimethyl thallium, and cobalt (nI) acetylacetonate as starting materials. An optical disk was fabricated by plasma polymerizing a recording film with a thickness of 100 nm using the method. The recording film was formed using an apparatus similar to that used in Example 1 (introduction pipes for triethyl indium, selenium diisopropoxy diacetylacetonate, and trimethyl thallium are not shown).
It was used. The film forming conditions are as follows.

・Substrate temperature: 50℃ ・Ar flow m: 30 SCCM ・H2 flow ffi: 100 SCCM ・Reaction pressure crab
I X 10' torr/high frequency crab 100W
From the results of 13.56 MHz FTIR, XPS, and TEM observation, it was found that the obtained recording film was a carbon-based thin film in which fine metal particles with a particle size of 5 cm were uniformly dispersed. As a result of X-ray diffraction, the state of this film immediately after formation was amorphous. This thin film is subjected to high-sensitivity DSC, TGA+:
As a result of further thermal analysis, no exothermic peak or weight loss, which could be considered to be thermal decomposition, was observed up to 500°C.

Next, in order to evaluate the recording/erasing characteristics of this recording film, we used substrate/protective film A/recording H/protection Jl! An optical disc having the configuration B/adhesive layer/storage plate was produced. The substrate is polycarbonate with pregrooves, and the protective films A and B are 5iz.
A film with a thickness of 1 oorv was formed by sputtering using N4, an adhesive layer was formed by a coating method using an ultraviolet curable resin, and a 0.5 mm thick polycarbonate plate was used as a protective plate. Note that the recording film was formed using the above-mentioned apparatus under the same conditions.

While rotating the thus produced optical disk at 180 rpm, a power-modulated laser beam was emitted at 10 m/sec.
When irradiated at a linear velocity of e and repeated recording and erasing, 50
A C/N of dB and an erasure ratio of 30 dB were obtained, and sufficient recording and erasing characteristics were obtained.

Furthermore, 3 optical discs were recorded under the above conditions.
After being stored for 300 days in an environment of 0° C. and 90% humidity, recording and reproduction were performed, and the characteristics were the same as the initial characteristics.

Example 5 Copper acetylacetonate (CuAA) as starting material,
Nickel acetylacetonate (NiAA), cobalt (II) acetylacetonate (CoAA), R<m>
Acetylacetonate (FeAA), Zinc (II) acetylacetonate (ZnAA), Aluminum (III)
) Each thin film was produced with a thickness of 50 to 200 nm using acetylacetonate (,61AA) by plasma CVD method. The equipment used and film forming conditions are as follows.

・Equipment used: As shown in Figure 2.

・Substrate: glass plate, polyethylene terephthalate,
Silicon wafer 3.5 inch diameter polycarbonate optical disk substrate with pregroove, ・Substrate temperature: 25℃ ・Heating temperature of starting material 280-100℃ ・Reaction pressure crab
3 X 10'' torr, high frequency crab 70W,
Starting at 13.56 MHz, the thin film obtained above is T
The results obtained from EM observation revealed that it contained fine particles made of metal or metal oxide.

CuAA, NIAA, CoAA, PeAA, ZnA
A, A, Q The sizes of fine particles in the plasma CVD thin film of AA are approximately 15 and 8.6.2 nm, respectively.
ZuAA, AI AA plasma CVD thin films include:
No fine particles were observed.

The size of the fine particles decreases in response to the decrease in the standard electrode type (voltage) of the metal that makes up the fine particles in the film. It can be seen that it is effective to use an organometallic complex having the following as a starting material.

The generation of fine particles as described above affects the optical properties of thin films,
CuAA, NIAA, CoAA, FeAA, Zn
The plasma CVD thin films of AA and AIAA exhibited various appearances, including copper bar color, dark brown, gray, yellow, colorless and transparent, and colorless and transparent, respectively. The optical properties of these thin films are shown in Figure 3 (
Shown in a) to (e). It can be seen that as the particle size of the fine particles in the film increases, the absorption rate at each wavelength increases. When using visible light for writing and reading information, it is necessary to ensure absorption and reflectance, and in terms of optical properties, organic metal complexes containing metals with a standard electrode potential of 10.5 V or more are used as starting materials. It can be seen that it is effective to use this method.

Next, in order to evaluate the recording characteristics of these plasma CVD thin films, we deposited a film on a pregrooved polycarbonate substrate.
A 8M film having a thickness of 00r+m was produced (FIG. 4(a)). Note that the recording film was produced using the above-mentioned apparatus under the same conditions. The optical disc thus produced had a frequency of 3.7 MHz and a linear velocity of 5.
．． When recording was performed at 6 m/s at 830 cm and a wavelength of 5 mW, a clear change in reflectance was confirmed for the plasma CVD thin films of CoAA and N1AA. As a result of observing the recording portion by SEM, bubbles with a smooth surface were observed. C/N is 5
It was 0dB.

The plasma CVD thin film of CoAA was obtained by laminating AI at 50 rv (FIG. 4(b)), and the same results as in the case of the plasma CVD thin film of CuAA and NIAA were obtained. This is considered to be the result of an increase in absorption and reflectance due to the stacking of Ap.

Changes in reflectance of the FeAA plasma CVD thin film were observed when using a visible light gas laser, confirming its use as an information recording medium.

The mechanism of these recordings is thought to be that some of the hydrocarbon substances are vaporized by the heat generated by the laser beam.

Example 6 A plasma CVD thin film of nickel glyoxime was produced on a polycarbonate substrate, and the recording characteristics of the disc were evaluated. As a result, the same results as in Example 5 were obtained when a plasma CVD thin film of N1AA was used as the recording film.

Example 7 A plasma CVD thin film of iron phenanthroline was produced on a polycarbonate substrate, and the recording characteristics of the disc were evaluated. As a result, in Example 5, FeAA plasma C
Similar results were obtained when a VD thin film was used as the recording film.

[Effects of the Invention] According to the present invention, since the recording layer is a film obtained by plasma polymerizing an organometallic complex by a glow discharge decomposition method, the light-absorbing substance (metal fine particles) is uniformly dispersed in the carbon-based substance. The carbon-based material contained in the recording layer protects the light-absorbing material three-dimensionally, and the recording film itself has sufficient mechanical strength, heat resistance, weather resistance, and corrosion resistance.
It is possible to extend the lifespan of records.

In addition, by making the light-absorbing material into fine particles, the energy of electromagnetic waves during recording and/or erasing is concentrated on the fine particles, improving sensitivity, and the crystal grain size when erasing records is larger than the size of the fine particles. Therefore, the erasure ratio increases.

Furthermore, since the particle size and particle size distribution of the light-absorbing substance (metal fine particles) in the recording layer can be controlled arbitrarily, the recording sensitivity, erasing sensitivity, life span, and other characteristics of the recording layer can be uniformly and arbitrarily controlled. Furthermore, there is the advantage that the metal sources that can be used for the recording layer can be greatly expanded.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing an example of a configuration when the present invention is applied to an optical disk, FIG. 2 is a schematic diagram showing the configuration of an apparatus used for manufacturing an optical disk according to the present invention, and FIG. 3 (a)
~(e) are CuAA(a) and N1AA(b), respectively.
), CoAA(c), FeAA(d), Zn
FIG. 3 is a diagram showing the optical characteristics of a plasma CVD thin film of AA(e). FIGS. 4(a) and 4(b) are diagrams illustrating a recording medium in Example 5. FIG. l... Substrate, 2... Recording layer, 3... Protective layer, 4...
... Protective plate, 5... Carbon-based material, 6... Light absorption material, 11... Substrate, 12... Copper acetylacetonate, I3... RF electrode, 14... Counter electrode, 15...
・RF power supply, 16... Vacuum gauge, 17... Oil diffusion pump, 18... Oil rotary pump,

Claims (2)

[Claims] (1) An information recording medium comprising a recording layer provided on a substrate, wherein the recording layer is made of a plasma polymerized film of an organometallic complex formed by a glow discharge decomposition method. (2) The information recording medium according to claim (1), wherein the standard electrode potential of at least one metal constituting the metal fine particles contained in the plasma polymerized film of the organometallic complex is -0.5 eV or more.